Patents for G21K 5 - Irradiation devices (9,144)
05/2001
05/22/2001US6234671 X-ray system with scanning beam x-ray source below object table
05/17/2001WO2001035438A1 Particle beam processing apparatus
05/17/2001WO2000031769A9 Detector configuration for efficient secondary electron collection in microcolumns
05/16/2001EP1100113A2 Dielectric barrier discharge lamp
05/15/2001US6233306 X-ray irradiation apparatus including an x-ray source provided with a capillary optical system
05/10/2001WO2001033920A1 Nondestructive inspection apparatus
05/10/2001WO2001033919A1 X-ray generator of open type
05/10/2001DE19949978A1 Elektronenstoßionenquelle Electron impact ion source
05/03/2001DE19934987A1 Röntgenanode und Verfahren zu ihrer Herstellung X-ray anode and processes for their preparation
05/02/2001CN1293532A X-ray meter with limiting device
05/02/2001CN1293450A Electron beam exposure method and mask used and electron beam exposure system
05/01/2001US6226354 Short-wavelength electromagnetic-radiation generator
05/01/2001US6224445 Actinic radiation source and uses therefor
04/2001
04/26/2001WO2001030122A1 Production of a dense mist of micrometric droplets in particular for extreme uv lithography
04/26/2001WO2001029846A1 X-ray apparatus including a filter with filter elements having an adjustable absorptivity
04/26/2001WO2001029845A1 Integral lens for high energy particle flow, method for producing such lenses and use thereof in analysis devices and devices for radiation therapy and lithography
04/25/2001EP1093662A1 Apparatus and method for reducing charge accumulation on a substrate
04/19/2001WO2001027984A1 Ultraviolet radiation producing apparatus
04/19/2001WO2001027964A2 Electron impact ion source
04/19/2001DE19945074A1 Drying process for coated substrates uses ultraviolet light focussed on the surface
04/18/2001EP1092393A1 An x-ray apparatus with a limiting device
04/17/2001US6219400 X-ray optical system and X-ray exposure apparatus
04/17/2001US6218675 Charged particle beam irradiation apparatus
04/17/2001US6217214 X-ray bone densitometry apparatus
04/12/2001WO2001026135A1 Irradiation system and method
04/12/2001WO2001025754A1 Article irradiation system in which article transporting conveyor is closely encompassed by shielding material
04/12/2001DE19947809A1 C-Bogen-Röntgeneinrichtung C-arm X-ray device
04/11/2001EP1091386A2 Illumination system for electron beam lithography tool
04/11/2001EP1090585A1 C-arm X-ray apparatus
04/11/2001EP1090397A1 Article irradiation system having intermediate wall of radiation shielding material within loop of a conveyor system that transports the articles
04/10/2001US6215847 Product irradiator
04/05/2001WO2001024591A1 Apparatus for charged-particle beam irradiation, and method of control thereof
04/05/2001WO1996024860B1 Scanning-beam x-ray imaging system
04/05/2001DE10012848A1 Particle induced X-ray emission analysis apparatus comprises nuclear fusion apparatus, charged particle line, and analysis unit
04/04/2001CN1063979C Multi-layer multi-shutter aligner
04/03/2001US6212255 System for X-ray irradiation of blood
03/2001
03/29/2001WO2001022470A1 Ion beam vacuum sputtering apparatus and method
03/28/2001EP1086612A2 X-ray examination apparatus including a control loop for adjusting the x-ray flux
03/27/2001US6207951 Method of generating a pulsed metastable atom beam and pulsed ultraviolet radiation and an apparatus therefor
03/22/2001WO2001019280A1 Irradiation unit
03/21/2001EP1085786A2 Accelerator system
03/14/2001EP1082881A1 X-ray examination apparatus with a brightness control system
03/14/2001EP1082729A1 Fluid-jet deposition of radioactive material for brachytherapy devices
03/14/2001EP1082727A2 Method and apparatus for the production of neutrons and other particles
03/08/2001WO2001016991A1 Electron beam apparatus having a low loss beam path
03/07/2001EP1081741A2 Focusing method and system
03/06/2001US6198806 X-ray examination apparatus having an adjustable X-ray filter
03/06/2001US6198804 Electron beam multistage accelerator
03/06/2001US6198802 Scanning beam x-ray source and assembly
03/06/2001US6198793 Illumination system particularly for EUV lithography
03/01/2001WO2001015199A1 Electron beam plasma formation for surface chemistry
03/01/2001WO2001014911A1 Real time monitoring of electron beam radiation dose
02/2001
02/28/2001EP1078972A2 Fluorescent materials for illumination purposes
