| Patents for G01Q 20 - Monitoring the movement or position of the probe (1,663) |
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| 04/27/1993 | US5206702 Technique for canceling the effect of external vibration on an atomic force microscope |
| 04/14/1993 | EP0536827A1 Combined scanning force microscope and optical metrology tool |
| 04/13/1993 | US5202879 Information recording medium, and information recording and/or reproducing method and apparatus |
| 04/13/1993 | US5202004 Determining contour of surface |
| 04/07/1993 | EP0535611A1 High resolution observation apparatus with photon scanning tunneling microscope |
| 04/04/1993 | CA2079752A1 High resolution observation apparatus with photon scanning microscope |
| 03/09/1993 | US5192866 Sample-moving automatic analyzing apparatus |
| 03/03/1993 | EP0529846A1 Scanning probe microscope |
| 03/02/1993 | US5189906 Compact atomic force microscope |
| 02/17/1993 | EP0527448A2 Scanning tunnelling/atomic force microscope combined with optical microscope |
| 02/16/1993 | US5187367 Cantilever type probe, scanning tunneling microscope and information processing device equipped with said probe |
| 01/13/1993 | EP0407460A4 An integrated mass storage device |
| 12/15/1992 | US5171987 Combined magnetic sector mass spectrometer and time-of-flight mass spectrometer |
| 12/02/1992 | EP0516380A2 Micro-displacement element for a scanning tunneling microscope |
| 11/26/1992 | WO1992020842A1 Methods of fabricating integrated, aligned tunneling tip pairs |
| 11/24/1992 | US5166516 Scanning probe microscope with slant detection and compensation |
| 11/19/1992 | EP0513790A2 Information processing apparatus |
| 11/17/1992 | US5164791 Minute displacement detector using optical interferometry |
| 10/28/1992 | EP0510895A2 Information processor |
| 10/21/1992 | EP0509856A1 Scanning probe type microscope combined with an optical microscope |
| 10/21/1992 | EP0509716A1 Cantilever unit and atomic force microscope, magnetic force microscope, reproducing apparatus and information processing apparatus using the cantilever unit |
| 10/20/1992 | US5157251 Scanning force microscope having aligning and adjusting means |
| 10/13/1992 | US5155715 Reproducing apparatus |
| 10/13/1992 | CA1308574C Atomic force sensor head |
| 09/08/1992 | US5144833 Atomic force microscopy |
| 09/01/1992 | US5144128 Surface microscope and surface microscopy |
| 08/25/1992 | US5141319 Displacement detection device with adjacent semiconductor diode lasers |
| 08/13/1992 | DE4203410A1 Lithography device for wafer structuring - has wafer support table, SXM base with reference structure, and jibs, each with STM sensor |
| 08/11/1992 | US5138159 Scanning tunneling microscope |
| 08/11/1992 | US5138158 Surface analysis method and apparatus |
| 08/05/1992 | EP0497288A2 Probe scanning system |
| 08/04/1992 | CA1305872C Micromechanical atomic force sensor head |
| 07/23/1992 | WO1992012398A1 Piezoresistive cantilever for atomic force microscopy |
| 07/14/1992 | US5130554 Two-dimensional scanning device for detecting position between two relatively movable objects |
| 07/14/1992 | US5129132 Method of making an integrated scanning tunneling microscope |
| 04/15/1992 | EP0480136A1 Atomic force microscopy |
| 04/02/1992 | DE4107605C1 Sensor for atomic force raster microscope - has opto-electronic distance measurer for ascertaining movement of probe tip at distal end of extendable arm |
| 02/26/1992 | EP0472342A2 Micro-displacement type information detection probe device and microscope and information processing device by use thereof |
| 02/19/1992 | EP0471511A2 Cantilever type probe and information processing device equipped with said probe |
| 02/18/1992 | US5089708 Vacuum system comprising an evacuatable housing, an object holder and an object carrier which is detachably coupled thereto |
| 02/17/1992 | CA2049197C Micro-displacement type information detection probe device and scanning tunneling microscope, atomic force microscope, information processing device by use thereof |
| 01/21/1992 | US5083022 Scanning tunneling microscope |
| 12/31/1991 | US5076026 Microscopic grinding method and microscopic grinding device |
| 10/23/1991 | EP0452851A1 Information recording/reproducing apparatus |
| 10/16/1991 | CN1014359B Test method for lcd elements |
| 10/02/1991 | EP0449221A2 Scanning probe microscope |
| 10/01/1991 | US5053995 Tunnel current data storage apparatus having separate lever bodies |
