| Patents for G01Q 20 - Monitoring the movement or position of the probe (1,663) |
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| 04/03/2008 | WO2008037427A1 Method and device for the locally resolved analysis of the elastic properties of a sample using an atomic force microscope |
| 04/03/2008 | DE102006045643A1 Verfahren und Vorrichtung zur ortsaufgelösten Untersuchung der elastischen Eigenschaften einer Probe mit einem Rasterkraftmikroskop Method and device for the spatially resolved investigation of the elastic properties of a sample using an atomic force microscope |
| 03/27/2008 | US20080073520 Tip structure for scanning devices, method of its preparation and devices thereon |
| 03/27/2008 | US20080072665 Device and Method for Scanning Probe Microscopy |
| 03/27/2008 | DE102006043352A1 Einrichtung zum Abtasten einer von einer Flüssigkeit bedeckten Probenoberfläche Means for scanning a surface covered by a liquid sample surface |
| 03/20/2008 | WO2008031618A1 Device for scanning a sample surface covered with a liquid |
| 03/19/2008 | EP1899107A2 Integrated displacement sensors for probe microscopy and force spectroscopy |
| 03/13/2008 | WO2008029562A1 Atomic force microscope |
| 03/13/2008 | US20080061230 Probe sensor with multi-dimensional optical grating |
| 03/12/2008 | EP1898204A1 Scan type probe microscope and cantilever drive device |
| 03/05/2008 | CN101135624A Monitoring molecule conformation transition and biochemical reaction method and device thereof |
| 03/04/2008 | US7337656 Surface characteristic analysis apparatus |
| 02/28/2008 | US20080049236 Optical Displacement Detection Mechanism and Surface Information Measurement Device Using the Same |
| 02/28/2008 | US20080049223 Optical displacement-detecting mechanism and probe microscope using the same |
| 02/28/2008 | US20080048115 Scanning probe microscope displacement detecting mechanism and scanning probe microscope using same |
| 02/28/2008 | US20080047335 Measuring apparatus |
| 02/27/2008 | EP1892727A1 Measuring apparatus |
| 02/27/2008 | EP1892499A2 Atomic force microscope for generating a small incident beam spot |
| 02/26/2008 | US7334459 Atomic force microscope and corrector thereof and measuring method |
| 02/21/2008 | US20080042074 Charged particle beam apparatus and charged particle beam irradiation method |
| 02/19/2008 | US7333191 Scanning probe microscope and measurement method using the same |
| 01/29/2008 | US7323684 Scanning probe microscope and specimen observation method and semiconductor device manufacturing method using said scanning probe microscope |
| 01/23/2008 | EP1427983A4 Multiple plate tip or sample scanning reconfigurable scanned probe microscope with transparent interfacing of far-field optical microscopes |
| 01/17/2008 | DE112006000419T5 Abtastsondenmikroskop-Versatzerfassungsmechanismus und Abtastsondenmikroskop, welches dergleichen verwendet Scanning probe displacement detection mechanism and scanning probe microscope, which uses like |
| 01/16/2008 | EP1879015A1 Heterodyne laser doppler probe and measurement system using the same |
| 01/15/2008 | US7319528 Surface texture measuring instrument |
| 01/15/2008 | US7319527 Sensor with cantilever and optical resonator |
| 01/03/2008 | US20080000292 System for Nano Position Sensing in Scanning Probe Microscopes using an Estimator |
| 01/03/2008 | US20080000291 Method and apparatus for monitoring movement of a SPM actuator |
| 01/01/2008 | US7313948 Real time detection of loss of cantilever sensing loss |
| 12/25/2007 | US7312619 Multiple local probe measuring device and method |
| 12/18/2007 | US7309863 Cantilever array, method for fabricating the same, scanning probe microscope, sliding apparatus of guiding and rotating mechanism, sensor, homodyne laser interferometer, laser doppler interferometer having optically exciting function for exciting sample, each using the same, and method for exciting cantilevers |
| 12/06/2007 | WO2007121208A3 Nanometer-precision tip-to-substrate control and pattern registration for scanning-probe lithography |
