Patents
Sitemap › G01 - Measuring; Testing › G01Q - Scanning-probe techniques or apparatus; Applications of scanning-probe techniques, e.g. scanning-probe microscopy [spm] › G01Q 20 - Monitoring the movement or position of the probe
Patents for G01Q 20 - Monitoring the movement or position of the probe (1,663)
09/2012
09/26/2012EP2502876A1 Micromechanical device with a cantilever and an integrated electrical device
09/26/2012CN101975873B Microscopic white light interferometry-based nano probe device
09/12/2012CN102662085A Sensor for noncontact profiling of a surface
09/11/2012US8266718 Modulated microwave microscopy and probes used therewith
09/06/2012US20120227138 Displacement detection mechanism and scanning probe mircoscope using the same
08/2012
08/29/2012CN101952706B Scanning type probe microscope
08/22/2012CN1979126B Method and device for analysis of a sample
08/14/2012US8245316 Scanning probe microscope with periodically phase-shifted AC excitation
08/09/2012US20120204296 Multiple modulation heterodyne infrared spectroscopy
08/09/2012US20120204295 Fast-scanning spm scanner and method of operating same
08/09/2012CA2825038A1 Adaptive mode scanning probe microscope
08/01/2012EP2480132A1 Optical probe system with increased scanning speed
08/01/2012EP1441215B1 Optical scanning type observation device
07/2012
07/18/2012CN101960287B Fast-scanning spm and method of operating same
07/17/2012US8225418 Method for processing output of scanning type probe microscope, and scanning type probe microscope
07/10/2012US8220066 Vibration compensation in probe microscopy
07/04/2012CN102548471A Optical probe system with increased scanning speed
07/03/2012US8214916 Large area, homogeneous array fabrication including leveling with use of bright spots
07/03/2012US8214915 Cantilever, cantilever system, scanning probe microscope, mass sensor apparatus, viscoelasticity measuring instrument, manipulation apparatus, displacement determination method of cantilever, vibration method of cantilever and deformation method of cantilever
06/2012
06/28/2012WO2012084994A1 Atomic force microscope probe, method for preparing same, and uses thereof
06/20/2012CN102507984A Scanning probe microscopy and motion detection device thereof
06/13/2012EP1985991B1 Measuring probe, sample surface measuring apparatus and sample surface measuring method
05/2012
05/31/2012US20120137395 Scanned probe microscope without interference or geometric constraint for single or multiple probe operation in air or liquid
05/24/2012US20120131702 Method and Apparatus of Using Peak Force Tapping Mode to Measure Physical Properties of a Sample
05/24/2012DE102010052037A1 Sensor zum berührungslosen Abtasten einer Oberfläche Sensor for contactless scanning a surface
05/17/2012US20120121935 Probe, method for manufacturing probe, probe microscope, magnetic head, method for manufacturing magnetic head, and magnetic recording/reproducing device
05/15/2012US8181267 Scanning-type probe microscope
05/02/2012EP2447723A1 Scanning probe microscope and probe proximity detection method therefor
04/2012
04/24/2012US8166567 Fast-scanning SPM scanner and method of operating same
04/12/2012US20120085924 Method and apparatus for specimen fabrication
03/2012
03/29/2012US20120079633 Apparatus and Method for Isolating and Measuring Movement in Metrology Apparatus
03/20/2012US8141168 Scanning probe microscope and a method to measure relative-position between probes
03/01/2012US20120054924 SPM Probe and Inspection Device for Light Emission Unit
02/2012
02/23/2012US20120047610 Cantilever-based optical interface force microscope
02/22/2012CN101278357B 用于对微机械及纳米机械结构进行检验的系统及方法 System and method for micro-mechanical and nano-mechanical structure inspection
02/07/2012US8109135 Cantilever assembly
02/02/2012US20120030846 Atomic Force Microscopy System and Method for Nanoscale Measurement
02/01/2012CN102338811A Real-time feedback method based on probability estimation in nanometer operating task space
01/2012
01/31/2012US8108942 Probe microscope
01/26/2012WO2012011012A1 Micro optical device
01/26/2012WO2012010738A1 Microscopy device comprising a tuning-fork probe and a control unit for a nanosensor based on a tuning fork
01/11/2012EP2404164A1 A scanned probe microscope without interference or geometric constraint for single or multiple probe operation in air or liquid
01/03/2012US8091143 Atomic force microscopy probe
01/03/2012US8087288 Scanning stylus atomic force microscope with cantilever tracking and optical access
12/2011
12/29/2011US20110321202 Dynamic mode nano-scale imaging and position control using deflection signal direct sampling of higher mode-actuated microcantilevers