| 09/25/1991 | EP0448331A2 Mass spectrometry systems |
| 09/10/1991 | US5047633 Imaging apparatus and method |
| 08/21/1991 | EP0442536A2 Atomic force sensor head for measuring the properties of a data store |
| 08/14/1991 | EP0441311A2 Surface microscope apparatus |
| 08/07/1991 | EP0440268A2 Atomic force sensor head with interferometric measurement of the properties of a data store |
| 08/07/1991 | EP0439534A1 Photon scanning tunneling microscopy. |
| 06/26/1991 | EP0433604A2 Electrical probe incorporating scanning proximity microscope |
| 06/25/1991 | US5025658 Compact atomic force microscope |
| 06/18/1991 | US5025147 Laser light |
| 06/12/1991 | EP0431553A2 Microscopic grinding method and microscopic grinding device |
| 05/28/1991 | US5018865 Photon scanning tunneling microscopy |
| 05/21/1991 | US5017266 Piezoelectric transducer |
| 05/21/1991 | US5017010 High sensitivity position sensor and method |
| 04/30/1991 | CA1283733C Direct access storage unit |
| 04/24/1991 | EP0423877A1 Vacuum system comprising an evacuatable housing, an object holder and an object carrier which is detachably coupled thereto |
| 04/17/1991 | EP0422548A2 Atomic force microscope |
| 04/10/1991 | EP0421355A2 Scanning tunneling microscope |
| 04/10/1991 | EP0421354A2 Scanning tunneling microscope |
| 02/12/1991 | US4992728 Electrical probe incorporating scanning proximity microscope |
| 02/12/1991 | US4992659 Near-field lorentz force microscopy |
| 01/30/1991 | EP0410131A1 Near-field Lorentz force microscopy |
| 01/22/1991 | US4987367 Method and apparatus for predicting deterioration of a member constituting a part of equipment |
| 01/22/1991 | US4987303 Micro-displacement detector device, piezo-actuator provided with the micro-displacement detector device and scanning probe microscope provided with the piezo-actuator |
| 01/16/1991 | EP0407835A2 Atomic force microscope |
| 01/16/1991 | EP0407460A1 An integrated mass storage device. |
| 01/02/1991 | EP0404799A1 Integrated scanning tunneling microscope. |
| 11/22/1990 | EP0398334A1 Position detecting apparatus |
| 11/22/1990 | EP0398085A1 High sensitivity position-sensing method |
| 11/22/1990 | EP0397799A1 A piezoelectric motion transducer and an integrated scanning tunneling microscope using the same. |
| 11/14/1990 | EP0397416A1 Imaging apparatus and method |
| 11/08/1990 | CA2016002A1 Imaging apparatus and method |
| 10/31/1990 | EP0394962A2 Atomic force microscope |
| 10/31/1990 | EP0394668A1 Apertureless near field optical microscopy |
| 10/16/1990 | USRE33387 Atomic force microscope and method for imaging surfaces with atomic resolution |
| 10/10/1990 | EP0391429A2 Micro-displacement detector device, piezo-actuator provided with the micro-displacement detector device and scanning probe microscope provided with the piezo-actuator |
| 09/04/1990 | US4954770 Spin-polarization detector |
| 09/04/1990 | US4954704 Method to increase the speed of a scanning probe microscope |
| 08/08/1990 | EP0381113A2 Tunnel current data storage apparatus having separate lever bodies |
| 08/07/1990 | US4947034 Apertureless near field optical microscope |
| 07/18/1990 | EP0378444A2 Reproducing apparatus |
| 06/12/1990 | CA1270132A1 Method and atomic force microscope for imaging surfaces with atomic resolution |
| 05/10/1990 | DE3929735A1 Finely controlling point of scanning tunnelling microscope - exerting electrostatic forces on metallised oxide diaphragm deflected vertically by tensions in two directions |
| 05/08/1990 | US4924091 Scanning ion conductance microscope |
| 05/03/1990 | WO1990004753A1 Photon scanning tunneling microscopy |
| 04/17/1990 | US4918309 Method for investigating surfaces at nanometer and picosecond resolution and laser-sampled scanning tunneling microscope for performing said method |
| 04/03/1990 | US4914293 Microscope apparatus |
| 04/03/1990 | US4912822 Method of making an integrated scanning tunneling microscope |
| 03/06/1990 | US4906840 Integrated scanning tunneling microscope |
| 01/17/1990 | EP0350874A2 Surface analysis method and apparatus |
| 12/26/1989 | US4889988 Feedback control for scanning tunnel microscopes |
| 11/28/1989 | US4883959 Scanning surface microscope using a micro-balance device for holding a probe-tip |
| 11/02/1989 | DE3812684A1 Method for fast scanning of uneven surfaces with the scanning tunnel microscope |
| 10/17/1989 | US4874946 Method and apparatus for analyzing the internal chemistry and compositional variations of materials and devices |