| Patents for G01Q 70 - General aspects of spm probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single spm technique covered by group (3,251) |
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| 03/13/1997 | WO1997009584A1 Cantilever with integrated deflection sensor |
| 03/06/1997 | WO1997008733A1 A scanning probe microscope having automatic probe exchange and alignment |
| 02/26/1997 | EP0759537A2 A scanning force microscope with optical device |
| 02/25/1997 | US5606162 Microprobe for surface-scanning microscopes |
| 02/11/1997 | US5602820 Method and apparatus for mass data storage |
| 02/06/1997 | WO1997004449A1 Nanometer scale data storage device and associated positioning system |
| 02/06/1997 | WO1997004283A2 Microfabricated torsional cantilevers for sensitive force detection |
| 02/04/1997 | US5600137 Probe apparatus having reduced misalignment of conductive needles |
| 01/29/1997 | CN1141501A High speed ashing method |
| 01/28/1997 | CA2000071C Recording and reproducing apparatus and recording and reproducing method and recording medium for the recording and reproducing method |
| 01/23/1997 | DE19526775A1 Probes for scanning force microscopy and needles for scanning tunnelling microscopy |
| 01/22/1997 | EP0588888B1 Microprobe for surface-scanning microscopes |
| 01/21/1997 | US5596194 Single-wafer tunneling sensor and low-cost IC manufacturing method |
| 01/21/1997 | US5595942 Method of fabricating cantilever for atomic force microscope having piezoresistive deflection detector |
| 01/15/1997 | EP0753824A1 Recording/reproducing apparatus and method for recording/reproducing information using probe |
| 01/14/1997 | US5594166 Cantilever for use with atomic force microscope and process for the production thereof |
| 01/07/1997 | US5591903 Reconstructing the shape of an atomic force microscope probe |
| 01/02/1997 | DE19522004A1 Method for producing partly movable micro structure(s) |
| 12/31/1996 | CA2048365C Information processing device and information processing method |
| 12/11/1996 | EP0746857A1 Scanning probe microscope |
| 12/10/1996 | US5583286 Integrated sensor for scanning probe microscope |
| 12/05/1996 | WO1996038705A1 Probes for sensing and manipulating microscopic environments and structures |
| 12/04/1996 | EP0745987A2 Probe for memory device having movable media |
| 12/03/1996 | US5581083 Method for fabricating a sensor on a probe tip used for atomic force microscopy and the like |
| 12/03/1996 | US5581082 Combined scanning probe and scanning energy microscope |
| 11/26/1996 | CA2070946C Cantilever type displacement element, and scanning tunneling microscope or information processing apparatus using same |
| 11/14/1996 | WO1996035943A1 Data acquisition and control apparatus for scanning probe systems |
| 11/12/1996 | US5574279 Probe with torsion lever structure, and scanning probe microscope and record/reproducing apparatus utilizing the same |
| 11/07/1996 | WO1996035225A1 Tapered structure suitable for microthermocouples microelectrodes, field emission tips and micromagnetic sensors with force sensing capabilities |
| 10/30/1996 | EP0740333A2 High speed ashing method |
| 10/29/1996 | US5569918 Probe holder and probe mounting method for a scanning probe microscope |
| 10/03/1996 | WO1996030927A1 Combined scanning probe and scanning energy microscope |
| 10/03/1996 | CA2213970A1 Combined scanning probe and scanning energy microscope |
| 10/02/1996 | EP0584233A4 Methods of fabricating integrated, aligned tunneling tip pairs |
| 09/26/1996 | DE19611779A1 Raster scan microscope with probe holding system for detachable holding of probe |
| 09/24/1996 | US5559330 Scanning tunneling microscope |
| 09/10/1996 | US5553486 Apparatus for microindentation hardness testing and surface imaging incorporating a multi-plate capacitor system |
| 08/28/1996 | EP0728294A1 Mounting for a probe tip in a scanning force or scanning tunneling microscope |
| 08/14/1996 | EP0726567A2 Semiconductor layer structure as a recording medium |
| 08/13/1996 | US5546375 Method of manufacturing a tip for scanning tunneling microscope using peeling layer |
| 08/13/1996 | US5546374 Information recording and/or reproducing apparatus using probe |
| 08/06/1996 | US5543614 Scanning probe microscope capable of suppressing probe vibration caused by feedback control |
| 07/30/1996 | US5540958 Coating a substrates, patterning a material and coating with a second material |
| 07/24/1996 | EP0722574A1 Near-field optical microscope |
| 07/17/1996 | EP0721564A1 High precision scale and position sensor |
| 07/16/1996 | US5537372 High density data storage system with topographic contact sensor |
| 06/25/1996 | US5530253 Sample stage for scanning probe microscope head |
| 06/11/1996 | US5526334 Information processing apparatus with multiple probes and method therefor |