02/27/2001US6194102 Mask for transferring a pattern to a substrate, comprising sub-fields including pattern lines and interconnection patterns which include transmitting pattern segments with widths that change monotonically in a longitudinal direction
02/27/2001US6193415 Mobile device for X-ray apparatus
02/21/2001EP1076906A1 Lighting system, especially for extreme ultraviolet lithography
02/21/2001CN1284650A Radiation source assembly and connector pressing bed for manufacturing the same
02/20/2001US6191424 Irradiation apparatus for production line use
02/20/2001US6190808 X-ray mask and method of manufacturing the same
02/15/2001WO2001011655A1 Methods and apparatus for mounting an x-ray detecting unit to an electron microscope
02/15/2001WO2001011634A1 Process for irradiation producing constant depth/dose profile
02/14/2001EP1076084A2 Lumninescent materials for illumination purposes
02/13/2001US6188075 Electron beam irradiating method and object to be irradiated with electron beam
02/13/2001US6188071 Feedback method for increasing stability of electron beams
02/08/2001WO2000077479A3 X-ray beam position monitors
02/08/2001DE10024634A1 Electron beam patterning apparatus for use in manufacture of semiconductor device, sets up adjusting value of shaping lens such that detected position slippage of electron beam is minimum
02/06/2001US6183817 Recording a holographic pattern in lense, generation a photonic lense by focusing light
02/06/2001US6183139 X-ray scanning method and apparatus
02/01/2001WO2001008195A1 X-ray anode and method for the production thereof
02/01/2001WO2001008163A1 Extreme ultraviolet soft x-ray projection lithographic method system and lithography elements
02/01/2001DE19935404A1 Beleuchtungssystem mit mehreren Lichtquellen A lighting system comprising a plurality of light sources
02/01/2001DE10036444A1 Locating image isocentre when using electronic portal imaging systems involves acquiring image via collimator, identifying line through central lamella that line also passes through isocentre
01/2001
01/31/2001EP1072957A2 Illumination system with multiple light sources
01/31/2001EP0791221B1 Production of radioisotopes by isotopic conversion
01/31/2001CN1282078A Electron beam illuminating device
01/30/2001US6180951 Process for irradiation producing constant depth/dose profile
01/30/2001US6180014 Oxidation, removal
01/30/2001US6178955 Fuel improving method and apparatus
01/25/2001WO2001006538A1 Adaptive gcib for smoothing surfaces
01/25/2001WO2001006537A1 Electron beam shielding apparatus and methods for shielding electron beams
01/25/2001DE19943393C1 Dental material radiation device e.g. for hardening dental filling, has light beams from light-emitting diodes directed onto focus region at input end of light conductor
01/25/2001CA2379913A1 Electron beam shielding apparatus and methods for shielding electron beams
01/23/2001US6178227 Portable-type fluorescent X-ray analyzer
01/23/2001CA2251801C Multiple station gamma ray absorption contraband detection system
01/18/2001WO2001004924A1 Electron beam accelerator
01/18/2001DE19933346A1 Stabile radioactively-marked nanoparticles bound to other molecules for use in medical and diagnostic techniques, particularly used for studying phagocyte processes
01/17/2001EP1069444A2 UV radiation system having materials for selectively attenuating radiation
01/17/2001CN2415436Y 重离子辐照装置 Heavy ion irradiation facility
01/16/2001US6175585 Electron beam shielding apparatus and methods for shielding electron beams
01/16/2001US6175121 Block mask and charged particle beam exposure method and apparatus using the same
01/11/2001WO2001003155A1 Method and apparatus for simultaneously depositing and observing materials on a target
01/11/2001WO2001002082A1 Electron beam irradiation apparatus and method
01/11/2001WO2001001860A1 Steering arrangement for mobile x-ray apparatus
01/04/2001WO2001000249A1 System for, and method of, irradiating articles to sterilize the articles
01/04/2001WO2001000092A1 Digital x-ray scanning apparatus
01/04/2001WO2000036884A3 X-ray examination apparatus including a control loop for adjusting the x-ray flux
01/04/2001DE10033144A1 Optical barrier used in the production of integrated circuits has a structured layer made of tungsten
01/04/2001CA2376861A1 System for, and method of, irradiating articles to sterilize the articles
01/03/2001EP1065696A2 Ion implantation apparatus and ion source and ion source subassembly for use in ion implantation apparatus
01/03/2001EP0746857A4 Scanning probe microscope
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