Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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08/15/1985 | WO1985003460A1 Method and apparatus for the gas jet deposition of conducting and dielectric thin solid films and products produced thereby |
08/14/1985 | EP0151233A2 Apparatus for the coating of a metallic dental prosthesis part and process for the bonding of a metallic dental prosthesis part with a synthetic dental material |
08/14/1985 | EP0151200A1 Raw material supply device |
08/13/1985 | US4535228 Heater assembly and a heat-treatment method of semiconductor wafer using the same |
08/13/1985 | US4535227 Method for heating semiconductor wafer by means of application of radiated light |
08/13/1985 | US4535000 Chemical vapor deposition of titanium nitride and like films |
08/13/1985 | US4534842 Process and device for producing a homogeneous large-volume plasma of high density and of low electronic temperature |
08/13/1985 | CA1191975A1 Glow discharge deposition apparatus including a non- horizontally disposed cathode |
08/07/1985 | EP0150878A2 Process for the manufacture of a thin film strain gage system |
08/07/1985 | EP0150578A1 Manufacture of optical fibre preforms |
08/07/1985 | EP0150204A1 Non-iridescent glass structure and coating process for making same. |
08/06/1985 | US4533820 Radiant heating apparatus |
08/06/1985 | US4533564 Method of manufacturing an electrophotographic photoreceptor |
07/30/1985 | US4532199 Method of forming amorphous silicon film |
07/30/1985 | US4532150 Method for providing a coating layer of silicon carbide on the surface of a substrate |
07/30/1985 | US4532022 Process of producing a semiconductor device |
07/30/1985 | US4532015 Depositing conductive metal onto polyarylene sulfide substrate by electroless plating, aging to improve adhesion |
07/30/1985 | CA1191107A1 Isolation valve |
07/24/1985 | EP0149408A2 Method and apparatus for the deposition of a thin layer on a substrate by a reactive plasma |
07/24/1985 | EP0149044A1 Boron nitride containing titanium nitride, method of producing the same and composite ceramics produced therefrom |
07/24/1985 | EP0149024A2 Surface-coated wear-resistant member of cermet and process for producing same |
07/24/1985 | EP0148898A1 Apparatus for plasma treatment of plate-shaped substrats. |
07/18/1985 | WO1985003088A1 Material vapor deposition technique |
07/16/1985 | US4529617 Continuously depositing amorphous element on support; radiation with electromagnetic waves |
07/16/1985 | US4529474 Using gas mixture of carbon tetrafluoride and oxygen |
07/16/1985 | US4529427 Method for making low-loss optical waveguides on an industrial scale |
07/10/1985 | EP0147967A2 Induction heated reactor system for chemical vapor deposition |
07/10/1985 | EP0147663A1 Gas supplying apparatus |
07/09/1985 | CA1190043A1 Conductive silicon carbide |
07/03/1985 | EP0147182A1 Method of coating nuclear fuel with boron nitride |
07/02/1985 | US4526805 Decomposing raw gas to form molecular species, depositing thin film on substrate |
07/02/1985 | US4526673 Exposing negatively biased parts to ion beam from excited plasma |
07/02/1985 | US4526644 Treatment device utilizing plasma |
07/01/1985 | EP0088074A4 Plasma reactor and method therefor. |
06/25/1985 | US4525415 Sintered hard metal products having a multi-layer wear-resistant coating |
06/25/1985 | US4525389 Method for conveying and treating a gas employed for the coating of workpieces by means of a chemical, heterogeneous vapor-phase reaction |
06/25/1985 | US4525382 Electric plasma discharge generating uv rays, grid or wire-nettingmetal |
06/25/1985 | US4525381 Photochemical vapor deposition apparatus |
06/25/1985 | US4525376 Optical methods for controlling layer thickness |
06/25/1985 | US4525375 Method of controllong the deposition of hydrogenated amorphous silicon and apparatus therefor |
06/25/1985 | US4524719 Substrate loading means for a chemical vapor deposition apparatus |
06/25/1985 | US4524718 Reactor for continuous coating of glass |
06/25/1985 | CA1189602A1 Apparatus for uniformly heating a substrate |
06/19/1985 | EP0145403A2 Semiconducting multilayered structures and systems and methods for synthesizing the structures and devices incorporating the structures |
06/19/1985 | EP0145346A2 Reactor and susceptor for chemical vapor deposition process |
06/18/1985 | US4524090 Low temperature thermolysis |
06/18/1985 | US4523544 Apparatus for glow discharge deposition of a thin film |
06/18/1985 | CA1189174A1 Magnetic apparatus for reducing substrate warpage |
06/12/1985 | EP0144229A2 Improvements in or relating to coating apparatus |
