Patents
Patents for G01Q 70 - General aspects of spm probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single spm technique covered by group (3,251)
08/1999
08/17/1999US5939719 Scanning probe microscope with scan correction
08/12/1999WO1999040445A1 Optical probe for proximity field
08/11/1999EP0935137A1 Scanning probe microscope
08/10/1999US5936243 Conductive micro-probe and memory device
08/10/1999US5936237 Combined topography and electromagnetic field scanning probe microscope
08/05/1999WO1999039215A1 Multi-probe test head
08/05/1999CA2281932A1 Multi-probe test head
08/03/1999US5932876 Tunnel effect sensor, suitable for determining the topography of a surface
08/03/1999CA2053533C Information recording unit, apparatus and method for information recording/reproduction in conjunction with a scanning tunneling microscope
07/1999
07/29/1999WO1999037364A1 A high intensity focused ultrasound system for scanning and curing tumor
07/28/1999EP0932020A1 Micro surface measuring apparatus and probe manufacturing
07/27/1999US5929438 Cantilever and measuring apparatus using it
07/13/1999US5923637 For use in a scanning probe microscope or information recording apparatus
07/13/1999US5923033 Integrated SPM sensor having a photodetector mounted on a probe on a free end of a supported cantilever
07/07/1999EP0927331A1 Macroscopically manipulable nanoscale devices made from nanotube assemblies
06/1999
06/16/1999EP0922929A1 Scanning-probe device with compensation for the disturbing influence of mechanical vibrations on the scanning process
06/15/1999US5912468 Charged particle beam exposure system
06/15/1999US5912461 Probe scanning mechanism for a scanning probe microscope
06/03/1999WO1999015851A9 Method and apparatus for obtaining improved vertical metrology measurements
05/1999
05/25/1999US5907095 High-sensitivity strain probe
05/18/1999US5905260 Triboluminescent damage sensors
05/11/1999US5902928 Controlling engagement of a scanning microscope probe with a segmented piezoelectric actuator
05/06/1999EP0913508A2 Carbon nanotube device, manufacturing method of carbon nanotube device, and electron emitting device
05/05/1999CN1215616A High-intensity focus supersonic tumor scanning therapy system
04/1999
04/27/1999US5898106 Method and apparatus for obtaining improved vertical metrology measurements
04/21/1999EP0909937A1 Semiconductor strain sensor, method of manufacturing the sensor, and scanning probe microscope
04/15/1999DE19752202C1 Micromechanical device production involving ion deposition on substrate region
04/14/1999EP0908719A1 Stage unit used for sample positioning and scanning probe microscope with such a stage unit
04/07/1999EP0907076A2 Methods of fabricating integrated, aligned tunneling tip pairs
04/06/1999US5892223 Multilayer microtip probe and method
04/01/1999WO1999015851A1 Method and apparatus for obtaining improved vertical metrology measurements
03/1999
03/30/1999US5888371 Method of fabricating an aperture for a near field scanning optical microscope
03/25/1999WO1999014793A1 Atom probe
03/25/1999WO1999014785A1 Electron detectors
03/23/1999US5885434 Measuring and storing surface topography of the workpiece during a first scan with a fine tip probe, then using the stored information to control probe position during a second scan in which an electrochemical reaction is performed
03/17/1999EP0584233B1 Submicron tip structure with opposed tips
03/16/1999US5883387 SPM cantilever and a method for manufacturing the same
03/10/1999CN1042470C Moulded field emission electron emitter formations and their production
03/03/1999EP0899538A1 A probe tip configuration, a method of fabricating probe tips and use thereof
03/02/1999US5877891 Scanning probe microscope having a single viewing device for on-axis and oblique optical views
03/02/1999US5877497 Data acquisition and control apparatus for scanning probe systems
02/1999
02/23/1999US5874669 Scanning force microscope with removable probe illuminator assembly
02/23/1999US5874668 Atomic force microscope for biological specimens
02/18/1999DE19733520A1 Verfahren zur Nanostrukturierung von amorphen Kohlenstoffschichten Method for nanostructuring of amorphous carbon films
02/11/1999WO1999006996A1 Method for nano-structuring amorphous carbon layers
02/11/1999WO1999006793A1 Microscope for compliance measurement
02/10/1999CN1042072C Field emission electron source employing diamond coating and mfg. method thereof
02/03/1999EP0895293A2 Semiconductor device comprising an aggregate of semiconductor micro-needles
02/02/1999US5866807 Method of forming an indentation in a surface of a sample
02/02/1999US5866805 Cantilevers for a magnetically driven atomic force microscope
