Patents for G01Q 20 - Monitoring the movement or position of the probe (1,663)
02/2011
02/24/2011US20110047662 Apparatus and method for investigating surface properties of different materials
02/24/2011US20110047661 Microprobe, measurement system and method
02/24/2011US20110043229 Quantum tunnelling sensor device and method
02/23/2011EP2287624A2 Scanning Probe System
02/17/2011US20110041223 Spatially resolved quantitative mapping of thermomechanical properties and phase transition temperatures using scanning probe microscopy
02/16/2011CN101975873A Microscopic white light interferometry-based nano probe device
02/15/2011US7891016 Automatic landing method and apparatus for scanning probe microscope using the same
02/10/2011US20110035849 SPM Imaging Apparatus, Probe and Method
02/03/2011US20110030109 Surface state measuring device, and surface state measuring method using the device
01/2011
01/26/2011EP2278264A1 Probe microscope
01/26/2011CN101960287A Fast-scanning spm and method of operating same
01/20/2011US20110014378 Leveling devices and methods
01/19/2011CN101952706A Scanning type probe microscope
01/18/2011US7874016 Scanning probe microscope and scanning method
12/2010
12/29/2010WO2010150756A1 Scanning probe microscope and probe proximity detection method therefor
12/14/2010US7854016 Process for manufacturing probes intended to interact with a storage medium and probe obtained thereby
12/09/2010US20100313311 Scanning probe in pulsed-force mode, digital and in real time
12/08/2010EP2259009A1 Arrangement and method for measuring relative movement
12/02/2010US20100306885 Cantilevers with Integrated Actuators for Probe Microscopy
12/02/2010DE19721112B4 Autofokussierverfahren Autofocusing
10/2010
10/05/2010US7810166 Device and method for scanning probe microscopy
10/05/2010US7808656 Probe sensor with multi-dimensional optical grating
10/05/2010US7806008 Sample analysis using cantilever probe
09/2010
09/30/2010US20100251437 Method and Apparatus for Characterizing a Sample with Two or More Optical Traps
09/16/2010US20100235955 Vibration compensation in probe microscopy
09/16/2010US20100235954 Dual-tip cantilever
09/14/2010US7797757 Cantilevers with integrated actuators for probe microscopy
09/09/2010US20100229262 Apparatus and method for examining a specimen by means of probe microscopy
09/07/2010US7791050 Method and apparatus for specimen fabrication
09/01/2010EP2223036A1 Microprobe, measurement system and method
08/2010
08/31/2010US7787133 Optical displacement-detecting mechanism and probe microscope using the same
08/26/2010US20100218287 Scanning probe microscope and method of observing sample using the same
08/26/2010US20100218286 Modulated microwave microscopy and probes used therewith
08/26/2010US20100218284 Method for examining a test sample using a scanning probe micrscope, measurement system and a measuring probe system
08/19/2010US20100207039 Probe Microscopy and Probe Position Monitoring Apparatus
08/18/2010EP2218075A1 Device and method for an atomic force microscope for the study and modification of surface properties
08/12/2010US20100205698 Atomic force microscopy probe
08/05/2010US20100199393 Probe microscope
08/05/2010DE102010001467A1 Sondenmikroskop Probe microscope
08/03/2010US7770231 Fast-scanning SPM and method of operating same
07/2010
07/20/2010US7757544 Method and apparatus for measuring electrical properties in torsional resonance mode
07/15/2010US20100180355 Probe Sensor with Multi-Dimensional Optical Grating
07/08/2010US20100175155 Measurement and Mapping of Molecular Stretching and Rupture Forces
06/2010
06/23/2010EP2199769A2 Force measuring device
06/17/2010WO2010067570A1 Method for processing output of scanning type probe microscope, and scanning type probe microscope
06/17/2010WO2010067129A1 Dynamic probe detection system
06/17/2010US20100149545 Apparatus and Method for Measuring Deformation of a Cantilever Using Interferometry
06/17/2010CA2746147A1 Dynamic probe detection system
06/10/2010US20100146673 Apparatus and Method for Investigating Biological Systems and Solid Systems
05/2010
05/27/2010US20100132075 Self displacement sensing cantilever and scanning probe microscope
05/20/2010DE112008001611T5 Positionssteuerung für die Rastersondenspektroskopie Position control for scanning probe spectroscopy
05/18/2010US7719663 Heterodyne laser doppler probe and measurement system using the same
05/18/2010US7716970 Scanning probe microscope and sample observation method using the same
05/13/2010US20100122385 Method and apparatus of operating a scanning probe microscope
05/12/2010EP2183569A2 Fast-scanning spm and method of operating same
