| Patents for G01Q 20 - Monitoring the movement or position of the probe (1,663) |
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| 06/06/2002 | US20020066863 Real time monitoring simultaneous imaging and exposure in charged particle beam systems |
| 05/30/2002 | US20020062684 Dynamic activation for an atomic force microscope and method of use thereof |
| 05/29/2002 | EP1209737A2 Method and apparatus for specimen fabrication |
| 05/23/2002 | WO2002040944A1 Method and apparatus for reading an array of thermal resistance sensors |
| 05/14/2002 | US6388252 Self-detecting type of SPM probe and SPM device |
| 05/10/2002 | WO2002037488A1 Afm-based data storage and microscopy |
| 05/10/2002 | WO2002037090A1 Apparatus for parallel detection of the behaviour of mechanical micro-oscillators |
| 05/08/2002 | EP1203749A1 Nanometer-order mechanical vibrator, production method thereof and measuring device using it |
| 05/07/2002 | US6383823 Probe for scanning probe microscope (SPM) and SPM device |
| 04/18/2002 | US20020043101 Scanning probe microscope with probe formed by single conductive material |
| 04/17/2002 | EP1197986A2 Autoadjusting charged-particle probe-forming apparatus |
| 04/17/2002 | EP1197726A1 Multipurpose Sensor and cantilever for it |
| 04/17/2002 | EP1196939A1 Object inspection and/or modification system and method |
| 04/16/2002 | US6373054 Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same |
| 04/11/2002 | WO2001081857A3 Resonant probe driving arrangement and scanning probe microscope |
| 04/03/2002 | EP1192442A1 Atomic force microscope and driving method therefor |
| 04/02/2002 | US6365895 Apparatus for measuring a micro surface configuration and a method for manufacturing a probe incorporated in this measuring apparatus |
| 03/28/2002 | WO2002025692A1 Real time monitoring for simultaneous imaging and exposure in charged particle beam systems |
| 03/21/2002 | WO2002023174A1 Microcantilever rheometer |
| 03/21/2002 | WO2002023159A1 Scanning probe microscope, method for measuring band structure of substance by using the microscope, and microscopic spectroscopy |
| 03/21/2002 | US20020034325 Method and apparatus for inspection of patterned semiconductor wafers |
| 03/19/2002 | US6358426 Method of fabricating probe force atomic force microscope |
| 03/13/2002 | EP1135691A4 Electrostatic force detector with cantilever and shield |
| 03/12/2002 | US6355994 Precision stage |
| 03/05/2002 | US6353219 Object inspection and/or modification system and method |
| 02/26/2002 | USRE37560 Scan control for scanning probe microscopes |
| 02/21/2002 | US20020020805 Microprobe and scanning type probe apparatus using thereof |
| 02/14/2002 | US20020017615 Scanning unit and scanning microscope having the same |
| 02/14/2002 | DE10035134A1 Optical near-field microscopic inspection of e.g. semiconductor material, involves demodulating output of detector to which reference beam and stray light from probe having specific frequency are input |
| 02/07/2002 | US20020015143 Multi-beam multi-column electron beam inspection system |
| 01/30/2002 | CN1333875A Electrostatic fource detector with cantilever and shield |
| 01/15/2002 | US6339217 Scanning probe microscope assembly and method for making spectrophotometric, near-field, and scanning probe measurements |
| 01/08/2002 | US6337479 Object inspection and/or modification system and method |
| 01/08/2002 | US6337478 Electrostatic force detector with cantilever and shield for an electrostatic force microscope |
| 01/08/2002 | US6336366 Piezoelectrically tunable resonance frequency beam utilizing a stress-sensitive film |
| 01/03/2002 | US20020000511 High sensitivity deflection sensing device |
| 12/27/2001 | WO2001097902A2 Medical imaging, diagnosis, and therapy using a scanning single optical fiber system |
| 12/27/2001 | US20010055462 Medical imaging, diagnosis, and therapy using a scanning single optical fiber system |
| 12/27/2001 | US20010055151 Scanning probe microscope and method of processing signals in the same |
| 12/27/2001 | US20010054691 Optical system for scanning microscope |
| 12/25/2001 | US6333497 Probe with tip having micro aperture for detecting or irradiating light, near-field optical microscope, recording/reproduction apparatus, and exposure apparatus using the probe, and method of manufacturing the probe |
| 12/18/2001 | US6330824 Photothermal modulation for oscillating mode atomic force microscopy in solution |
| 12/13/2001 | WO2001094877A1 Sample for simultaneously conducting electro-chemical and topographic near-field microscopy |
| 12/13/2001 | US20010049959 Integrated silicon profilometer and AFM head |
| 12/06/2001 | US20010048068 Probe opening forming apparatus and near-field optical microscope using the same |
| 12/06/2001 | US20010047682 Dual stage instrument for scanning a specimen |
| 12/05/2001 | EP1160611A2 Probe opening forming apparatus and near-field optical microscope using the same |
| 12/05/2001 | CN2463827Y Normal force piezoelectric detecting sensor |
| 11/27/2001 | US6323483 High bandwidth recoiless microactuator |
