Patents
Sitemap › G01 - Measuring; Testing › G01Q - Scanning-probe techniques or apparatus; Applications of scanning-probe techniques, e.g. scanning-probe microscopy [spm] › G01Q 20 - Monitoring the movement or position of the probe
Patents for G01Q 20 - Monitoring the movement or position of the probe (1,663)
01/2006
01/12/2006WO2006003789A1 Method and device for analyzing distribution of coercive force in vertical magnetic recording medium using magnetic force microscope
01/11/2006CN2751298Y Point follower of needle-point scanning
01/10/2006US6985425 Electron beam recorder and method thereof
01/10/2006US6984589 Method for determining etching process conditions and controlling etching process
12/2005
12/28/2005EP1609164A1 Resistive cantilever spring for probe microscopy
12/27/2005US6979823 Patterned wafer inspection method and apparatus therefor
12/22/2005US20050279158 Atomic force microscope and corrector thereof and measuring method
12/20/2005US6977375 Multi-beam multi-column electron beam inspection system
12/15/2005WO2005119697A1 Tip structure for scanning devices, method of its preparation and devices thereon
12/15/2005WO2005119206A1 Method and device for controlling photo-excitation q value of vibrator
12/13/2005US6975898 Medical imaging, diagnosis, and therapy using a scanning single optical fiber system
12/08/2005US20050269510 Electrical scanning probe microscope apparatus
12/01/2005US20050264825 Sensor with cantilever and optical resonator
11/2005
11/29/2005US6969853 Pattern width measuring apparatus, pattern width measuring method, and electron beam exposure apparatus
11/24/2005WO2005112043A1 Multi-column charged particle optics assembly
11/23/2005EP0981051B1 Optical probe for proximity field measurements
11/22/2005US6967328 Method for the electron-microscopic observation of a semiconductor arrangement and apparatus therefor
11/17/2005US20050253083 Charged particle beam apparatus and charged particle beam irradiation method
11/17/2005DE10346349B4 Sondenanordnung für ein Rastersondeninstrument The probe assembly for a scanning probe instrument
11/10/2005US20050247874 Scanning probe microscope and molecular structure change observation method
11/03/2005WO2005103604A2 Metallic thin film piezoresistive transduction in micromechanical and nanomechanical devices and its application in self-sensing spm probes
11/03/2005US20050242283 Scanning probe microscope and specimen surface structure measuring method
10/2005
10/27/2005US20050239047 Methods and devices for determining a cell characteristic, and applications employing the same
10/25/2005US6958477 Electron beam apparatus, and inspection instrument and inspection process thereof
10/18/2005US6956211 Charged particle beam apparatus and charged particle beam irradiation method
10/13/2005WO2005095922A1 Nanogap series substance capturing, detecting and identifying method and device
10/12/2005CN1682315A Sensor with suspending arm and optical resonator
10/11/2005US6953519 making a cantilever using lithographic techniques and forming microscopic electrodes at a distal end of the cantilever by sputtering and gas-assisted etching processing using a focused charge particle beam
10/05/2005EP1583104A2 Nanometric mechanical oscillator, method of fabricating the same, and measurement apparatus using the same
10/05/2005EP1582856A1 Scanning type probe microscope, and method of observing changes in molecular structure
10/05/2005EP1342049B1 Scanning probe with digitised pulsed-force mode operation and real-time evaluation
10/04/2005US6952492 Method and apparatus for inspecting a semiconductor device
10/04/2005US6951129 Scanning probe microscope with improved probe head mount
09/2005
09/29/2005US20050212529 Method and apparatus for measuring electrical properties in torsional resonance mode
09/29/2005US20050210966 Scanning probe microscope and measuring method by means of the same
09/28/2005CN2729693Y Scanning near field optical microscope with complete fibre-optical probe
09/21/2005EP1577660A1 Measuring method and device for vibration frequency of multi-cantilever
09/20/2005US6945100 Scanning probe microscope with improved probe tip mount
09/15/2005WO2005086172A1 System and method for detecting the displacement of a plurality of micro- and nanomechanical elements, such as micro-cantilevers
09/14/2005EP1575058A1 System and method for detecting the displacement of a plurality of micro- and nanomechanical elements, such as micro-cantilevers
09/14/2005EP1574815A2 A dual stage instrument for scanning a specimen
09/13/2005US6943574 Multiple local probe measuring device and method
09/13/2005US6943351 Multi-column charged particle optics assembly
09/01/2005US20050189480 Long travel near-field scanning optical microscope
08/2005
08/30/2005US6936981 Retarding electron beams in multiple electron beam pattern generation
08/25/2005US20050184746 Multiple local probe measuring device and method
08/17/2005EP1563275A2 Nanomotion sensing system and method
