| Patents for G01Q 20 - Monitoring the movement or position of the probe (1,663) |
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| 05/01/2001 | US6223591 Probe needle arrangement and movement method for use in an atomic force microscope |
| 04/10/2001 | US6215121 Three-dimensional scanning probe microscope |
| 04/05/2001 | DE19939239A1 Sensor for atomic force microscope, has at least one source magnetic field and at least one magnetic field detector used to measure movement on-and-off of opposite sides of bending element |
| 04/03/2001 | US6211540 Semiconductor strain sensor and scanning probe microscope using the semiconductor strain sensor |
| 04/03/2001 | US6211525 Detector devices |
| 03/29/2001 | WO2001022468A1 High bandwidth recoiless microactuator |
| 03/28/2001 | EP1012862A4 Atomic force microscope for generating a small incident beam spot |
| 03/22/2001 | WO2001020616A1 Magnetic sensing of motion in microfabricated devices |
| 03/13/2001 | US6201227 Scanning probe microscope |
| 03/13/2001 | US6201226 Probe with tip having micro aperture for detecting or irradiating light, near-field optical microscope, recording/reproduction apparatus, and exposure apparatus using the probe, and method of manufacturing the probe |
| 03/07/2001 | EP1081742A2 Charged particle beam evaluation method |
| 03/01/2001 | DE19935570A1 Mikromanipulator Micromanipulator |
| 02/27/2001 | US6194711 Scanning near-field optical microscope |
| 02/20/2001 | US6189374 Active probe for an atomic force microscope and method of use thereof |
| 02/20/2001 | US6189373 Scanning force microscope and method for beam detection and alignment |
| 02/13/2001 | US6185991 Method and apparatus for measuring mechanical and electrical characteristics of a surface using electrostatic force modulation microscopy which operates in contact mode |
| 02/08/2001 | WO2001009965A1 Micromanipulator with piezoelectric movement elements |
| 02/08/2001 | DE10024634A1 Electron beam patterning apparatus for use in manufacture of semiconductor device, sets up adjusting value of shaping lens such that detected position slippage of electron beam is minimum |
| 01/31/2001 | CN1282078A Electron beam illuminating device |
| 01/25/2001 | WO2001006296A1 High q-factor micro tuning fork by thin optical fiber for nsom |
| 01/25/2001 | WO2001005701A1 Nanometer-order mechanical vibrator, production method thereof and measuring device using it |
| 01/25/2001 | CA2380149A1 Near-field scanning optical microscoe with a high q-factor piezoelectric sensing elment |
| 01/23/2001 | US6176122 Cantilever unit and scanning probe microscope utilizing the cantilever unit |
| 01/11/2001 | WO2001003157A1 Object inspection and/or modification system and method |
| 01/09/2001 | US6172365 Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same |
| 01/02/2001 | US6169281 Apparatus and method for determining side wall profiles using a scanning probe microscope having a probe dithered in lateral directions |
| 12/14/2000 | WO2000075627A1 Atomic force microscope and driving method therefor |
| 11/22/2000 | EP1054283A2 Near field optical microscope and probe for near field optical microscope |
| 11/21/2000 | US6148662 High-sensitivity strain probe |
| 10/31/2000 | US6138503 Scanning probe microscope system including removable probe sensor assembly |
| 10/10/2000 | US6130427 Scanning probe microscope with multimode head |
| 10/05/2000 | WO2000058759A2 Active probe for an atomic force microscope and method of use thereof |
| 09/12/2000 | US6118123 Electron probe microanalyzer |
| 08/08/2000 | US6100524 Torsion type probe and scanning probe microscope using the same |
| 08/08/2000 | US6100523 Micro goniometer for scanning microscopy |
| 08/03/2000 | DE19900114A1 Verfahren und Vorrichtung zur gleichzeitigen Bestimmung der Adhäsion, der Reibung und weiterer Materialeigenschaften einer Probenoberfläche Method and apparatus for the simultaneous determination of adhesion, friction, and other material properties of a sample surface |
| 08/01/2000 | US6097473 Exposure apparatus and positioning method |
| 07/13/2000 | WO2000040946A1 Method and device for simultaneously determining the adhesion, friction, and other material properties of a sample surface |
| 07/05/2000 | EP1015843A1 Lever arm for a scanning microscope |
| 06/28/2000 | EP1012862A1 Atomic force microscope for generating a small incident beam spot |
| 06/27/2000 | US6080986 Secondary ion mass spectrometer with aperture mask |
| 06/20/2000 | US6078174 Apparatus for measuring exchange force |
| 06/20/2000 | US6078045 Process for analysis of a sample |
| 06/15/2000 | WO2000025165A8 Monolithic integration of a detection system for near-field microscopy based on optical feedback in a vertical cavity surface emitting laser |
| 06/13/2000 | US6075585 Vibrating probe for a scanning probe microscope |
| 06/13/2000 | US6075558 Auto-focus device |
| 06/13/2000 | US6073485 Scanning microscope for image topography and surface potential |