05/12/2010EP2183568A2 Heterodyne detection device for imaging an object by re-injection
04/2010
04/29/2010US20100107284 Cantilever, cantilever system, scanning probe microscope, mass sensor apparatus, viscoelasticity measuring instrument, manipulation apparatus, displacement determination method of cantilever, vibration method of cantilever and deformation method of cantilever
04/28/2010EP2179266A1 Miniaturized spring element and method for producing the latter
04/27/2010US7705999 Probe sensor with multi-dimensional optical grating
04/22/2010US20100100989 Piezoresistor height sensing cantilever
04/08/2010US20100088787 Pump probe measuring device and scanning probe microscope apparatus using the device
04/07/2010EP2171425A1 Apparatus and method for investigating surface properties of different materials
04/06/2010US7694347 Measuring device with daisy type cantilever wheel
03/2010
03/23/2010US7681439 Measuring apparatus
03/17/2010EP2163906A1 Method of detecting a movement of a measuring probe and measuring instrument
02/2010
02/18/2010US20100038535 Sample dimension measuring method and scanning electron microscope
02/10/2010EP2150799A1 Atomic force microscopy probe
01/2010
01/28/2010US20100024082 Atomic force microscope
01/26/2010CA2428218C Apparatus for parallel detection of the behaviour of mechanical micro-oscillators
01/21/2010US20100017921 Device and method for the micromechanical positioning and handling of an object
01/21/2010US20100013456 Arrangement for Detecting Resonance Frequency Shifts
01/13/2010EP2142906A1 Probe microscopy and probe position monitoring apparatus
01/12/2010US7646494 System and method for detecting the displacement of a plurality of micro- and nanomechanical elements, such as micro-cantilevers
12/2009
12/30/2009EP2137737A2 Fast scanning spm scanner and method of operating same
12/30/2009EP2137566A1 Driving scanning fiber devices with variable frequency drive signals
12/29/2009US7637149 Integrated displacement sensors for probe microscopy and force spectroscopy
12/17/2009US20090313729 Scan type probe microscope and cantilever drive device
12/15/2009US7631547 Scanning probe apparatus and drive stage therefor
12/15/2009US7631546 Method and apparatus for monitoring of a SPM actuator
12/10/2009WO2009147452A1 Method of probe alignment
12/10/2009WO2009147450A1 Probe detection system
12/10/2009CA2727118A1 Probe detection system
12/02/2009EP1451848B1 Device and method for reducing the impact of distortions in a microscope
11/2009
11/19/2009US20090286172 Surface shape measurement apparatus and exposure apparatus
11/18/2009EP0847590B1 A scanning probe microscope having automatic probe exchange and alignment
11/10/2009US7615738 Scanning probe microscope assembly and method for making spectrophotometric, near-field, and scanning probe measurements
11/10/2009US7614287 Scanning probe microscope displacement detecting mechanism and scanning probe microscope using same
10/2009
10/27/2009US7608842 Driving scanning fiber devices with variable frequency drive signals
10/27/2009US7607343 System for nano position sensing in scanning probe microscopes using an estimator
10/21/2009CN100552421C Detection method for photon crystal surface periodic structure
09/2009
09/17/2009US20090235396 Integrated optical scanning image acquisition and display
09/09/2009CN100538913C Sensor with suspending arm and optical resonator
09/03/2009US20090219506 Heterodyne laser doppler probe and measurement system using the same
08/2009
08/20/2009US20090207404 System and Method for Surface Inspection of Micro- and Nanomechanical Structures
08/19/2009EP2090877A2 Microlever containing a magneto-impedance stress sensor
08/06/2009DE102008006697A1 Movable measuring sensor's position and/or movement detecting device for e.g. scanning force microscope, has light guiding units with beam guides provided for guiding light reflected by measuring sensors to light sensitive detector unit
08/04/2009US7569077 Probe positional error from comparising image sequence of scans to identify differences between positions of a portion of a reference specimen characteristic in the images; probe moved to target location for spectroscopic analysis, as a function of the determined probe positional error; nanotechnolgy
07/2009
07/30/2009WO2009093284A1 Scanning type probe microscope
07/16/2009WO2009063145A3 Heterodyne detection device for imaging an object by re-injection
07/14/2009US7560921 Method and device for analyzing distribution of coercive force in vertical magnetic recording medium using magnetic force microscope
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