Patents
Patents for G01Q 30 - Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices (4,691)
02/1987
02/10/1987US4642518 Installation of electron beam metalworking
02/03/1987US4640626 Method and apparatus for localizing weak points within an electrical circuit
01/1987
01/21/1987EP0209432A1 Electron beam tester for integrated circuits
12/1986
12/30/1986EP0205760A1 Noncontact testing of integrated circuits
12/17/1986EP0205185A2 Objective with spectrometer in the electron beam measuring technique
12/17/1986EP0205184A2 Low aberration spectrometer objective with a high secondary electrons acceptance
12/09/1986US4628258 Method and apparatus for electrical testing of microwired structures with the assistance of particle probes
12/02/1986US4626689 Electron beam focusing system for electron microscope
11/1986
11/26/1986EP0202937A2 Surface analysis spectroscopy apparatus
11/25/1986US4624835 Microcentrifugation tube for the concentration of samples for electron microscopy
11/20/1986EP0201692A1 Method and device making use of it for the processing of a measured voltage with a band-limited processing circuit
10/1986
10/29/1986EP0199585A2 Apparatus for depositing electrically conductive and/or electrically insulating material on a workpiece
10/29/1986EP0199573A2 Electronic mosaic imaging process
10/08/1986EP0196804A1 Method and apparatus for testing integrated electronic device
09/1986
09/17/1986EP0194323A1 Scanning tunneling microscope
09/02/1986US4609867 Method for measuring electrical potentials at buried solid state matter
08/1986
08/20/1986EP0191293A2 Back-scatter electrons detector
08/14/1986WO1986004732A1 Secondary ion collection and transport system for ion microprobe
08/12/1986US4605194 High-performance vibration filter
07/1986
07/30/1986EP0189137A2 Ultrasonic flaw detecting system
07/30/1986EP0188961A1 Apparatus for the very high resolution microanalysis of a solid sample
07/29/1986CA1208763A1 Scan line type dynamic observation apparatus
06/1986
06/18/1986EP0184810A2 Method of detecting a focus defect of an electron microscope image
05/1986
05/28/1986EP0182341A2 Method for recording and reproducing electron beam image information
05/06/1986US4587458 Controlling current density
05/06/1986US4587425 Electron beam apparatus and electron collectors therefor
04/1986
04/30/1986EP0179716A2 A secondary ion mass spectrometer
04/23/1986EP0178431A1 Counterfield spectrometer for electron beam measurement
04/16/1986EP0177973A2 Method of recording and reproducing images produced by an electron microscope
04/16/1986EP0177722A1 Method and arrangement for determining the weak points within an electrical integrated circuit
04/02/1986EP0175807A1 Apparatus for the sputtered neutral mass spectrometry
02/1986
02/26/1986EP0172470A1 Method and device for the detection and mapping of measuring points corresponding to a signal of a specific shape
01/1986
01/28/1986US4567369 Correction of astigmatism in electron beam instruments
01/22/1986EP0168838A2 Method and apparatus for recording and reproducing electron microscope image
01/14/1986US4564758 Process and device for the ionic analysis of an insulating sample
01/08/1986EP0166912A1 Method for electrically testing microwirings using particle probes
01/08/1986EP0166814A1 Method and device for detecting and displaying a measuring point which carries a voltage of at least one certain frequency
12/1985
12/31/1985US4562352 Analyzing apparatus capable of analyzing a surface at a high resolution
12/03/1985US4556794 Secondary ion collection and transport system for ion microprobe
11/1985
11/19/1985US4554455 Potential analyzer
10/1985
10/23/1985EP0159214A1 Electron beam installation for the working of metals
10/08/1985US4546254 Charged particle energy analyzer
09/1985
09/26/1985WO1985004250A1 Method and apparatus for precision sem measurements
09/25/1985EP0155700A2 Apparatus for quantitative secondary ion mass spectrometry
06/1985
06/25/1985US4525652 Auxiliary-voltage source for supplying electric circuits which are at a high potential
04/1985
04/30/1985US4514682 Secondary electron spectrometer for measuring voltages on a sample utilizing an electron probe
04/30/1985US4514634 Electron beam focussing
04/09/1985US4510387 Ion micro-analysis
04/09/1985US4510386 Thinning of specimens for examination under the electron microscope
04/02/1985US4508967 Electronic optical apparatus comprising pyrolytic graphite elements
03/1985
03/05/1985US4503329 Ion beam processing apparatus and method of correcting mask defects
