| Patents for G01Q 20 - Monitoring the movement or position of the probe (1,663) |
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| 09/24/1997 | EP0797117A1 Optical waveguide probe and optical system |
| 09/23/1997 | US5670712 Method and apparatus for magnetic force control of a scanning probe |
| 09/10/1997 | EP0794406A1 Probe for atomic force microscope, method of fabricating same, and atomic force microscope |
| 09/09/1997 | US5666190 Method of performing lithography using cantilever array |
| 09/08/1997 | CA2199528A1 Probe for atomic force microscope, method of fabricating same, and atomic force microscope |
| 08/27/1997 | EP0791803A2 Cantilever unit and atomic force microscope, magnetic force microscope, reproducing apparatus and information processing apparatus using the cantilever unit |
| 08/27/1997 | EP0791802A1 Scanning type near field interatomic force microscope |
| 08/20/1997 | EP0790482A1 A dual stage instrument for scanning a specimen |
| 08/20/1997 | EP0789840A1 Current/voltage transformer for the detection of the electron current in a scanning tunnelling-electron microscope |
| 08/12/1997 | US5656809 Atomic force microscope and measuring head thereof with linearly polarized reflected light |
| 08/12/1997 | US5656769 Scanning probe microscope |
| 08/05/1997 | US5654547 Method for particle wave reconstruction in a particle-optical apparatus |
| 08/05/1997 | US5654131 High density recording |
| 07/16/1997 | EP0783670A1 Electromechanical transducer |
| 07/08/1997 | US5646339 Force microscope and method for measuring atomic forces in multiple directions |
| 07/01/1997 | US5644512 High precision calibration and feature measurement system for a scanning probe microscope |
| 06/24/1997 | US5641896 Coupled oscillator scanning imager |
| 06/19/1997 | WO1997021977A1 Integrated silicon profilometer and afm head |
| 05/27/1997 | US5633455 Method of detecting particles of semiconductor wafers |
| 05/21/1997 | CN1150253A 原子力显微镜 AFM |
| 05/20/1997 | USRE35514 Scanning force microscope having aligning and adjusting means |
| 05/20/1997 | US5631463 Cantilever detector having piezoelectric film of zinc oxide or aluminum nitride and platinum or palladium electrodes with controlled crystal orientation, for scanning tunneling microscopes |
| 05/20/1997 | US5631410 Vibrating probe atomic force microscope |
| 05/02/1997 | EP0619872B1 Piezoresistive cantilever for atomic force microscopy |
| 04/29/1997 | US5625142 For examining surface contours of a specimen |
| 04/15/1997 | US5620854 Measuring time-varying micromotion |
| 04/08/1997 | US5618760 Method of etching a pattern on a substrate using a scanning probe microscope |
| 04/01/1997 | US5616916 Configuration measuring method and apparatus for optically detecting a displacement of a probe due to an atomic force |
| 03/25/1997 | US5614663 Cantilever for use with atomic force microscope and process for the production thereof |
| 03/13/1997 | WO1997009584A1 Cantilever with integrated deflection sensor |
| 03/06/1997 | WO1997008733A1 A scanning probe microscope having automatic probe exchange and alignment |
| 03/05/1997 | EP0760109A1 Method for particle wave reconstruction in a particle-optical apparatus |
| 02/26/1997 | EP0759537A2 A scanning force microscope with optical device |
| 02/26/1997 | EP0759536A1 Atomic force microscope and measuring head thereof |
| 01/22/1997 | EP0754289A1 Cantilever deflection sensor and use thereof |
| 01/21/1997 | US5595942 Method of fabricating cantilever for atomic force microscope having piezoresistive deflection detector |
| 01/15/1997 | EP0753736A2 Contamination evaluating apparatus |
| 01/14/1997 | US5594166 Cantilever for use with atomic force microscope and process for the production thereof |
| 12/24/1996 | US5587523 Atomic force microscope employing beam tracking |
| 12/10/1996 | US5583286 Integrated sensor for scanning probe microscope |
| 12/05/1996 | DE19520457A1 Sensing element for probe used to measure topography of sample surface in raster scan microscope |
| 11/12/1996 | US5574278 For determining properties of a sample surface |
| 10/22/1996 | US5567872 Scanning atomic force microscope |
| 10/02/1996 | EP0584233A4 Methods of fabricating integrated, aligned tunneling tip pairs |
| 10/01/1996 | US5560244 Scanning stylus atomic force microscope with cantilever tracking and optical access |
| 09/24/1996 | US5559330 Scanning tunneling microscope |
| 09/19/1996 | WO1996028751A1 Method for particle wave reconstruction in a particle-optical apparatus |
| 09/17/1996 | US5557156 Scan control for scanning probe microscopes |
| 09/12/1996 | WO1996027895A1 Electrochemical identification of molecules in a scanning probe microscope |
| 09/11/1996 | EP0712533A4 Probe microscopy |
