| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
|---|
| 08/18/1992 | CA1306479C Feed-through element for application in a vacuum apparatus |
| 08/15/1992 | CA2061176A1 Series evaporator |
| 08/13/1992 | DE4103981A1 Hybrid vacuum deposition - uses ions of one component and droplets of another to give thick layer on rough surfaces |
| 08/12/1992 | EP0498663A2 Method for producing a semi conductor device using sputtering |
| 08/12/1992 | CN2112637U Multi-element packing type combined target |
| 08/11/1992 | US5137791 Metal-film laminate resistant to delamination |
| 08/11/1992 | US5137772 Body coated with cubic boron nitride and method for manufacturing the same |
| 08/11/1992 | US5137610 Rotatably mounted cathode nested in Teflon spacers; quartz plate covering prevents sputtering of spacers |
| 08/06/1992 | WO1992013360A1 Aluminum alloy wiring layer, manufacturing thereof, and aluminum alloy sputtering target |
| 08/06/1992 | WO1992013115A1 Target for cathode sputtering |
| 08/06/1992 | WO1992013114A1 Ion vapour deposition apparatus and method |
| 08/06/1992 | WO1992013113A1 Method for depositing a multi-component thin film by photo-ablation |
| 08/06/1992 | CA2098725A1 Target for cathode sputtering |
| 08/05/1992 | EP0497651A1 Individual, reversible support for the treatment of a substrate, in particular a spectacle lens, and equipment using such a support |
| 08/05/1992 | EP0497503A2 Process for producing single phase TlCaBaCuO thin films |
| 08/05/1992 | EP0497499A1 Thin film coating and method |
| 08/05/1992 | EP0497267A1 Semiconductor processing machine and suspension system for use in same |
| 08/05/1992 | EP0497066A1 A sputtering apparatus |
| 08/05/1992 | EP0496897A1 Method for manufacturing high temperature superconductive oxide thin film |
| 08/05/1992 | CN1063315A Multiple ion-beam high-energy-level reinforced injection technique |
| 08/04/1992 | US5136462 Foil with vacuum vapor deposited metal coating |
| 08/04/1992 | US5135817 Zn-Mg alloy vapor deposition plated metals of high corrosion resistance, as well as method of producing them |
| 08/04/1992 | US5135808 Abrasion wear resistant coated substrate product |
| 08/04/1992 | US5135807 Diamond-coated member and process for the preparation thereof |
| 08/04/1992 | US5135801 Diffusion barrier coating material |
| 08/04/1992 | US5135778 Removably attachable fore-chamber for sequentially registering substrates with an opening in a vacuum treatment chamber and process of operation |
| 08/04/1992 | US5135775 Process for plasma-chemical cleaning prior to pvd or pecvd coating |
| 08/04/1992 | US5135635 Sputtering apparatus |
| 08/04/1992 | US5135634 Apparatus for depositing a thin layer of sputtered atoms on a member |
| 08/04/1992 | US5135630 For video display system; deformable elastomer over electrode array, sputtered with reflective conductor |
| 08/04/1992 | US5135629 Containing electrolytic copper foil having fine grains of copper and/or copper oxide on projections of matte surface to prevent contamination and particle formation |
| 08/04/1992 | US5135581 Hydrogen and fluorine doped indium tin oxide solar cells |
| 08/04/1992 | US5135554 Method and apparatus for continuous sputter coating of fibers |
| 07/30/1992 | DE4134984C1 Prodn. of yttrium-contg. high temp. superconductors - by introducing yttrium by evapn. from yttrium oxide vessel in oxygen@-contg. atmos. and depositing on substrate |
| 07/29/1992 | EP0496655A1 A method of forming high purity metal silicides targets for sputtering |
| 07/29/1992 | EP0496100A1 Method for making magnetic recording medium |
| 07/29/1992 | EP0496053A1 Coated highly wear-resistant tool and physical coating method for highly wear-resistant tools |
| 07/29/1992 | EP0496036A1 A sputtering apparatus |
| 07/29/1992 | EP0340275B1 Vapour phase process and apparatus |
| 07/29/1992 | CN1063128A Method of treating metals by deposition of materials and furnace for implementing said method |
| 07/29/1992 | CN1017607B Polymeric films and its preparation |
| 07/28/1992 | US5133850 Sputtering cathode for coating substrates in cathode sputtering apparatus |
| 07/28/1992 | US5133849 Thin film forming apparatus |
| 07/28/1992 | US5133845 Method for making prosthesis of polymeric material coated with biocompatible carbon |
| 07/28/1992 | US5133824 Method and device for removing a flexible product from a carrier plate |
| 07/28/1992 | US5133757 Surface treatment of polyethylene, hardness, densification, chemical resistance, joint implants |
| 07/28/1992 | US5133604 Method and apparatus for evaluating evaporating boats based on evaporation rate characteristics |