10/1984
10/23/1984US4479060 Apparatus for irradiation with charged particle beams
10/10/1984EP0121309A2 Scan line type dynamic observation apparatus
10/02/1984US4475044 Apparatus for focus-deflecting a charged particle beam
09/1984
09/11/1984US4471302 Method for representing logical status changes of a plurality of adjacent circuit nodes in an integrated circuit in a logic image employing a pulsed electron probe
08/1984
08/14/1984US4465935 Electrically conductive sample support-mounting for secondary ion mass spectrometer analysis
08/07/1984US4464571 Opposing field spectrometer for electron beam mensuration technology
08/07/1984US4463763 Ultrasonic compound scanning diagnostic apparatus
07/1984
07/24/1984CA1171366A1 Phase separation of hydrocarbon liquids using liquid vortex
07/17/1984US4460866 Method for measuring resistances and capacitances of electronic components
05/1984
05/09/1984EP0107772A1 Method of measuring the electric potential on a buried solid-state substance
05/08/1984US4447731 Exterior view examination apparatus
05/08/1984US4447724 Apparatus for the chemical analysis of samples
05/08/1984US4447374 Preparing replica film of specimen for electron microscopy
04/1984
04/10/1984US4442354 Method of analyzing for a component in a sample
04/03/1984US4440475 Electron probe microanalyzer comprising an observation system having double magnification
03/1984
03/20/1984US4438336 Corpuscular radiation device for producing an irradiation pattern on a workpiece
03/13/1984US4437009 Scanning electron microscope or similar equipment
02/1984
02/22/1984EP0100785A1 High-performance vibration filter
02/02/1984WO1984000443A1 Electron beam apparatus and electron collectors therefor
01/1984
01/24/1984US4427891 Variable temperature stage device for electron microscope
11/1983
11/22/1983US4417203 System for contactless electrical property testing of multi-layer ceramics
11/08/1983US4414474 Corrector for axial aberrations in electron optic instruments
10/1983
10/18/1983US4410272 Optical spectroscope for scanning electron microscope
09/1983
09/20/1983US4405861 Secondary-electron detector for analyzing irradiated samples for scanning electron microscopes and microprobes
08/1983
08/17/1983EP0086120A1 Electron-optical apparatus comprising pyrolytic graphite elements
08/04/1983WO1983002572A1 Sputter initiated resonance ionization spectrometry
08/03/1983EP0084850A2 Apparatus for irradiation with charged particle beams
07/1983
07/26/1983US4395731 Television microscope surgical method and apparatus therefor
07/12/1983US4393311 Method and apparatus for surface characterization and process control utilizing radiation from desorbed particles
07/12/1983US4393309 Method and apparatus for controlling the objective lens in a scanning electron microscope or the like
07/05/1983US4392058 Electron beam lithography
06/1983
06/07/1983US4387304 Phase dependent SEM IC chip testing with voltage contrast
05/1983
05/24/1983US4385317 Specimen image display apparatus
05/10/1983US4383172 Method and apparatus for measuring coating thicknesses on continuously moving material
04/1983
04/06/1983EP0075949A2 Ion beam processing apparatus and method of correcting mask defects
04/06/1983EP0075716A1 Opposing field spectrometer for electron beam measuring
04/06/1983EP0075709A2 Spectrometer for detecting secondary electrons produced by an electron probe from a target
03/1983
03/22/1983CA1143333A1 Corona discharge device
01/1983
01/26/1983EP0070351A2 Conductive sample holder for analysis in the secondary ion mass spectrometry
12/1982
12/08/1982EP0066070A1 Method and apparatus for contactless electrical testing
11/1982
11/09/1982US4358732 Synchronized voltage contrast display analysis system
10/1982
10/19/1982US4354852 Phase separation of hydrocarbon liquids using liquid vortex
10/13/1982EP0062097A1 Method of displaying the logic status of several neighbouring modes in integrated circuits in a logic picture by using a pulsed-electron probe
08/1982
08/10/1982US4343993 Scanning tunneling microscope
06/1982
06/15/1982US4335189 Resolution standard for scanning electron microscope comprising palladium spines on a metal substrate
06/15/1982US4334844 Replica film of specimen for electron microscopy apparatus
04/1982
04/07/1982EP0048862A1 Method of measuring resistances and capacities of electronic components
03/1982
03/24/1982EP0048013A1 Ultrasonic diagnostic apparatus
03/16/1982US4320298 Warhead detector
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