06/12/1985 | EP0144055A2 Process and apparatus for producing a continuous insulated metallic substrate |
06/12/1985 | EP0143889A2 Coated hard metal body |
06/11/1985 | US4522849 Reacting diborane with ammonia in stream of inert gas |
06/11/1985 | US4522845 Process for producing a layer of a metal silicide by applying multichromatic radiation |
06/11/1985 | US4522842 Annealing |
06/11/1985 | US4522663 Method for optimizing photoresponsive amorphous alloys and devices |
06/11/1985 | US4522453 Tribological coatings for the protection of moving machine parts from wear and corrosion |
06/11/1985 | US4522149 Reactor and susceptor for chemical vapor deposition process |
06/06/1985 | WO1985002417A1 Method and apparatus for chemical vapor deposition |
06/05/1985 | EP0143701A1 Process for depositing amorphous silicon by low-temperature thermal decomposition, and apparatus for carrying out this process |
06/05/1985 | EP0143697A2 Modular V-CVD diffusion furnace |
06/05/1985 | EP0143611A1 Bubbling evaporator |
06/05/1985 | EP0143479A1 Plasma-stimulated chemical vapour deposition device and, in particular, a substrate supporting and electrode disposition and associated components |
06/04/1985 | US4521717 Apparatus for producing a microwave plasma for the treatment of substrates, in particular for the plasma-polymerization of monomers thereon |
06/04/1985 | US4521447 Method and apparatus for making layered amorphous semiconductor alloys using microwave energy |
06/04/1985 | US4520757 Process gas introduction, confinement and evacuation system for glow discharge deposition apparatus |
06/04/1985 | CA1188398A1 Method and apparatus for continuously producing tandem amorphous photovoltaic cells |
05/29/1985 | EP0143053A2 Apparatus for providing depletion-free uniform thickness cvd thin-film on semiconductor wafers |
05/29/1985 | EP0142495A1 Inverted positive vertical flow chemical vapor deposition reactor chamber. |
05/28/1985 | US4519339 Continuous amorphous solar cell production system |
05/22/1985 | EP0142450A2 Device for manufacturing thin dielectric layers on the surfaces of solid bodies |
05/22/1985 | EP0142176A1 Cubic carbon |
05/22/1985 | EP0142083A2 Method and apparatus for the production of metallic coatings |
05/21/1985 | US4518628 Hermetic coating by heterogeneous nucleation thermochemical deposition |
05/21/1985 | CA1187622A1 Semiconductor device having a body of amorphous silicon |
05/15/1985 | EP0141561A2 A process for producing devices having semi-insulating indium phosphide based compositions |
05/14/1985 | US4517223 Method of making amorphous semiconductor alloys and devices using microwave energy |
05/14/1985 | US4517220 Deposition and diffusion source control means and method |
05/14/1985 | US4517027 Bulk production of alloys by deposition from the vapor phase and apparatus therefor |
05/14/1985 | US4516527 Photochemical vapor deposition apparatus |
05/08/1985 | EP0140793A2 Process of making glass sheets with filtering bands and apparatus therefor |
05/08/1985 | EP0140791A1 Apparatus for providing uniform thickness CVD thin-film on semiconductor substrates |
05/08/1985 | EP0140660A2 Method of forming amorphous polymeric halosilane films and products produced therefrom |
05/08/1985 | EP0140625A1 Tellurides |
05/08/1985 | EP0140294A2 Plasma processing method and apparatus for carrying out the same |
05/08/1985 | EP0140130A2 Process and apparatus for preparing semiconductor layer |
05/07/1985 | US4515107 Apparatus for the manufacture of photovoltaic devices |
05/07/1985 | CA1186787A1 Magnetic gas gate |
05/02/1985 | EP0139134A2 Deposition and diffusion source control means and method |
04/30/1985 | US4514441 Layer of mixed oxides |
04/30/1985 | US4513684 Upstream cathode assembly |
04/30/1985 | CA1186280A1 Multiple chamber deposition and isolation system and method |
04/24/1985 | EP0138332A1 Methods of using selective optical excitation in deposition processes and the detection of new compounds |
04/24/1985 | EP0137923A1 Electroconductive film system for aircraft windows |
04/23/1985 | US4513057 Process for forming sulfide layers |
04/23/1985 | US4513026 Vapor deposition using reaction mixture or silicon compound phosphorus compound, and oxidizing gas |
04/23/1985 | US4513022 Process for amorphous silicon films |
04/23/1985 | US4513021 Plasma reactor with reduced chamber wall deposition |
04/23/1985 | US4512825 Recovery of fragile layers produced on substrates by chemical vapor deposition |
04/23/1985 | US4512812 Method for reducing phosphorous contamination in a vacuum processing chamber |
04/23/1985 | US4512284 Glow discharge apparatus for use in coating a disc-shaped substrate |