| Patents for G01Q 20 - Monitoring the movement or position of the probe (1,663) |
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| 05/15/2003 | US20030089162 Dual stage instrument for scanning a specimen |
| 05/08/2003 | WO2003038410A1 Optical scanning type observation device |
| 05/08/2003 | US20030086094 Microforce measurement method and apparatus |
| 05/08/2003 | US20030085355 Electron beam apparatus, and inspection instrument and inspection process thereof |
| 04/22/2003 | US6552340 Autoadjusting charged-particle probe-forming apparatus |
| 04/22/2003 | US6552339 Micro goniometer for scanning probe microscopy |
| 04/10/2003 | US20030066963 Multi-beam multi-column electron beam inspection system |
| 04/08/2003 | US6545492 Multiple local probe measuring device and method |
| 04/08/2003 | US6545275 Beam evaluation |
| 04/08/2003 | US6545274 Methods and devices for determining times for maintenance activity performed on a charged-particle-beam microlithography apparatus, and microelectronic-device-manufacturing methods comprising same |
| 04/03/2003 | WO2003028038A2 Method and device for analysing a sample by means of a raster scanning probe microscope |
| 04/03/2003 | WO2003028037A2 Device and method for scanning probe microscope |
| 04/02/2003 | EP0868648B1 Integrated silicon profilometer and afm head |
| 04/01/2003 | US6542455 Optical probe array head device |
| 03/20/2003 | US20030053048 Electron microscope and spectroscopy system |
| 03/13/2003 | US20030047675 Diffractive optical position detector |
| 03/12/2003 | EP1290404A1 Sample for simultaneously conducting electro-chemical and topographic near-field microscopy |
| 03/12/2003 | CN1402830A Precision stage |
| 03/11/2003 | US6530267 Scanning system having a deflectable probe tip |
| 03/11/2003 | US6530266 Active probe for an atomic force microscope and method of use thereof |
| 03/06/2003 | WO2003019241A2 Diffractive optical position detector |
| 03/06/2003 | WO2003019238A2 Multiple plate tip or sample scanning reconfigurable scanned probe microscope with transparent interfacing of far-field optical microscopes |
| 03/06/2003 | US20030042409 Intermittent contact imaging under force-feedback control |
| 03/04/2003 | US6528780 Optical probe for proximity field |
| 02/27/2003 | WO2003016874A1 Vibration type probe sensor |
| 02/20/2003 | US20030034457 Electron-optical corrector for eliminating third-order aberations |
| 02/20/2003 | US20030033863 Atomic force microscopy for high throughput analysis |
| 02/11/2003 | US6518582 Electron beam apparatus, and inspection instrument and inspection process thereof |
| 02/11/2003 | US6518571 Through-the-substrate investigation of flip-chip IC's |
| 02/04/2003 | US6515274 Near-field scanning optical microscope with a high Q-factor piezoelectric sensing element |
| 01/30/2003 | WO2003009305A2 Measurement head for atomic force microscopy and other applications |
| 01/30/2003 | US20030020500 Multiple local probe measuring device and method |
| 01/29/2003 | CN1393860A Electronic beam recording apparatus and electronic beam recording method |
| 01/23/2003 | WO2003007328A1 Device for reducing the impact of distortions in a microscope |
| 01/23/2003 | US20030015653 Measurement head for atomic force microscopy and other applications |
| 01/15/2003 | EP1274966A2 Resonant probe driving arrangement and scanning probe microscope |
| 01/14/2003 | US6507017 Near-field optical inspection apparatus |
| 01/09/2003 | US20030007444 Electron beam recorder and method thereof |
| 01/09/2003 | US20030007242 Enhanced scanning probe microscope and nanolithographic methods using the same |
| 01/09/2003 | US20030006372 Automatic focusing system for scanning electron microscope equipped with laser defect detection function |
| 01/09/2003 | US20030005755 Enhanced scanning probe microscope |
| 01/02/2003 | EP1271502A2 Electron beam recorder and method thereof |
| 01/02/2003 | EP1269168A1 Methods and apparatus for atomic force microscopy |
| 12/27/2002 | WO2002103328A1 Cantilever array, method of manufacturing the array, and scanning probe microscope, sliding device of guide and rotating mechanism, sensor, homodyne laser interferometer, and laser doppler interferometer with specimen light excitation function, using the array, and cantilever |
| 12/27/2002 | WO2001077694A9 Ultrananocrystalline diamond cantilever wide dynamic range acceleration/vibration/pressure sensor |
| 12/26/2002 | US20020197750 Method and apparatus for inspecting a semiconductor device |
| 12/26/2002 | US20020195574 Method and apparatus for inspecting a semiconductor device |
| 12/26/2002 | US20020195560 Manufacturing fluid including flourescent dye penetrant and method for using to make components |
