| Patents for G01Q 70 - General aspects of spm probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single spm technique covered by group (3,251) |
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| 10/17/1989 | US4874945 Electron microscope equipped with scanning tunneling microscope |
| 09/08/1989 | WO1989007259A3 Integrated scanning tunneling microscope |
| 09/08/1989 | WO1989007258A3 Integrated scanning tunneling microscope |
| 09/06/1989 | EP0331148A2 Microscope apparatus |
| 08/10/1989 | WO1989007259A2 Integrated scanning tunneling microscope |
| 08/10/1989 | WO1989007258A2 Integrated scanning tunneling microscope |
| 08/10/1989 | WO1989007256A1 An integrated mass storage device |
| 07/18/1989 | US4849629 Charged particle analyzer |
| 06/20/1989 | US4841143 Charged particle beam apparatus |
| 06/14/1989 | EP0320292A2 A process for forming a pattern |
| 04/18/1989 | CA1252918A1 Scanning tunneling microscope |
| 03/29/1989 | EP0309236A2 Microprobe, preparation thereof and electronic device by use of said microprobe |
| 03/01/1989 | EP0304893A2 Encoder |
| 02/21/1989 | US4806755 Micromechanical atomic force sensor head |
| 01/11/1989 | EP0298495A2 Method and apparatus for correcting defects of x-ray mask |
| 09/20/1988 | US4772817 Cathode mounting a high-frequency piezoelectric chip |
| 09/13/1988 | US4771178 Goniometer stage |
| 09/06/1988 | US4769763 Control for coordinate measuring instruments |
| 09/06/1988 | US4769542 Charged particle energy analyzer |
| 08/23/1988 | US4766551 Method of comparing spectra to identify similar materials |
| 08/23/1988 | US4766372 Electron beam tester |
| 05/25/1988 | EP0268232A2 Charged particle analyzer |
| 04/06/1988 | EP0262253A1 Micromechanical atomic force sensor head |
| 02/24/1988 | EP0256337A1 Low pressure chemical vapor deposition method fpr forming tungsten silicide |
| 12/09/1987 | EP0248233A2 Cathode mounting a high-frequency piezoelectric chip |
| 12/01/1987 | US4710625 Charged particle energy analyzer based upon isentropic containment |
| 08/04/1987 | US4684542 Low pressure chemical vapor deposition of tungsten silicide |
| 07/01/1987 | EP0226804A2 Goniometric stage |
| 05/27/1987 | EP0223520A1 Charged particle energy analyser |
| 05/26/1987 | US4668865 Scanning tunneling microscope |
| 02/25/1987 | EP0211202A1 Control device for coordinate measuring tools |
| 09/17/1986 | EP0194323A1 Scanning tunneling microscope |
| 10/02/1984 | US4475041 Aperture device for measuring thin films |
| 08/07/1984 | US4463763 Ultrasonic compound scanning diagnostic apparatus |
| 05/15/1984 | US4449048 Workpiece positioning system for beta ray measuring instruments |
| 04/03/1984 | US4441022 Coating thickness measuring device |
| 07/05/1983 | CA1149521A1 Electron applicator for a linear accelerator |
| 03/24/1982 | EP0048013A1 Ultrasonic diagnostic apparatus |
| 02/02/1982 | US4314158 Electron applicator for a linear accelerator |
| 12/29/1981 | US4308457 Device for the detection of back-scattered electrons from a sample in an electron microscope |
| 11/10/1981 | US4300045 Beam guidance for electron beam tests, and electron impact spectrometer having such beam guidance |
| 10/21/1981 | EP0037928A1 Electron applicator for a linear accelerator |
| 05/12/1981 | CA1101129A1 Point scattering detector |
| 02/10/1981 | CA1095637A1 Multiple crystal holder assembly for wavelength dispersive x-ray spectrometers |
| 07/09/1980 | EP0013003A1 Electron beam investigation process and electron impact spectrometer therefor |
| 12/18/1979 | US4179609 Point scattering detector |
| 10/09/1979 | US4170737 Top-entry transmission electron microscope |
| 07/31/1979 | US4163153 Ion beam means |
| 04/24/1979 | US4151418 Multiple crystal holder assembly for wavelength dispersive X-ray spectrometers |
| 11/28/1978 | CA1043474A1 Method of high current ion implantation |
| 02/28/1978 | US4076558 Method of high current ion implantation and charge reduction by simultaneous kerf implant |