Patents for G01J 4 - Measuring polarisation of light (3,335) |
---|
02/21/2006 | US7002692 Infrared circular dichroism measuring apparatus and infrared circular dichroism measuring method |
02/21/2006 | US7002686 Apparatus and method for imaging |
02/21/2006 | US7002685 System for measuring of both circular and linear birefringence |
02/16/2006 | US20060033914 Multiple beam ellipsometer |
02/16/2006 | US20060033019 Polarization state detecting system, light source, and exposure apparatus |
02/15/2006 | CN1735798A Method and device for measuring polarization mode dispersion |
02/14/2006 | US6999172 Optical apparatus |
02/07/2006 | US6995842 Detector configurations for optical metrology |
02/02/2006 | WO2005122875B1 Device and method for measuring scattering in optical systems |
02/02/2006 | US20060023213 Optical characteristic analysis method, sample measuring apparatus and spectroscopic ellipsometer |
02/02/2006 | DE19953527B4 Verfahren und Vorrichtung zur automatischen Messung der Spannungsdoppelbrechung mit rotierendem Analysator Method and apparatus for automatic measurement of the stress birefringence with a rotating analyzer |
01/31/2006 | US6992764 comprises measuring two periodic patterns (diffraction gratings) with an incident beam and detecting the intensity of the resulting polarized light |
01/31/2006 | US6992763 Beam splitting apparatus, transmittance measurement apparatus, and exposure apparatus |
01/24/2006 | US6989904 Method of determining local structures in optical crystals |
01/19/2006 | US20060012789 Ellipsometer, measurement device and method, and lithographic apparatus and method |
01/19/2006 | US20060012788 Ellipsometer, measurement device and method, and lithographic apparatus and method |
01/17/2006 | US6987566 Methods and apparatus for analyzing mirror reflectance |
01/17/2006 | US6987256 Polarized semi-active laser last pulse logic seeker using a staring focal plane array |
01/10/2006 | US6985228 Multiple beam ellipsometer |
01/10/2006 | US6985227 Birefringence measurement at deep-ultraviolet wavelengths |
01/05/2006 | US20060001877 Apparatus for inspecting a surface of an object to be processed |
01/04/2006 | EP1612586A2 Polarizing element, method of manufacturing polarizing element, method of evaluating exposure apparatus, method of manufacturing semiconductor device, and exposure apparatus |
01/03/2006 | US6983000 Laser diode module |
01/03/2006 | US6982792 Spectrophotometer, ellipsometer, polarimeter and the like systems |
01/03/2006 | US6982791 Scatterometry to simultaneously measure critical dimensions and film properties |
12/29/2005 | WO2005122875A1 Device and method for measuring scattering in optical systems |
12/22/2005 | WO2005036215A3 Differential optical technique for chiral analysis |
12/08/2005 | WO2005116598A2 Imaging method and apparatus |
12/08/2005 | WO2005116597A2 Microarray scanning |
12/08/2005 | US20050270529 Stokes parameter measurement device and method |
12/07/2005 | CN1705865A Birefringence measurement of large-format samples |
12/06/2005 | CA2267897C Infrared spectroscopy and imaging of libraries |
12/01/2005 | US20050264813 Multi-wavelength imaging system |
11/29/2005 | US6970241 Device for enabling slow and direct measurement of fluorescence polarization |
11/24/2005 | US20050258348 Polarized semi-active laser last pulse logic seeker using a staring focal plane array |
11/23/2005 | EP1598656A2 Method and apparatus for transfusing liquid specimen into an optical cuvette and polarimeter using the same |
11/17/2005 | US20050254051 Method of polishing thin film formed on substrate |
11/17/2005 | US20050254050 Systems and methods for measurement of a specimen with vacuum ultraviolet light |
11/17/2005 | US20050254039 Polarization state measuring apparatus |
11/16/2005 | EP1596172A2 Polarization state measuring apparatus |
11/10/2005 | US20050248763 Normal incidence rotating compensator ellipsometer |
11/09/2005 | EP1592990A2 Purging light beam paths in optical equipment |
11/08/2005 | US6963400 Systems and methods for analyzing particle systems using polarized scattered light |
11/03/2005 | US20050243314 Polarized optical probes |
11/02/2005 | EP1590646A1 Method and apparatus for measuring polarization mode dispersion |
11/01/2005 | US6961679 Method and system of dynamic learning through a regression-based library generation process |
11/01/2005 | US6961123 Method and apparatus for obtaining information from polarization-sensitive optical coherence tomography |
10/26/2005 | CN1224829C Differential numerical aperture methods and device |
10/25/2005 | US6958812 Systems and methods for analyzing particle systems of surface facets using polarized scattered light |
10/20/2005 | US20050231719 Optical inspection equipment for semiconductor wafers with precleaning |
10/19/2005 | EP1585953A1 Multi-signal determination of polarization dependent characteristic |
10/19/2005 | EP1368678B1 Apparatus and method for measuring polarization dependent loss using repeated high speed polarization scrambling |
