| Patents for G21K 5 - Irradiation devices (9,144) |
|---|
| 07/25/2002 | WO2002056952A2 Miniature x-ray device and method of its manufacture |
| 07/25/2002 | US20020097838 Rotary anode type X-ray tube apparatus |
| 07/25/2002 | DE10138313A1 Kollektor für Beleuchtugnssysteme mit einer Wellenlänge < 193 nm Collector for Beleuchtugnssysteme with a wavelength <193 nm |
| 07/24/2002 | EP1225793A2 Rotary anode type X-ray tube apparatus |
| 07/24/2002 | EP1225481A2 Collector for an illumination system with wavelength of 193 nm |
| 07/23/2002 | US6424695 Separate lateral processing of backscatter signals |
| 07/18/2002 | WO2002027405A3 Illumination system particularly for microlithography |
| 07/18/2002 | US20020094064 Large-area individually addressable multi-beam x-ray system and method of forming same |
| 07/18/2002 | US20020094063 Laser plasma EUV light source apparatus and target used therefor |
| 07/18/2002 | US20020092968 Optical barrier |
| 07/18/2002 | DE10153204A1 Ultraviolet radiation generation system for treating coating of fiber optic cable, has two reflectors within microwave chamber, that reflect ultraviolet radiation from plasma lamp, onto fiber optic cable |
| 07/17/2002 | EP1222842A1 Production of a dense mist of micrometric droplets in particular for extreme uv lithography |
| 07/17/2002 | EP1222677A2 Electron impact ion source |
| 07/17/2002 | CN1359304A System for and method of, irradiating articles to sterilize the articles |
| 07/17/2002 | CN1358544A Radiation medical inplantation article and making method thereof |
| 07/16/2002 | US6421421 Extreme ultraviolet based on colliding neutral beams |
| 07/16/2002 | US6420700 Charged-particle-beam exposure device and charged-particle-beam exposure method |
| 07/11/2002 | WO2002054413A1 Device for x-ray lithography |
| 07/11/2002 | WO2002054115A2 A self-cleaning optic for extreme ultraviolet lithography |
| 07/11/2002 | WO2002053195A2 System for, and method of, irradiating article with x-ray beam |
| 07/11/2002 | WO2002039462A3 Multi-fluid elements device with controllable fluid level by means of matrix addressing |
| 07/11/2002 | WO2002027402A3 Illumination system particularly for microlithography |
| 07/11/2002 | WO2002027400A3 Illumination system particularly for microlithography |
| 07/11/2002 | US20020091986 Process window based optical proximity correction of lithographic images |
| 07/11/2002 | US20020090054 Apparatus and method for containing debris from laser plasma radiation sources |
| 07/11/2002 | US20020088948 Fluid sterilization apparatus |
| 07/11/2002 | US20020088947 Method of pole tip sample preparation using FIB |
| 07/11/2002 | DE10100265A1 Beleuchtungssystem mit Rasterelementen unterschiedlicher Größe Lighting system with raster elements of different sizes |
| 07/10/2002 | EP1221634A2 Illumination system with array elements of different sizes |
| 07/10/2002 | EP1221167A1 Process for irradiation producing constant depth/dose profile |
| 07/10/2002 | CN1358108A Electron beam irradiation apparatus and method |
| 07/10/2002 | CN1357415A Ultraviolet lamp system and method |
| 07/09/2002 | US6418187 X-ray mask structure, and X-ray exposure method and apparatus using the same |
| 07/09/2002 | US6417912 Method and apparatus for controlling optical-parameters in a stepper |
| 07/09/2002 | CA2121614C Electron accelerator for sterilizing packaging material in an aseptic packaging machine |
| 07/04/2002 | WO2002052580A1 X-ray examination apparatus |
| 07/04/2002 | WO2002027406A3 Illumination system particularly for microlithography |
| 07/04/2002 | WO2002027401A3 Illumination system particularly for microlithography |
| 07/04/2002 | US20020085682 X-ray apparatus with non-contacting transmission of data or energy between mechanically connected components |
| 07/04/2002 | US20020085674 Radiography device with flat panel X-ray source |
| 07/04/2002 | US20020084425 Self-cleaning optic for extreme ultraviolet lithography |
| 07/04/2002 | DE10147633A1 Bestrahlungssystem und Bestrahlungsziel Bewegungs-Überwachungsverfahren sowie Bestrahlungszielpositions-Erkennungsverfahren Irradiation system and the irradiation target movement monitoring procedures and irradiation target position detection method |
| 07/03/2002 | EP1220585A1 Apparatus for charged-particle beam irradiation, and method of control thereof |
| 07/03/2002 | EP1218916A1 Electron beam plasma formation for surface chemistry |
| 07/03/2002 | EP1218796A1 Extreme ultraviolet soft x-ray projection lithographic method and mask devices |
| 07/02/2002 | US6414438 Method of producing short-wave radiation from a gas-discharge plasma and device for implementing it |
| 07/02/2002 | US6414329 Method and system for microwave excitation of plasma in an ion beam guide |
| 06/27/2002 | US20020080920 Multi-fluid elements device with controllable fluid level by means of matrix addressing |
| 06/27/2002 | US20020080919 X-ray source having a liquid metal target |
