| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 06/07/1994 | US5318840 Wear resistant coating films and their coated articles |
| 06/07/1994 | US5318091 Die coating |
| 06/07/1994 | CA1330020C Process for treating the surface of polyimides to improve properties to receive metal layer |
| 06/05/1994 | CA2102668A1 Method for producing high gloss bright colored plastic articles |
| 06/01/1994 | EP0599487A1 Method for making bright trim articles |
| 06/01/1994 | EP0599225A1 Iron-based material having excellent oxidation resistance at elevated temperatures and process for the production thereof |
| 06/01/1994 | EP0599071A1 Transparent substrate with a transparent layer system and method for the production of such a layer system |
| 06/01/1994 | EP0586702A4 Electric arc evaporator of metals |
| 06/01/1994 | DE4305856C1 Vapour deposition of an impermeable inorganic coating on plastic foil - used for packaging by sublimation of a solid substance contg. silicon, oxygen and boron |
| 06/01/1994 | CN1087448A High sensitivity photoelectric conductive film and its manufacturing method |
| 06/01/1994 | CN1024814C Plasma thin film deposition process control |
| 05/31/1994 | US5317235 Magnetically-filtered cathodic arc plasma apparatus |
| 05/31/1994 | US5317006 Cylindrical magnetron sputtering system |
| 05/31/1994 | US5316804 Depositing a cubic boron nitride film of a single phase on the surface of a substrate |
| 05/31/1994 | US5316802 Pretreatment by irradiation |
| 05/31/1994 | US5316645 Plasma processing apparatus |
| 05/31/1994 | US5316631 Magnetic recording layer on chromium undercoat and cobalt alloy thin film |
| 05/31/1994 | US5316594 Hardening a zirconium alloy by oxidation to form zirconium oxide layer |
| 05/31/1994 | US5316586 Silicon sample holder for molecular beam epitaxy on pre-fabricated integrated circuits |
| 05/31/1994 | US5316585 Method for fabricating superconducting materials and superconductive thin films |
| 05/31/1994 | US5315749 Method for holding substrates |
| 05/26/1994 | WO1994011543A1 Improvements in methods and apparatus for controlling film deposition |
| 05/26/1994 | DE4339491A1 Application of multiple layers by laser ablation - with targets mounted on the same, longitudinally displaceable carrier |
| 05/26/1994 | DE4304613C1 Stabilisation of plasma generation using electron beam evaporator for metals - focusing electron beam on evaporator material within housing and monitoring intensity of light emission above surface, to control power supply to electron gun |
| 05/26/1994 | DE4235678C1 Surface treating workpieces in a vacuum chamber device - using a transport device to transfer workpieces with masks into and out of a treatment chamber. |
| 05/25/1994 | EP0598660A1 Glazing with transmission properties varying with the incidence |
| 05/25/1994 | EP0598422A1 Method of forming a Ti and a TiN layer on a semiconductor body by a sputtering process, comprising an additional step of cleaning the target |
| 05/25/1994 | EP0598362A1 Clamping ring and method and apparatus for using same |
| 05/25/1994 | EP0598128A1 Plasma processing apparatus |
| 05/25/1994 | EP0285668B1 Thin film formation apparatus |
| 05/25/1994 | CN1087131A Method and apparatus for ion implantation of metal plasma source |
| 05/25/1994 | CN1087130A Method and apparatus for high-vacuum multi-target magnetic control sputtering |
| 05/25/1994 | CN1087129A Apparatus for sputtering and codeposition with multiple plasma beams |
| 05/25/1994 | CN1087128A Microwave plasma source ion implantation apparatus |
| 05/25/1994 | CN1024693C Furnace for double-layer metallic glow ion cementation |
| 05/24/1994 | US5315212 Plasma processing apparatus for generating uniform strip-shaped plasma by propagating microwave through rectangular slit |
| 05/24/1994 | US5315121 Metal ion source and a method of producing metal ions |
| 05/24/1994 | US5314734 Recording due to change in atomic arrangement upon irradiation with a laser beam |
| 05/24/1994 | US5314597 Sputtering apparatus with a magnet array having a geometry for a specified target erosion profile |
| 05/24/1994 | US5314541 Reduced pressure processing system and reduced pressure processing method |
| 05/24/1994 | US5314539 Apparatus for plasma treatment of continuous material |
| 05/24/1994 | US5314509 Vacuum processing apparatus and operating method therefor |
| 05/24/1994 | US5314475 Method for producing osteo-integrating surfaces on skeletal implants and skeletal implants with osteo-integrating surfaces |