| 12/26/2002 | US20020195553 High sensitivity deflection sensing device |
| 12/19/2002 | DE10224212A1 Selbstdetektierender SPM-Messkopf Selbstdetektierender SPM probe |
| 12/05/2002 | US20020178802 Scanning probe microscope and method of processing signals in the same |
| 12/05/2002 | US20020178801 Self-detecting type SPM probe |
| 12/04/2002 | EP1261878A2 Precision stage |
| 11/28/2002 | US20020174716 Method for replacing a probe sensor assembly on a scanning probe microscope |
| 11/28/2002 | US20020174715 Cantilever for scanning probe microscope |
| 11/27/2002 | CN1095094C Automated non-visual method of locating periodically arranged sub-micron objects |
| 11/20/2002 | EP1257780A1 Method for increasing the measurement information available from a transmission electron microscope and a transmission electron microscopy device |
| 11/12/2002 | US6479817 Cantilever assembly and scanning tip therefor with associated optical sensor |
| 11/06/2002 | CN1093943C Automatic focus device |
| 10/22/2002 | US6469293 Multiprobe and scanning probe microscope |
| 10/22/2002 | US6469288 Near field optical microscope and probe for near field optical microscope |
| 10/16/2002 | EP1249031A1 Electron-optical corrector for eliminating third-order aberrations |
| 10/10/2002 | WO2002080218A1 Magnetic field applying sample observing system |
| 10/10/2002 | WO2002080187A1 Array and method for quasi-parallel probe microscopy |
| 10/10/2002 | WO2001097902B1 Medical imaging, diagnosis, and therapy using a scanning single optical fiber system |
| 10/10/2002 | DE10115690A1 Quasi-Paralleles Rasterkraftmikroskop Quasi-Parallel scanning force microscope |
| 10/09/2002 | EP1247063A1 Scanning force microscope probe cantilever with reflective structure |
| 10/09/2002 | CN1373891A Magnetic sensing of motion in microfabricated device |
| 09/26/2002 | US20020135755 Scanning probe microscope assembly |
| 09/24/2002 | US6455838 High sensitivity deflection sensing device |
| 09/18/2002 | EP1196939A4 Object inspection and/or modification system and method |
| 09/12/2002 | WO2002071412A1 Enhanced scanning probe microscope |
| 09/12/2002 | US20020127050 Platform positioning system |
| 09/10/2002 | US6448553 Signal detector to be used with scanning probe and atomic force microscope |
| 08/29/2002 | US20020117635 Patterned wafer inspection method and apparatus therefor |
| 08/29/2002 | US20020117611 Object inspection and/or modification system and method |
| 08/27/2002 | US6441371 Scanning probe microscope |
| 08/22/2002 | WO2000019166A9 Multidimensional sensing system for atomic force miscroscopy |
| 08/20/2002 | US6435015 Scanning probe microscope |
| 08/08/2002 | US20020104963 Multidimensional sensing system for atomic force microscopy |
| 08/01/2002 | US20020100872 Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same |
| 07/30/2002 | US6426501 Defect-review SEM, reference sample for adjustment thereof, method for adjustment thereof, and method of inspecting contact holes |
| 07/25/2002 | US20020096635 Mask defect repair method |
| 07/23/2002 | US6423967 Detection apparatus and detection method to be used for scanning probe and observation apparatus and observation method |
| 07/23/2002 | US6422077 Ultrananocrystalline diamond cantilever wide dynamic range acceleration/vibration/pressure sensor |
| 07/23/2002 | US6422069 Self-exciting and self-detecting probe and scanning probe apparatus |
| 07/18/2002 | US20020092982 High frequency dithering probe for high speed scanning probe microscope |
| 07/18/2002 | US20020092359 Sensor apparatus and cantilever for it |
| 07/17/2002 | CN1359468A Atomic force microscope and driving method therefor |
| 07/11/2002 | US20020088937 Scanning probe microscope |
| 07/09/2002 | US6415654 Scanning probe microscope system including removable probe sensor assembly |
| 06/27/2002 | US20020079463 Method and apparatus for specimen fabrication |
| 06/27/2002 | US20020079446 Scanning probe microscope |
| 06/27/2002 | DE10062049A1 Verfahren zur Abbildung einer Probenoberfläche mit Hilfe einer Rastersonde sowie Rastersondenmikroskop Method for imaging a sample surface using a scanning probe and scanning probe microscope |
| 06/25/2002 | US6410929 Electron beam irradiation apparatus |
| 06/20/2002 | WO2002048644A1 Scanning probe with digitised pulsed-force mode operation and real-time evaluation |
| 06/20/2002 | WO2001097902A3 Medical imaging, diagnosis, and therapy using a scanning single optical fiber system |
| 06/18/2002 | US6405584 Probe for scanning probe microscopy and related methods |
| 06/12/2002 | EP0737299B1 Scanning force microscope with detector probe |
| 06/06/2002 | US20020067170 Scanning microwave microscope capable of realizing high resolution and microwave resonator |