| 09/10/1996 | US5553487 Methods of operating atomic force microscopes to measure friction |
| 08/28/1996 | EP0728294A1 Mounting for a probe tip in a scanning force or scanning tunneling microscope |
| 08/20/1996 | US5547774 Binary coded information; using endohedrally doped cagelike molecules as storage elements; applying probing tip to molecule for read/write process to enhance storage density |
| 08/15/1996 | WO1996024819A1 Cantilever deflection sensor and use thereof |
| 08/13/1996 | US5546375 Method of manufacturing a tip for scanning tunneling microscope using peeling layer |
| 08/08/1996 | WO1996024026A1 Tapping atomic force microscope with phase or frequency detection |
| 08/06/1996 | US5543614 Scanning probe microscope capable of suppressing probe vibration caused by feedback control |
| 07/23/1996 | US5537863 Scanning probe microscope having a cantilever used therein |
| 07/09/1996 | US5535185 Information recording/reproduction apparatus using probe |
| 06/11/1996 | US5524479 Detecting system for scanning microscopes |
| 05/22/1996 | EP0712533A1 Probe microscopy |
| 05/21/1996 | US5519686 Encoder for controlling measurements in the range of a few angstroms |
| 05/21/1996 | US5519212 Tapping atomic force microscope with phase or frequency detection |
| 05/15/1996 | DE4447538A1 Meßwertverstärker (Strom-Spannungswandler) zur Erfassung kleiner, transienter Ströme Measuring amplifier (current-voltage converter) to detect small, transient currents |
| 05/14/1996 | US5517280 Photolithography system |
| 05/14/1996 | US5517027 Method for detecting and examining slightly irregular surface states, scanning probe microscope therefor, and method for fabricating a semiconductor device or a liquid crystal display device using these |
| 05/09/1996 | WO1996013714A1 Current/voltage transformer for the detection of the electron current in a scanning tunnelling-electron microscope |
| 05/02/1996 | DE4438960A1 Current-voltage converter to determine tunnel current of a scanning tunnel microscope |
| 04/30/1996 | US5513168 Optical information read/write apparatus |
| 04/16/1996 | US5508517 Scanning probe type microscope apparatus |
| 04/10/1996 | EP0706052A2 Sensor using tunnel current |
| 04/09/1996 | US5506400 Scanning type probe microscope |
| 03/21/1996 | WO1996008701A1 Electromechanical transducer |
| 03/05/1996 | US5496999 Scanning probe microscope |
| 02/27/1996 | US5495109 Electrochemical identification of molecules in a scanning probe microscope |
| 02/13/1996 | CA2007618C Reproducing apparatus |
| 02/06/1996 | US5489774 Combined atomic force and near field scanning optical microscope with photosensitive cantilever |
| 01/16/1996 | US5485451 Information processing apparatus |
| 01/16/1996 | US5483822 For use in an atomic force microscope |
| 01/09/1996 | US5483064 Positioning mechanism and method for providing coaxial alignment of a probe and a scanning means in scanning tunneling and scanning force microscopy |
| 01/09/1996 | US5481908 Resonance contact scanning force microscope |
| 01/02/1996 | US5481529 Scanning probe microscope for observing a sample surface while applying an AC bias voltage between the sample and a probe |
| 01/02/1996 | US5481527 Information processing apparatus with ferroelectric rewritable recording medium |
| 01/02/1996 | US5481521 Information recording and reproducing apparatus utilizing a tunneling current or interatomic forces |
| 12/26/1995 | US5477732 Adhesion measuring method |
| 12/05/1995 | US5473157 Variable temperature near-field optical microscope |
| 11/21/1995 | US5468959 Scanning probe microscope and method for measuring surfaces by using this microscope |
| 11/21/1995 | US5467642 Scanning probe microscope and method of control error correction |
| 11/14/1995 | US5465611 Sensor head for use in atomic force microscopy and method for its production |
| 11/07/1995 | US5463897 Scanning stylus atomic force microscope with cantilever tracking and optical access |
| 10/19/1995 | DE4412383A1 Scanning atomic force microscope |
| 10/03/1995 | CA2066343C Information processor |
| 09/12/1995 | US5449903 Methods of fabricating integrated, aligned tunneling tip pairs |
| 09/05/1995 | US5448399 Optical system for scanning microscope |
| 08/29/1995 | US5445011 Scanning force microscope using an optical trap |
| 08/22/1995 | US5444244 Piezoresistive cantilever with integral tip for scanning probe microscope |
| 08/15/1995 | US5442300 Ultrafast electrical scanning force microscope probe |
| 08/15/1995 | US5440920 Scanning force microscope with beam tracking lens |
| 08/08/1995 | US5440122 Surface analyzing and processing apparatus |
| 08/02/1995 | EP0665417A2 Atomic force microscope combined with optical microscope |