| 06/11/1996 | US5524479 Detecting system for scanning microscopes |
| 06/04/1996 | US5523700 Quantitative two-dimensional dopant profile measurement and inverse modeling by scanning capacitance microscopy |
| 06/04/1996 | US5523686 Probes for scanning SQUID magnetometers |
| 05/28/1996 | US5521377 Measurement of trace element concentration distribution, and evaluation of carriers, in semiconductors, and preparation of standard samples |
| 05/21/1996 | US5519686 Encoder for controlling measurements in the range of a few angstroms |
| 05/08/1996 | EP0711029A2 Microstructure and method of forming the same |
| 05/02/1996 | WO1996012930A1 Apparatus for microindentation hardness testing and surface imaging incorporating a multi-plate capacitor system |
| 05/01/1996 | EP0709836A2 Method of access to recording medium and apparatus and method for processing information |
| 05/01/1996 | EP0709835A2 Probe apparatus having reduced misalignment of conductive needles |
| 04/30/1996 | US5512746 Micro-pattern measuring apparatus |
| 04/25/1996 | WO1996012206A1 Fiber optic probe for near field optical microscopy |
| 04/23/1996 | US5510617 Particle-optical instrument comprising a deflection unit for secondary electrons |
| 04/23/1996 | US5510615 Scanning probe microscope apparatus for use in a scanning electron microscope |
| 04/16/1996 | US5508627 Photon assisted sub-tunneling electrical probe, probe tip, and probing method |
| 04/16/1996 | US5508517 Scanning probe type microscope apparatus |
| 04/10/1996 | EP0706052A2 Sensor using tunnel current |
| 04/09/1996 | US5506829 Cantilever probe and apparatus using the same |
| 03/27/1996 | EP0703429A2 Probe with torsion lever structure, and scanning probe microscope and record/reproducing apparatus utilizing the same |
| 03/26/1996 | US5502305 Measurement of trace element concentration distribution, and evaluation of carriers, in semiconductors, and preparation of standard samples |
| 03/19/1996 | US5500527 Electron/ion microscope with improved resolution |
| 03/13/1996 | EP0701135A1 Single-wafer tunneling sensor and low-cost IC manufacturing method |
| 03/06/1996 | EP0699921A2 Improved probes for scanning squid magnetometers |
| 03/06/1996 | EP0699341A1 Particle-optical instrument comprising a deflection unit for secondary electrons |
| 03/05/1996 | US5496999 Scanning probe microscope |
| 02/08/1996 | WO1996003641A1 Scanning probe microscope assembly |
| 01/30/1996 | US5488305 System and method for high-speed potentiometry using scanning probe microscope |
| 01/16/1996 | US5485536 Fiber optic probe for near field optical microscopy |
| 01/16/1996 | US5483822 For use in an atomic force microscope |
| 01/09/1996 | US5482002 Microprobe, preparation thereof and electronic device by use of said microprobe |
| 01/02/1996 | US5481528 Information processor and method using the information processor |
| 12/05/1995 | US5472916 Method for manufacturing tunnel-effect sensors |
| 11/28/1995 | US5471458 Multi-probe information recording/reproducing apparatus including a probe displacement control circuit |
| 11/28/1995 | US5471064 Precision machining method, precision machining apparatus and data storage apparatus using the same |
| 11/23/1995 | WO1995031693A1 Resonant measurement value sensor |
| 11/23/1995 | DE4417132A1 Resonanter Meßwertaufnehmer Resonant transducer |
| 11/21/1995 | US5467642 Scanning probe microscope and method of control error correction |
| 11/14/1995 | US5466935 Programmable, scanned-probe microscope system and method |
| 11/14/1995 | US5465611 Sensor head for use in atomic force microscopy and method for its production |
| 10/24/1995 | US5459939 Apparatus and method for measuring width of micro gap |
| 10/11/1995 | EP0676749A2 Information reproducing device and method |
| 10/03/1995 | US5455420 Scanning probe microscope apparatus for use in a scanning electron |
| 10/03/1995 | US5455419 Micromechanical sensor and sensor fabrication process |
| 10/03/1995 | CA2066343C Information processor |
| 09/28/1995 | WO1995026041A1 Particle-optical instrument comprising a deflection unit for secondary electrons |
| 09/27/1995 | EP0674181A2 Micro mechanical component and production process thereof |
| 09/26/1995 | US5453616 Probe microscope having error correction piezoelectric scanner |
| 09/25/1995 | CA2145331A1 Micro mechanical component and production process thereof |
| 09/19/1995 | US5450746 Constant force stylus profiling apparatus and method |
| 09/12/1995 | US5450505 Method of reducing distortions in probe microscope |
| 09/12/1995 | US5449903 Methods of fabricating integrated, aligned tunneling tip pairs |
| 09/05/1995 | US5448399 Optical system for scanning microscope |
| 08/29/1995 | US5446720 Information recording method and apparatus recording two or more changes in topographical and electrical states |