| 06/25/2002 | US6410929 Electron beam irradiation apparatus |
| 06/25/2002 | US6410928 EUV illumination system |
| 06/25/2002 | CA2081552C Selective radiation of pathological material |
| 06/20/2002 | WO2002048796A2 Projection system for euv lithography |
| 06/20/2002 | US20020077545 Irradiation system ans its irradiation target movement monitoring method, and irradiation target position recognizing method |
| 06/20/2002 | US20020074519 Electron beam treatment device |
| 06/20/2002 | DE10062928A1 Röntgenstrahler mit Flüssigmetall-Target X-ray tubes with liquid metal target |
| 06/19/2002 | EP1215707A2 X-ray source with liquid metal target and X-ray apparatus |
| 06/19/2002 | EP1215706A2 Electron beam treatment device |
| 06/19/2002 | EP1214718A1 Extreme ultraviolet soft x-ray projection lithographic method system and lithography elements |
| 06/18/2002 | US6407492 Electron beam accelerator |
| 06/13/2002 | WO2001079798B1 Product irradiator for optimizing dose uniformity in products |
| 06/13/2002 | US20020072012 Charged beam exposure method and charged beam exposure apparatus |
| 06/13/2002 | US20020070356 Electron beam proximity exposure apparatus and mask unit therefor |
| 06/13/2002 | US20020070345 Evacuation use sample chamber and circuit pattern forming apparatus using the same |
| 06/13/2002 | DE10147133A1 Elektronenstrahl-Belichtungsvorrichtung Electron beam exposure apparatus |
| 06/12/2002 | EP1213743A2 Method and apparatus for prolonging the life of an x-ray target |
| 06/12/2002 | EP1212777A1 Ion beam vacuum sputtering apparatus and method |
| 06/12/2002 | CN1352998A Multilobe collimater for regulating intensity |
| 06/11/2002 | US6403167 Method for surface modification of 3-dimensional bulk polymers |
| 06/06/2002 | WO2002045122A2 Cold-plate window in a metal-frame x-ray insert |
| 06/06/2002 | US20020067482 Particle beam system |
| 06/06/2002 | DE10057824A1 Vorrichtung und Verfahren zur Anpassung einer Ionenstrahlfleckgröße in der Tumorbestrahlung Apparatus and method for adapting an ion beam spot size in tumor irradiation |
| 06/05/2002 | EP1210029A1 Irradiation unit |
| 06/04/2002 | US6401235 Method of and apparatus for producing exposure mask |
| 06/04/2002 | US6400794 Illumination system, particularly for EUV lithography |
| 06/04/2002 | US6399954 Charged-particle beam lithography apparatus and system capable of readily detecting abnormality in controlling on-off operation |
| 05/30/2002 | WO2002041948A1 Device and method for adapting the size of an ion beam spot in the domain of tumor irradiation |
| 05/30/2002 | WO2001076327A3 Method for operating a radiation examination device |
| 05/29/2002 | EP1208581A1 Electron beam apparatus having a low loss beam path |
| 05/28/2002 | US6397103 Apparatus for the emission of a combined flow of electrons and electromagnetic radiations |
| 05/28/2002 | US6396903 Reference grid for security equipment |
| 05/28/2002 | US6396899 Fluorescent X-ray analyzing apparatus and secondary target device disposed therein |
| 05/28/2002 | US6396068 Illumination system having a plurality of movable sources |
| 05/22/2002 | EP1206714A1 Real time monitoring of electron beam radiation dose |
| 05/22/2002 | EP1129223B1 Method and device for heating metal components using electron irradiation in a vacuum chamber |
| 05/21/2002 | US6393330 Method and device for managing an electronic component with complementary MOS transistors functioning under radiation |
| 05/21/2002 | US6391434 Composite scintillator material and method of manufacture |
| 05/16/2002 | WO2002039792A2 Target for production of x-rays |
| 05/16/2002 | WO2002039462A2 Multi-fluid elements device with controllable fluid level by means of matrix addressing |
| 05/16/2002 | WO2001079798A3 Product irradiator for optimizing dose uniformity in products |
| 05/16/2002 | US20020057987 Member is provided with different thicknesses, dependent upon amount of cumulative radiation in the article for the different positions in the second thickness range, to reduce the cumulative radiation in the article to optimal |
| 05/16/2002 | US20020057762 Portable radiation imaging system and a radiation image detection device for said imaging system |
| 05/16/2002 | US20020056816 Surface plasmon enhanced illumination system |
| 05/15/2002 | EP1204984A1 Electron beam shielding apparatus and methods for shielding electron beams |
| 05/14/2002 | US6389100 X-ray lens system |
| 05/14/2002 | US6389099 Irradiation system and method using X-ray and gamma-ray reflector |
| 05/10/2002 | WO2002037905A2 Mechanism for prevention of neutron radiation in ion implanter beamline |
| 05/10/2002 | WO2002007817A3 Device for irradiating a tumor tissue |
| 05/08/2002 | EP1204002A2 EUV lithography system with thin-film coating for protection from laser-produced plasma |
| 05/08/2002 | DE10151183A1 Radiation therapy system has guide magnet for directing electrons towards desired target via window in first mode and towards diagnostic target in second mode |