| Patents for G01Q 20 - Monitoring the movement or position of the probe (1,663) |
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| 03/08/2005 | US6862925 Device for contacting and/or modifying a surface having a cantilever and a method for production of said cantilever |
| 03/02/2005 | EP1290404B1 Sample for simultaneously conducting electro-chemical and topographic near-field microscopy |
| 03/02/2005 | EP1135691B1 Electrostatic force detector with cantilever and shield |
| 03/02/2005 | CN1587981A Light-spot tracking device of atomic force microscope |
| 03/01/2005 | US6861651 Electron-optical corrector for eliminating third-order aberations |
| 03/01/2005 | US6861648 Scanning probe microscopy inspection and modification system |
| 02/24/2005 | WO2004075204A3 Measuring system for the combined scanning and analysis of microtechnical components comprising electrical contacts |
| 02/24/2005 | US20050040836 Multiple local probe measuring device and method |
| 02/17/2005 | WO2005015570A1 Probe for probe microscope using transparent substrate, method of producing the same, and probe microscope device |
| 02/17/2005 | US20050035289 Differential in-plane tunneling current sensor |
| 02/09/2005 | EP1327137A4 Microcantilever rheometer |
| 02/08/2005 | US6851301 Cantilever for scanning probe microscope |
| 02/03/2005 | WO2005010501A1 Scanning-type probe microscope |
| 02/03/2005 | US20050023481 Method of and an apparatus for measuring a specimen by means of a scanning probe microscope |
| 01/27/2005 | WO2004082830A3 Sample manipulation system |
| 01/26/2005 | CN1186768C Electronic beam recording apparatus and electronic beam recording method |
| 01/20/2005 | US20050012936 Scanning probe microscope and measurement method using the same |
| 01/18/2005 | US6844550 Multi-beam multi-column electron beam inspection system |
| 01/13/2005 | US20050006600 Method and apparatus for specimen fabrication |
| 01/13/2005 | US20050005688 Dual stage instrument for scanning a specimen |
| 01/06/2005 | US20050001178 Multi-column charged particle optics assembly |
| 01/04/2005 | US6838675 Specimen observation system for applying external magnetic field |
| 12/23/2004 | WO2004112050A1 Integrated optical displacement sensors for scanning probe microscopy |
| 12/23/2004 | US20040256552 Cantilever array, method of manufacturing the array, and scanning probe microscope, sliding device of guide and rotating mechanism, sensor, homodyne laser interferometer, and laser doppler interferometer with specimen light excitation function, using the array, and cantilever |
| 12/23/2004 | US20040255651 Dynamic activation for an atomic force microscope and method of use thereof |
| 12/16/2004 | US20040250608 Removable probe sensor assembly and scanning probe microscope |
| 12/07/2004 | US6828571 Apparatus and methods of controlling surface charge and focus |
| 12/07/2004 | US6828566 Method and apparatus for specimen fabrication |
| 12/07/2004 | US6828554 Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same |
| 12/01/2004 | EP1482297A1 Scanning probe microscope and specimen surface structure measuring method |
| 11/18/2004 | WO2001097902A9 Medical imaging, diagnosis, and therapy using a scanning single optical fiber system |
| 11/18/2004 | US20040228258 Method and apparatus for reading an array of thermal |
| 11/11/2004 | US20040222377 Patterned wafer inspection method and apparatus therefor |
| 11/04/2004 | US20040216518 Multiple plate tip or sample scanning reconfigurable scanned probe microscope with transparent interfacing of far-field optical microscopes |
| 11/03/2004 | CN1174417C Magnetic sensing of motion in microfabricated device |
| 11/02/2004 | US6810720 Active probe for an atomic force microscope and method of use thereof |
| 10/27/2004 | EP1141673B1 Method and device for simultaneously determining the adhesion, friction, and other material properties of a sample surface |
| 10/26/2004 | US6809306 Scanning unit and scanning microscope having the same |
| 10/21/2004 | DE10024634B4 Elektronenstrahl-Belichtungsvorrichtung und -verfahren Electron beam exposure apparatus and method |
| 10/19/2004 | US6806958 Microforce measurement method and apparatus |
| 10/14/2004 | DE10297054T5 Messkopf für ein Rasterkraftmikroskop und weitere Anwendungen Probe for an atomic force microscope and other applications |
| 10/12/2004 | US6803573 Scanning electron microscope |
| 10/07/2004 | US20040195523 Device for reducing the impact of distortions in a microscope |
| 09/30/2004 | WO2004082830A2 Sample manipulation system |
| 09/28/2004 | US6798226 Multiple local probe measuring device and method |
| 09/28/2004 | US6797954 Patterned wafer inspection method and apparatus therefor |
| 09/21/2004 | US6794663 Method and apparatus for specimen fabrication |
| 09/16/2004 | US20040181148 Optical scanning observation apparatus |
| 09/16/2004 | US20040178372 End effector for supporting a microsample |
| 09/16/2004 | US20040178355 Sample manipulation system |
| 09/15/2004 | CN1167079C Electron beam illuminating device |
