Patents for G21K 5 - Irradiation devices (9,144)
10/2002
10/03/2002US20020141533 X-ray exposure apparatus
10/03/2002US20020141071 Illumination system with reduced heat load
10/03/2002US20020140431 Radiation test system
10/03/2002US20020139939 Electron beam irradiation process and an object irradiated with an electron beam
10/03/2002US20020139772 Adaptive GCIB for smoothing surfaces
10/02/2002CN1372099A Electric lamp assembly
10/01/2002US6459766 Photon generator
10/01/2002US6459089 Single accelerator/two-treatment vault system
09/2002
09/26/2002WO2002075771A1 X-ray irradiation apparatus
09/26/2002WO2002075747A2 Electron beam irradiation apparatus
09/26/2002US20020136351 Illumination system with variable adjustment of the illumination
09/26/2002US20020135290 Electron beam emitter
09/26/2002US20020134950 Substrate positioning system
09/25/2002EP1242312A2 Device and method for treating water with ozone generated by water electrolysis
09/25/2002EP1218916A4 Electron beam plasma formation for surface chemistry
09/25/2002EP0941501B1 X-ray apparatus with an imaging cassette
09/25/2002EP0809524B1 Beamline control and security system for a radiation treatment facility
09/24/2002US6456688 X-ray spectrometer and apparatus for XAFS measurements
09/24/2002US6456084 Radiation test system
09/24/2002US6454987 Micro structure and its manufacture method
09/19/2002US20020131556 Rotatable multi-element beam shaping device
09/19/2002US20020131181 Illumination system with raster elements of different sizes
09/18/2002EP1241683A2 Rotatable multi-element beam shaping device
09/18/2002EP1240551A2 Lithography device which uses a source of radiation in the extreme ultraviolet range and multi-layered mirrors with a broad spectral band in this range
09/18/2002EP0934615B1 Method and device for managing an electronic component with complementary mos transistors functioning under radiation
09/17/2002US6453013 X-ray apparatus provided with a filter with a dynamically adjustable absorption
09/17/2002US6453012 X-ray apparatus with filter comprising filter elements with adjustable X-ray absorption and X-ray absorption sensor
09/17/2002US6453010 X-ray tube liquid flux director
09/17/2002US6452197 Ion implantation apparatus and method of implanting ions to prevent charge build up on a substrate
09/12/2002US20020128807 Radiation treatment system and method
09/12/2002US20020126800 X-ray image photographing apparatus and grid device
09/12/2002US20020125446 Substrate positioning system
09/11/2002CN1369105A 电子束加速器 Electron beam accelerator
09/10/2002US6448555 Electron microscope and similar instruments
09/06/2002WO2002069677A1 Extreme ultraviolet generating device, exposure device using the generating device, and semiconductor manufacturing method
09/06/2002WO2002069350A1 Beam scanning system for a heavy ion gantry
09/06/2002WO2002069349A1 Radiotherapeutic apparatus
09/05/2002US20020123168 Apparatus and methods for blocking highly scattered charged particles in a patterned beam in a charged-particle-beam microlithography system
09/05/2002US20020121504 Electron beam irradiation system and electron beam irradiation method
09/05/2002DE10207928A1 Lampenanordnung Lamp assembly
09/04/2002EP1236036A2 X-ray fluorescence apparatus
09/04/2002EP1144983A4 Article irradiation system in which article transporting conveyor is closely encompassed by shielding material
09/03/2002US6445771 X-ray device incorporating detection of shutter edges
09/03/2002US6445768 X-ray examination apparatus
09/03/2002US6445766 System and method for improved diagnostic imaging in a radiation treatment system
08/2002
08/29/2002WO2002066081A1 Method and unit for sterilizing packaging sheet material for manufacturing sealed packages of pourable food products
08/29/2002US20020118791 X-ray examination apparatus
08/29/2002US20020118541 Lamp assembly
08/29/2002US20020117636 Electron beam irradiation system and electron beam irradiation method
08/28/2002EP1234310A1 Doubly curved optical device with graded atomic planes
08/22/2002WO2002065482A2 Collector with an unused area for lighting systems having a wavelength of ≤ 193 nm
08/22/2002WO2002065209A1 Collimator arrangement
08/22/2002WO2002039792A3 Target for production of x-rays