| 12/06/2007 | US20070278405 Multi-tip surface cantilever probe |
| 12/06/2007 | US20070278177 Processing method using atomic force microscope microfabrication device |
| 11/29/2007 | US20070272040 Device and Method for Measuring Molecule Using Gel Substrate Material |
| 11/29/2007 | US20070271996 Cantilever Assembly |
| 11/28/2007 | EP1860396A1 Homodyne laser interferometer probe and displacement measurement system using the same |
| 11/21/2007 | EP1330823B1 Afm-based data storage and microscopy |
| 11/21/2007 | EP1012862B1 Atomic force microscope for generating a small incident beam spot |
| 11/01/2007 | WO2007123473A1 An arrangement for detecting resonance frequency shifts |
| 10/31/2007 | EP1430486B1 Method and device for analysing a sample by means of a raster scanning probe microscope |
| 10/25/2007 | WO2007121208A2 Nanometer-precision tip-to-substrate control and pattern registration for scanning-probe lithography |
| 10/16/2007 | US7282722 Charged particle beam apparatus and charged particle beam irradiation method |
| 10/11/2007 | US20070234786 Nanometer-precision tip-to-substrate control and pattern registration for scanning-probe lithography |
| 09/27/2007 | US20070220958 Optical detection alignment/tracking method and apparatus |
| 09/26/2007 | CN101042325A Detection method for photon crystal surface periodic structure |
| 09/20/2007 | WO2007104452A1 Cantilever of a scanning probe microscope |
| 09/19/2007 | CN101040346A Device and method for scanning probe microscopy |
| 09/13/2007 | DE102006011598A1 Cantilever eines Rastersondenmikroskops Cantilever of a scanning probe microscope |
| 09/11/2007 | US7268356 Method and apparatus for specimen fabrication |
| 08/23/2007 | WO2007094365A1 Measuring probe, sample surface measuring apparatus and sample surface measuring method |
| 08/16/2007 | DE112005002187T5 Vorrichtung und Verfahren zur Molekülmessung unter Verwendung eines Gelsubstratmaterials Apparatus and method for measurement using a molecule Gelsubstratmaterials |
| 08/09/2007 | WO2007088018A1 Miniaturized spring element and method for producing the latter |
| 08/09/2007 | DE102006004922A1 Miniaturisiertes Federelement und Verfahren zu dessen Herstellung Miniaturized spring element and process for its preparation |
| 08/09/2007 | CA2640702A1 Miniaturized spring element and method for producing the latter |
| 08/07/2007 | US7251987 Scanning probe microscope and measuring method by means of the same |
| 07/31/2007 | US7250598 Plasmon enhanced near-field optical probes |
| 07/31/2007 | US7249494 Beam tracking system for scanning-probe type atomic force microscope |
| 07/19/2007 | US20070163335 Method and apparatus for measuring electrical properties in torsional resonance mode |
| 07/12/2007 | WO2007078979A2 Probe module with integrated actuator for a probe microscope |
| 07/12/2007 | US20070158554 Probe for probe microscope using transparent substrate, method of producing the same, and probe microscope device |
| 07/11/2007 | EP1806572A1 Measuring device with daisy type cantilever wheel |
| 07/10/2007 | US7242015 Patterned wafer inspection method and apparatus therefor |
| 07/10/2007 | US7241994 Scanning probe microscope and specimen surface structure measuring method |
| 07/04/2007 | EP1804050A2 Cantilever array, method of manufacturing the array, and scanning probe microscope, sliding device of guide and rotating mechanism, sensor, homodyne laser interferometer, and laser doppler interferometer with specimen light excitation function, using the array, and cantilever |
| 06/28/2007 | US20070145302 Method and apparatus for specimen fabrication |
| 06/28/2007 | US20070145301 Method and apparatus for specimen fabrication |
| 06/28/2007 | US20070145300 Method and apparatus for specimen fabrication |
| 06/28/2007 | US20070145299 Method and apparatus for specimen fabrication |
| 06/28/2007 | US20070144244 Probe module with integrated actuator for a probe microscope |
