| Patents for G01Q 20 - Monitoring the movement or position of the probe (1,663) |
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| 05/26/1999 | EP0917725A1 Automated adjustment of an energy filtering transmissiion electron microscope |
| 05/25/1999 | US5907095 High-sensitivity strain probe |
| 05/12/1999 | EP0914669A1 Detector devices |
| 05/11/1999 | US5902928 Controlling engagement of a scanning microscope probe with a segmented piezoelectric actuator |
| 04/21/1999 | EP0909937A1 Semiconductor strain sensor, method of manufacturing the sensor, and scanning probe microscope |
| 04/07/1999 | EP0907076A2 Methods of fabricating integrated, aligned tunneling tip pairs |
| 03/31/1999 | CN1212365A Apparatus for measuring exchange force |
| 03/25/1999 | WO1999014555A1 Lever arm for a scanning microscope |
| 03/25/1999 | DE19740763A1 Cantilever arm manufacturing method for atomic force microscope (AFM) |
| 03/25/1999 | CA2302739A1 Lever arm for a scanning microscope |
| 03/24/1999 | EP0712533B1 Probe microscopy |
| 03/23/1999 | US5886532 Nanometer distance regulation using electromechanical power dissipation |
| 03/17/1999 | EP0584233B1 Submicron tip structure with opposed tips |
| 03/16/1999 | US5883705 Atomic force microscope for high speed imaging including integral actuator and sensor |
| 03/02/1999 | US5877891 Scanning probe microscope having a single viewing device for on-axis and oblique optical views |
| 03/02/1999 | US5877412 Probe for atomic force microscope and atomic force microscope |
| 02/23/1999 | US5874669 Scanning force microscope with removable probe illuminator assembly |
| 02/10/1999 | EP0896201A1 Scanning probe microscope |
| 01/26/1999 | CA2040701C Information recording/reproducing apparatus |
| 01/19/1999 | US5861754 Position detection device |
| 01/19/1999 | US5861624 Atomic force microscope for attachment to optical microscope |
| 01/19/1999 | US5861550 Scanning force microscope |
| 01/19/1999 | CA2069702C Micro-displacement element, and scanning tunneling microscope and information processing apparatus using same |
| 01/19/1999 | CA2065593C Cantilever unit and atomic force microscope, magnetic force microscope, reproducing apparatus and information processing apparatus using the cantilever unit |
| 01/13/1999 | EP0890821A1 Scanning probe microscope |
| 01/05/1999 | US5856617 Atomic force microscope system with cantilever having unbiased spin valve magnetoresistive strain gauge |
| 12/22/1998 | US5852232 Instrument for sensing a sample |
| 12/16/1998 | EP0884759A1 Secondary ion mass spectrometer with apertured mask |
| 12/15/1998 | US5850038 Scanning probe microscope incorporating an optical microscope |
| 12/08/1998 | US5847383 Approaching device of scanning probe microscope |
| 11/17/1998 | US5838000 Method device and system for optical near-field scanning microscopy of test specimens in liquids |
| 11/11/1998 | EP0877243A1 Material evaluation method |
| 10/21/1998 | EP0872707A1 Apparatus for measuring exchange force |
| 10/20/1998 | US5825670 High precison calibration and feature measurement system for a scanning probe microscope |
| 10/20/1998 | US5825020 Atomic force microscope for generating a small incident beam spot |
| 10/14/1998 | EP0871166A1 Apparatus for machining, recording, or reproducing, using scanning probe microscope |
| 10/14/1998 | EP0871006A1 Scanning probe microscope |
| 10/13/1998 | US5821549 Through-the-substrate investigation of flip-chip IC's |
| 10/10/1998 | CA2231224A1 Apparatus for machining, recording, and reproducing, using scanning probe microscope |
| 10/09/1998 | CA2231310A1 Scanning probe microscope |
| 10/07/1998 | EP0869329A2 Torsion type probe and scanning probe microscope using the same |
| 10/07/1998 | EP0868648A1 Integrated silicon profilometer and afm head |
| 09/22/1998 | US5811802 Scanning probe microscope with hollow pivot assembly |
| 09/16/1998 | EP0864899A2 Scanning near-field optical microscope |
| 09/12/1998 | CA2229221A1 Scanning near-field optical microscope |
| 09/09/1998 | EP0863543A2 Through-the-substrate investigation of flip-chip IC's |
| 09/08/1998 | US5804710 Atomic force microscope system with multi-directional voice coil actuator for controlling the stylus |
| 09/08/1998 | US5804709 For measuring a force used in atomic force microscopy |
| 09/01/1998 | US5801381 Between a microscope probe tip and a sample surface |
| 08/26/1998 | EP0860726A1 Probe with tip having micro aperture for detecting or irradiating light, near-field optical microscope, recording/reproduction apparatus, and exposure apparatus using the probe, and method of manufacturing the probe |
| 08/25/1998 | US5798524 Automated adjustment of an energy filtering transmission electron microscope |
