| Patents for G01J 4 - Measuring polarisation of light (3,335) |
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| 02/21/2008 | US20080043236 Optical Property Measurement Apparatus and Optical Property Measurement Method, Exposure Apparatus and Exposure Method, and Device Manufacturing Method |
| 02/20/2008 | CN101126662A Elliptical polarized light analytical equipment |
| 02/19/2008 | US7333200 Overlay metrology method and apparatus using more than one grating per measurement direction |
| 02/19/2008 | US7333198 Sample orientation system and method |
| 02/19/2008 | US7333196 Evaluation apparatus and evaluation method |
| 02/14/2008 | US20080037905 Method and apparatus for determining the influencing of the state of polarization by an optical system, and an analyser |
| 02/14/2008 | US20080037017 Generic interface for an optical metrology system |
| 02/14/2008 | US20080035834 Very fast time resolved imaging in multiparameter measurement space |
| 02/13/2008 | EP1095259B1 Spectroscopic ellipsometer |
| 02/12/2008 | US7330277 Resonant ellipsometer and method for determining ellipsometric parameters of a surface |
| 02/12/2008 | US7330260 Method for measuring ion-implanted semiconductors with improved repeatability |
| 02/12/2008 | US7330259 Optical measurements of patterned articles |
| 02/07/2008 | US20080030732 Fluorescence polarization imaging devices and methods |
| 02/07/2008 | US20080030731 Automatic wafer edge inspection and review system |
| 02/07/2008 | US20080029692 Method and Apparatus for Dual Polarization Imaging |
| 02/06/2008 | EP1883849A2 Molecular imaging and nanophotonics imaging and detection principles and systems, and contrast agents, media makers and biomarkers, and mechanisms for such contrast agents |
| 02/06/2008 | CN101120359A Real-time image detection using polarization data |
| 02/06/2008 | CN100367027C Method for detecting surface defect and device thereof |
| 02/05/2008 | US7327457 Apparatus and method for optical characterization of a sample over a broadband of wavelengths while minimizing polarization changes |
| 02/05/2008 | US7327456 Spectrophotometer, ellipsometer, polarimeter and the like systems |
| 02/05/2008 | US7327455 Process monitoring system, process monitoring method, and method for manufacturing semiconductor device |
| 01/31/2008 | US20080024780 Systems and methods for immersion metrology |
| 01/29/2008 | US7324198 Edge bead removal inspection by reflectometry |
| 01/24/2008 | WO2006124572A3 Dual wavelength polarized near-field imaging apparatus |
| 01/24/2008 | US20080018895 Detector configurations for optical metrology |
| 01/22/2008 | US7321427 Multiple beam ellipsometer |
| 01/22/2008 | US7321426 Optical metrology on patterned samples |
| 01/17/2008 | WO2008008223A2 Combination ellipsometry and optical stress generation and detection |
| 01/17/2008 | WO2008008058A1 Discrete polarization state rotatable compensator spectroscopic ellipsometer system, and method of calibration |
| 01/17/2008 | WO2007002182A9 Improved systems and methods for chiral detection and analysis |
| 01/17/2008 | US20080015802 Defect Inspection Method and Apparatus |
| 01/17/2008 | US20080013070 Method and Instrument for Measuring Complex Dielectric Constant of a Sample by Optical Spectral Measurement |
| 01/17/2008 | US20080011111 Method And Apparatus For Screening Combinatorial Libraries For Semiconducting Properties |
| 01/16/2008 | CN101107495A Metrological characterization of microelectronic circuits |
| 01/15/2008 | CA2481910C Polarization mitigation technique |
| 01/10/2008 | WO2007134453A3 Method for monitoring and measuring optical properties of device in polarization maintaining fibers by using reference fiber bragg grating and fiber components manufactured thereby |
| 01/08/2008 | US7317531 Apparatus and methods for detecting overlay errors using scatterometry |
| 01/08/2008 | US7317530 Combined spatial filter and relay systems |
| 01/08/2008 | US7317528 Ellipsometer, measurement device and method, and lithographic apparatus and method |
| 01/08/2008 | US7317527 Spatial light modulator fourier transform |
| 01/03/2008 | WO2008002981A2 Circular birefringence refractometer: method and apparatus for measuring optical activity |
| 01/03/2008 | WO2007120181A3 Process and apparatus for measurements of mueller matrix parameters of polarized light scattering |
| 01/03/2008 | US20080002202 Polarization Based Interferometric Detector |
| 01/03/2008 | US20080002201 High-speed polarizing device and high-speed birefringence measuring apparatus and stereoscopic image display apparatus utilizing the polarizing device |
| 01/01/2008 | US7315374 Real-time monitoring optically trapped carbon nanotubes |
| 12/27/2007 | WO2007149930A2 Fiber optic sensing instrument and system with fiber of adjustable optical path length and method of using it |
| 12/27/2007 | WO2007149925A2 Fiber optic sensor usable over wide range of gage lengths |
| 12/27/2007 | WO2007147959A1 Method of characterizing the anisotropy of a scattering medium and device for implementing such a method |
| 12/27/2007 | WO2007130001A3 Multi-spectral mixed radiation, polarmetric systems |
| 12/27/2007 | WO2005072327A3 Deformable photoelastic device |
| 12/27/2007 | US20070296977 Integrated Polarization Beam Splitter with Quarter-Wave Plate for Polarimeter and PMD Compensation Applications |
