| Patents for G01Q 20 - Monitoring the movement or position of the probe (1,663) |
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| 02/21/2007 | EP1247063B1 Scanning force microscope probe cantilever with reflective structure |
| 02/15/2007 | US20070034797 Electron beam apparatus, and inspection instrument and inspection process thereof |
| 02/13/2007 | US7176458 Method and apparatus for specimen fabrication |
| 02/13/2007 | US7176450 Long travel near-field scanning optical microscope |
| 02/07/2007 | EP1749185A2 Metallic thin film piezoresistive transduction in micromechanical and nanomechanical devices and its application in self-sensing spm probes |
| 02/06/2007 | US7173714 Apparatus for parallel detection of the behaviour of mechanical micro-oscillators |
| 02/01/2007 | US20070022804 Scanning probe microscopy inspection and modification system |
| 01/25/2007 | US20070018096 Cantilever array, method for fabricating the same, scanning probe microscope, sliding apparatus of guiding and rotating mechanism, sensor, homodyne laser interferometer, laser doppler interferometer having optically exciting function for exciting sample, each using the same, and method for exciting cantilevers |
| 01/24/2007 | EP1745492A1 Multi-column charged particle optics assembly |
| 01/23/2007 | US7166839 Apparatus for measuring a three-dimensional shape |
| 01/18/2007 | WO2007006834A2 System and method for the inspection of micro and nanomechanical structures |
| 01/18/2007 | US20070012873 Scanning-type probe microscope |
| 01/18/2007 | US20070012094 Integrated displacement sensors for probe microscopy and force spectroscopy |
| 01/18/2007 | CA2626230A1 System and method for surface inspection of micro and nanomechanical structures |
| 01/17/2007 | EP1744325A1 System and method for surface inspection of micro and nanomechanical structures |
| 01/03/2007 | EP1739404A1 Nanogap series substance capturing, detecting and identifying method and device |
| 01/02/2007 | US7158234 Optical scanning observation apparatus |
| 01/02/2007 | US7155964 Method and apparatus for measuring electrical properties in torsional resonance mode |
| 12/28/2006 | WO2006138697A2 Integrated displacement sensors for probe microscopy and force spectroscopy |
| 12/21/2006 | US20060283338 Force sensing integrated readout and active tip based probe microscope systems |
| 12/20/2006 | EP1733399A1 System and method for detecting the displacement of a plurality of micro- and nanomechanical elements, such as micro-cantilevers |
| 12/14/2006 | US20060277981 Micro structure, cantilever, scanning probe microscope and a method of measuring deformation quantity for the fine structure |
| 12/13/2006 | EP1731895A2 Micro structure, cantilever, scanning probe microscope and a method for measuring deformation quantity for the micro structure |
| 12/13/2006 | CN1877277A Micro structure, cantilever, scanning probe microscope and a method of measuring deformation quantity for the fine structure |
| 12/07/2006 | WO2006129561A1 Scan type probe microscope and cantilever drive device |
| 12/07/2006 | US20060272398 Beam tracking system for scanning-probe type atomic force microscope |
| 11/29/2006 | CN1871665A Cantilever assembly |
| 11/23/2006 | WO2006123239A1 Displacement sensor, its use, and method for making such a sensor |
| 11/23/2006 | US20060261264 Feedback influenced increased-quality-factor scanning probe microscope |
| 11/21/2006 | US7138628 Method and apparatus for specimen fabrication |
| 11/16/2006 | US20060255818 Multiple local probe measuring device and method |
| 11/16/2006 | US20060254346 Method to transiently detect sample features using cantilevers |
| 11/09/2006 | US20060253943 Cantilever array, method for fabricating the same, scanning probe microscope, sliding apparatus of guiding and rotating mechanism, sensor, homodyne laser interferometer, laser doppler interferometer having optically exciting function for exciting sample, each using the same, and method for exciting cantilevers |
| 10/31/2006 | US7129486 Scanning probe with digitized pulsed-force mode operation and real-time evaluation |
| 10/26/2006 | US20060238206 Measuring system for the combined scanning and analysis of microtechnical components comprising electrical contacts |
| 10/26/2006 | US20060237639 Scanning probe microscope assembly and method for making spectrophotometric, near-filed, and scanning probe measurements |
| 10/19/2006 | US20060231776 Method and apparatus for specimen fabrication |
| 10/19/2006 | US20060231757 Cantilever array, method for fabricating the same, scanning probe microscope, sliding apparatus of guiding and rotating mechanism, sensor, homodyne laser interferometer, laser doppler interferometer having optically exciting function for exciting sample, each using the same, and method for exciting cantilevers |
| 10/17/2006 | US7122796 Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same |
| 10/05/2006 | US20060219900 Scanning probe microscope and specimen observation method and semiconductor device manufacturing method using said scanning probe microscope |
| 10/05/2006 | DE10307561B4 Meßanordnung zur kombinierten Abtastung und Untersuchung von mikrotechnischen, elektrische Kontakte aufweisenden Bauelementen Measuring arrangement for combined sampling and analysis of micro-technical, electrical contacts having components |
| 10/03/2006 | US7116817 Method and apparatus for inspecting a semiconductor device |
