Patents for G01J 4 - Measuring polarisation of light (3,335)
02/2006
02/21/2006US7002692 Infrared circular dichroism measuring apparatus and infrared circular dichroism measuring method
02/21/2006US7002686 Apparatus and method for imaging
02/21/2006US7002685 System for measuring of both circular and linear birefringence
02/16/2006US20060033914 Multiple beam ellipsometer
02/16/2006US20060033019 Polarization state detecting system, light source, and exposure apparatus
02/15/2006CN1735798A Method and device for measuring polarization mode dispersion
02/14/2006US6999172 Optical apparatus
02/07/2006US6995842 Detector configurations for optical metrology
02/02/2006WO2005122875B1 Device and method for measuring scattering in optical systems
02/02/2006US20060023213 Optical characteristic analysis method, sample measuring apparatus and spectroscopic ellipsometer
02/02/2006DE19953527B4 Verfahren und Vorrichtung zur automatischen Messung der Spannungsdoppelbrechung mit rotierendem Analysator Method and apparatus for automatic measurement of the stress birefringence with a rotating analyzer
01/2006
01/31/2006US6992764 comprises measuring two periodic patterns (diffraction gratings) with an incident beam and detecting the intensity of the resulting polarized light
01/31/2006US6992763 Beam splitting apparatus, transmittance measurement apparatus, and exposure apparatus
01/24/2006US6989904 Method of determining local structures in optical crystals
01/19/2006US20060012789 Ellipsometer, measurement device and method, and lithographic apparatus and method
01/19/2006US20060012788 Ellipsometer, measurement device and method, and lithographic apparatus and method
01/17/2006US6987566 Methods and apparatus for analyzing mirror reflectance
01/17/2006US6987256 Polarized semi-active laser last pulse logic seeker using a staring focal plane array
01/10/2006US6985228 Multiple beam ellipsometer
01/10/2006US6985227 Birefringence measurement at deep-ultraviolet wavelengths
01/05/2006US20060001877 Apparatus for inspecting a surface of an object to be processed
01/04/2006EP1612586A2 Polarizing element, method of manufacturing polarizing element, method of evaluating exposure apparatus, method of manufacturing semiconductor device, and exposure apparatus
01/03/2006US6983000 Laser diode module
01/03/2006US6982792 Spectrophotometer, ellipsometer, polarimeter and the like systems
01/03/2006US6982791 Scatterometry to simultaneously measure critical dimensions and film properties
12/2005
12/29/2005WO2005122875A1 Device and method for measuring scattering in optical systems
12/22/2005WO2005036215A3 Differential optical technique for chiral analysis
12/08/2005WO2005116598A2 Imaging method and apparatus
12/08/2005WO2005116597A2 Microarray scanning
12/08/2005US20050270529 Stokes parameter measurement device and method
12/07/2005CN1705865A Birefringence measurement of large-format samples
12/06/2005CA2267897C Infrared spectroscopy and imaging of libraries
12/01/2005US20050264813 Multi-wavelength imaging system
11/2005
11/29/2005US6970241 Device for enabling slow and direct measurement of fluorescence polarization
11/24/2005US20050258348 Polarized semi-active laser last pulse logic seeker using a staring focal plane array
11/23/2005EP1598656A2 Method and apparatus for transfusing liquid specimen into an optical cuvette and polarimeter using the same
11/17/2005US20050254051 Method of polishing thin film formed on substrate
11/17/2005US20050254050 Systems and methods for measurement of a specimen with vacuum ultraviolet light
11/17/2005US20050254039 Polarization state measuring apparatus
11/16/2005EP1596172A2 Polarization state measuring apparatus
11/10/2005US20050248763 Normal incidence rotating compensator ellipsometer
11/09/2005EP1592990A2 Purging light beam paths in optical equipment
11/08/2005US6963400 Systems and methods for analyzing particle systems using polarized scattered light
11/03/2005US20050243314 Polarized optical probes
11/02/2005EP1590646A1 Method and apparatus for measuring polarization mode dispersion
11/01/2005US6961679 Method and system of dynamic learning through a regression-based library generation process
11/01/2005US6961123 Method and apparatus for obtaining information from polarization-sensitive optical coherence tomography
10/2005
10/26/2005CN1224829C Differential numerical aperture methods and device
10/25/2005US6958812 Systems and methods for analyzing particle systems of surface facets using polarized scattered light
10/20/2005US20050231719 Optical inspection equipment for semiconductor wafers with precleaning
10/19/2005EP1585953A1 Multi-signal determination of polarization dependent characteristic
10/19/2005EP1368678B1 Apparatus and method for measuring polarization dependent loss using repeated high speed polarization scrambling