| 06/28/2007 | US20070144243 Scanning probe apparatus and drive stage therefor |
| 06/20/2007 | EP1797567A1 Device and method for scanning probe microscopy |
| 06/14/2007 | WO2006090593A9 Displacement detection mechanism for scanning probe microscope and scanning probe microscope |
| 06/13/2007 | CN1979126A Method for analysis of a sample |
| 06/12/2007 | US7230719 High sensitivity scanning probe system |
| 06/07/2007 | US20070125159 Method for analysis of a sample |
| 06/06/2007 | DE102005056467A1 Surface`s translation and tilt measuring method for scanning probe microscope, involves focusing measuring beam of interferometer with optical system, and utilizing reflecting beam after beam split for measuring surface tilt |
| 05/31/2007 | WO2007061286A1 Optical device comprising a cantilever and method of fabrication and use thereof |
| 05/31/2007 | CA2631179A1 Optical device comprising a cantilever and method of fabrication and use thereof |
| 05/30/2007 | EP1130379B1 Optical cantilever for scanning microscope and method of its production |
| 05/24/2007 | US20070114402 Object inspection and/or modification system and method |
| 05/24/2007 | DE102005055460A1 Laser microscope pulse forced mode raster surface inspection process, digitizing information to generate real time force-time graph profile |
| 05/22/2007 | US7220962 Cantilever array and scanning probe microscope including a sliding, guiding, and rotating mechanism |
| 05/09/2007 | EP1782432A1 Tip structure for scanning devices, method of its preparation and devices thereon |
| 05/03/2007 | WO2007006834A3 System and method for the inspection of micro and nanomechanical structures |
| 05/02/2007 | EP1780173A1 Nanometric mechanical oscillator, method of fabricating the same, and measurement apparatus using the same |
| 05/02/2007 | EP1203749B1 Nanometer-order mechanical vibrator, production method thereof and measuring device using it |
| 04/18/2007 | EP1775570A2 Cantilever array, method of manufacturing the array, and scanning probe microscope, sliding device of guide and rotating mechanism, sensor, homodyne laser interferometer, and laser Doppler interferometer with specimen light excitation function, using the array and cantilever |
| 04/18/2007 | EP1775569A2 Cantilever array, method of manufacturing the array, and scanning probe microscope, sliding device of guide and rotating mechanism, sensor, homodyne laser interferometer, and laser Doppler interferometer with specimen light excitation function, using the array and cantilever |
| 04/18/2007 | EP1775568A2 Cantilever array, method of manufacturing the array, and scanning probe microscope, sliding device of guide and rotating mechanism, sensor, homodyne laser interferometer, and laser Doppler interferometer with specimen light excitation function, using the array and cantilever |
| 04/18/2007 | EP1775567A2 Cantilever array, method of manufacturing the array, and scanning probe microscope, sliding device of guide and rotating mechanism, sensor, homodyne laser interferometer, and laser Doppler interferometer with specimen light excitation function, using the array and cantilever |
| 04/18/2007 | EP1775258A1 Nanometric mechanical oscillator, method of fabricating the same, and measurement apparatus using the same |
| 04/17/2007 | US7204131 Dynamic activation for an atomic force microscope and method of use thereof |
| 04/11/2007 | EP0760109B1 Method for particle wave reconstruction in a particle-optical apparatus |
| 04/05/2007 | WO2007036614A1 Measuring system |
| 04/04/2007 | EP1332510A4 Real time monitoring for simultaneous imaging and exposure in charged particle beam systems |
| 03/28/2007 | EP1767490A2 Nanometric mechanical oscillator, method of fabricating the same, and measurement apparatus using the same |
| 03/20/2007 | US7193424 Electrical scanning probe microscope apparatus |
| 03/15/2007 | WO2005103604A3 Metallic thin film piezoresistive transduction in micromechanical and nanomechanical devices and its application in self-sensing spm probes |