| Patents for G01Q 70 - General aspects of spm probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single spm technique covered by group (3,251) |
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| 09/02/1992 | EP0500980A1 Cantilevered microtip |
| 09/01/1992 | US5144128 Surface microscope and surface microscopy |
| 08/25/1992 | US5141460 Method of making a field emission electron source employing a diamond coating |
| 08/11/1992 | US5138159 Scanning tunneling microscope |
| 08/05/1992 | EP0497288A2 Probe scanning system |
| 08/04/1992 | US5136162 Measuring device in a scanning probe microscope |
| 08/04/1992 | CA1305872C Micromechanical atomic force sensor head |
| 07/23/1992 | WO1992012398A1 Piezoresistive cantilever for atomic force microscopy |
| 07/14/1992 | US5129850 Method of making a molded field emission electron emitter employing a diamond coating |
| 07/14/1992 | US5129132 Method of making an integrated scanning tunneling microscope |
| 07/01/1992 | EP0492915A1 Cantilever probe and apparatus using the same |
| 06/23/1992 | US5124645 Transmission electron microscope (TEM) power probe for in-situ viewing of electromigration and operation of an integrated circuit or microprocessor |
| 06/03/1992 | EP0488133A1 Method of making a cantilever stylus for use in an atomic force microscope |
| 05/26/1992 | US5116462 Cantilever beam; coating, masking, etching |
| 05/20/1992 | EP0486270A1 Transesophageal ultrasonic scanhead |
| 05/06/1992 | EP0483579A2 Nanometer scale probe for an atomic force microscope, and method for making the same |
| 04/22/1992 | EP0481498A2 Information recording unit and apparatus and method for information recording/reproduction |
| 04/07/1992 | US5103471 Apparatus for measuring the thickness of a coating |
| 04/07/1992 | US5103095 Scanning probe microscope employing adjustable tilt and unitary head |
| 04/07/1992 | US5103094 Compact temperature-compensated tube-type scanning probe with large scan range |
| 03/31/1992 | CA1298416C High stability bimorph scanning tunneling microscope |
| 03/18/1992 | EP0475559A2 Cantilever for use in atomic force microscope and manufacture method therefor |
| 03/18/1992 | EP0475365A2 Tracking method for memory apparatus |
| 03/17/1992 | US5097127 Multiple detector system for specimen inspection using high energy backscatter electrons |
| 03/10/1992 | US5094975 Conductive crystals epitaxially grown in square holes |
| 03/04/1992 | EP0472938A2 Device for testing and repairing an integrated circuit |
| 02/26/1992 | EP0472342A2 Micro-displacement type information detection probe device and microscope and information processing device by use thereof |
| 02/19/1992 | EP0471511A2 Cantilever type probe and information processing device equipped with said probe |
| 02/17/1992 | CA2049197C Micro-displacement type information detection probe device and scanning tunneling microscope, atomic force microscope, information processing device by use thereof |
| 02/12/1992 | EP0470370A1 Information detection apparatus and method |
| 02/12/1992 | EP0470300A1 Electron beam apparatus with a monopole magnetic lens field |
| 02/05/1992 | EP0469879A2 Information recording device and information recording method |
| 02/05/1992 | EP0469565A2 Apparatus for reading and/or inputting information |
| 01/29/1992 | EP0468071A1 Method of producing micromechanical sensors for the AFM/STM/MFM profilometry and micromechanical AFM/STM/MFM sensor head |
| 12/10/1991 | US5072116 Microprobe preparation thereof and electronic device by use of said microprobe |
| 12/04/1991 | EP0459392A2 Method and apparatus for processing a minute portion of a specimen |
| 10/29/1991 | US5061850 High-repetition rate position sensitive atom probe |
| 10/23/1991 | EP0453263A1 Method of access to recording medium, and apparatus and method for processing information |
| 10/17/1991 | WO1991015752A1 Scanning tunneling microscope |
| 10/08/1991 | US5055680 Scanning tunneling microscope |
| 10/08/1991 | US5055679 Surface analysis method and apparatus |
| 10/01/1991 | US5053995 Tunnel current data storage apparatus having separate lever bodies |
| 09/24/1991 | US5051379 Coating an inorganic material on a wafer, masking for a beam pattern photoresists |
| 09/24/1991 | US5050610 Transesophageal ultrasonic scanhead |
| 09/18/1991 | EP0446742A2 Method and apparatus for manufacturing welded electrically-conductive microstructures on probe heads and use thereof |
| 09/11/1991 | EP0445825A2 Information recording method/apparatus and information reproducing method/apparatus |
