| Patents for G01Q 20 - Monitoring the movement or position of the probe (1,663) |
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| 07/25/1995 | US5436448 Surface observing apparatus and method |
| 07/06/1995 | WO1995018352A1 Scanning force microscopy process and scanning force microscope with detector probe |
| 06/20/1995 | US5426302 Optically guided macroscopic-scan-range/nanometer resolution probing system |
| 06/13/1995 | US5423514 Alignment assembly for aligning a spring element with a laser beam in a probe microscope |
| 05/18/1995 | WO1995013518A1 Mounting for a probe tip in a scanning force or scanning tunneling microscope |
| 05/16/1995 | US5416327 Ultrafast scanning probe microscopy |
| 05/16/1995 | US5415027 Method of operating an atomic force microscope |
| 05/09/1995 | US5414690 Moving apparatus, a moving method and an information detection and/or input apparatus using the same |
| 05/09/1995 | US5412980 Tapping atomic force microscope |
| 04/20/1995 | DE4437081A1 Device and method for adhesion measurement and method for producing semiconductor devices |
| 04/18/1995 | US5408094 Atomic force microscope with light beam emission at predetermined angle |
| 04/05/1995 | EP0646913A2 Encoder using the tunnel current effect |
| 04/05/1995 | EP0646787A1 Cantilever for use with atomic force microscope and process for the production thereof |
| 04/04/1995 | US5404349 Position displacement detecting apparatus |
| 03/28/1995 | US5400647 Methods of operating atomic force microscopes to measure friction |
| 03/09/1995 | DE4338688C1 Holder for a sampling tip of a scanning probe microscope |
| 03/07/1995 | US5394741 Atomic probe microscope |
| 03/02/1995 | WO1995006138A1 Microscopic method for detecting micromotions |
| 03/01/1995 | EP0407460B1 An integrated mass storage device |
| 02/16/1995 | WO1995005000A1 Probe microscopy |
| 02/14/1995 | US5388452 Detection system for atomic force microscopes |
| 02/07/1995 | US5386720 Integrated AFM sensor |
| 02/01/1995 | EP0439534B1 Photon scanning tunneling microscopy |
| 01/11/1995 | EP0633450A2 Method for detecting and examining slightly irregular surface states, and scanning probe microscope therefor |
| 12/27/1994 | US5376790 Scanning probe microscope |
| 12/22/1994 | WO1994029894A1 Piezoresistive cantilever with integral tip |
| 11/10/1994 | WO1994025888A1 Optically guided macroscopic-scan-range/nanometer resolution probing system |
| 11/01/1994 | US5360977 Compound type microscope |
| 10/19/1994 | EP0619872A1 Piezoresistive cantilever for atomic force microscopy. |
| 10/18/1994 | US5357105 Light modulated detection system for atomic force microscopes |
| 10/11/1994 | US5354985 Near field scanning optical and force microscope including cantilever and optical waveguide |
| 10/05/1994 | EP0618425A1 Sensor head and method for its manufacture |
| 09/21/1994 | EP0616192A1 Scanning probe microscope and method for measuring surfaces by using this microscope |
| 09/20/1994 | US5347854 Method of two dimensional profiling of a sample surface |
| 09/13/1994 | US5345816 Integrated tip strain sensor for use in combination with a single axis atomic force microscope |
| 09/13/1994 | US5345815 Atomic force microscope having cantilever with piezoresistive deflection sensor |
| 09/07/1994 | EP0404799B1 Integrated scanning tunneling microscope |
| 08/31/1994 | EP0397799B1 A piezoelectric motion transducer and an integrated scanning tunneling microscope using the same |
| 08/30/1994 | USRE34708 Scanning ion conductance microscope |
| 08/03/1994 | EP0608655A1 Integrated tip strain sensor for use in combination with a single axis atomic force microscope |
| 07/19/1994 | US5329808 Atomic force microscope |
| 07/05/1994 | EP0619872A4 Piezoresistive cantilever for atomic force microscopy. |
| 06/28/1994 | US5324935 Scanning probe microscope having a directional coupler and a Z-direction distance adjusting piezoelectric element |
| 06/28/1994 | CA1330452C Oscillating quartz atomic force microscope |
| 06/21/1994 | US5321977 Integrated tip strain sensor for use in combination with a single axis atomic force microscope |
| 06/14/1994 | US5319977 Near field acoustic ultrasonic microscope system and method |
| 06/14/1994 | US5319960 For examining surface contours of a specimen |
| 05/31/1994 | US5317533 Integrated mass storage device |
| 05/31/1994 | US5317153 Scanning probe microscope |
| 05/24/1994 | US5315373 Method of measuring a minute displacement |
| 05/17/1994 | US5313451 Information recording/reproducing apparatus with STM cantilever probe having a strain gauge |