10/18/2005US6956646 Direct method for the correction of pressure induced scrambling of polarized fluorescence intensities
10/13/2005US20050225775 Resonant ellipsometer and method for determining ellipsometric parameters of a surface
10/13/2005US20050225761 Simultaneous 4-stokes parameter determination using a single digital image
10/12/2005CN1680877A Lithographic apparatus and methods for use thereof
10/06/2005US20050219529 Sample analysis method
10/06/2005US20050219528 Out-of-plane birefringence measurement
10/05/2005CN1677164A Optical analyzers of polarization properties
10/05/2005CN1221785C Optical spectrum analyzer
10/04/2005US6952261 System for performing ellipsometry using an auxiliary pump beam to reduce effective measurement spot size
09/2005
09/29/2005US20050213104 Optical analyzers of polarization properties
09/29/2005US20050213095 Inspecting device for optical films
09/29/2005US20050213094 Method and device for testing polarizers
09/29/2005DE102004052330A1 Materials or processes analyzing method, involves determining change in polarization angle so that path of rays is fed over polarization filters that are arranged in different angular positions
09/29/2005CA2497372A1 Optical analyzers of polarization properties
09/27/2005US6950182 Functional equivalent to spatial filter in ellipsometer and the like systems
09/22/2005US20050206897 Evaluation apparatus and evaluation method
09/22/2005US20050206879 Lithographic apparatus and methods for use thereof
09/20/2005US6947140 Birefringence measurement apparatus and method
09/20/2005US6947137 System and method for measuring birefringence in an optical material
09/20/2005US6946646 Method of evaluating fiber PMD using polarization optical time domain reflectometry
09/15/2005US20050200845 Measuring method, analyzing method, measuring apparatus, analyzing apparatus, ellipsometer, and computer program
09/15/2005US20050200844 Polarizing plates grading method
09/14/2005CN1668911A Antiglare supports and contrast amplifying supports for reflected polarized light
09/13/2005US6943880 Spectroscopic ellipsometer with adjustable detection area
09/06/2005US6941081 Method and apparatus for polarization measurements
09/06/2005US6940595 Application of spectroscopic ellipsometry to in-situ real time fabrication of multiple layer alternating high/low refractive index filters
08/2005
08/25/2005WO2005078778A1 Lighting optical device, polarization status detector,and exposure system and exposure method
08/23/2005US6934025 Thin film optical measurement system and method with calibrating ellipsometer
08/23/2005US6934024 Ellipsometry methods and apparatus using solid immersion tunneling
08/18/2005WO2005029015A3 Multispectral, multifusion, laser-polarimetric optical imaging system
08/18/2005US20050179897 Method of analysis of multiple layer samples
08/16/2005US6930771 Optical inspection equipment for semiconductor wafers with precleaning
08/11/2005WO2005017826B1 Advanced polarization imaging method, apparatus, and computer program product for retinal imaging, liquid crystal testing, active remote sensing, and other applications
08/11/2005US20050174573 Imaging spectrometer
08/11/2005US20050173623 Energy-modulating fiber grating sensor
08/10/2005CN1214258C Apparatus and method for measuring polarization-dependent loss using repeated high speed polarization scrambling
08/09/2005US6928395 Method and system for dynamic learning through a regression-based library generation process
08/09/2005US6927845 Integrated polarization analyzer for fiber telecommunications
08/03/2005EP1558905A2 Method of evaluating fiber pmd using polarization optical time domain reflectometry
08/03/2005EP1558902A1 Polarization conversion unit for reducing polarization dependent measurement errors
07/2005
07/28/2005US20050164304 Apparatus comprising infrared camera for rapidly screening arrays of diverse materials on single substrate surfaces; combinatorial synthesis and characterization of libraries of diverse materials
07/28/2005US20050163365 Apparatus and method of information extraction from electromagnetic energy based upon multi-characteristic spatial geometry processing
07/28/2005US20050162741 Arbitrary and endless polarization controller and polarization-mode dispersion compensator using the same and arbitrary and endless polarization controlling method
07/21/2005US20050157295 Ellipsometry system and method using spectral imaging
07/14/2005US20050151969 Approach to improve ellipsometer modeling accuracy for solving material optical constants N & K
07/12/2005US6917427 Highly accurate calibration of polarimeters
07/07/2005WO2005062008A1 System and method for measuring birefringence in an optical material
07/07/2005WO2005060485A2 Method and apparatus for dual polarization imaging
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