Patents for G21K 5 - Irradiation devices (9,144)
12/2002
12/05/2002WO2002097851A1 X-ray generator
12/05/2002WO2002097828A2 Radiation device
12/05/2002WO2002097429A1 Apparatus and method for transmitting appreciable information
12/05/2002WO2002097366A1 Observation device using light and x-ray, exposure system and exposure method
12/05/2002US20020182294 System for, and method of, irradiating food products
12/05/2002US20020181656 Apparatus for determining the crystalline and polycrystalline materials of an item
12/05/2002US20020181652 X-ray foreign material detecting apparatus simultaneously detecting a plurality of X-rays having different amounts of energy
12/05/2002US20020179853 System for, and method of, irradiating articles
12/05/2002DE10151080C1 Device for producing extreme ultraviolet radiation used in the semiconductor industry comprises a discharge chamber surrounded by electrode housings through which an operating gas flows under a predetermined pressure
12/04/2002EP0770257B1 Three-dimensional imaging system using laser generated ultrashort x-ray pulses
12/04/2002CN1383182A Ion beam radiator and method for triggering plasma by using such radiator
12/03/2002US6489792 Charge-up measuring apparatus
11/2002
11/28/2002US20020177055 Charged particle processing for forming pattern boundaries at a uniform thickness
11/28/2002US20020175296 Apparatus and method of ion beam processing
11/28/2002US20020175288 Probe for contamination detection in recyclable materials
11/27/2002EP1260861A1 Method of manufacturing a reflector, reflector manufactured thereby, phase shift mask and lithographic apparatus making use of them
11/27/2002CN1381871A High-contrast ratio diaphragm mask
11/27/2002CN1381716A Radiation testing device and radiation testing method
11/27/2002CN1381283A Rotation multielement radiation streaming forming device
11/27/2002CN1095091C X-ray tomography device
11/26/2002US6486482 Irradiation equipment
11/21/2002WO2002093988A1 Method and system for improving the effectiveness of medical devices by adhering drugs to the surface thereof
11/21/2002WO2002093588A2 Shielded structure for radiation treatment equipment and method of assembly
11/21/2002US20020171817 Lithography device wich uses a source of radiation in the extreme ultraviolet range and multi-layered mirrors with a broad spectral band in this range
11/21/2002US20020171050 Gas injector in which one of a plurality of nozzles can be selectively driven for elevation
11/20/2002EP1258011A1 Method and arrangement for variable exposure of x-ray detector
11/20/2002EP1258010A1 System and method for the production of ?18 f-fluoride
11/20/2002EP1257325A2 Cone-beam computerized tomography with a flat-panel imager
11/19/2002US6483894 Apparatus and method for adjusting a collimator
11/19/2002US6483891 Reduced-angle mammography device and variants
11/19/2002US6483118 Positron source, method of preparing the same, and automated system for supplying the same
11/14/2002WO2002091807A1 High flux, high energy photon source
11/14/2002WO2002091420A1 X-ray tube with graphite window
11/14/2002WO2002091394A1 Differential photochemical & photomechanical processing
11/14/2002WO2002091022A1 X-ray system comprising an x-ray source, a detector assembly and an aperture
11/14/2002US20020168050 Open type X-ray generating apparatus
11/14/2002US20020166293 Shielded structure for radiation treatment equipment and method of assembly
11/14/2002DE10122041A1 Verfahren und Vorrichtung zur Belichtung von Röntgenaufnahmen Method and apparatus for X-ray exposure
11/13/2002EP1257155A2 Method and apparatus for the exposure of radiographs
11/13/2002CN1379968A Production of dense mist of micrometric droplets in particular for extreme UV lithography
11/12/2002US6479830 Low-sputter-yield coating for hardware near laser-produced plasma
11/07/2002US20020164845 Ion beam irradiation apparatus and method of igniting a plasma for the same
11/07/2002US20020163793 EUV-transparent interface structure
11/07/2002US20020162975 High output extreme ultraviolet source
11/07/2002US20020162974 High temperature EUV source nozzle
11/07/2002US20020162971 Irradiation system and method
11/06/2002EP1255426A1 High temperature EUV source nozzle
11/06/2002EP1255163A2 High output extreme ultraviolet source
11/06/2002EP1101123B1 Particle beam current monitoring technique
11/05/2002US6477235 X-Ray device and deposition process for manufacture
11/05/2002US6477234 X-ray source having a liquid metal target
11/05/2002US6477233 Miniature x-ray source
11/05/2002US6476403 Gantry with an ion-optical system
11/05/2002US6476389 X-ray analyzer having an absorption current calculating section
10/2002
10/31/2002US20020159566 Method and apparatus for measuring the position, shape, size and intensity distribution of the effective focal spot of an x-ray tube
10/31/2002US20020158200 Electron microscope equipped with x-ray spectrometer
10/30/2002WO2002070067A1 Irradiator
10/29/2002US6473492 Multi-fluid elements device with controllable fluid level by means of matrix addressing
10/29/2002US6472834 Accelerator and medical system and operating method of the same
10/29/2002US6472677 Transuranic transmuter includes a sealable steel housing having a window to allow a beam of protons to enter the housing and strike a spallation target, thereby generating fast neutrons.
