| Patents for G01Q 70 - General aspects of spm probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single spm technique covered by group (3,251) |
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| 09/19/2000 | US6121611 Force sensing probe for scanning probe microscopy |
| 09/13/2000 | EP0721564B1 High precision scale and position sensor |
| 09/12/2000 | US6118121 Probe scanning mechanism for a scanning probe microscope |
| 08/17/2000 | WO2000048195A1 Nanocapsules containing charged particles, their uses and methods of forming the same |
| 08/15/2000 | US6104030 Optical probe having tapered wave guide and scanning near-field optical microscope utilizing optical probe |
| 08/10/2000 | WO2000046569A1 System and method of multi-dimensional force sensing for atomic force microscopy |
| 08/09/2000 | EP1025416A1 Method and apparatus for obtaining improved vertical metrology measurements |
| 08/08/2000 | US6100524 Torsion type probe and scanning probe microscope using the same |
| 08/01/2000 | US6094971 Scanning-probe microscope including non-optical means for detecting normal tip-sample interactions |
| 07/25/2000 | US6093930 Automatic probe replacement in a scanning probe microscope |
| 07/18/2000 | US6091248 Method for measuring the electrical potential in a semiconductor element |
| 07/18/2000 | US6091124 Micromechanical sensor for AFM/STM profilometry |
| 07/13/2000 | WO2000041213A1 Methods utilizing scanning probe microscope tips and products therefor or produced thereby |
| 07/11/2000 | US6088320 Micro-mechanically fabricated read/write head with a strengthening shell on the tip shaft |
| 07/11/2000 | US6087197 Aggregate of semiconductor micro-needles and method of manufacturing the same, and semiconductor apparatus and method of manufacturing the same |
| 07/11/2000 | US6086774 Method of making released micromachined structures by directional etching |
| 07/05/2000 | EP1016123A1 Atom probe |
| 06/28/2000 | EP1014457A2 Micro-fabrication method and sensor using the same |
| 06/28/2000 | EP1012867A1 Electron detectors |
| 06/28/2000 | EP1012584A2 Object inspection and/or modification system and method |
| 06/27/2000 | US6079255 Mechanically coupled alternatively usable cantilever structures for scanning a surface |
| 06/20/2000 | US6078044 Probe scanning apparatus |
| 06/14/2000 | CN1256788A Electron beam aperture element |
| 06/13/2000 | US6073484 Microfabricated torsional cantilevers for sensitive force detection |
| 06/08/2000 | WO2000033052A1 Electronic device surface signal control probe and method of manufacturing the probe |
| 06/06/2000 | US6072764 Information processing apparatus having face regulating system |
| 05/24/2000 | EP1003026A2 Scanning depletion microscopy for carrier profiling |
| 05/24/2000 | EP1002216A1 Microscope for compliance measurement |
| 05/18/2000 | WO2000028299A1 Optical cantilever and production method therefor |
| 05/17/2000 | EP1000425A2 Method for nano-structuring amorphous carbon layers |
| 05/16/2000 | US6064060 Near-field scanning optical microscope |
| 05/02/2000 | US6057547 Scanning probe microscope with scan correction |
| 05/02/2000 | US6057546 Kinematically mounted probe holder for scanning probe microscope |
| 04/26/2000 | EP0996117A1 Near field optical head and reproduction method |
| 04/18/2000 | US6051833 Probe scanning device |
| 04/11/2000 | US6049078 Transmitting tip for scanning tunneling microscopy system |
| 04/06/2000 | WO2000019494A1 Method for manufacturing carbon nanotubes as functional elements of mems devices |
| 04/04/2000 | US6046972 Method and producing probe with minute aperture, scanning near-field optical microscope using the probe and recording and/or reproducing apparatus using the probe |
| 04/04/2000 | US6046448 Scanning near field optical microscope based on the use of polarized light |
| 03/23/2000 | WO2000015544A1 Aperture in a semiconductor material, and the production and use thereof |
| 03/21/2000 | US6038916 Method and apparatus for measuring energy dissipation by a probe during operation of an atomic force microscope |
| 03/08/2000 | EP0984444A2 Probe and information recording/reproduction apparatus using the same |
| 03/07/2000 | US6033928 Etching a silicon substrate using said dotted mask so as to form a first number of semiconductor micro-needles |
| 03/02/2000 | WO1999006996B1 Method for nano-structuring amorphous carbon layers |
| 03/01/2000 | EP0981828A1 Electron beam aperture element |
| 03/01/2000 | EP0868648A4 Integrated silicon profilometer and afm head |
| 03/01/2000 | EP0847590A4 A scanning probe microscope having automatic probe exchange and alignment |
| 03/01/2000 | EP0839383A4 Tapered structure suitable for microthermocouples microelectrodes, field emission tips and micromagnetic sensors with force sensing capabilities |
| 02/24/2000 | WO2000009443A1 Carbon nanotube structures made using catalyst islands |
| 02/23/2000 | EP0981051A1 Optical probe for proximity field |
| 02/23/2000 | EP0980584A1 Electron-beam microcolumn as a general purpose scanning electron microscope |