| 06/06/2000 | US6072764 Information processing apparatus having face regulating system |
| 05/23/2000 | US6067164 Method and apparatus for automatic adjustment of electron optics system and astigmatism correction in electron optics device |
| 05/18/2000 | WO2000028338A1 Electrostatic force detector with cantilever and shield |
| 05/18/2000 | WO2000028299A1 Optical cantilever and production method therefor |
| 05/18/2000 | DE19852833A1 Scanning microscope probe distance evaluation method, e.g. for scanning near-field optical microscopy; uses detected oscillation amplitude, frequency or phase of probe subjected to lateral and superimposed vertical oscillation |
| 05/10/2000 | EP0998689A1 Optical near-field microscope |
| 05/04/2000 | WO2000025165A1 Monolithic integration of a detection system for near-field microscopy based on optical feedback in a vertical cavity surface emitting laser |
| 04/26/2000 | EP0783670B1 Electromechanical transducer |
| 04/25/2000 | US6053035 Material evaluation method |
| 04/18/2000 | US6050722 Non-contact passive temperature measuring system and method of operation using micro-mechanical sensors |
| 04/06/2000 | WO2000019166A1 Multidimensional sensing system for atomic force miscroscopy |
| 03/07/2000 | US6032518 Scanning stylus atomic force microscope with cantilever tracking and optical access |
| 03/01/2000 | EP0868648A4 Integrated silicon profilometer and afm head |
| 03/01/2000 | EP0847590A4 A scanning probe microscope having automatic probe exchange and alignment |
| 02/23/2000 | EP0981051A1 Optical probe for proximity field |
| 02/22/2000 | US6028305 Dual cantilever scanning probe microscope |
| 02/08/2000 | US6021665 Cantilever tracking type scanning probe microscope |
| 02/01/2000 | US6018991 Scanning probe microscope having cantilever attached to driving member |
| 01/18/2000 | CA2075855C Scanning microscope comprising force-sensing means |
| 12/28/1999 | US6006594 Scanning probe microscope head with signal processing circuit |
| 12/21/1999 | US6005251 Voice coil scanner for use in scanning probe microscope |
| 12/16/1999 | WO1999064909A1 Near-field optical inspection apparatus |
| 12/14/1999 | US6000947 Method of fabricating transistor or other electronic device using scanning probe microscope |
| 12/02/1999 | WO1999061949A1 Optical near-field microscope |
| 12/02/1999 | DE19823265A1 Image generation method for raster scanning microscope |
| 11/30/1999 | US5994691 Near-field scanning optical microscope |
| 11/25/1999 | DE19822869A1 Optical near-field microscope |
| 11/25/1999 | DE19822634A1 Nano-atomic force microscope for rapid and sensitive surface interatomic or intermolecular force measurement |
| 11/23/1999 | US5990477 Apparatus for machining, recording, and reproducing, using scanning probe microscope |
| 11/23/1999 | US5990474 Near field optical probe for simultaneous phase and enhanced amplitude contrast in reflection mode using path matched differential interferometry and method of making it |
| 11/16/1999 | US5986263 Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same |
| 11/16/1999 | US5986262 Probe array for a scanning probe microscope |
| 11/16/1999 | US5986256 Scanning probe microscope using fluorescent light |
| 11/09/1999 | US5982009 Integrated device of cantilever and light source |
| 10/19/1999 | US5969821 Optical waveguide probe and optical system and atomic force microscope using the optical waveguide probe |
| 10/12/1999 | US5965881 Scanning probe microscope and processing apparatus |
| 09/28/1999 | US5960147 Probe, manufacturing method therefor and scanning probe microscope |
| 09/21/1999 | US5956565 Analysis apparatus and analysis methods for semiconductor devices |
| 09/21/1999 | US5955660 Method of controlling probe microscope |
| 09/14/1999 | US5952562 Scanning probe microscope incorporating an optical microscope |
| 09/07/1999 | US5949070 For examining surface contours of a specimen |
| 09/07/1999 | US5948972 For sensing a sample |
| 08/25/1999 | EP0789840B1 Current/voltage transformer for the detection of the electron current in a scanning tunnelling-electron microscope |
| 08/17/1999 | US5939719 Scanning probe microscope with scan correction |
| 08/17/1999 | US5939623 Atomic force microscope |
| 08/12/1999 | WO1999040445A1 Optical probe for proximity field |
| 08/03/1999 | US5932876 Tunnel effect sensor, suitable for determining the topography of a surface |
| 07/28/1999 | EP0932020A1 Micro surface measuring apparatus and probe manufacturing |
| 07/27/1999 | US5929643 Scanning probe microscope for measuring the electrical properties of the surface of an electrically conductive sample |
| 07/20/1999 | US5925818 Method and apparatus for magnetic force control of a scanning probe |
| 07/14/1999 | EP0928950A2 Method for detecting and examining slightly irregular surface states, and its use for fabricating liquid crystal display devices |
| 06/16/1999 | EP0922930A1 Scanning probe microscope with integrated deflection sensor |
| 06/08/1999 | US5910837 Photomechanical transducer |