Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
05/1992
05/19/1992US5115512 Optical waveguide device and method of making the same
05/19/1992US5114906 Process for depositing tl-containing superconducting thin films on (110) mgo substrates
05/19/1992US5114559 Thin film deposition system
05/19/1992US5114556 Mobilization by collisions; sputtering
05/19/1992US5113789 Self cleaning flow control orifice
05/19/1992CA1301239C Method and arrangement for mechanically moving of a magnetic field generating device in a cathode arc discharge evaporating device
05/14/1992WO1992007970A1 Magnetron sputter coating method and apparatus with rotating magnet cathode
05/14/1992WO1992007969A1 Apparatus for depositing material into high aspect ratio holes
05/14/1992WO1992007968A1 STRUCTURE AND METHOD OF MAKING ALPHA-Ta IN THIN FILMS
05/14/1992DE4034034A1 Coating weakly corrosion resistant substrate - useful in making decorative layers, without applying galvanic protection and is effective and simple
05/13/1992EP0485314A1 Apparatus for low temperature plasma surface treatment of a metal plate or sheet
05/13/1992EP0485233A2 A method of manufacturing insulated-gate field effect transistors
05/13/1992EP0485129A1 Magnetoresistive device and method of making
05/13/1992EP0485126A2 Coatable plastics film and composite film comprising same
05/13/1992EP0484809A2 Process for obtaining a coating by deposition, in particular by laser or pseudo-spark ablation
05/13/1992EP0484704A1 Low voltage arc discharge and variable magnetic field for heating a substrate
05/13/1992EP0484699A1 Friction pairing and its method of manufacture
05/13/1992EP0371065B1 Surface deposition or surface treatment reactor
05/13/1992CN2104222U Cold cathode arc light ion plating step type target
05/13/1992CN1061051A Method for synthesizing thin layer of titanium nitride by ionic beam increasing sedimentation
05/13/1992CN1016605B Architectural coating with interference colors
05/12/1992US5113074 Ion beam potential detection probe
05/12/1992US5112699 Metal-metal epitaxy on substrates and method of making
05/12/1992US5112693 Low reflectance, highly saturated colored coating for monolithic glazing
05/12/1992US5112644 Horizontal precession tooling and method for tube rotation
05/12/1992US5112642 Monitoring fundamental resonance frequency and nearby harmonic
05/12/1992US5112469 Apparatus for the inward and outward transfer of a workpiece in a vacuum chamber
05/12/1992US5112468 Target for magnetron-sputtering systems
05/12/1992US5112467 Clamp, roller with alumina insulation
05/12/1992US5112466 Apparatus for forming a thin film
05/12/1992US5112462 Method of making metal-film laminate resistant to delamination
05/12/1992US5112185 Method for replacing a deposit shield in an evacuated film forming chamber
05/12/1992CA1300367C Apparatus for passing workpieces into and out of a coating chamber through locks
05/12/1992CA1300325C Plated steel sheet for a can
05/10/1992WO1992009117A1 Rechargeable lithiated thin film intercalation electrode battery
05/09/1992CA2053767A1 Metallized polypropylene film and process for manufacture
05/07/1992DE4126040C1 Segmented cathodes for plasma surface-coating process - comprise rectangular section frame internally divided into 3 segments of titanium@, zirconium@ and chromium@ respectively and insulating projections
05/06/1992EP0483880A2 Method for forming thin film and apparatus therefor
05/06/1992EP0483839A1 Method for plasmachemical cleaning for a subsequent PVD or PECVD coating
05/06/1992EP0483782A2 Metallising process
05/06/1992EP0483375A1 Sputtering target and production thereof
05/05/1992US5111022 Cooling system for electron beam gun and method
05/05/1992US5110696 In situ low temperature annealing
05/05/1992US5110679 Crystalline sp-3 bonded, sputtering onto single crystal
05/05/1992US5110662 Silver, transparent metal oxide
05/05/1992US5110637 Amorphous oxide film and article having such film thereon
05/05/1992US5110438 Reduced pressure surface treatment apparatus
05/05/1992US5110435 Formation and acceleration of ionized clusters
05/05/1992US5110373 Layer having non-uniform dopant concentration
