Patents
Sitemap › G21 - Nuclear physics; Nuclear engineering › G21K - Techniques for handling particles or ionising radiation not otherwise provided for; Irradiation devices; Gamma ray or x-ray microscopes › G21K 5 - Irradiation devices
Patents for G21K 5 - Irradiation devices (9,144)
05/2003
05/01/2003US20030080293 Scanning electron microscope
04/2003
04/24/2003WO2003034153A2 Lithographic apparatus and device manufacturing method
04/24/2003US20030077544 Cups are configured to reduce beam displacements caused by eddy currents; semiconductors; microelectronics
04/22/2003US6553096 X-ray generating mechanism using electron field emission cathode
04/17/2003WO2003032351A2 Method and device for aligning a charged particle beam column
04/17/2003WO2003032329A1 Optical element and method for its manufacture as well as lightography apparatus and method for manufacturing a semiconductor device
04/17/2003WO2002085079A3 Method and apparatus for measuring the position, shape, size and intensity distribution of the effective focal spot of an x-ray tube
04/17/2003US20030072410 System and method for optimizing radiation treatment with an intensity modulating multi-leaf collimator by minimizing junctions
04/17/2003US20030072408 X-ray tube and method having tilted rotation axis
04/17/2003US20030071979 Lithographic apparatus and device manufacturing method
04/17/2003US20030071231 Electron beam exposing method and exposure apparatus
04/17/2003DE20201493U1 Irradiation unit for irradiating an object with ultra violet or visible light, comprises one or more light diodes arranged in parallel in two or more groups
04/15/2003US6549609 X-ray generator with a limiting device
04/15/2003US6548381 Ion beam irradiation apparatus and method of igniting a plasma for the same
04/10/2003WO2003030240A2 Etching method and apparatus
04/10/2003WO2003030184A1 Compact self-shielded irradiation system and method
04/10/2003WO2003028771A1 Process and apparatus for irradiating product pallets
04/10/2003US20030068012 Arrangement for generating extreme ultraviolet (EUV) radiation based on a gas discharge
04/10/2003US20030068001 Quantitative analysis of trace elements
04/10/2003US20030066975 Photocatalytic layer; decomposing impurities by exposure toradiation
04/10/2003US20030066970 Compact self-shielded irradiation system and method
04/10/2003US20030066963 Multi-beam multi-column electron beam inspection system
04/10/2003US20030066479 Process for the treatment of a fiber
04/09/2003EP1300857A2 Apparatus and methods for surficial milling of selected regions on surfaces of multilayer-film reflective mirrors as used in X-ray optical systems
04/09/2003EP1300058A1 Spallation device for producing neutrons
04/09/2003EP1300056A2 Method of producing short-wave radiation from a gas-discharge plasma and device for implementing it
04/09/2003EP0856206B1 Method of enhancing radioactivity decay
04/09/2003CN1408450A Optimum radiation therapeutic system and method using strength modulation multiple fin collimator
04/08/2003US6546077 Miniature X-ray device and method of its manufacture
04/08/2003US6545398 Electron accelerator having a wide electron beam that extends further out and is wider than the outer periphery of the device
04/08/2003US6545272 Apparatus and methods for monitoring contamination of an optical component in an optical system
04/03/2003US20030063266 Lithographic apparatus and device manufacturing method
04/02/2003EP1298965A2 Radiation-generating devices utilizing multiple plasma-discharge sources and microlithography apparatus and methods utilizing the same
04/02/2003EP1297863A2 System and method for optimizing radiation treatment with an intensity modulating multi-leaf collimator while minimizing junctions
04/02/2003EP1222842B1 Production of a dense mist of micrometric droplets in particular for extreme uv lithography
04/02/2003CN1407951A Device and method for treating water with ozone generated by water electrolysis
04/02/2003CN1104291C Thin film coater, coating method, and method for mfg. liquid crystal display device and liquid crystal display device
04/01/2003US6542578 Apparatus for determining the crystalline and polycrystalline materials of an item
04/01/2003US6542576 X-ray tube for CT applications
04/01/2003US6541786 Plasma pinch high energy with debris collector
04/01/2003US6541781 Waveguide for microwave excitation of plasma in an ion beam guide
04/01/2003US6541780 Particle beam current monitoring technique
03/2003
03/27/2003WO2003026363A1 Discharge source with gas curtain for protecting optics from particles
03/27/2003WO2003025951A1 Method of and apparatus for transmuting radioactive waste
03/27/2003WO2003024527A1 Device for x-ray therapy
03/27/2003US20030058986 Apparatus and methods for surficial milling of selected regions on surfaces multilayer-film reflective mirrors as used in X-ray optical systems
03/27/2003US20030058429 Stable energy detector for extreme ultraviolet radiation detection
03/27/2003US20030058422 Lithographic apparatus and device manufacturing method
03/27/2003US20030057971 Inspection method using a charged particle beam and inspection device based thereon
03/27/2003US20030057513 Membrane IC fabrication
03/27/2003US20030057382 Charged particle beam irradiation equipment and control method thereof
03/27/2003CA2461102A1 Method of and apparatus for transmuting radioactive waste
03/26/2003EP1296181A2 X-ray image reader
03/26/2003EP1295157A1 Composite diamond window
03/26/2003EP1294445A2 Device for irradiating a tumor tissue
03/26/2003EP1050064B1 Implantation of radioactive ?32 p atoms
03/26/2003CN1406383A Device for X-ray lithography
03/26/2003CN1103630C Spotlight source device
03/25/2003US6538257 Method of generating extremely short-wave radiation, and extremely short-wave radiation source unit
03/20/2003WO2003023685A1 Method and apparatus for simulating a radiation dose delivered to an object
03/20/2003US20030053596 X-ray image reader
03/20/2003US20030053594 Discharge source with gas curtain for protecting optics from particles
03/20/2003US20030053588 Radiation-generating devices utilizing multiple plasma-discharge sources and microlithography apparatus and methods utilizing the same
03/20/2003US20030052612 Microminiature microwave electron source
03/20/2003US20030051990 Molecular dissociation of pollutants in exhaust gas streams of combustion systems.
