Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892)
04/1985
04/23/1985US4512283 Plasma reactor sidewall shield
04/23/1985CA1185839A1 High hardness material
04/17/1985EP0137702A2 Chemical Vapor deposition apparatus
04/17/1985EP0137512A2 Solar cell
04/17/1985EP0137043A1 Method of manufacturing hydrogenated amorphous silicon thin film and solar cell
04/16/1985US4511411 Method of forming a hard surface layer on a metal component
04/11/1985WO1985001522A1 Method and apparatus for coating a substrate
04/09/1985US4510182 Method for the production of homogeneous coatings of two or more metals and/or metal compounds
04/09/1985US4510177 Method and apparatus for vapor phase deposition
04/09/1985US4509997 Organometallic chemical vapor deposition of films utilizing organic heterocyclic compounds
04/09/1985US4509456 Apparatus for guiding gas for LP CVD processes in a tube reactor
04/09/1985US4509451 Electron beam induced chemical vapor deposition
04/02/1985US4508554 Microwave energy; reaction of gaseous starting materials with end face
04/02/1985US4508054 Device for depositing a mineral oxide coating on a substrate
03/1985
03/27/1985EP0135344A1 Manufacture of cadmium mercury telluride
03/27/1985EP0135308A1 Cooled optical window for semiconductor wafer heating
03/27/1985EP0135179A1 Process for depositing metallic copper
03/26/1985US4507375 Electrophotographic photosensitive member and process for production thereof
03/26/1985US4506815 Bubbler cylinder and dip tube device
03/20/1985EP0134645A1 Method of forming thin film
03/20/1985EP0134507A1 Process of depositing a layer on a body
03/19/1985US4505950 Method of manufacturing a multiple-layer, non-single-crystalline semiconductor on a substrate
03/19/1985US4505949 Thin film deposition using plasma-generated source gas
03/19/1985CA1184096A1 Method of making p-doped silicon films and more efficiently p-doped films and devices made therefrom
03/14/1985WO1985000999A1 Cutting tool and method of manufacture thereof
03/12/1985US4504526 Chemical vapor deposition
03/12/1985US4504522 Method of making a titanium dioxide oxygen sensor element by chemical vapor deposition
03/12/1985US4504519 Diamond-like film and process for producing same
03/12/1985US4504518 Method of making amorphous semiconductor alloys and devices using microwave energy
03/12/1985US4503807 Chemical vapor deposition apparatus
03/12/1985CA1183738A1 Surface treatment for carbon
03/05/1985CA1183411A1 Method of making a coated cemented carbide body and resulting body
02/1985
02/26/1985US4501777 Reacting silicon hydride silane or silicon tetrachloride with hydrogen or ammonia to form solid in pores
02/26/1985US4501769 Vapor deposition
02/26/1985US4501766 Film depositing apparatus and a film depositing method
02/26/1985CA1183102A1 Low temperature process for depositing oxide layers by photochemical vapor deposition
02/19/1985US4500567 Method for forming tin oxide coating
02/19/1985US4500565 Photoreaction of gas with ligat
02/19/1985US4500563 Semiconductive wafers; evacuable envelopes containing interleaved electrodes
02/19/1985US4500483 Manufacture of hollow CVD silicon nitride articles
02/19/1985US4499853 Distributor tube for CVD reactor
02/14/1985WO1985000555A1 Coating process for making non-iridescent glass structure
02/13/1985EP0132735A2 Method of producing a thermal barrier coating on a metallic substrate
02/12/1985US4499354 Susceptor for radiant absorption heater system
02/12/1985US4498953 Etching techniques
02/05/1985US4497874 Coated carbide cutting tool insert
02/05/1985US4497277 Bell of opaque fused silica
01/1985
01/31/1985WO1985000466A1 Apparatus for plasma treatment of plate-shaped substrats
01/30/1985EP0132408A2 Method and apparatus for growing layers or producing coatings on a substrate
01/29/1985US4496843 Method for producing metal ions
01/29/1985US4496828 Susceptor assembly
01/29/1985US4496450 Process for the production of a multicomponent thin film
