| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 07/20/1993 | CA2034650C Ellipsometric control of material growth |
| 07/15/1993 | DE4200429A1 Verfahren zur ionisation thermisch erzeugter materialdaempfe und vorrichtung zur durchfuehrung des verfahrens A method for ionization of thermally generated materialdaempfe and apparatus for performing the method |
| 07/14/1993 | EP0551117A2 Large scale integrated circuit device and thin film forming method and apparatus for the same |
| 07/14/1993 | EP0550630A1 Abrasion wear resistant coated substrate product |
| 07/14/1993 | CN1074247A Cathode and long arc Plasma evaporating source with tubular |
| 07/13/1993 | US5227364 Method of forming patterned oxide superconducting films and Josephson junction devices by using an aqueous alkaline solution |
| 07/13/1993 | US5227230 Thermal control materials |
| 07/13/1993 | US5227211 Magnetic recording disk medium comprising a magnetic thin film and a carbon overcoat having surface nitrogen atoms, a specified carbon structure, and oxygen atoms |
| 07/13/1993 | US5227204 Fabrication of ferrite films using laser deposition |
| 07/13/1993 | US5227203 Ion-plating method and apparatus therefor |
| 07/13/1993 | US5227129 Nuclear fuel rods |
| 07/13/1993 | US5226636 Holding fixture for substrates |
| 07/08/1993 | WO1993013542A1 Extended lifetime collimator |
| 07/08/1993 | WO1993013240A1 System for depositing superconducting films |
| 07/08/1993 | WO1993013239A1 Exothermic reflexible glass, exothermic transparent glass and process of manufacturing them |
| 07/08/1993 | WO1993013238A1 Vacuum surface treatment apparatus and method |
| 07/08/1993 | WO1993012941A1 Base material of sheet for metallic transfer printing film and sheet itself |
| 07/08/1993 | WO1993012928A1 Magnetic recording media employing soft magnetic material |
| 07/08/1993 | WO1993012874A1 Method of feeding ultrahigh-purity gas and feed system thereof |
| 07/08/1993 | DE4200193A1 Prodn. of quantum point systems - by vaporising cluster-forming atoms and polymerising monomers between electrodes in high vacuum, and coalescing clusters in electron beam |
| 07/08/1993 | CA2126674A1 Exothermic reflexible glass, exothermic transparent glass and process of manufacturing them |
| 07/08/1993 | CA2125180A1 Extended lifetime collimator |
| 07/07/1993 | EP0550039A2 A gas barrier film |
| 07/07/1993 | EP0550003A1 Vacuum treatment apparatus and its applications |
| 07/07/1993 | EP0549854A1 Cathode for coating a substrate |
| 07/07/1993 | EP0549801A1 Diamond-covered member and production thereof |
| 07/07/1993 | EP0549585A1 Binder enriched cvd and pvd coated cutting tool |
| 07/07/1993 | EP0549584A1 Cvd and pvd coated cutting tools |
| 07/06/1993 | US5225651 Device for low-temperature plasma surface treatment of a plate or a sheet of a metallic material |
| 07/06/1993 | US5225398 Method for forming an oxide superconducting film having different crystal orientation on different regions of a si substrate |
| 07/06/1993 | US5225397 Method for preparing superconducting thin film |
| 07/06/1993 | US5225396 Method for forming an oxide superconducting film |
| 07/06/1993 | US5225393 Yttrium oxide, barium oxide, copper oxide |
| 07/06/1993 | US5225382 Titanium oxide film |
| 07/06/1993 | US5225273 Transparent electroconductive laminate |
| 07/06/1993 | US5225253 Method of forming silver/molybdenum surface coating material |
| 07/06/1993 | US5225057 Process for depositing optical films on both planar and non-planar substrates |
| 07/06/1993 | US5224249 Immersion in an ion stream and deformation |
| 07/01/1993 | DE4223091C1 Water cooled holder for inserted exchangeable target - comprises housing, cooling plate and axially freely movable metal bellows, vacuum arc discharge vapour deposition appts. |
| 07/01/1993 | DE4221361C1 Plasma-supported deposition of thin insulating layers on substrates - buy vaporising insulating material and ionising in plasma of low energetic arc discharge |
| 06/30/1993 | EP0549545A2 Electric arc evaporator |
| 06/30/1993 | EP0549528A1 Method for fabrication of coated substrates |
| 06/30/1993 | EP0549246A2 Multilayer film materials system |
| 06/30/1993 | EP0548788A2 Procedure for forming, on a solid substrate, a film with properties similar to those of diamonds, the solid bodies so coated and the self-sustained film so obtained |
| 06/30/1993 | EP0548084A1 A vacuum deposited dark coating on a substrate |
| 06/29/1993 | US5224202 Apparatus for the evaporation of liquids |
| 06/29/1993 | US5223309 Improved surface |
| 06/29/1993 | US5223307 Packaging foil, and method for the production thereof |
| 06/29/1993 | US5223304 Polishing with aqueous dispersion of fine diamond particles which also contains dissolved surfactant gives low surface irregularities |