| 07/22/1998 | EP0854350A1 Probe array for a scanning probe microscope |
| 07/14/1998 | US5780727 Electromechanical transducer |
| 07/09/1998 | WO1998029707A1 Acoustic sensor as proximity detector |
| 07/08/1998 | EP0728294B1 Mounting for a probe tip in a scanning force or scanning tunneling microscope |
| 06/17/1998 | EP0847590A1 A scanning probe microscope having automatic probe exchange and alignment |
| 06/09/1998 | US5763767 For examining surface properties of a sample surface |
| 06/02/1998 | US5760396 Scanning probe microscope |
| 05/26/1998 | US5756997 Scanning probe/optical microscope with modular objective/probe and drive/detector units |
| 05/20/1998 | EP0843175A1 Scanning probe microscope and signal processing apparatus |
| 05/19/1998 | US5753912 Cantilever chip |
| 05/06/1998 | EP0839312A1 Tapping atomic force microscope with phase or frequency detection |
| 05/05/1998 | US5747802 Automated non-visual method of locating periodically arranged sub-micron objects |
| 04/29/1998 | EP0838658A1 Tunnel effect sensor, particularly for measuring the topography of a surface |
| 04/21/1998 | US5742377 Cantilever for scanning probe microscope including piezoelectric element and method of using the same |
| 04/14/1998 | US5739425 Cantilever with integrated deflection sensor |
| 04/07/1998 | US5736745 Contamination evaluating apparatus |
| 04/01/1998 | EP0833125A2 Scanning probe microscope with hollow pivot assembly |
| 03/18/1998 | CN1176396A Auto-focus device |
| 03/17/1998 | US5729026 For scanning the surface of a sample |
| 03/17/1998 | US5729015 Position control system for scanning probe microscope |
| 03/12/1998 | WO1998010458A1 Atomic force microscope for generating a small incident beam spot |
| 03/12/1998 | CA2264747A1 Atomic force microscope for generating a small incident beam spot |
| 03/03/1998 | US5723775 Atomic force microscope under high speed feedback control |
| 02/26/1998 | DE19633546A1 Device for contactless scanning of surface |
| 02/24/1998 | US5721721 Two scanning probes information recording/reproducing system with one probe to detect atomic reference location on a recording medium |
| 02/17/1998 | US5719324 Microcantilever sensor |
| 02/12/1998 | WO1998006125A1 Automated adjustment of an energy filtering transmissiion electron microscope |
| 02/10/1998 | US5717132 Cantilever and process for fabricating it |
| 02/04/1998 | EP0822435A1 Device and method for scanning near field optical microscopy of samples in fluids |
| 02/03/1998 | US5715054 Scanning force microscope with detector probe for the atomic resolution of a surface structure |
| 02/03/1998 | US5714756 Scanning probe microscope having a single viewing device for on-axis and oblique angle views |
| 02/03/1998 | US5714682 Scanning stylus atomic force microscope with cantilever tracking and optical access |
| 02/03/1998 | CA2195838A1 Method and device for optical near-field scanning microscopy of test specimens in liquids |
| 01/28/1998 | EP0821216A2 Position detection device |
| 01/08/1998 | WO1998000853A1 Detector devices |
| 01/06/1998 | US5705814 Scanning probe microscope having automatic probe exchange and alignment |
| 12/23/1997 | US5701381 Mounting arrangement for a probe tip of a scanning force or tunneling microscope |
| 12/02/1997 | CA2068587C Information reading and recording using a scanning tunnel microscope |
| 11/25/1997 | CA2059990C Moving apparatus, a moving method and an information detection and/or input apparatus using the same |
| 11/19/1997 | CN1165323A Automated non-visual method of locating periodically arranged sub-micron objects |
| 11/18/1997 | US5689063 Atomic force microscope using cantilever attached to optical microscope |
| 10/21/1997 | US5679888 Dynamic quantity sensor and method for producing the same, distortion resistance element and method for producing the same, and angular velocity sensor |
| 10/15/1997 | EP0801318A2 Probe, manufacturing method therefore and scanning probe microscope |
| 10/09/1997 | CA2200992A1 Probe, manufacturing method therefor and scanning probe microscope |
| 10/07/1997 | US5675154 Scanning probe microscope |
| 10/07/1997 | US5675145 Scanning probe microscope having an optical system for enabling identification of the scanning region and sample observation during a scanning operation |
| 10/01/1997 | EP0798774A2 An automated non-visual method of locating periodicalliy arranged sub-micron objects |
| 09/30/1997 | US5672816 Large stage system for scanning probe microscopes and other instruments |
| 09/30/1997 | CA2048968C Cantilever type probe, scanning tunneling microscopy and information processing device equipped with said probe |