05/05/1992US5110249 Transport system for inline vacuum processing
05/03/1992CA2054437A1 Process of plasma-chemical cleaning prior to pvd or pecvd coating
04/1992
04/30/1992WO1992007105A1 Rotating magnetron incorporating a removable cathode
04/30/1992WO1992007104A1 Film thickness uniformity control apparatus for in-line sputtering systems
04/30/1992WO1992007103A1 Vapour deposition apparatus and method
04/30/1992WO1992006923A1 Method of making superconductive film
04/29/1992EP0482891A2 High vacuum magnetron sputter source
04/29/1992EP0482541A1 Large area cathodic device with equalized consumption
04/29/1992EP0482387A2 Process for producing a YBa2Cu3O7 superconducting layer on a sapphire substrate
04/28/1992US5108846 Protective layers of germanium ceramics
04/28/1992US5108813 Sliding member
04/28/1992US5108574 Cylindrical magnetron shield structure
04/28/1992US5108571 Process for coating a dielectric substrate with copper
04/28/1992US5108569 Process and apparatus for forming stoichiometric layer of a metal compound by closed loop voltage controlled reactive sputtering
04/28/1992US5108543 Method of surface treatment
04/28/1992US5107791 Process for the manufacture of deposition films and apparatus therefor
04/27/1992CA2054238A1 Large surface cathode arrangement of uniform consumption
04/22/1992EP0481416A1 Cathodic sputtering coating machine
04/22/1992EP0481346A1 Multilayer metal-coated steel sheet
04/22/1992EP0481266A1 Foil
04/22/1992EP0481198A2 Scanned electron cyclotron resonance plasma source
04/22/1992EP0173715B1 Method and apparatus for the gas jet deposition of conducting and dielectric thin solid films and products produced thereby
04/21/1992US5107174 Low threshold voltage for electroluminescence
04/21/1992US5107119 Method of evaluating characteristics of superconductors and process and apparatus for forming superconductor film by using the method
04/21/1992US5106821 Process for forming thin oxide film
04/21/1992US5106794 Zirconium oxide sinter for forming thin film thereof and method for production of the same
04/21/1992US5106674 Blade member of tungsten-carbide-based cemented carbide for cutting tools and process for producing same
04/21/1992US5106474 Anode structures for magnetron sputtering apparatus
04/21/1992US5106470 Alternating direction of electric current in outer peripheral coil moves magnetic field and widens target area sputtered
04/21/1992US5106392 Multigrain abrasive particles
04/17/1992WO1992006798A1 In situ growth of superconducting films
04/17/1992CA2092530A1 In situ growth of superconducting films
04/16/1992WO1992006224A1 Component-coating process and device
04/16/1992WO1992005951A1 Abrasion wear resistant coated substrate product
04/16/1992WO1992003841A3 Device for evaporating material by means of a vacuum arc discharge and process
04/16/1992DE4127260C1 Magnetron sputter source
04/15/1992EP0480895A2 Improved diamond tools for rock drilling, metal cutting and wear part applications
04/15/1992EP0480789A2 Process for producing an oxide type crystallised thin layer by rapid annealing
04/15/1992EP0480689A2 Ion implantation and surface processing method and apparatus
04/15/1992EP0480688A2 Plasma source arrangement for ion implantation
04/15/1992EP0480504A1 Method of reducing particle contamination during sputtering
04/15/1992EP0480409A1 Method of fabricating a Ti/TiN/Al contact, with a reactive sputtering step
04/15/1992EP0479907A1 Process for making diamond, doped diamond, diamond-cubic boron nitride composite films at low temperature
04/15/1992CN1060315A Ornament and method for making same
04/15/1992CN1060254A Foil and method of making same
04/14/1992US5105066 Device comprising a heating sample carrier
04/14/1992US5104734 Applying metal as metal benzotriazole; heating
04/14/1992US5104695 Method and apparatus for vapor deposition of material onto a substrate
04/14/1992US5104509 Vacuum deposition from consumable electrode in direct current arc in presence of hydrogen yields diamond films
04/14/1992US5104461 Hardened insert for backstopping clutch
04/14/1992US5103766 Vacuum arc vapor deposition device having electrode switching means