| Patents for G01Q 70 - General aspects of spm probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single spm technique covered by group (3,251) |
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| 08/25/1998 | US5798529 Focused ion beam metrology |
| 08/13/1998 | DE19804017A1 Probe scanner for raster probe microscope |
| 08/11/1998 | CA2107048C Sample carriage for scanning probe microscope |
| 08/06/1998 | WO1998034092A2 Object inspection and/or modification system and method |
| 08/04/1998 | US5789666 Resonant sensor for determining multiple physical values |
| 07/29/1998 | EP0855045A1 High resolution fiber optic probe for near field optical microscopy |
| 07/22/1998 | EP0854350A1 Probe array for a scanning probe microscope |
| 07/16/1998 | DE19700747A1 Raster probe microscope for determining parameters of object in liquid |
| 07/15/1998 | EP0853251A2 Microprobe chip for detecting evanescent waves and method for making the same, probe provided with the microprobe chip and method for making the same, and evanescent wave detector, nearfield scanning optical microscope, and information regenerator provided with the microprobe chip |
| 07/14/1998 | US5780851 Detection probe for scanning tunneling microscope |
| 07/08/1998 | EP0728294B1 Mounting for a probe tip in a scanning force or scanning tunneling microscope |
| 06/23/1998 | US5770946 Photon assisted sub-tunneling electrical probe, probe tip, and probing method |
| 06/18/1998 | DE19651636A1 Vibration-free, or damped suspension for appts such as raster tunnel microscope |
| 06/17/1998 | EP0847590A1 A scanning probe microscope having automatic probe exchange and alignment |
| 06/17/1998 | EP0847309A2 Tips and substrates for scanning probe microscopy |
| 06/09/1998 | US5763879 Diamond probe tip |
| 06/04/1998 | WO1998023796A1 Method for preparation of metal intercalated fullerene-like metal chalcogenides |
| 05/19/1998 | US5753912 Cantilever chip |
| 05/19/1998 | US5753814 Magnetically-oscillated probe microscope for operation in liquids |
| 05/12/1998 | US5751685 Probe for memory device having movable media |
| 05/12/1998 | US5751684 Recording/reproducing apparatus and method for recording/reproducing information using probe |
| 05/12/1998 | US5751683 Nanometer scale data storage device and associated positioning system |
| 05/06/1998 | EP0839383A1 Tapered structure suitable for microthermocouples microelectrodes, field emission tips and micromagnetic sensors with force sensing capabilities |
| 05/06/1998 | EP0839311A1 Inter-atomic measurement technique |
| 04/29/1998 | EP0838658A1 Tunnel effect sensor, particularly for measuring the topography of a surface |
| 04/28/1998 | US5744799 Apparatus for and method of real-time nanometer-scale position measurement of the sensor of a scanning tunneling microscope or other sensor scanning atomic or other undulating surfaces |
| 04/14/1998 | US5739527 Near-field optical microscope for angle resolved measurements |
| 04/14/1998 | US5739425 Cantilever with integrated deflection sensor |
| 04/02/1998 | WO1998013663A1 Atomic force microscope probe |
| 04/01/1998 | EP0833125A2 Scanning probe microscope with hollow pivot assembly |
| 03/26/1998 | DE19638977A1 Kraftmikroskopiesonde Force microscopy probe |
| 03/24/1998 | US5730940 Detection dna base arrangement |
| 03/17/1998 | US5729074 Micro mechanical component and production process thereof |
| 03/17/1998 | US5729026 For scanning the surface of a sample |
| 03/17/1998 | US5729015 Position control system for scanning probe microscope |
| 03/04/1998 | EP0826145A1 Data acquisition and control apparatus for scanning probe systems |
| 02/24/1998 | US5721721 Two scanning probes information recording/reproducing system with one probe to detect atomic reference location on a recording medium |
| 02/12/1998 | WO1998005920A1 Macroscopically manipulable nanoscale devices made from nanotube assemblies |
| 02/10/1998 | US5717205 Method and apparatus for measuring mass distribution of a shaft |
| 02/10/1998 | US5717132 Cantilever and process for fabricating it |
| 02/03/1998 | US5715054 Scanning force microscope with detector probe for the atomic resolution of a surface structure |
| 02/03/1998 | US5714756 Scanning probe microscope having a single viewing device for on-axis and oblique angle views |
| 02/03/1998 | CA2070948C Information reproduction by high density scanning |
| 02/03/1998 | CA2069452C Information recording/reproduction apparatus and method for recording and/or reproducing information onto and/or from recording medium using probe electrodes |
| 01/28/1998 | EP0699341B1 Particle-optical instrument comprising a deflection unit for secondary electrons |
| 01/20/1998 | US5710051 Method for manufacturing a single electron transistor by using a scanning tunneling microscopy |
| 01/14/1998 | EP0818052A1 Combined scanning probe and scanning energy microscope |
| 01/06/1998 | US5705814 Scanning probe microscope having automatic probe exchange and alignment |
| 12/23/1997 | US5701381 Mounting arrangement for a probe tip of a scanning force or tunneling microscope |
| 12/18/1997 | DE19646120A1 Micromechanical sensor for atomic force or scanning tunnelling microscope |