08/16/2005US6930308 SEM profile and surface reconstruction using multiple data sets
08/11/2005US20050172703 Scanning probe microscopy inspection and modification system
08/09/2005US6927400 Sample manipulation system
08/04/2005US20050167576 Near-field optical probe
08/02/2005US6924489 Device for reducing the impact of distortions in a microscope
07/2005
07/28/2005US20050161594 Plasmon enhanced near-field optical probes
07/28/2005DE19900114B4 Verfahren und Vorrichtung zur gleichzeitigen Bestimmung zumindest zweier Materialeigenschaften einer Probenoberfläche, umfassend die Adhäsion, die Reibung, die Oberflächentopographie sowie die Elastizität und Steifigkeit Method and apparatus for the simultaneous determination of at least two material properties of a sample surface, comprising the adhesion, friction, the surface topography as well as the elasticity and stiffness
07/19/2005US6919556 System and method for monitoring and evaluating solid and semi-solid materials
07/14/2005US20050151077 Scanning probe microscope and specimen observation method and semiconductor device manufacturing method using said scanning probe microscope
07/13/2005EP1553048A1 Nanometric mechanical oscillator
07/13/2005EP1553047A1 Nanometric mechanical oscillator
07/05/2005US6914249 Particle-optical apparatus, electron microscopy system and electron lithography system
06/2005
06/28/2005US6910368 Removable probe sensor assembly and scanning probe microscope
06/16/2005WO2005055245A1 High sensitivity scanning probe system
06/16/2005DE10346349A1 Sondenanordnung für ein Rastersondeninstrument The probe assembly for a scanning probe instrument
06/15/2005EP1540661A1 Sensor with cantilever and optical resonator
06/14/2005US6906450 Resonant probe driving arrangement and a scanning probe microscope including such an arrangement
06/07/2005US6901800 Differential in-plane tunneling current sensor
06/02/2005US20050117163 High sensitivity scanning probe system
05/2005
05/26/2005US20050109937 Scanning electron microscope
05/24/2005US6895818 Differential in-plane tunneling current sensor
05/19/2005US20050103996 Measurement device for electron microscope
05/18/2005EP1531327A1 SOM cantilever with hole with tip filling with a projected shape
05/17/2005US6894287 Microfabrication apparatus and microfabrication method
05/17/2005US6894272 Device for simultaneously carrying out an electrochemical and a topographical near-field microscopy
05/12/2005WO2005043551A1 Cantilever assembly
05/11/2005EP1530220A1 Cantilever assembly
05/10/2005US6890772 Method and apparatus for determining two dimensional doping profiles with SIMS
05/06/2005WO2004038762A3 Nanomotion sensing system and method
05/05/2005US20050092907 Oscillating scanning probe microscope
05/03/2005US6888135 Scanning probe microscope with probe formed by single conductive material
04/2005
04/26/2005US6885445 Electron microscope and spectroscopy system
04/26/2005US6884981 Diffractive optical position detector
04/21/2005US20050082476 Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same
04/19/2005US6881954 Scanning probe microscope and method of measurement
04/19/2005US6881947 Near-field optical probe
04/19/2005US6880386 Method and device for simultaneously determining the adhesion, friction, and other material properties of a sample surface
04/14/2005WO2005034134A1 Probe arrangement for a raster probe instrument
04/12/2005US6877365 Scanning probe microscope and specimen observation method and semiconductor device manufacturing method using said scanning probe microscope
04/07/2005DE10342644A1 Raster force microscopy probe has nano structure probe tip arm with integrated CMOS piezoelectric sensor
04/06/2005EP1274966B1 Resonant probe driving arrangement and scanning probe microscope
03/2005
03/31/2005WO2004012201A3 Method of and apparatus for calibrating cantilevers
03/31/2005US20050066714 Active probe for an atomic force microscope and method for use thereof
03/31/2005US20050066713 Method to transiently detect samples in atomic force microscopes
03/31/2005DE10226801B4 Oberflächenmessvorrichtung und Verfahren zur mechanischen sowie berührungslosen-optischen Untersuchung von Objektoberflächen Surface measuring apparatus and methods for mechanical and non-contact optical investigation of object surfaces
03/29/2005US6872958 Platform positioning system
03/29/2005US6871527 Measurement head for atomic force microscopy and other applications
03/24/2005US20050061970 Apparatus and method for a scanning probe microscope
03/23/2005EP1247063A4 Scanning force microscope probe cantilever with reflective structure
03/17/2005WO2005024496A2 Integrated optical scanning image acquisiting and display
03/17/2005US20050056783 Object inspection and/or modification system and method
03/10/2005US20050054029 Method and apparatus for specimen fabrication
03/08/2005US6864483 Method for increasing the measurement information available from a transmission electron microscope and a transmission electron microscopy device
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