| 06/29/1993 | US5223112 Removable shutter apparatus for a semiconductor process chamber |
| 06/29/1993 | US5223111 Device for applying thin layers onto a substrate |
| 06/29/1993 | US5223108 Multipassages tapering longitudinally; cathode sputtering |
| 06/29/1993 | US5223038 Apparatus for producing metal-free strips |
| 06/29/1993 | US5223001 Vacuum processing apparatus |
| 06/24/1993 | WO1993012632A1 Method of monitoring atmospheric pressure glow discharge plasma |
| 06/24/1993 | WO1993012265A1 Ion implantation in metal alloys |
| 06/24/1993 | WO1993012264A1 Method for preparing a target element for cathode sputtering |
| 06/24/1993 | DE4203772C1 Selective coating of glass sheet edges e.g. car windscreens - by stacking in stepwise overlapping manner in support means |
| 06/24/1993 | CA2125670A1 Method for preparing a target element for cathode sputtering |
| 06/23/1993 | EP0548032A2 Electric arc evaporator |
| 06/23/1993 | EP0547312A1 Substrate-holding and -turning device for vacuum processes |
| 06/23/1993 | EP0547048A1 Heater for an effusion cell. |
| 06/23/1993 | CN1021350C Method for coating organic film on neodymium, iron and boron products, and apparatus thereof |
| 06/22/1993 | US5222074 Thermal decomposition cell |
| 06/22/1993 | US5221636 Process and apparatus for the deposition of anti-reflection coatings and the checking of their thickness |
| 06/22/1993 | US5221449 Forming a seed layer of Ta doped with nitrogen, depositing a layer of alpha-Ta in a nitrogen-free atmosphere |
| 06/22/1993 | US5221403 Support table for plate-like body and processing apparatus using the table |
| 06/22/1993 | US5221349 Vaccum arc vapor deposition device |
| 06/21/1993 | CA2085494A1 Process for producing substrates containing a coating layer |
| 06/17/1993 | WO1993012262A1 Titanium containing magnesium alloy produced by vapour quenching |
| 06/17/1993 | DE4141365A1 Sintered silicon nitride body with modified surface - consists of silicon nitride, amorphous or semi-crystalline grain boundary phase and sintering aid |
| 06/17/1993 | DE4140891A1 Capacitor foil web prodn. - comprises vapour depositing metal aluminium@ and/or zinc@ layers, and silica insulating layer on web |
| 06/17/1993 | CA2104012A1 Titanium containing magnesium alloy produced by vapour quenching |
| 06/16/1993 | EP0546946A2 Film deposition apparatus |
| 06/16/1993 | EP0546470A1 Heat treatable sputter-coated glass |
| 06/16/1993 | EP0546293A1 Apparatus for coating a substrate, in particular for electrical insulating layers |
| 06/16/1993 | EP0546251A2 Cathodic sputtering apparatus |
| 06/16/1993 | EP0546248A2 Evaporator boat for a substrate-coating apparatus |
| 06/16/1993 | EP0546052A1 Method of enhancing the performance of a magnetron sputtering target |
| 06/16/1993 | EP0546006A1 Ion plating method |
| 06/15/1993 | US5220515 Flow verification for process gas in a wafer processing system apparatus and method |
| 06/15/1993 | US5219668 Process and apparatus for the treatment of coated, elongated substrate, as well as substrates thus treated and articles of polymeric material reinforced with these substrates |
| 06/10/1993 | WO1993011278A1 Aluminum alloy plate |
| 06/10/1993 | WO1993011272A1 Process for applying a coloured decorative layer on articles of daily use |
| 06/10/1993 | WO1993011068A1 Conversion of fullerenes to diamond |
| 06/09/1993 | EP0545863A1 Coating a substrate surface with a permeation barrier |
| 06/09/1993 | EP0545839A1 Process for coating a metallurgical product, product thereby obtained and apparatus for its fabrication |
| 06/09/1993 | EP0545699A1 Optical coatings having a plurality of prescribed properties and methods of fabricating same |
| 06/09/1993 | EP0545610A1 Data memory disk carrier and method of manufacture |
| 06/08/1993 | US5218335 Electronic circuit device having thin film resistor and method for producing the same |
| 06/08/1993 | US5218232 Semiconductor device having two-level wiring |
| 06/08/1993 | US5218210 Broad beam flux density control |
| 06/08/1993 | US5218179 Plasma source arrangement for ion implantation |
| 06/08/1993 | US5217817 Steel tool provided with a boron layer |
| 06/08/1993 | US5217748 Method of hardening metal surfaces |
| 06/08/1993 | US5217589 Method of adherent metal coating for aluminum nitride surfaces |
| 06/03/1993 | DE4231779C1 Zirconium oxide thin layer formation on substrate - by vaporising in vacuum chamber using water vapour as reactive gas |
| 06/03/1993 | DE4138926A1 Prodn. of indium-tin oxide targets in CVD reactor - by depositing thermally decomposable tin and indium cpds. with addn. of oxygen@ onto substrate |
| 06/02/1993 | EP0544107A1 Method and apparatus for coating a substrate, in particular for electrical insulating layers |
| 06/02/1993 | EP0544040A1 Protection coating for titanium article |