| 12/16/1997 | US5698071 Etching aftertreatment under vacuum |
| 12/02/1997 | CA2074914C Information processing apparatus, and electrode substrate and information recording medium used in the apparatus |
| 11/27/1997 | WO1997044631A1 Inter-atomic measurement technique |
| 11/27/1997 | DE19636582C1 Sensor for measuring ion concentrations |
| 11/25/1997 | CA2059990C Moving apparatus, a moving method and an information detection and/or input apparatus using the same |
| 11/19/1997 | EP0807799A1 Probe Scanning Apparatus |
| 11/12/1997 | EP0805946A1 Apparatus for microindentation hardness testing and surface imaging incorporating a multi-plate capacitor system |
| 10/29/1997 | EP0803702A2 Micro needle probe apparatus |
| 10/22/1997 | EP0786099A4 Fiber optic probe for near field optical microscopy |
| 10/21/1997 | US5679952 Scanning probe microscope |
| 10/21/1997 | US5679888 Dynamic quantity sensor and method for producing the same, distortion resistance element and method for producing the same, and angular velocity sensor |
| 10/15/1997 | EP0801318A2 Probe, manufacturing method therefore and scanning probe microscope |
| 10/14/1997 | US5677978 Bent probe microscopy |
| 10/14/1997 | CA2069708C Probe-driving mechanism, production thereof, and apparatus and piezoelectric actuator employing the same |
| 10/09/1997 | CA2200992A1 Probe, manufacturing method therefor and scanning probe microscope |
| 10/08/1997 | EP0800081A1 Method of performing fine working |
| 09/30/1997 | US5672816 Large stage system for scanning probe microscopes and other instruments |
| 09/30/1997 | CA2048968C Cantilever type probe, scanning tunneling microscopy and information processing device equipped with said probe |
| 09/24/1997 | EP0797117A1 Optical waveguide probe and optical system |
| 09/18/1997 | WO1997034122A1 Cantilever structures |
| 09/09/1997 | US5665253 Method of manufacturing single-wafer tunneling sensor |
| 09/02/1997 | US5664036 High resolution fiber optic probe for near field optical microscopy and method of making same |
| 08/27/1997 | EP0791803A2 Cantilever unit and atomic force microscope, magnetic force microscope, reproducing apparatus and information processing apparatus using the cantilever unit |
| 08/26/1997 | CA2048194C Apparatus for reading and/or inputting information |
| 08/20/1997 | EP0790482A1 A dual stage instrument for scanning a specimen |
| 08/19/1997 | US5658710 Surface treatment by diffusing a gas to nitrogenation and carbonization with silicon substrate |
| 08/19/1997 | CA2057619C Cantilever probe and apparatus using the same |
| 07/30/1997 | EP0786642A1 Method of manufacturing micro-tip for detecting tunneling current or micro-force or magnetic force, female mold substrate for manufacture thereof, method of manufacturing probe with micro-tip, probe unit, scanning probe microscope and information recording/reproduction apparatus having said probe |
| 07/30/1997 | EP0786099A1 Fiber optic probe for near field optical microscopy |
| 07/23/1997 | EP0785410A2 Probe, method of manifacturing the probe, probe unit, and information recording/reproducing apparatus using the probe unit |
| 07/15/1997 | US5648300 Method of manufacturing cantilever drive mechanism and probe drive mechanism |
| 07/08/1997 | US5646339 Force microscope and method for measuring atomic forces in multiple directions |
| 06/24/1997 | US5641896 Coupled oscillator scanning imager |
| 06/19/1997 | WO1997021977A1 Integrated silicon profilometer and afm head |
| 06/03/1997 | CA2040703C Method of access to recording medium, and apparatus and method for processing information |
| 05/22/1997 | WO1997018451A1 Triboluminescent damage sensors |
| 05/20/1997 | USRE35514 Scanning force microscope having aligning and adjusting means |
| 05/20/1997 | US5631463 Cantilever detector having piezoelectric film of zinc oxide or aluminum nitride and platinum or palladium electrodes with controlled crystal orientation, for scanning tunneling microscopes |
| 05/20/1997 | US5630932 Sodium hydroxide etching by immersion in solutions |
| 05/06/1997 | US5627815 Precision machining method precision machining apparatus and data storage apparatus using the same |
| 05/02/1997 | EP0619872B1 Piezoresistive cantilever for atomic force microscopy |
| 04/17/1997 | WO1997014067A1 High resolution fiber optic probe for near field optical microscopy |
| 04/08/1997 | US5618760 Method of etching a pattern on a substrate using a scanning probe microscope |
| 04/03/1997 | WO1997004283A3 Microfabricated torsional cantilevers for sensitive force detection |
| 04/02/1997 | EP0766060A1 Micromechanical part having at least one tip consisting of diamond, and manufacturing method for such parts. |
| 03/27/1997 | WO1997010901A1 Tips and substrates for scanning probe microscopy |
| 03/25/1997 | US5614663 Cantilever for use with atomic force microscope and process for the production thereof |
| 03/19/1997 | EP0763844A1 Method of manufacturing micro-tip and female mold substrate therefor, and method of manufacturing probe with micro-tip |
| 03/19/1997 | CN1145487A Probe apparatus having reduced misalignment of conductive needles |
| 03/18/1997 | US5611942 Method for producing tips for atomic force microscopes |