| 12/27/2007 | US20070296973 Method and apparatus for angular-resolved spectroscopic lithography characterization |
| 12/27/2007 | US20070296972 Method And System For Optical Detection Of Nano-Objects In A Light Refracting Medium |
| 12/27/2007 | US20070296960 Method of characterising the transmission losses of an optical system |
| 12/26/2007 | EP1334339B8 Method and apparatus for determining the polarization properties of light emitted, reflected or transmitted by a material using a laser scanning microscope |
| 12/26/2007 | CN200996935Y Thermostatic razor-shell-type jacket device with hinge mechanism for polarimeter test tube |
| 12/26/2007 | CN101093176A Extinction / luminosity compatible type automatic elliptical polarization instrument and measuring method |
| 12/25/2007 | US7312881 Parametric profiling using optical spectroscopic systems to adjust processing parameter |
| 12/25/2007 | US7312869 Out-of-plane birefringence measurement |
| 12/18/2007 | US7310145 Apparatus and method for determining optical retardation and birefringence |
| 12/18/2007 | US7310144 Polarimetry of three-dimensional optical fields |
| 12/13/2007 | US20070285665 Apparatus and method for inspecting film defect |
| 12/12/2007 | EP1865302A1 Method and device for measuring polarisation state and polarisation mode dispersion in photonic transmission systems |
| 12/12/2007 | CN200989879Y Constant temperature carpet device used for polarimeters sample tube |
| 12/11/2007 | US7307726 Device for ellipsometric two-dimensional display of a sample, display method and ellipsometric measurement method with spatial resolution |
| 12/11/2007 | US7307725 Surface inspection apparatus, polarization illuminating device and light-receiving device |
| 12/11/2007 | US7307724 Method of reducing the effect of noise in determining the value of a dependent variable |
| 12/11/2007 | US7307723 Method for the optical characterization of materials without using a physical model |
| 12/11/2007 | US7307722 Polarization stabilization |
| 12/04/2007 | US7304737 Rotating or rotatable compensator system providing aberation corrected electromagnetic raadiation to a spot on a sample at multiple angles of a incidence |
| 12/04/2007 | US7304736 Method and apparatus for measuring polarization |
| 11/29/2007 | US20070273880 Process monitoring system, process monitoring method, and method for manufacturing semiconductor device |
| 11/29/2007 | US20070273879 Particles with light-polarizing codes |
| 11/27/2007 | US7301974 Wavelength monitoring apparatus |
| 11/27/2007 | US7301649 System for scatterometric measurements and applications |
| 11/27/2007 | US7301633 High-throughput chiral detector and methods for using same |
| 11/27/2007 | US7301632 Polarization state conversion in optically active spectroscopy |
| 11/27/2007 | US7301631 Control of uncertain angle of incidence of beam from Arc lamp |
| 11/27/2007 | US7301138 Method and apparatus for dual polarization imaging |
| 11/23/2007 | CA2548022A1 Method for monitoring and measuring optical properties of device in polarization maintaining fibers by using reference fiber bragg grating and fiber components manufactured thereby |
| 11/22/2007 | US20070268490 Ellipsometer and Ellipsometry |
| 11/22/2007 | US20070268478 Metrology system with spectroscopic ellipsometer and photoacoustic measurements |
| 11/22/2007 | DE19719462B4 Verfahren und Vorrichtung zur Kontrastanhebung in der optischen Kohärenztomographie Method and apparatus for contrast enhancement in optical coherence tomography |
| 11/21/2007 | CN101076714A Birefringence measurement of polymeric films and the like |
| 11/20/2007 | US7298480 Broadband ellipsometer / polarimeter system |
| 11/15/2007 | WO2007130990A2 Measurement of linear and circular diattenuation in optical elements |
| 11/15/2007 | WO2007130001A2 Multi-spectral mixed radiation, polarmetric systems |
| 11/15/2007 | WO2007061460A3 Combined spatial filter and relay systems in ellipsometers and polarimeters |
| 11/15/2007 | US20070263220 Optical Measurement System with Simultaneous Multiple Wavelengths, Multiple Angles of Incidence and Angles of Azimuth |
| 11/15/2007 | US20070263219 Metrological Characterisation of Microelectronic Circuits |
| 11/15/2007 | US20070263218 Rapid 4-Stokes parameter determination via stokes filter |
| 11/15/2007 | DE102006031006A1 Measuring arrangement i.e. polarimetric measuring device, for measuring polarization-affecting characteristics of e.g. biconvex lens, has detector and/or light source units which are changeable in alignment relative to optical component |
| 11/14/2007 | EP1853959A1 Rotational disk polarization controller |
| 11/14/2007 | EP1853886A2 Michelson interferometer based delay line interferometers |
| 11/13/2007 | US7295313 Application of intermediate wavelength band spectroscopic ellipsometry to in-situ real time fabrication of multiple layer alternating high/low refractive index filters |
| 11/13/2007 | US7295312 Rapid 4-Stokes parameter determination via Stokes filter wheel |
| 11/08/2007 | US20070258092 Optical measurement device and method |
| 11/06/2007 | US7292389 Circular extinction contrast imaging microscope |
| 11/01/2007 | WO2007123696A2 In-die optical metrology |
| 11/01/2007 | US20070252992 Apparatus and method for obtaining sample information by detecting electromagnetic wave |