12/20/2011US8082593 Atomic force microscopy devices, arrangements and systems
12/15/2011US20110307979 Scanning-type Probe Microscope
12/07/2011CN102272610A 动态探针检测系统 Dynamic Probe Detection System
11/2011
11/17/2011DE102010012701A1 Microforce sensor for measuring micro forces at nano range and milli Newton range, has spring region provided between two support regions and stiffener marking unit, respectively, where spring regions comprise two-winged meander shape
11/16/2011EP1332510B1 Real time monitoring for simultaneous imaging and exposure in charged particle beam systems
11/03/2011US20110271411 Method and apparatus for measuring cantilever deflection in constrained spaces
11/01/2011US8051493 Probe microscopy and probe position monitoring apparatus
10/2011
10/27/2011US20110265227 Piezoelectric microcantilevers and uses in atomic force microscopy
10/13/2011US20110252512 Cantilever-based optical interfacial force microscope
10/12/2011EP2374011A1 Dynamic probe detection system
10/06/2011US20110247107 Method for processing output of scanning type probe microscope, and scanning type probe microscope
10/06/2011US20110247106 Dynamic probe detection system
09/2011
09/27/2011US8028343 Scanning probe microscope with independent force control and displacement measurements
09/22/2011US20110231965 Mode synthesizing atomic force microscopy and mode-synthesizing sensing
09/21/2011EP2367016A1 Method for processing output of scanning type probe microscope, and scanning type probe microscope
09/21/2011CN1871665B 悬臂组件 Cantilever assembly
09/14/2011EP1680788B1 Cantilever assembly
09/06/2011US8011230 Scanning probe microscope
09/01/2011WO2011104195A1 Near field optical microscope with optical imaging system
09/01/2011US20110211197 Heterodyne detection device for imaging an object by re-injection
08/2011
08/31/2011EP1376649B1 Magnetic field applying sample observing system
08/24/2011EP2360481A1 Near field optical microscope with optical imaging system
08/16/2011US7999240 Method and apparatus for specimen fabrication
08/16/2011US7997125 Miniaturized spring element and method for producing the spring element
08/11/2011DE10106854B4 Mikro-Tastkopf und Vorrichtung zum Messen einer Probenoberfläche Micro-probe and apparatus for measuring a sample surface
08/11/2011DE10084431B4 Aktive Sonde für ein Rasterkraftmikroskop mit atomarer Auflösung sowie Verfahren zur Verwendung derselben Active probe for an atomic force microscope with atomic resolution and methods of using same
08/09/2011US7992431 Piezoelectric microcantilevers and uses in atomic force microscopy
07/2011
07/13/2011EP2342532A1 Modular atomic force microscope
07/12/2011US7979916 Preamplifying cantilever and applications thereof
07/12/2011US7978344 System and method for the inspection of micro and nanomechanical structures
07/07/2011US20110167525 Probe detection system
07/05/2011US7975315 Atomic force microscope
07/05/2011US7973942 Optical displacement detection mechanism and surface information measurement device using the same
06/2011
06/30/2011US20110162117 Device for scanning a sample surface covered with a liquid
06/29/2011CN101210869B Micro- cantilever beam sensing sensitivity control system
06/28/2011US7966881 Arrangement for detecting resonance frequency shifts
06/22/2011EP2336789A1 Parallel cantilever deflection measurement
06/16/2011US20110140006 Method and apparatus for specimen fabrication
06/14/2011US7961379 Pump probe measuring device and scanning probe microscope apparatus using the device
06/09/2011US20110138506 Method of probe alignment
06/07/2011US7958566 AFM probe with variable stiffness
06/07/2011US7958565 Scan type probe microscope and cantilever drive device
06/01/2011CN102084431A Probe detection system
05/2011
05/31/2011US7952725 Surface shape measurement apparatus and exposure apparatus
05/19/2011US20110114476 Method and apparatus for specimen fabrication
05/12/2011US20110113515 Scanning Probe Microscope
04/2011
04/05/2011US7921466 Method of using an atomic force microscope and microscope
03/2011
03/31/2011WO2011036598A1 Optical probe system with increased scanning speed
03/29/2011US7916306 Optical device comprising a cantilever and method of fabrication and use thereof
03/23/2011EP2297546A1 Probe detection system
03/15/2011US7907288 Shape measuring apparatus
03/08/2011US7900506 Multi-dimensional standing wave probe for microscale and nanoscale measurement, manipulation, and surface modification
03/03/2011US20110055985 Device and method for an atomic force microscope for the study and modification of surface properties
03/03/2011US20110055983 Dynamic mode afm apparatus
03/01/2011US7897936 Method and apparatus for specimen fabrication
1 2 3 4 5 6 7 8 9 10 11 12 ... 17