| 07/28/1992 | US5133286 Substrate-heating device and boat structure for a vacuum-depositing apparatus |
| 07/28/1992 | US5133285 Apparatus for transporting substrates |
| 07/28/1992 | CA1305610C Diamond tools for rock drilling and machining |
| 07/23/1992 | WO1992012275A1 Device and process for the vaporisation of material |
| 07/23/1992 | WO1992012274A1 Method of forming oxide film |
| 07/22/1992 | EP0495755A1 Aluminium surfaces |
| 07/22/1992 | EP0495524A1 System for processing a workpiece in a plasma and a process for generating such plasma |
| 07/22/1992 | EP0495447A1 Method of controlling an arc spot in vacuum arc vapor deposition and an evaporation source |
| 07/22/1992 | EP0495215A2 Vapor deposition device |
| 07/22/1992 | EP0495143A2 Process for making metallized polyethylene plexifilamentary film-fibril sheet |
| 07/21/1992 | US5132544 System for irradiating a surface with atomic and molecular ions using two dimensional magnetic scanning |
| 07/21/1992 | US5132506 Vacuum evaporation apparatus and method for making vacuum evaporated sheet |
| 07/21/1992 | US5132280 Method of producing a superconductive oxide layer on a substrate |
| 07/21/1992 | US5131995 Method of manufacturing titanium magnetic disk substrate |
| 07/21/1992 | US5131460 Reducing particulates during semiconductor fabrication |
| 07/21/1992 | CA1305317C Cutting tool for aluminum workpieces having enhanced crater wear resistance |
| 07/19/1992 | CA2034550A1 Process for making metallized polyethylene plexifilamentary film-fibril sheet |
| 07/16/1992 | DE4100548A1 Deposition of diamond or carbide films onto refractory metal substrates by CVD - comprising two diamond or carbide deposition steps, with an intermediate metal deposition step to give complete coverage |
| 07/15/1992 | EP0494790A2 High ratio planetary drive system for vacuum chamber |
| 07/15/1992 | EP0494689A2 Thin film deposition method and apparatus |
| 07/15/1992 | EP0494389A1 Corrosion resistant magnesium titanate coatings for gas turbines |
| 07/15/1992 | EP0494342A1 Sputtering cathode |
| 07/15/1992 | EP0494340A1 Apparatus for obtaining metal-free stripes |
| 07/15/1992 | CN1062770A Making method of oxygen-storaged alloy film |
| 07/14/1992 | US5130552 Improved ion implantation using a variable mass resolving system |
| 07/14/1992 | US5130192 Process for preparing metallized polyimide film |
| 07/14/1992 | US5130161 Ion bombardment of the surface and implanting ion then reacting |
| 07/14/1992 | US5130005 Magnetron sputter coating method and apparatus with rotating magnet cathode |
| 07/09/1992 | WO1992011653A1 Preventing of via poisoning by glow discharge induced desorption |
| 07/08/1992 | EP0493827A2 Sensor for semiconductor device manufacturing process control |
| 07/08/1992 | EP0493792A1 Method of manufacturing drive plate |
| 07/08/1992 | EP0493647A1 Sputtering cathode for substrate deposition in a cathode sputtering apparatus |
| 07/08/1992 | EP0493382A1 Ion vapour deposition apparatus and method |
| 07/08/1992 | CN2109397U Vertical strong current big beam ion implantation machine |
| 07/08/1992 | CN1017354B Membrane forming device using sputtering method of ion beam reaction |
| 07/08/1992 | CA2058781A1 Corrosion resistant magnesium titanate coatings for gas turbines |
| 07/07/1992 | US5128316 Articles containing a cubic perovskite crystal structure |
| 07/07/1992 | US5128214 Amorphous pure iron film |
| 07/07/1992 | US5128173 Ionization of dielectric fluoride, coating semiconductor substrates |
| 07/07/1992 | US5128009 Process for reducing the reflectivity of sputtered films |
| 07/07/1992 | US5128008 Method of forming a microelectronic package having a copper substrate |
| 07/07/1992 | US5127998 Oxidation, non-photoresist |
| 07/07/1992 | CA1304573C Apparatus on the carousel principle for coating substrates |
| 07/01/1992 | EP0493278A1 Method of cleaning the surface of a substrate by a plasma |
| 07/01/1992 | EP0492992A2 Magnetron sputtering equipment |
| 07/01/1992 | EP0492763A1 Sputtered scandate coatings for dispenser cathodes and methods for making same |
| 07/01/1992 | EP0492592A1 Vacuum arc deposition device |
| 07/01/1992 | EP0492584A2 Magneto-optical recording medium |
| 07/01/1992 | EP0492583A2 Method of coating the surface of polymeric articles with inorganic films |
| 07/01/1992 | EP0492524A2 Deposition method of anti-doming material of shadow mask |
| 07/01/1992 | EP0492114A1 Sputtering apparatus |
| 07/01/1992 | EP0491811A1 Deposition heaters. |
| 06/30/1992 | US5126576 Method and apparatus for controlling the rate of emission of electrons used for charge neutralization in ion implantation |