01/29/1985US4496252 Resilient support arrangement for shaft bearings of highspeed rotors, in particular rotors of turbo machines
01/29/1985CA1181719A1 Photochemical vapor deposition apparatus and method
01/22/1985US4495218 Vapor deposition of silicon by ultraviolet radiation of a polysilane
01/22/1985US4495215 Fluidized bed furnace and method of emptying the same
01/22/1985CA1181361A1 Ionization enhanced chemical process
01/16/1985EP0131208A1 Susceptor assembly
01/15/1985US4493977 Method for heating semiconductor wafers by a light-radiant heating furnace
01/09/1985EP0130803A2 Graphite intercalated alkali metal vapour sources
01/09/1985EP0130768A2 External isolation module
01/09/1985EP0130398A2 Method for producing an electroconductive connection, and device for realizing such a method
01/08/1985US4492736 Passing flow discharge through silicon containing gas, hydrogen, a
01/08/1985US4492716 Method of making non-crystalline semiconductor layer
01/08/1985US4492605 Doping with gases
01/08/1985US4492181 Apparatus for continuously producing tandem amorphous photovoltaic cells
01/02/1985EP0129686A1 Superconducting fibre
01/02/1985EP0129588A1 Damped chemical vapor deposition of smooth doped films.
01/02/1985CA1180220A Amorphous silicon photoconductive member including an intermediate composite barrier layer
01/01/1985US4491606 Spacer for preventing shorting between conductive plates
01/01/1985US4491604 Silicon deposition process
01/01/1985US4491496 Enclosure for the treatment, and particularly for the etching of substrates by the reactive plasma method
12/1984
12/27/1984EP0129490A1 Method and device for the production of a uniform plasma having a large volume, a high density and a low electron temperature
12/27/1984EP0129291A1 Method of and device for manufacturing optical fibres
12/25/1984US4490229 Deposition of diamondlike carbon films
12/25/1984US4490190 Process for thermochemical treatments of metals by ionic bombardment
12/19/1984EP0128169A1 Chemical vapor deposition of titanium nitride and like films.
12/18/1984US4489103 Vapor deposition of nitrous oxide-silicon hydride
12/18/1984US4489102 Radiation-stimulated deposition of aluminum
12/18/1984US4488506 Metallization plant
12/11/1984US4487799 Pyrolytic graphite pretreatment for carbon-carbon composites
12/11/1984US4487787 Method of growing silicate glass layers employing chemical vapor deposition process
12/11/1984US4487162 Magnetoplasmadynamic apparatus for the separation and deposition of materials
12/11/1984US4487161 Semiconductor device manufacturing unit
12/05/1984EP0127499A1 Process for the amorphous growth of a material with irradiation crystallisation
12/04/1984US4486473 Nondestructive
12/04/1984US4486462 Electroconductive workpiece
12/04/1984US4486286 Method of depositing a carbon film on a substrate and products obtained thereby
12/04/1984US4485759 Planetary substrate support apparatus for vapor vacuum deposition coating
11/1984
11/27/1984US4485149 Highly temperature-resistant, wear-resistant workpieces and method for their manufacture
11/27/1984US4485125 Method for continuously producing tandem amorphous photovoltaic cells
11/27/1984US4485121 Method for producing a fluorine-containing amorphous semiconductor
11/27/1984US4484809 Glow discharge method and apparatus and photoreceptor devices made therewith
11/27/1984US4484538 Apparatus for providing depletion-free uniform thickness CVD thin-film on semiconductor wafers
11/27/1984CA1178553A1 Method and arrangement for internally coating a tube by reactive deposition from a gas mixture activated by a plasma
11/21/1984EP0125954A1 Tin oxide coating with electrical properties, obtained from gaseous compounds
11/21/1984EP0125318A1 Method of forming amorphous silicon film
11/20/1984US4483883 Upstream cathode assembly
11/20/1984US4483541 Gas seal for semiconductor processing equipment
11/20/1984CA1178180A1 Method for producing semiconductor grade silicon