| 11/22/2001 | DE10110933A1 Mikrosonde und diese verwendende Vorrichtung des Abtastsondentyps Microprobe and use this device of Abtastsondentyps |
| 11/20/2001 | US6319838 Lever arm for a scanning microscope |
| 11/13/2001 | US6317514 Method and apparatus for inspection of patterned semiconductor wafers |
| 11/08/2001 | US20010038598 Device for contacting and/or modifying a surface having a cantilever and a method for production of said cantilever |
| 11/08/2001 | DE10016478A1 Materialbearbeitung mit Präzision auf atomarer Skala Material processing with precision at the atomic scale |
| 11/01/2001 | WO2001081857A2 Resonant probe driving arrangement and scanning probe microscope |
| 11/01/2001 | CA2406407A1 Resonant probe driving arrangement and scanning probe microscope |
| 10/31/2001 | DE10106854A1 Mikro-Tastkopf und Vorrichtung zum Messen einer Probenoberfläche Micro-probe and apparatus for measuring a sample surface |
| 10/18/2001 | WO2001077694A1 Ultrananocrystalline diamond cantilever wide dynamic range acceleration/vibration/pressure sensor |
| 10/18/2001 | US20010030286 Scanning probe microscope |
| 10/11/2001 | WO2001075427A1 Methods and apparatus for atomic force microscopy |
| 10/11/2001 | WO2001074709A1 Precision material processing or structuring carried out on the atomic scale |
| 10/11/2001 | US20010028033 Microprobe and sample surface measuring apparatus |
| 10/11/2001 | DE10113966A1 Sondenelektronenmikroskop Electron probe |
| 10/11/2001 | CA2404604A1 Methods and apparatus for atomic force microscopy |
| 10/10/2001 | EP1141673A1 Method and device for simultaneously determining the adhesion, friction, and other material properties of a sample surface |
| 10/09/2001 | USRE37404 Detection system for atomic force microscopes |
| 10/09/2001 | US6298715 Scanning force microscope probe cantilever with reflective structure |
| 10/02/2001 | US6297502 Method and apparatus for force control of a scanning probe |
| 09/27/2001 | WO2001033232A3 Precision stage |
| 09/26/2001 | EP1135691A1 Electrostatic force detector with cantilever and shield |
| 09/26/2001 | EP0754289B1 Measurement of AFM cantilever deflection with high frequency radiation and dopant profiler |
| 09/25/2001 | US6294774 Scanning probe microscope having graphical information |
| 09/06/2001 | US20010019109 Scanning electron microscope |
| 09/05/2001 | EP1130379A1 Optical cantilever and production method therefor |
| 08/30/2001 | WO2001063204A1 Method for increasing the measurement information available from a transmission electron microscope and a transmission electron microscopy device |
| 08/23/2001 | WO2001060456A1 Multi-beam multi-column electron beam inspection system |
| 08/23/2001 | US20010015097 Scanning system having a deflectable probe tip |
| 08/16/2001 | US20010013574 Intermittent contact imaging under force-feedback control |
| 08/02/2001 | US20010010356 Through-the-substrate investigation of flip-chip IC's |
| 08/02/2001 | DE10003693A1 Abtastsystem mit auslenkbarer Tastspitze Scanning probe tip deflectable |
| 07/31/2001 | USRE37299 Atomic force microscopy |
| 07/31/2001 | US6267005 Dual stage instrument for scanning a specimen |
| 07/24/2001 | US6265711 Scanning probe microscope assembly and method for making spectrophotometric near-field optical and scanning measurements |
| 07/19/2001 | WO2001052301A1 Electron-optical corrector for eliminating third-order aberrations |
| 07/19/2001 | DE10001277A1 Elektronenoptischer Korrektor zur Beseitigung der Bildfehler dritter Ordnung Electron optical corrector to eliminate the aberrations of the third order |
| 07/18/2001 | CN1068677C 原子力显微镜 AFM |
| 07/12/2001 | WO2000058759A3 Active probe for an atomic force microscope and method of use thereof |
| 07/12/2001 | US20010007347 Probe with tip having micro aperture for detecting or irradiating light, near-field optical microscope, recording/reproduction apparatus, and exposure apparatus using the probe, and method of manufacturing the probe |
| 07/10/2001 | US6257053 Scanning probe microscope having piezoelectric member for controlling movement of probe |
| 06/28/2001 | WO2001046643A1 Scanning force microscope probe cantilever with reflective structure |
| 06/19/2001 | US6249000 Scanning probe microscope |
| 06/13/2001 | DE10057737A1 Imaging probe for image testing device, has charge-coupled device camera, optical imaging system and light source to illuminate work piece, with optics to focus work piece image to camera |
| 06/07/2001 | US20010002697 Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same |
| 06/05/2001 | USRE37203 Feedback control for scanning tunnel microscopes |
| 06/05/2001 | US6240771 Device for noncontact intermittent contact scanning of a surface and a process therefore |
| 05/29/2001 | US6237399 Cantilever having sensor system for independent measurement of force and torque |
| 05/22/2001 | US6236053 Charged particle detector |
| 05/16/2001 | CN1295242A Small light spot detector for CD driver objective |
| 05/10/2001 | WO2001033232A2 Precision stage |
| 05/01/2001 | US6225626 Through-the-substrate investigation of flip chip IC's |