| 09/10/1991 | US5047633 Imaging apparatus and method |
| 09/04/1991 | EP0444697A2 Atomic probe microscope and cantilever unit for use in the microscope |
| 08/27/1991 | US5043577 Distance-controlled tunneling transducer |
| 08/21/1991 | EP0442488A2 Improved process for rie etching silicon dioxide |
| 08/14/1991 | EP0441311A2 Surface microscope apparatus |
| 07/30/1991 | US5036490 Memory device with dual cantilever means |
| 07/17/1991 | EP0437275A2 Microprobe, method for producing the same, and information input and/or output apparatus utilizing the same |
| 07/17/1991 | EP0436982A2 Scanning tip for a scanning tunnelling apparatus |
| 07/16/1991 | US5032723 Charged particle energy analyzer |
| 06/25/1991 | US5026437 Cantilevered microtip manufacturing by ion implantation and etching |
| 06/04/1991 | US5021655 Apparatus and method for contactless measurement of coating thickness |
| 06/04/1991 | US5021364 Microcantilever with integral self-aligned sharp tetrahedral tip |
| 06/04/1991 | US5021121 Reactive ion etching by flowing an inert gas and trifluoromethane into an enclosure while controlling the power level of the plasma |
| 05/21/1991 | US5017266 Piezoelectric transducer |
| 04/23/1991 | US5010249 Diamond probe and forming method thereof |
| 04/10/1991 | EP0421355A2 Scanning tunneling microscope |
| 04/09/1991 | US5006795 Charged beam radiation apparatus |
| 04/02/1991 | US5004927 Process for forming a fine pattern having a high aspect ratio |
| 02/20/1991 | EP0413042A1 Method of producing micromechanical sensors for the AFM/STM profilometry and micromechanical AFM/STM sensor head |
| 02/20/1991 | EP0413041A1 Method of producing micromechanical sensors for the AFM/STM profilometry and micromechanical AFM/STM sensor head |
| 02/20/1991 | EP0413040A1 Method of producing ultrafine silicon tips for the AFM/STM profilometry |
| 02/12/1991 | US4992660 Scanning tunneling microscope |
| 01/16/1991 | EP0407460A1 An integrated mass storage device. |
| 01/15/1991 | US4985627 Spin-polarized scanning tunneling microscope |
| 01/02/1991 | EP0404799A1 Integrated scanning tunneling microscope. |
| 11/22/1990 | EP0397799A1 A piezoelectric motion transducer and an integrated scanning tunneling microscope using the same. |
| 11/14/1990 | EP0397073A2 Circuit pattern forming apparatus using mu-STM |
| 09/26/1990 | EP0388959A2 Charged particled energy analyzer |
| 09/24/1990 | CA2012879A1 Charged particled energy analyzer |
| 09/19/1990 | EP0388023A2 Atomic force microscope with optional replaceable fluid cell |
| 09/04/1990 | US4954711 Low-voltage source for narrow electron/ion beams |
| 08/22/1990 | EP0383323A1 Tunneling acoustic microscope |
| 08/08/1990 | EP0381113A2 Tunnel current data storage apparatus having separate lever bodies |
| 07/26/1990 | WO1990008397A1 Microminiature cantilever stylus |
| 07/24/1990 | US4943720 Electronic probe |
| 07/24/1990 | US4943719 Microminiature cantilever stylus |
| 07/11/1990 | EP0377446A2 Surface analysis method and apparatus |
| 06/19/1990 | US4935634 Atomic force microscope with optional replaceable fluid cell |
| 06/12/1990 | US4933565 Method and apparatus for correcting defects of X-ray mask |
| 05/15/1990 | US4926055 Field emission electron gun |
| 05/09/1990 | EP0366851A1 Low-voltage source for narrow electron/ion beams |
| 05/01/1990 | US4921346 Tunnel current detecting photo-acoustic spectrometer |
| 04/18/1990 | EP0363550A1 Distance-controlled tunneling transducer and direct access storage unit employing the transducer |
| 04/11/1990 | EP0363147A2 Recording and reproducing apparatus and recording and reproducing method and recording medium for the recording and reproducing method |
| 04/10/1990 | US4916002 Forming aperture in dielectric on silicon substrate; anisotropic etching |
| 04/03/1990 | US4914293 Microscope apparatus |
| 04/03/1990 | US4912822 Method of making an integrated scanning tunneling microscope |
| 03/06/1990 | US4906840 Integrated scanning tunneling microscope |
| 02/28/1990 | EP0355241A1 Spin-polarized scanning tunneling microscope |
| 02/07/1990 | EP0354020A2 Electronic probe |
| 01/16/1990 | US4894537 High stability bimorph scanning tunneling microscope |
| 12/12/1989 | US4886971 Ion beam irradiating apparatus including ion neutralizer |
| 11/28/1989 | US4883959 Scanning surface microscope using a micro-balance device for holding a probe-tip |
| 11/14/1989 | US4880975 Fine adjustment mechanism for a scanning tunneling microscope |