| 09/28/2006 | US20060213261 Real Time Detection of Loss of Cantilever Sensing Loss |
| 09/21/2006 | US20060207317 Scanning probe microscope |
| 09/20/2006 | CN1834616A Quality factor controllable shearforce detection controller |
| 09/19/2006 | US7109482 Object inspection and/or modification system and method |
| 09/08/2006 | WO2006093209A1 Heterodyne laser doppler probe and measurement system using the same |
| 09/05/2006 | US7100430 Dual stage instrument for scanning a specimen |
| 08/31/2006 | WO2006090593A1 Displacement detection mechanism for scanning probe microscope and scanning probe microscope |
| 08/31/2006 | US20060192099 Method and apparatus for specimen fabrication |
| 08/31/2006 | US20060191329 Dynamic activation for an atomic force microscope and method of use thereof |
| 08/29/2006 | US7098678 Multiple local probe measuring device and method |
| 08/15/2006 | US7091476 Scanning probe microscope assembly |
| 08/10/2006 | DE102004063980A1 Vorrichtung und Verfahren zur Rastersondenmikroskopie Apparatus and method for scanning probe microscopy |
| 08/01/2006 | US7084384 Diffractive optical position detector in an atomic force microscope having a moveable cantilever |
| 07/27/2006 | US20060168703 Apparatus and method for a scanning probe microscope |
| 07/27/2006 | US20060162455 Method and device for measuring vibration frequency of multi-cantilever |
| 07/19/2006 | EP1680788A1 Cantilever assembly |
| 07/12/2006 | CN1800850A Quality factor control system for microcantilever beam |
| 07/04/2006 | US7071475 Method and apparatus for specimen fabrication |
| 06/27/2006 | US7067806 Scanning probe microscope and specimen observation method |
| 06/27/2006 | US7066014 Method to transiently detect samples in atomic force microscopes |
| 06/21/2006 | EP1671176A2 Integrated optical scanning image acquisiting and display |
| 06/21/2006 | CN1260721C AFM-based data storage and microscope |
| 06/01/2006 | DE10035134B4 Verfahren und Vorrichtung zur optischen Nahfeldmikroskopie Method and apparatus for optical near-field microscopy |
| 05/31/2006 | CN1779436A Coaxial-illuminating microscope otpical system for atomic force microscope |
| 05/25/2006 | US20060109480 Surface texture measuring instrument |
| 05/25/2006 | US20060108526 Apparatus for measuring a three-dimensional shape |
| 05/24/2006 | DE102004048971B3 Apparatus for scanning probe microscopy for examining biological systems and which automatically analyzes measurements from the device according to predetermined analysis parameters |
| 05/23/2006 | US7047796 Multiple plate tip or sample scanning reconfigurable scanned probe microscope with transparent interfacing of far-field optical microscopes |
| 05/16/2006 | US7045780 Scanning probe microscopy inspection and modification system |
| 05/11/2006 | US20060097158 Scanning electron microscope |
| 05/10/2006 | EP1655738A1 Probe for probe microscope using transparent substrate, method of producing the same, and probe microscope device |
| 05/10/2006 | EP1540661B1 Sensor with cantilever and optical resonator |
| 05/10/2006 | CN1769837A Surface texture measuring instrument |
| 05/04/2006 | WO2006046625A1 Measuring device with daisy type cantilever wheel |
| 05/04/2006 | WO2005024496A3 Integrated optical scanning image acquisiting and display |
| 05/04/2006 | CA2585173A1 Measuring device with daisy type cantilever wheel |
| 05/03/2006 | EP1653477A2 Surface texture measuring instrument |
| 05/03/2006 | EP1653213A1 Scanning-type probe microscope |
| 05/02/2006 | US7038996 Method and apparatus for reading an array of thermal resistance sensors |
| 05/02/2006 | US7036357 Dynamic activation for an atomic force microscope and method of use thereof |
| 04/20/2006 | WO2006040025A1 Device and method for scanning probe microscopy |
| 04/06/2006 | US20060072185 Diffractive optical position detector |
| 04/05/2006 | CN1249419C Light-spot tracking device of atomic force microscope |
| 04/04/2006 | US7022985 Apparatus and method for a scanning probe microscope |
| 03/29/2006 | EP1640996A2 Scanning probe with digitised pulsed-force mode operation and real-time evaluation |
| 03/28/2006 | US7017398 Active probe for an atomic force microscope and method for use thereof |
| 03/21/2006 | US7015455 Near-field optical probe |
| 03/16/2006 | WO2006028135A1 Device and method for measuring molecule using gel substrate material |
| 03/08/2006 | CN1244817C Electrostatic force microscope with cantilever and shield and method for determining such electrostatic force and film thickness |
| 02/21/2006 | US7002151 Scanning electron microscope |
| 02/14/2006 | US6998602 Method of and an apparatus for measuring a specimen by means of a scanning probe microscope |
| 02/09/2006 | US20060027739 Scanning probe microscope and method |
| 02/07/2006 | US6995380 End effector for supporting a microsample |
| 02/02/2006 | US20060022138 Electron beam apparatus, and inspection instrument and inspection process thereof |
| 01/26/2006 | US20060018532 Method and apparatus for inspecting a semiconductor device |
| 01/26/2006 | US20060017014 Patterned wafer inspection method and apparatus therefor |
| 01/19/2006 | US20060011830 Method of manufacturing the multi-tip probe, a multi-tip probe, and surface characteristic analysis apparatus |
| 01/19/2006 | US20060011467 Method of manufacturing the multi-tip probe, a multi-tip probe, and surface characteristic analysis apparatus |