10/24/2002WO2002085079A2 Method and apparatus for measuring the position, shape, size and intensity distribution of the effective focal spot of an x-ray tube
10/24/2002WO2002084406A1 Euv-transparent interface structure
10/24/2002US20020155764 Electron beam emitter
10/24/2002US20020154740 X-ray irradiation apparatus
10/24/2002US20020154739 Miniature X-ray device and method of its manufacture
10/23/2002EP1204984A4 Electron beam shielding apparatus and methods for shielding electron beams
10/23/2002CN1376376A X-ray generator of open type
10/23/2002CN1375833A Method of reducing electromagnetic radiation background of electron beam irradiation unit
10/22/2002US6469775 Photolithographic device is registered to the wafer-in-process to prevent radiant energy from being directly transmitted into the photoresist material overlaying the vias.
10/22/2002US6469310 Radiation source for extreme ultraviolet radiation, e.g. for use in lithographic projection apparatus
10/22/2002US6469273 Method and device for heating metal components using electron irradiation in a vacuum chamber
10/22/2002US6468471 Sterilization of foods such as fruits and meats using electron beam radiation to kill harmful bacteria
10/17/2002WO2002082872A1 Method and device for producing extreme ultraviolet radiation and soft x-radiation
10/17/2002WO2002082871A1 Method and device for the generation of far ultraviolet or soft x-ray radiation
10/17/2002WO2002082495A1 A dual fluid cooling system for high power x-ray tubes
10/17/2002WO2002082065A2 Computed tomography apparatus
10/17/2002WO2002053195A3 System for, and method of, irradiating article with x-ray beam
10/17/2002US20020150206 Radiation inspection apparatus and radiation inspection method
10/17/2002US20020150202 Computed tomography apparatus for determining the pulse momentum transfer spectrum
10/17/2002US20020150194 Method and device for non-invasive soil carbon content and distribution measurements
10/17/2002US20020149321 Electron beam irradiation apparatus
10/17/2002DE10139677A1 Verfahren und Vorrichtung zum Erzeugen von extrem ultravioletter Strahlung und weicher Röntgenstrahlung Method and device for generating extreme ultraviolet radiation and soft x-rays
10/15/2002US6465799 UV radiation system having materials for selectively attenuating radiation
10/10/2002WO2002080631A1 X-ray generator
10/10/2002WO2002080213A2 Irradiation system and method
10/10/2002US20020146092 Dual fluid cooling system for high power x-ray tubes
10/10/2002DE10116561A1 Radiation test system has daughter board for components, base board for connection to radiation control unit, near and far monitors connected via short and long transmission cables
10/10/2002CA2443150A1 Irradiation system and method
10/09/2002EP1248499A1 Method and apparatus for production of extreme ultraviolet radiation
10/09/2002EP1248272A1 Method for testing objects, in particular for X-ray detection of defects or irregularities, and apparatus for carrying out the method
10/09/2002EP1248153A2 X-Ray exposure apparatus
10/09/2002EP1247433A2 Enhanced etching/smoothing of dielectric surfaces
10/08/2002US6463123 Target for production of x-rays
10/08/2002US6462333 Apparatus for direct write fabrication of nanostructures
10/08/2002US6461433 Fluid-jet deposition of radioactive material
10/08/2002US6461039 C-arm X-ray device
10/03/2002WO2002078042A2 Neutral particle beam processing apparatus
10/03/2002WO2002078039A1 Exit window for electron beam emitter
10/03/2002WO2002045122A3 Cold-plate window in a metal-frame x-ray insert
10/03/2002US20020141537 Laser plasma generation method and system
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