10/18/2005 | US6956646 Direct method for the correction of pressure induced scrambling of polarized fluorescence intensities |
10/13/2005 | US20050225775 Resonant ellipsometer and method for determining ellipsometric parameters of a surface |
10/13/2005 | US20050225761 Simultaneous 4-stokes parameter determination using a single digital image |
10/12/2005 | CN1680877A Lithographic apparatus and methods for use thereof |
10/06/2005 | US20050219529 Sample analysis method |
10/06/2005 | US20050219528 Out-of-plane birefringence measurement |
10/05/2005 | CN1677164A Optical analyzers of polarization properties |
10/05/2005 | CN1221785C Optical spectrum analyzer |
10/04/2005 | US6952261 System for performing ellipsometry using an auxiliary pump beam to reduce effective measurement spot size |
09/29/2005 | US20050213104 Optical analyzers of polarization properties |
09/29/2005 | US20050213095 Inspecting device for optical films |
09/29/2005 | US20050213094 Method and device for testing polarizers |
09/29/2005 | DE102004052330A1 Materials or processes analyzing method, involves determining change in polarization angle so that path of rays is fed over polarization filters that are arranged in different angular positions |
09/29/2005 | CA2497372A1 Optical analyzers of polarization properties |
09/27/2005 | US6950182 Functional equivalent to spatial filter in ellipsometer and the like systems |
09/22/2005 | US20050206897 Evaluation apparatus and evaluation method |
09/22/2005 | US20050206879 Lithographic apparatus and methods for use thereof |
09/20/2005 | US6947140 Birefringence measurement apparatus and method |
09/20/2005 | US6947137 System and method for measuring birefringence in an optical material |
09/20/2005 | US6946646 Method of evaluating fiber PMD using polarization optical time domain reflectometry |
09/15/2005 | US20050200845 Measuring method, analyzing method, measuring apparatus, analyzing apparatus, ellipsometer, and computer program |
09/15/2005 | US20050200844 Polarizing plates grading method |
09/14/2005 | CN1668911A Antiglare supports and contrast amplifying supports for reflected polarized light |
09/13/2005 | US6943880 Spectroscopic ellipsometer with adjustable detection area |
09/06/2005 | US6941081 Method and apparatus for polarization measurements |
09/06/2005 | US6940595 Application of spectroscopic ellipsometry to in-situ real time fabrication of multiple layer alternating high/low refractive index filters |
08/25/2005 | WO2005078778A1 Lighting optical device, polarization status detector,and exposure system and exposure method |
08/23/2005 | US6934025 Thin film optical measurement system and method with calibrating ellipsometer |
08/23/2005 | US6934024 Ellipsometry methods and apparatus using solid immersion tunneling |
08/18/2005 | WO2005029015A3 Multispectral, multifusion, laser-polarimetric optical imaging system |
08/18/2005 | US20050179897 Method of analysis of multiple layer samples |
08/16/2005 | US6930771 Optical inspection equipment for semiconductor wafers with precleaning |
08/11/2005 | WO2005017826B1 Advanced polarization imaging method, apparatus, and computer program product for retinal imaging, liquid crystal testing, active remote sensing, and other applications |
08/11/2005 | US20050174573 Imaging spectrometer |
08/11/2005 | US20050173623 Energy-modulating fiber grating sensor |
08/10/2005 | CN1214258C Apparatus and method for measuring polarization-dependent loss using repeated high speed polarization scrambling |
08/09/2005 | US6928395 Method and system for dynamic learning through a regression-based library generation process |
08/09/2005 | US6927845 Integrated polarization analyzer for fiber telecommunications |
08/03/2005 | EP1558905A2 Method of evaluating fiber pmd using polarization optical time domain reflectometry |
08/03/2005 | EP1558902A1 Polarization conversion unit for reducing polarization dependent measurement errors |
07/28/2005 | US20050164304 Apparatus comprising infrared camera for rapidly screening arrays of diverse materials on single substrate surfaces; combinatorial synthesis and characterization of libraries of diverse materials |
07/28/2005 | US20050163365 Apparatus and method of information extraction from electromagnetic energy based upon multi-characteristic spatial geometry processing |
07/28/2005 | US20050162741 Arbitrary and endless polarization controller and polarization-mode dispersion compensator using the same and arbitrary and endless polarization controlling method |
07/21/2005 | US20050157295 Ellipsometry system and method using spectral imaging |
07/14/2005 | US20050151969 Approach to improve ellipsometer modeling accuracy for solving material optical constants N & K |
07/12/2005 | US6917427 Highly accurate calibration of polarimeters |
07/07/2005 | WO2005062008A1 System and method for measuring birefringence in an optical material |
07/07/2005 | WO2005060485A2 Method and apparatus for dual polarization imaging |