03/20/2003CA2460102A1 Method and apparatus for simulating a radiation dose delivered to an object
03/13/2003WO2003021000A1 Process for the treatment of a fiber
03/13/2003WO2003020196A2 Antiprotons for imaging and termination of undesirable cells
03/13/2003US20030050769 Method and apparatus for simulating a radiation dose delivered to an object
03/13/2003US20030048875 Radiation applying apparatus
03/13/2003US20030048869 Method and apparatus for controlling a rotatable multi-element beam shaping device
03/13/2003US20030048080 Accelerator system and medical accelerator facility
03/13/2003CA2449087A1 Antiprotons for imaging and termination of undesirable cells
03/12/2003EP1290925A2 Extreme ultraviolet source based on colliding neutral beams
03/12/2003EP1053551A4 Wavelength dispersive x-ray spectrometer with x-ray collimator optic for increased sensitivity over a wide x-ray energy range
03/11/2003US6532276 Method and apparatus for determining a material of a detected item
03/11/2003US6530874 Synchronized moving shield for a radiation therapy apparatus
03/06/2003WO2003019613A1 Method and apparatus for improved ion bunching in an ion implantation system
03/06/2003WO2003019612A1 Split double gap buncher and method for ion bunching in an ion implantation system
03/06/2003WO2002078042A3 Neutral particle beam processing apparatus
03/06/2003US20030043455 Collector for an illumination system with a wavelength of less than or equal to 193 nm
03/06/2003DE20120721U1 Assembly to treat workpiece surface with UV radiation, has recess in workpiece which is filled with carbon dioxide gas, and is further away from UV lamp than surface areas not covered by gas
03/06/2003DE20120720U1 Assembly for treating workpiece objects with UV radiation in quasi-continuous process, has shrouding housings, filled with carbon dioxide, around each workpiece, whilst moving through radiation zone
03/06/2003DE20120718U1 UV radiation assembly, to treat workpiece surfaces, has radiation chamber totally filled with inert carbon dioxide gas, and initial ante-chamber in movement path to exclude oxygen
03/04/2003US6529577 System for, and method of, irradiating article with x-ray beam
03/04/2003US6528800 Particulate curing system
02/2003
02/27/2003WO2003017005A1 Stable energy detector for extreme ultraviolet radiation detection
02/27/2003WO2003016781A2 Surface plasmon enhanced illumination system
02/27/2003WO2002080213A3 Irradiation system and method
02/27/2003WO2002078039A8 Exit window for electron beam emitter
02/27/2003US20030039332 Method for inspecting objects. particularly for detecting defects or irregularities therein by means of X-radiation and apparatus for performing the method
02/27/2003US20030038254 Slit double gap buncher and method for improved ion bunching in an ion implantation system
02/27/2003US20030038253 Method and apparatus for improved ion bunching in an ion implantation system
02/27/2003US20030038247 Watertight electrodeless irradiation apparatus and method for irradiating packaging materials
02/27/2003DE20203303U1 Objects within CO2 atmosphere are exposed to UV emission within a sealed housing
02/25/2003US6525295 Laser imaging apparatus
02/20/2003WO2002098243A3 System for, and method of, irradiating food products
02/20/2003US20030036204 Surface plasmon enhanced illumination system
02/19/2003EP1283734A2 Device for positioning a tumour patient with a tumour in the head or neck region in a heavy-ion therapy chamber
02/18/2003US6522056 Method and apparatus for simultaneously depositing and observing materials on a target
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