08/22/2002WO2000019901A9 X-ray system
08/22/2002US20020113216 Substrate treatment device using a dielectric barrier discharge lamp
08/22/2002US20020113205 Atomic beam control apparatus and method
08/21/2002EP1233659A1 Nondestructive inspection apparatus
08/21/2002EP1233658A1 X-ray generator of open type
08/21/2002EP1233444A2 Membrane dielectric isolation ic fabrication
08/21/2002EP1232760A1 Method and unit for sterilizing packaging sheet material for manufacturing sealed packages of pourable food products
08/21/2002EP1232517A1 Plasma focus light source with improved pulse power system
08/21/2002EP1232515A1 Particle beam processing apparatus
08/21/2002EP0738311B1 Fluorescent materials for illumination purposes
08/20/2002US6438211 X-ray apparatus including a filter with filter elements having an adjustable absorptivity
08/20/2002US6438208 Large surface area x-ray tube window and window cooling plenum
08/20/2002US6438199 Illumination system particularly for microlithography
08/20/2002US6437344 Product irradiation device and method of irradiating products using the same
08/15/2002WO2002063933A1 Apparatus for pre-acceleration of ion beams used in a heavy ion beam application system
08/15/2002WO2002063638A1 Gantry system for transport and delivery of a high energy ion beam in a heavy ion cancer therapy facility
08/15/2002WO2002063637A1 Apparatus for generating and selecting ions used in a heavy ion cancer therapy facility
08/15/2002US20020110481 Irradiating with a beam of electrons in the range of about 40 kv-60 kv exiting from a generator through a window onto surfaces on a living creature without damaging living tissue
08/15/2002US20020110219 Electric discharge detection circuit
08/15/2002US20020110217 X-ray illumination optical system and X-ray reduction exposure apparatus
08/14/2002EP1230828A1 Method for obtaining an extreme ultraviolet radiation source and its use in lithography
08/13/2002US6433495 Device for fitting of a target in isotope production
08/13/2002US6433349 Charged-particle beam irradiation method and system
08/08/2002WO2002062113A1 Impulsive source of carbon plasma
08/08/2002WO2002061464A1 On-line measurement of absorbed electron beam dosage in irradiated product
08/08/2002WO2002061407A1 High-energy x-ray imaging device and method therefor
08/08/2002WO2000067289A9 Apparatus and method for reducing charge accumulation on a substrate
08/08/2002US20020106056 X-ray tube for CT applications
08/08/2002US20020106050 X-ray exposure apparatus
08/08/2002DE10164318A1 Festkörper-CT-System und Verfahren Solid-CT system and method
08/08/2002DE10164315A1 Radiographie Einrichtung mit Flachpanel-Röntgenquelle Radiography device with flat panel X-ray source
08/06/2002US6430265 X-ray apparatus including a filter provided with filter elements having an adjustable absorption
08/06/2002US6430263 Cold-plate window in a metal-frame x-ray insert
08/06/2002US6430258 Method for operating a radiation examination device
08/06/2002US6429445 Electron beam irradiating apparatus having cathode plate formed of non-metal conductive material
08/06/2002US6429444 Real time monitoring of electron beam radiation dose
08/06/2002US6429443 Multiple beam electron beam lithography system
08/01/2002WO2002058743A2 Fluid sterilization apparatus
08/01/2002WO2002058742A1 Decontamination apparatus
08/01/2002WO2002037905A3 Mechanism for prevention of neutron radiation in ion implanter beamline
08/01/2002US20020102395 Optically nonisotropic composite of a transparent bulk optical material and radiation absorbing or reflecting fibers embedded; fibers are parallel to one another and channel the radiation along the direction of the fibers.
08/01/2002US20020101956 X-ray projection exposure apparatus and a device manufacturing method
07/2002
07/31/2002EP1226587A1 Rotatable cylinder dual beam modulator
07/30/2002US6426999 X-ray apparatus including a filter provided with filter elements having an adjustable absorption
07/30/2002US6426995 Radiation inspection system and method using the same
07/30/2002US6426507 Particle beam processing apparatus
07/25/2002WO2002058100A2 X-ray tube for ct applications
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