| Patents for G01Q 20 - Monitoring the movement or position of the probe (1,663) |
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| 04/21/2004 | EP1411341A1 Cantilever array, method of manufacturing the array, and scanning probe microscope, sliding device of guide and rotating mechanism, sensor, homodyne laser interferometer, and laser doppler interferometer with specimen light excitation function, using the array, and cantilever |
| 04/21/2004 | CN1146724C Small light spot detector for CD driver objective |
| 04/13/2004 | US6718821 Laser interferometry force-feedback sensor for an interfacial force microscope |
| 04/08/2004 | US20040065827 Method for the electron-microscopic observation of a semiconductor arrangement and apparatus therefor |
| 04/08/2004 | US20040065825 Pattern width measuring apparatus, pattern width measuring method, and electron beam exposure apparatus |
| 04/08/2004 | US20040065821 Intermittent contact imaging under force-feedback control |
| 04/08/2004 | US20040065819 Scanning unit and scanning microscope having the same |
| 04/06/2004 | US6717142 Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same |
| 04/01/2004 | US20040061066 Magnetic field applying sample observing system |
| 03/30/2004 | US6713743 Fabry-perot resonator and system for measuring and calibrating displacement of a cantilever tip using the same in atomic force microscope |
| 03/25/2004 | WO2003009305A3 Measurement head for atomic force microscopy and other applications |
| 03/23/2004 | US6710339 Scanning probe microscope |
| 03/23/2004 | US6708556 Atomic force microscope and driving method therefor |
| 03/18/2004 | WO2003106918A3 Device for measuring surfaces and method for the mechanical and contactless-optical analysis of object surfaces |
| 03/18/2004 | US20040052687 Apparatus for parallel detection of the behaviour of mechanical micro-oscillators |
| 03/17/2004 | EP1398818A2 Charged particle beam apparatus and irradiation method |
| 03/09/2004 | US6703626 Defect observed with the atomic force microscope (afm) and a pattern putting together the shape and position of the defect is extracted from and afm image. the extracted pattern is then converted to a shape format for a for an ion beam defect |
| 03/09/2004 | US6703614 Method for determining the distance of a near-field probe from a specimen surface to be examined, and near-field microscope |
| 03/09/2004 | US6702186 Assembly comprising a plurality of media probes for writing/reading high density magnetic data |
| 03/04/2004 | US20040040930 Method for determining etching process conditions and controlling etching process |
| 02/26/2004 | WO2004017355A1 Multi-column multi-beam inspection system |
| 02/26/2004 | WO2004017329A1 Sensor with cantilever and optical resonator |
| 02/18/2004 | EP1389797A2 Particle-optical apparatus, electron microscopy system and electron lithography system |
| 02/12/2004 | WO2003028038A3 Method and device for analysing a sample by means of a raster scanning probe microscope |
| 02/12/2004 | WO2003028037A3 Device and method for scanning probe microscope |
| 02/05/2004 | WO2004012201A2 Method of and apparatus for calibrating cantilevers |
| 02/04/2004 | CN1473330A AFM-based data storage and micrascopy |
| 01/29/2004 | US20040016882 Scanning electron microscope |
| 01/29/2004 | DE10230929A1 Verfahren zum elektronenmikroskopischen Beobachten einer Halbleiteranordnung und Vorrichtung hierfür A method for electron microscopic observation of a semiconductor device and apparatus therefor |
| 01/14/2004 | EP1381074A2 Method and apparatus for observing a semiconductor device using an electron microscope |
| 01/13/2004 | US6677587 Electron beam apparatus, and inspection instrument and inspection process thereof |
| 01/13/2004 | US6677584 Optically detecting defects in manufactured components during the manufacturing process by the incorporation of a fluorescent dye into a manufacturing fluid. |
| 01/13/2004 | US6677567 Scanning probe microscope with improved scan accuracy, scan speed, and optical vision |
| 01/08/2004 | US20040004182 Sample for simultaneously conducting electro-chemical and topographic near-field microscopy |
| 01/08/2004 | DE10226801A1 Oberflächenmessvorrichtung und Verfahren zur mechanischen sowie berührungslosen-optischen Untersuchung von Objektoberflächen Surface measuring apparatus and methods for mechanical and non-contact optical investigation of object surfaces |
| 01/07/2004 | EP1377794A1 Improved scanning probe microscope |
| 01/06/2004 | US6674074 Enhanced scanning probe microscope |
| 01/06/2004 | US6674057 Optical near-field microscope |
| 01/06/2004 | US6672144 Dynamic activation for an atomic force microscope and method of use thereof |
| 01/02/2004 | EP1376649A1 Magnetic field applying sample observing system |
| 12/30/2003 | US6671398 Method and apparatus for inspection of patterned semiconductor wafers |
| 12/30/2003 | US6668628 Scanning probe system with spring probe |
| 12/30/2003 | US6668627 Sensor apparatus with magnetically deflected cantilever |
| 12/25/2003 | US20030233870 Multidimensional sensing system for atomic force microscopy |
| 12/24/2003 | WO2003106918A2 Device for measuring surfaces and method for the mechanical and contactless-optical analysis of object surfaces |