| 09/09/2004 | DE10307561A1 Meßanordnung zur kombinierten Abtastung und Untersuchung von mikrotechnischen, elektrische Kontakte aufweisenden Bauelementen Measuring arrangement for combined sampling and analysis of micro-technical, electrical contacts having components |
| 09/08/2004 | EP1454335A1 Measurement device for electron microscope |
| 09/07/2004 | US6788086 Scanning probe system with spring probe |
| 09/02/2004 | WO2004075204A2 Measuring system for the combined scanning and analysis of microtechnical components comprising electrical contacts |
| 09/01/2004 | EP1451848A1 Device for reducing the impact of distortions in a microscope |
| 08/26/2004 | WO2004044943A3 Retarding electron beams in multiple electron beam pattern generation |
| 08/26/2004 | US20040164244 Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same |
| 08/26/2004 | US20040164234 Near field microscope including waveguide resonator |
| 08/19/2004 | WO2004070765A1 Resistive cantilever spring for probe microscopy |
| 08/17/2004 | US6777698 Electron beam exposure apparatus exposing method using an electron beam |
| 08/11/2004 | CN1519556A Method for analyzing roughness on surface of film |
| 08/11/2004 | CN1161605C Apparatus for measuring exchange force |
| 07/29/2004 | WO2004063723A1 Scanning type probe microscope, and method of observing changes in molecular structure |
| 07/28/2004 | EP1441215A1 Optical scanning type observation device |
| 07/22/2004 | WO2004061427A1 Measuring method and device for vibration frequency of multi-cantilever |
| 07/22/2004 | US20040142409 Motion sensor for monitoring migration, vibrational movement, oscillations and fluctuation in semen, ear cilia, bacteria and kinesins |
| 07/22/2004 | US20040140426 Scanning probe microscope with improved probe head mount |
| 07/22/2004 | US20040140424 Scanning probe microscope with improved probe tip mount |
| 07/15/2004 | US20040135096 Microfabrication apparatus and microfabrication method |
| 07/01/2004 | US20040123651 Scanning probe system with spring probe |
| 07/01/2004 | DE10084431T5 Aktive Sonde für ein Rasterkraftmikroskop mit atomarer Auflösung sowie Verfahren zur Verwendung derselben Active probe for an atomic force microscope with atomic resolution and methods of using same |
| 06/24/2004 | US20040122328 Integrated optical scanning image acquisition and display |
| 06/24/2004 | US20040119022 Charged particle beam apparatus and charged particle beam irradiation method |
| 06/24/2004 | US20040118207 Differential in-plane tunneling current sensor |
| 06/23/2004 | EP1430486A2 Method and device for analysing a sample by means of a raster scanning probe microscope |
| 06/23/2004 | EP1430485A2 Device and method for scanning probe microscope |
| 06/16/2004 | EP1428058A2 Diffractive optical position detector |
| 06/16/2004 | EP1427983A2 Multiple plate tip or sample scanning reconfigurable scanned probe microscope with transparent interfacing of far-field optical microscopes |
| 06/15/2004 | US6748795 Pendulum scanner for scanning probe microscope |
| 06/15/2004 | US6748794 Method for replacing a probe sensor assembly on a scanning probe microscope |
| 06/10/2004 | US20040107770 Device for contacting and/or modifying a surface having a cantilever and a method for production of said cantilever |
| 06/08/2004 | US6747265 Optical cantilever having light shielding film and method of fabricating the same |
| 06/08/2004 | US6745618 Scanning probe microscope |
| 06/03/2004 | US20040106862 Electron beam apparatus, and inspection instrument and inspection process thereof |
| 06/03/2004 | US20040105160 Particle-optical apparatus, electron microscopy system and electron lithography system |
| 05/27/2004 | WO2004044943A2 Retarding electron beams in multiple electron beam pattern generation |
| 05/25/2004 | US6740876 Scanning probe microscope |
| 05/18/2004 | US6737646 Enhanced scanning probe microscope and nanolithographic methods using the same |
| 05/13/2004 | US20040090194 Retarding electron beams in multiple electron beam pattern generation |
| 05/13/2004 | US20040089821 Method and apparatus for specimen fabrication |
| 05/13/2004 | US20040089059 Scanning probe microscope and specimen observation method and semiconductor device manufacturing method using said scanning probe microscope |
| 05/11/2004 | US6734428 Multi-beam multi-column electron beam inspection system |
| 05/11/2004 | US6734425 Scanning probe system with spring probe and actuation/sensing structure |
| 05/06/2004 | WO2004038762A2 Nanomotion sensing system and method |
| 05/06/2004 | US20040084618 Scanning probe with digitised pulsed-force mode operation and real-time evaluation |
| 04/29/2004 | US20040079142 Apparatus and method for isolating and measuring movement in metrology apparatus |
| 04/28/2004 | EP1412728A1 Apparatus for parallel detection of the behaviour of mechanical micro-oscillators |
| 04/28/2004 | EP0914669B1 Detector devices |
| 04/22/2004 | US20040074288 Method of manufacturing the multi-tip probe, a multi-tip probe, and surface characteristic analysis apparatus |