02/02/1999US5866021 Method of manufacturing micro-tip and female mold substrate therefor, and method of manufacturing probe with micro-tip and the probe
02/02/1999US5865839 Artificial retina
01/1999
01/27/1999EP0893834A2 Semiconductor device comprising an aggregate of semiconductor micro-needles
01/20/1999EP0892446A2 Method of manufacturing an aggregate of semiconductor micro-needles and method of manufacturing a semiconductor device comprising an aggregate of semiconductor micro-needles
01/20/1999EP0892445A2 Semiconductor device comprising an aggregate of semiconductor micro-needles
01/20/1999EP0892444A2 Semiconductor device comprising an aggregate of semiconductor micro-needles
01/19/1999US5861624 Atomic force microscope for attachment to optical microscope
01/19/1999CA2069702C Micro-displacement element, and scanning tunneling microscope and information processing apparatus using same
01/19/1999CA2065593C Cantilever unit and atomic force microscope, magnetic force microscope, reproducing apparatus and information processing apparatus using the cantilever unit
01/12/1999US5859364 Scanning probe microscope
01/07/1999EP0855045A4 High resolution fiber optic probe for near field optical microscopy
01/05/1999US5856672 Single-crystal silicon cantilever with integral in-plane tip for use in atomic force microscope system
12/1998
12/30/1998EP0887867A2 Semiconductor device comprising an aggregate of semiconductor micro-needles
12/30/1998EP0887866A2 Semiconductor device comprising an aggregate of semiconductor micro-needles
12/30/1998EP0886758A1 Cantilever structures
12/29/1998US5854487 Scanning probe microscope providing unobstructed top down and bottom up views
12/22/1998US5851902 Semiconductor layer structure and recording medium for a large capacity memory
12/16/1998EP0884617A1 Scanning near-field optic/atomic-force microscope, probe for use in same, and method of fabricating said probe
12/16/1998EP0884557A2 Conductive micro-probe and memory device
12/08/1998US5847387 Support device and stage assembly for a scanned-probe microscope
12/02/1998EP0880671A2 Microfabricated torsional cantilevers for sensitive force detection
12/01/1998US5844803 Method of sorting a group of integrated circuit devices for those devices requiring special testing
11/1998
11/26/1998WO1998053481A1 Electron beam aperture element
11/25/1998EP0880043A2 Scanning near field optical microscope
11/17/1998US5838005 In a method for forming a sensor
11/17/1998US5836996 Artificial retina
11/11/1998EP0805946A4 Apparatus for microindentation hardness testing and surface imaging incorporating a multi-plate capacitor system
11/11/1998EP0721564A4 High precision scale and position sensor
11/05/1998WO1998034092A3 Object inspection and/or modification system and method
10/1998
10/22/1998DE19816914A1 Scanning microscope with stage observing=evaluating parameters of sample surface
10/20/1998US5824470 Protection of detectors by passivation and deprotection in a microscopic environment
10/14/1998EP0871166A1 Apparatus for machining, recording, or reproducing, using scanning probe microscope
10/13/1998US5821410 Scanning tip microwave near field microscope
10/13/1998CA2111770C Information recording and reproducing apparatus for recording and reproducing information by using a probe electrode
10/10/1998CA2231224A1 Apparatus for machining, recording, and reproducing, using scanning probe microscope
10/07/1998EP0869329A2 Torsion type probe and scanning probe microscope using the same
10/07/1998EP0868648A1 Integrated silicon profilometer and afm head
09/1998
09/22/1998US5812722 Optical fiber and method for manufacturing the same
09/22/1998US5811802 Scanning probe microscope with hollow pivot assembly
09/22/1998US5811017 Cantilever for use in a scanning probe microscope and method of manufacturing the same
09/22/1998CA2051192C Tracking method for memory apparatus
09/16/1998EP0864899A2 Scanning near-field optical microscope
09/12/1998CA2229221A1 Scanning near-field optical microscope
09/09/1998EP0722574B1 Near-field optical microscope
09/03/1998WO1998038501A1 Scanning probe microscope providing unobstructed top down and bottom up views
09/02/1998EP0862045A2 Atomic force microscope with optional replaceable fluid cell.
09/02/1998EP0861428A1 Triboluminescent damage sensors
09/01/1998US5801472 Micro-fabricated device with integrated electrostatic actuator
09/01/1998US5801381 Between a microscope probe tip and a sample surface
08/1998
08/26/1998EP0860726A1 Probe with tip having micro aperture for detecting or irradiating light, near-field optical microscope, recording/reproduction apparatus, and exposure apparatus using the probe, and method of manufacturing the probe
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