| 05/11/1994 | EP0596494A2 Scanning probe microscope and method of control error correction |
| 04/19/1994 | US5304795 High resolution observation apparatus with photon scanning microscope |
| 04/13/1994 | EP0591595A1 Molecular recording/reproducing method and recording medium |
| 04/07/1994 | DE4233399A1 Force microscope with cantilevered point and deflection photodetector - is based on measurement of astigmatism in compact sensor head revolvable into path of optical microscope |
| 04/05/1994 | USRE34575 Electrostatic ion accelerator |
| 03/30/1994 | EP0589815A2 Two dimensional profiling with a contact force atomic force microscope |
| 03/29/1994 | US5299184 Information processing apparatus with held distance control on track edge detection |
| 03/29/1994 | US5298975 Combined scanning force microscope and optical metrology tool |
| 03/22/1994 | US5296704 For investigating a surface of a sample |
| 03/16/1994 | EP0587459A1 An ultra-low force atomic force microscope |
| 03/15/1994 | US5294804 Cantilever displacement detection apparatus |
| 03/08/1994 | US5291775 Scanning force microscope with integrated optics and cantilever mount |
| 03/02/1994 | EP0584233A1 Methods of fabricating integrated, aligned tunneling tip pairs |
| 02/22/1994 | US5289004 Scanning probe microscope having cantilever and detecting sample characteristics by means of reflected sample examination light |
| 02/15/1994 | US5286977 Positioning device |
| 01/18/1994 | US5280341 Feedback controlled differential fiber interferometer |
| 01/18/1994 | US5280176 X-ray photoelectron emission spectrometry system |
| 01/11/1994 | US5278406 Apparatus for detecting information contained in electrons emitted from sample surface |
| 01/04/1994 | US5276672 Micro-displacement type information detection probe device and scanning tunneling microscope, atomic force microscope, information processing device by use thereof |
| 12/28/1993 | US5274230 Scanning probe microscope having first and second optical waveguides |
| 12/07/1993 | US5268571 Micro-displacement element, and scanning tunneling microscope and information processing apparatus using same |
| 12/07/1993 | US5267471 Double cantilever sensor for atomic force microscope |
| 11/30/1993 | US5266801 Atomic force microscope for measuring a physical property of a sample |
| 11/24/1993 | EP0570726A1 Opto-mechanical automatic focusing system and method |
| 11/23/1993 | US5264794 Method of measuring magnetic fields on magnetically recorded media using a scanning tunneling microscope and magnetic probe |
| 11/16/1993 | US5262642 Scanning tunneling optical spectrometer |
| 11/09/1993 | US5260926 Atomic force microscope with a plurality of cantilevers for recording/reproducing information |
| 11/09/1993 | US5260824 Atomic force microscope |
| 11/09/1993 | US5260567 Cantilever unit and atomic force microscope, magnetic force microscope, reproducing apparatus and information processing apparatus using the cantilever unit |
| 10/19/1993 | US5254854 Scanning microscope comprising force-sensing means and position-sensitive photodetector |
| 10/19/1993 | US5253516 Atomic force microscope for small samples having dual-mode operating capability |
| 10/13/1993 | EP0565227A1 Scanning force microscope |
| 10/06/1993 | EP0564088A1 Scanning force microscope with integrated optics and cantilever mount |
| 09/28/1993 | US5248912 Integrated scanning tunneling microscope |
| 09/21/1993 | US5247186 Integrated optical displacement sensor |
| 09/21/1993 | US5245863 Atomic probe microscope |
| 09/01/1993 | EP0557743A1 Feedback controlled differential fiber interferometer |
| 08/24/1993 | US5237859 Atomic force microscope |
| 08/10/1993 | US5235187 Methods of fabricating integrated, aligned tunneling tip pairs |
| 08/03/1993 | USRE34331 Feedback control for scanning tunnel microscopes |
| 07/27/1993 | US5231286 Scanning probe microscope utilizing an optical element in a waveguide for dividing the center part of the laser beam perpendicular to the waveguide |
| 07/21/1993 | EP0551814A1 Surface observing apparatus and method |
| 07/20/1993 | US5229606 Jumping probe microscope |
| 07/13/1993 | US5227626 Lithography apparatus using scanning tunneling microscopy |
| 07/06/1993 | US5224376 Atomic force microscope |
| 06/09/1993 | EP0545538A1 Scanning microscope comprising force-sensing means |
| 06/01/1993 | US5216235 Opto-mechanical automatic focusing system and method |
| 05/12/1993 | EP0439534A4 Photon scanning tunneling microscopy |
| 05/11/1993 | US5210410 Scanning probe microscope having scan correction |