| Patents for G01Q 20 - Monitoring the movement or position of the probe (1,663) |
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| 07/14/2009 | US7559261 Device and method for measuring molecule using gel substrate material |
| 07/07/2009 | US7557933 Measuring probe, sample surface measuring apparatus and sample surface measuring method |
| 07/07/2009 | US7556968 Scanning probe microscope and molecular structure change observation method |
| 06/30/2009 | US7555333 Integrated optical scanning image acquisition and display |
| 06/30/2009 | US7552625 Force sensing integrated readout and active tip based probe microscope systems |
| 06/18/2009 | WO2009074617A1 Device and method for an atomic force microscope for the study and modification of surface properties |
| 06/18/2009 | DE102007060460A1 Vorrichtung und Verfahren zur Untersuchung und Modifikation von Oberflächeneigenschaften verschiedener Materialien Device and method for the examination and modification of surface properties of various materials |
| 06/17/2009 | CN100501322C Surface texture measuring device |
| 06/10/2009 | EP2067016A1 Device for scanning a sample surface covered with a liquid |
| 06/09/2009 | US7545508 Interferometric apparatus utilizing a cantilever array to measure a surface |
| 05/28/2009 | WO2009066555A1 Scan probe microscope and probe unit for scan probe microscope |
| 05/28/2009 | US20090138994 Optical measuring head positioned to correspond to the cantilever array for measuring movement of the cantilever, whereby measuring variations in vibration frequency and/or amplitude of the cantilevers according to the rotation the disk-like base plate:biological sampling; medical diagnosis; MERSA |
| 05/27/2009 | EP2063250A1 Atomic force microscope |
| 05/22/2009 | WO2009063217A1 Microprobe, measurement system and method |
| 05/22/2009 | WO2009063145A2 Heterodyne detection device for imaging an object by re-injection |
| 04/28/2009 | US7525108 Focused ion beam apparatus for specimen fabrication |
| 04/23/2009 | WO2009018575A3 Fast-scanning spm and method of operating same |
| 04/21/2009 | US7520165 Micro structure, cantilever, scanning probe microscope and a method of measuring deformation quantity for the fine structure |
| 04/16/2009 | WO2006138697A3 Integrated displacement sensors for probe microscopy and force spectroscopy |
| 04/15/2009 | CN100478666C Micro structure, cantilever, scanning probe microscope and a method of measuring deformation quantity for the fine structure |
| 04/09/2009 | DE102007045860A1 Schaltungsanordnung für parallele Cantilever-Arrays für die Raster-Kraft-Mikroskopie Circuitry for parallel cantilever arrays for atomic force microscopy |
| 04/02/2009 | WO2009040236A1 Circuit arrangement for parallel cantilever arrays for the scanning force microscopy |
| 03/12/2009 | US20090070904 Oscillating scanning probe microscope |
| 03/05/2009 | WO2009029043A1 Quantum tunnelling sensor device and method |
| 03/04/2009 | CN201203565Y Strength association quantum imaging microscope |
| 03/04/2009 | CN101379383A Miniaturized spring element and method for producing the spring element |
| 02/12/2009 | WO2009019513A1 Vibration compensation in probe microscopy |
| 02/12/2009 | WO2008157373A3 Position control for scanning probe spectroscopy |
| 02/12/2009 | US20090041333 Scanning electron microscope |
| 02/11/2009 | EP2023373A2 Charged particle beam apparatus and irradiation method |
| 02/05/2009 | WO2009018575A2 Fast-scanning spm and method of operating same |
| 02/05/2009 | US20090032706 Fast-Scanning SPM and Method of Operating Same |
| 02/03/2009 | US7485856 Scanning probe microscopy inspection and modification system |
| 01/29/2009 | US20090027690 Measuring probe, sample surface measuring apparatus and sample surface measuring method |
| 01/29/2009 | US20090025465 Miniaturized Spring Element and Method for Producing the Spring Element |
| 01/28/2009 | EP2018527A1 An arrangement for detecting resonance frequency shifts |
| 01/22/2009 | US20090021747 Shape measuring apparatus |
| 01/21/2009 | EP2017599A2 Shape measuring apparatus |
| 01/20/2009 | US7478552 Optical detection alignment/tracking method and apparatus |
| 01/14/2009 | EP1430485B1 Device and method for scanning probe microscope |
| 01/08/2009 | US20090008578 Method and apparatus for specimen fabrication |
| 01/08/2009 | US20090007645 Piezoelectric microcantilevers and uses in atomic force microscopy |
| 01/07/2009 | EP1428058A4 Diffractive optical position detector |
| 01/07/2009 | CN101341388A Optical apparatus comprising cantilever, method for manufacturing and using the same |
| 01/06/2009 | US7474410 Nanometer-precision tip-to-substrate control and pattern registration for scanning-probe lithography |
| 01/06/2009 | US7473894 Apparatus and method for a scanning probe microscope |
| 01/02/2009 | DE102007031112A1 Vorrichtung und Verfahren zur Untersuchung von Oberflächeneigenschaften verschiedenartiger Materialien Device and method for the examination of surface properties of various materials |
| 01/01/2009 | US20090002714 Optical Device Comprising a Cantilever and Method of Fabrication and Use Thereof |
| 12/31/2008 | WO2009000885A1 Apparatus and method for investigating surface properties of different materials |
| 12/25/2008 | US20080315092 Scanning probe microscopy inspection and modification system |
