| Patents for G01Q 20 - Monitoring the movement or position of the probe (1,663) |
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| 09/26/1989 | US4870352 Contactless current probe based on electron tunneling |
| 09/08/1989 | WO1989007259A3 Integrated scanning tunneling microscope |
| 09/08/1989 | WO1989007258A3 Integrated scanning tunneling microscope |
| 09/06/1989 | EP0331148A2 Microscope apparatus |
| 09/05/1989 | US4863226 Confocal laser scanning microscope |
| 08/10/1989 | WO1989007259A2 Integrated scanning tunneling microscope |
| 08/10/1989 | WO1989007258A2 Integrated scanning tunneling microscope |
| 08/10/1989 | WO1989007256A1 An integrated mass storage device |
| 07/25/1989 | US4851671 Oscillating quartz atomic force microscope |
| 06/27/1989 | US4843312 Test method for LCD elements |
| 06/06/1989 | US4837445 Coarse adjusting device of scanning tunneling microscope |
| 05/16/1989 | US4831614 Direct access storage unit using tunneling current techniques |
| 03/29/1989 | EP0308537A1 Sensor for converting a distance to optical and further to electrical energy, and surface scanning apparatus using same |
| 03/14/1989 | US4812775 Electrostatic ion accelerator |
| 03/07/1989 | US4810879 For investigating a selected area of a specimen |
| 03/01/1989 | EP0304893A2 Encoder |
| 02/28/1989 | US4808821 Spectrometer objective for electron beam mensuration techniques |
| 02/21/1989 | US4806755 Micromechanical atomic force sensor head |
| 01/31/1989 | US4801879 Electron beam testing of integrated circuits |
| 01/25/1989 | EP0300105A2 Electrostatic ion accelerator |
| 01/24/1989 | US4800274 High resolution atomic force microscope |
| 12/28/1988 | EP0296262A1 Method for investigating surfaces at nanometer and picosecond resolution and laser-sampled scanning tunneling microscope for performing said method |
| 12/27/1988 | US4794259 Charged particle collection |
| 11/29/1988 | US4788431 Specimen distance measuring system |
| 11/17/1988 | EP0290648A1 Atomic force sensor head for investigating the topography of a surface |
| 11/17/1988 | EP0290647A1 Oscillating quartz atomic force microscope |
| 11/09/1988 | EP0290066A1 Test method for LCD elements |
| 11/09/1988 | CN88102316A Test method for lcd elements |
| 10/18/1988 | CA1243231A1 Optical near-field scanning microscope |
| 09/28/1988 | EP0284136A1 Confocal laser scanning microscope |
| 04/06/1988 | EP0262253A1 Micromechanical atomic force sensor head |
| 02/09/1988 | US4724318 Atomic force microscope and method for imaging surfaces with atomic resolution |
| 01/26/1988 | US4721910 High speed circuit measurements using photoemission sampling |
| 12/15/1987 | US4713687 Scan line type dynamic observation apparatus |
| 12/02/1987 | EP0247219A1 Direct access storage unit |
| 10/28/1987 | EP0243060A2 A charged particle energy analyser |
| 10/28/1987 | EP0242993A1 Apparatus and method for collecting charged particles |
| 06/23/1987 | US4675528 Method for measurement of spotsize and edgewidth in electron beam lithography |
| 06/03/1987 | EP0223918A2 Method and atomic force microscope for imaging surfaces with atomic resolution |
| 01/21/1987 | EP0209236A1 Electron beam testing of integrated circuits |
| 12/17/1986 | EP0205185A2 Objective with spectrometer in the electron beam measuring technique |
| 08/05/1986 | US4604520 Optical near-field scanning microscope |
| 07/29/1986 | CA1208763A1 Scan line type dynamic observation apparatus |
| 10/10/1984 | EP0121309A2 Scan line type dynamic observation apparatus |
| 07/04/1984 | EP0112401A1 Optical near-field scanning microscope |
| 05/08/1984 | US4447731 Exterior view examination apparatus |
| 04/03/1984 | US4440475 Electron probe microanalyzer comprising an observation system having double magnification |
| 07/12/1983 | US4393309 Method and apparatus for controlling the objective lens in a scanning electron microscope or the like |
| 07/05/1983 | US4392058 Electron beam lithography |
| 05/10/1983 | US4383172 Method and apparatus for measuring coating thicknesses on continuously moving material |
| 03/16/1982 | US4320298 Warhead detector |
| 06/23/1981 | CA1103813A1 Apparatus for electron beam lithography |
| 01/20/1981 | US4246487 Method and device for determining the focal length of a long focal length electron optical lens |
| 06/24/1980 | CA1080369A1 Scanning electron microscope micrometer scale and method of fabricating same |
| 04/22/1980 | US4199688 Apparatus for electron beam lithography |
| 01/23/1980 | EP0006985A1 Method and device for the determination of the focal length of electrooptical lenses of long focal length |
| 12/18/1979 | US4179604 Electron collector for forming low-loss electron images |
| 02/20/1979 | US4139933 Method for fabricating a scanning electron microscope micrometer scale |
| 04/25/1978 | US4086491 Direct measurement of the electron beam of a scanning electron microscope |
| 01/31/1978 | US4071765 Electron microscope |
| 01/17/1978 | US4068381 Scanning electron microscope micrometer scale and method for fabricating same |
| 08/31/1976 | US3978338 Illumination system in a scanning electron microscope |
| 06/15/1976 | US3963922 X-ray fluorescence device |