| 02/23/2000 | CN1245540A Method for preparation of metal intercalated fullerene-like metal chalcogenides |
| 02/22/2000 | US6028305 Dual cantilever scanning probe microscope |
| 02/17/2000 | WO1999058925A3 Cantilever with whisker-grown probe and method for producing thereof |
| 02/16/2000 | EP0979414A1 Multi-probe test head |
| 02/15/2000 | CA2098040C Automatic tip approach method and apparatus for scanning probe microscope |
| 02/08/2000 | US6023060 T-shaped electron-beam microcolumn as a general purpose scanning electron microscope |
| 01/25/2000 | US6017618 Substrate coated with polymer whereby polymer molecule chains have been mechanically oriented into an pattern of parallel stacks representing written information such as a bar code; atomic scale resolution, high speed, room temperature |
| 01/25/2000 | US6017590 Used to insulate the tips with soft polymer coating material to ensure very low tip leakage current |
| 01/20/2000 | WO2000003267A1 Polarimeter |
| 01/18/2000 | CA2075855C Scanning microscope comprising force-sensing means |
| 01/11/2000 | US6013573 Method of manufacturing an air bridge type structure for supporting a micro-structure |
| 01/04/2000 | US6011261 Probe formed of mono-crystalline SI, the manufacturing method thereof, and an information processing device using the probe |
| 12/28/1999 | US6006594 Scanning probe microscope head with signal processing circuit |
| 12/21/1999 | US6005251 Voice coil scanner for use in scanning probe microscope |
| 12/14/1999 | US6002131 Scanning probe potentiometer |
| 12/14/1999 | US6000947 Method of fabricating transistor or other electronic device using scanning probe microscope |
| 12/14/1999 | US6000281 Method and apparatus for measuring critical dimensions on a semiconductor surface |
| 12/14/1999 | US6000280 Drive electrodes for microfabricated torsional cantilevers |
| 12/09/1999 | DE19825404A1 Needle probe for scanning probe microscope, having toughened carbon, metallic or organometallic coating |
| 11/30/1999 | US5994750 Microstructure and method of forming the same |
| 11/30/1999 | US5994698 Microprobe, preparation thereof and electronic device by use of said microprobe |
| 11/30/1999 | US5994160 Forming oxide film on walls of mold; vapor deposition of diamond particles; removal substrate |
| 11/25/1999 | WO1999060330A1 Force sensing probe for scanning probe microscopy |
| 11/23/1999 | US5990479 Organo Luminescent semiconductor nanocrystal probes for biological applications and process for making and using such probes |
| 11/23/1999 | US5990477 Apparatus for machining, recording, and reproducing, using scanning probe microscope |
| 11/18/1999 | WO1999059147A1 Near field optical head and reproduction method |
| 11/18/1999 | WO1999058925A2 Cantilever with whisker-grown probe and method for producing thereof |
| 11/16/1999 | US5986262 Probe array for a scanning probe microscope |
| 11/16/1999 | US5986261 Tapered structure suitable for microthermocouples microelectrodes, field emission tips and micromagnetic sensors with force sensing capabilities |
| 11/16/1999 | US5983712 Microscope for compliance measurement |
| 11/09/1999 | US5982009 Integrated device of cantilever and light source |
| 10/21/1999 | WO1999053321A1 Method for fixing a biological molecule on a support surface |
| 10/21/1999 | CA2328302A1 Method for fixing a biological molecule on a support surface |
| 10/19/1999 | US5969821 Optical waveguide probe and optical system and atomic force microscope using the optical waveguide probe |
| 10/19/1999 | US5969345 Micromachined probes for nanometer scale measurements and methods of making such probes |
| 10/19/1999 | US5966787 Piezoelectric actuator, |
| 10/13/1999 | EP0948671A1 Method for preparation of metal intercalated fullerene-like metal chalcogenides |
| 10/12/1999 | US5965218 Forming apertures where probe tips are to be; unbiased plasma chemical vapor deposition of a second material forms sharp probe tips in apertures, and a sacrificial layer that acts as shadow mask during deposition to give sharp profile |
| 09/28/1999 | US5960147 Probe, manufacturing method therefor and scanning probe microscope |
| 09/28/1999 | US5959957 Probe and a cantilever formed with same material |
| 09/14/1999 | US5953306 Micro needle probe apparatus having probes cantilevered over respective electronic circuits, moving medium memory device including same and method of making same |
| 09/14/1999 | US5952562 Scanning probe microscope incorporating an optical microscope |
| 09/10/1999 | WO1999045565A1 Electron-beam microcolumn as a general purpose scanning electron microscope |
| 09/10/1999 | CA2286804A1 Electron-beam microcolumn as a general purpose scanning electron microscope |
| 09/07/1999 | US5949070 For examining surface contours of a specimen |
| 09/07/1999 | US5948972 For sensing a sample |
| 08/25/1999 | EP0938012A1 Probe for near-field optical microscope, method for manufacturing the same and scanning near-field optical microscope |
| 08/24/1999 | US5943555 Micro mechanical component and production process thereof |
| 08/19/1999 | WO1999041741A1 Information recording apparatus |