| 12/24/2008 | WO2008157373A2 Position control for scanning probe spectroscopy |
| 12/18/2008 | US20080308718 Position control for scanning probe spectroscopy |
| 12/11/2008 | WO2008148951A1 Atomic force microscopy probe |
| 12/04/2008 | WO2008145340A1 Device and method for analyzing biological systems, and solid body system |
| 12/04/2008 | WO2008145103A1 Microforce sensor, particularly for cmm and afm applications |
| 12/04/2008 | US20080296516 Method and apparatus for specimen fabrication |
| 12/04/2008 | US20080296497 Method and apparatus for specimen fabrication |
| 12/04/2008 | DE102007025240A1 Vorrichtung und Verfahren zur Untersuchung biologischer Systeme und Festkörpersystem Apparatus and method for the study of biological systems and solid-state system |
| 12/04/2008 | DE102007024992A1 Mikrokraftsensor, insbesondere für CMM- und AFM-Anwendungen Micro force sensor, in particular for CMM and AFM applications |
| 11/27/2008 | WO2008115862A3 Fast scanning spm scanner and method of operating same |
| 11/20/2008 | US20080284422 Method and Device for Analyzing Distribution of Coercive Force in Vertical Magnetic Recording Medium Using Magnetic Force Microscope |
| 11/19/2008 | EP1993103A1 Cantilever assembly and process of manufacturing the same |
| 11/19/2008 | EP1993102A1 Cantilever assembly and process of manufacturing the same |
| 11/06/2008 | WO2008133636A1 Driving scanning fiber devices with variable frequency drive signals |
| 11/06/2008 | WO2007078979B1 Probe module with integrated actuator for a probe microscope |
| 11/06/2008 | US20080271522 Sample analysis using cantilever probe |
| 10/30/2008 | US20080265178 Driving scanning fiber devices with variable frequency drive signals |
| 10/30/2008 | DE112006003492T5 Sondermodul mit integriertem Stellglied für ein Rastersondenmikroskop Special module with integrated actuator for a scanning probe microscope |
| 10/29/2008 | EP1985991A1 Measuring probe, sample surface measuring apparatus and sample surface measuring method |
| 10/23/2008 | US20080259356 System and method for detecting the displacement of a plurality of micro- and nanomechanical elements, such as micro-cantilevers |
| 10/21/2008 | US7439505 Scanning electron microscope |
| 10/16/2008 | WO2008122800A1 Probe microscopy and probe position monitoring apparatus |
| 10/16/2008 | WO2008122799A1 Probe microscopy with small probe |
| 10/15/2008 | CN101286373A 悬臂组件 Cantilever assembly |
| 10/01/2008 | CN101278357A System and method for inspection of micro and nanomechanical structures |
| 09/25/2008 | WO2008115862A2 Fast scanning spm scanner and method of operating same |
| 09/18/2008 | US20080223122 Scanning probe microscope |
| 09/18/2008 | US20080223119 Fast-Scanning SPM Scanner and Method of Operating Same |
| 09/18/2008 | US20080223117 Scanning probe microscope and sample observation method using the same and device manufacturing method |
| 09/16/2008 | US7425698 Feedback influenced increased-quality-factor scanning probe microscope |
| 09/03/2008 | EP1963816A1 Optical device comprising a cantilever and method of fabrication and use thereof |
| 08/14/2008 | US20080191151 Method and apparatus for specimen fabrication |
| 08/13/2008 | EP1733399B1 System and method for detecting the displacement of a plurality of micro- and nanomechanical elements, such as micro-cantilevers |
| 08/12/2008 | US7411189 Cantilever array, method for fabricating the same, scanning probe microscope, sliding apparatus of guiding and rotating mechanism, sensor, homodyne laser interferometer, laser doppler interferometer having optically exciting function for exciting sample, each using the same, and method for exciting cantilevers |
| 08/05/2008 | US7408172 Charged particle beam apparatus and charged particle beam irradiation method |
| 07/31/2008 | WO2008089950A1 Mems sensor for in situ tem atomic force microscopy |
| 07/29/2008 | US7404313 Scanning probe microscope |
| 07/24/2008 | WO2007006834A8 System and method for the inspection of micro and nanomechanical structures |
| 07/22/2008 | US7401503 Method for analysis through layer-by-layer sample removal using a cantilever probe |
| 07/08/2008 | US7397052 Method and apparatus for specimen fabrication |
| 07/08/2008 | US7397051 Method and apparatus for specimen fabrication |
| 07/08/2008 | US7397050 Method and apparatus for specimen fabrication |
| 07/02/2008 | CN101210869A Multifunctional widely-used micro- cantilever beam sensing sensitivity control system |
| 06/11/2008 | CN100394162C Method for analyzing roughness on surface of film |
| 06/05/2008 | WO2007078979A3 Probe module with integrated actuator for a probe microscope |
| 05/29/2008 | US20080121028 Scanning Probe Microscopy Inspection and Modification System |
| 05/14/2008 | CN100387968C Atomic force microscope and driving method therefor |
| 04/30/2008 | DE102006004922B4 Miniaturisiertes Federelement und Verfahren zu dessen Herstellung, Balkensonde, Rasterkraftmikroskop sowie Verfahren zu dessen Betrieb Miniaturized spring element and method for its manufacture, probe beam, atomic force microscope and method for its operation |
| 04/29/2008 | US7363802 Measurement device for electron microscope |
| 04/22/2008 | US7360405 Method to transiently detect sample features using cantilevers |