| 12/23/2003 | US6667467 Microprobe and scanning probe apparatus having microprobe |
| 12/16/2003 | US6664552 Method and apparatus for specimen fabrication |
| 12/16/2003 | US6664540 Microprobe and sample surface measuring apparatus |
| 12/11/2003 | US20030226955 Fabry-perot resonator and system for measuring and calibrating displacement of a cantilever tip using the same in atomic force microscope |
| 11/20/2003 | WO2003019241A3 Diffractive optical position detector |
| 11/18/2003 | US6649919 Real time monitoring simultaneous imaging and exposure in charged particle beam systems |
| 11/18/2003 | US6649902 Summing the output of an array of optical detector segments in an atomic force microscope |
| 11/18/2003 | US6647766 For thermomechanical writing and thermal readout of binary information in a storage media |
| 11/13/2003 | US20030209060 Apparatus and method for isolating and measuring movement in metrology apparatus |
| 11/04/2003 | US6642517 Method and apparatus for atomic force microscopy |
| 10/28/2003 | US6639686 Method of and apparatus for real-time continual nanometer scale position measurement by beam probing as by laser beams and the like of atomic and other undulating surfaces such as gratings or the like relatively moving with respect to the probing beams |
| 10/09/2003 | WO2003019238A3 Multiple plate tip or sample scanning reconfigurable scanned probe microscope with transparent interfacing of far-field optical microscopes |
| 10/08/2003 | EP1351256A2 Scanning probe system with spring probe |
| 10/02/2003 | US20030183776 Method and apparatus for specimen fabrication |
| 10/02/2003 | US20030183761 Scanning probe system with spring probe and actuation/sensing structure |
| 10/02/2003 | US20030182993 Scanning probe system with spring probe |
| 10/01/2003 | CN2577274Y Observation device of scanning probe microscope |
| 09/30/2003 | US6627888 Scanning electron microscope |
| 09/16/2003 | US6621082 Automatic focusing system for scanning electron microscope equipped with laser defect detection function |
| 09/16/2003 | US6621080 Apparatus for measuring a micro surface configuration and a method for manufacturing a probe incorporated in this measuring apparatus |
| 09/16/2003 | US6621065 Imaging probe |
| 09/10/2003 | EP1342049A1 Scanning probe with digitised pulsed-force mode operation and real-time evaluation |
| 09/09/2003 | US6617761 Scanning unit and scanning microscope having the same |
| 09/09/2003 | US6617569 Probe opening forming apparatus and near-field optical microscope using the same |
| 09/04/2003 | US20030164460 Patterned wafer inspection method and apparatus therefor |
| 09/02/2003 | US6614227 Scanning microwave microscope capable of realizing high resolution and microwave resonator |
| 09/02/2003 | US6613601 Ultrananocrystalline diamond cantilever wide dynamic range acceleration/vibration/pressure sensor |
| 09/02/2003 | US6613593 Method of fabricating a semiconductor device |
| 08/28/2003 | US20030160170 Methods and apparatus for atomic force microscopy |
| 08/26/2003 | US6611178 Nanometer-order mechanical vibrator, production method thereof and measuring device using it |
| 08/26/2003 | US6611140 Magnetic sensing unit for detecting nanometer scale displacements or flections |
| 08/21/2003 | WO2003069271A1 Improved scanning probe microscope |
| 08/21/2003 | US20030155481 Scanning probe microscope |
| 08/14/2003 | WO2003067224A1 Scanning probe microscope and specimen surface structure measuring method |
| 08/13/2003 | EP0839312B1 Tapping atomic force microscope with phase or frequency detection |
| 08/06/2003 | EP1332510A1 Real time monitoring for simultaneous imaging and exposure in charged particle beam systems |
| 08/05/2003 | US6603239 Micromanipulator with piezoelectric movement elements |
| 07/31/2003 | US20030141444 Near-field optical probe |
| 07/30/2003 | EP1330823A1 Afm-based data storage and microscopy |
| 07/24/2003 | US20030137216 Resonant probe driving arrangement and a scanning probe microscope including such an arrangement |
| 07/22/2003 | US6596992 Method of operating scanning probe microscope |
| 07/16/2003 | EP1327137A1 Microcantilever rheometer |
| 07/15/2003 | US6593571 Scanning probe microscope |
| 07/10/2003 | US20030127601 Method and apparatus for determining two dimensional doping profiles with SIMS |
| 07/08/2003 | US6590703 Optical system for scanning microscope |
| 06/26/2003 | US20030116710 Method for increasing the measurement information available from a transmission electron microscope and a transmission electron microscopy device |
| 06/26/2003 | US20030115939 Scanning probe microscope |
| 06/19/2003 | US20030111619 Electron beam exposure apparatus and exposing method using an electron beam |
| 06/17/2003 | US6578410 Resistive cantilever spring for probe microscopy |
| 06/11/2003 | EP1015843B1 Lever arm for a scanning microscope |
| 06/03/2003 | US6573508 Electron beam exposing method |
| 05/22/2003 | WO2003043051A1 Measurement device for electron microscope |
| 05/22/2003 | US20030094036 Active probe for an atomic force microscope and method of use thereof |
| 05/20/2003 | US6566653 Investigation device and method |
| 05/20/2003 | US6565720 Determination dielectric end-point |