| 05/24/1994 | US5313982 Gas supply piping device for a process apparatus |
| 05/24/1994 | CA1329791C Process for making diamond, doped diamond, diamond-cubic boron nitride composite films |
| 05/19/1994 | DE4238514A1 Loading of evaporator boat for substrate coating installation - with boat preliminarily loaded with wire segment made of coating material contg small amt. of tungsten |
| 05/18/1994 | EP0597670A1 Method of manufacturing electromagnetic wave shielding plastic molding |
| 05/18/1994 | EP0597664A2 X-ray mirror and material |
| 05/18/1994 | EP0597634A2 Method of opening windows in dielectric layers of an integrated circuit |
| 05/18/1994 | EP0597103A1 Apparatus for neutralizing charged body |
| 05/18/1994 | EP0596924A1 Continuous vacuum arc broad beam ion source |
| 05/18/1994 | EP0386182B1 Nonwoven insulating webs |
| 05/18/1994 | CN2165139Y Clamp capable of giving film layer at specified position on workpiece |
| 05/18/1994 | CN1086927A Photoelectric emission film for laser pulse detection |
| 05/18/1994 | CN1086853A Electronic beam evapouring metal ion source for material surface modification |
| 05/17/1994 | US5313067 Ion processing apparatus including plasma ion source and mass spectrometer for ion deposition, ion implantation, or isotope separation |
| 05/17/1994 | US5312804 Method of fabricating a superconductive flexible ceramic conductor having a high critical temperature |
| 05/17/1994 | US5312778 Etching |
| 05/17/1994 | US5312696 Method for reducing fretting wear between contacting surfaces |
| 05/17/1994 | US5312685 Atomic oxygen protective coating with resistance to undercutting at defect sites |
| 05/17/1994 | US5312664 Films of antimony/tin alloys containing carbon and hydrogen; higher amorphous to crystalline transition temperature, stability |
| 05/17/1994 | US5312647 Reflective coatings |
| 05/17/1994 | US5312643 Method of producing a transparent conductive film provided with supplementary metal lines |
| 05/17/1994 | US5312585 Corrosion inhibition in high temperature environment |
| 05/17/1994 | US5311896 Method for producing a heatable and refrigerable element for a system handling small quantities of liquid, and an element manufactured by the method |
| 05/11/1994 | WO1994010356A1 Plasma-assisted reactive electron-jet vaporisation process |
| 05/11/1994 | EP0596496A1 High impedance plasma ion implantation method and apparatus |
| 05/11/1994 | EP0596092A1 Process and device for applying pulses on the surface of a solid body |
| 05/11/1994 | EP0417067B1 Energy intensive surface reactions using a cluster beam |
| 05/11/1994 | DE4336900A1 Uniform deflected electron beam source - used esp. for vacuum vapour deposition of thin films |
| 05/11/1994 | DE4237517A1 Reactive magnetron sputtering appts. - esp. for coating substrate with electrically non-conductibe layers |
| 05/11/1994 | CN2164417Y Multi-polar grid ion emission accelerator |
| 05/11/1994 | CN1086549A Metal coating process for slide fastener and its coating composition |
| 05/11/1994 | CN1024481C Potassium chloride crystal type of diamond moisture-proof protecting film for laser window material |
| 05/10/1994 | US5311028 System and method for producing oscillating magnetic fields in working gaps useful for irradiating a surface with atomic and molecular ions |
| 05/10/1994 | US5310607 Hard coating; a workpiece coated by such hard coating and a method of coating such workpiece by such hard coating |
| 05/10/1994 | US5310577 Primer coating of polyurethane, overcoating of silicon resin, antireflection coating |
| 05/10/1994 | US5310410 Method for processing semi-conductor wafers in a multiple vacuum and non-vacuum chamber apparatus |
| 05/04/1994 | EP0595624A1 Film forming apparatus for filling fine pores of a substrate |
| 05/04/1994 | EP0595542A1 A method for forming a transparent conductive film |
| 05/04/1994 | EP0594568A1 Method of depositing optical oxide coatings at enhanced rates |
| 05/04/1994 | CN2163815Y Double-heating multi-functional ion-bombardment furnace |
| 05/04/1994 | CN1086225A Method for preparing decomposable film and its utilization |
| 05/03/1994 | USRE34598 Integrated circuit |
| 05/03/1994 | US5308989 Fluid flow control method and apparatus for an ion implanter |
| 05/03/1994 | US5308950 Method of removing material from a surface in a vacuum chamber |
| 05/03/1994 | US5308688 Protective coating deposited on and bonded to surface: hafnium carbide, hafnium oxy-carbide and hafnium oxide layers |
| 05/03/1994 | US5308552 Method of fabricating anisometric metal needles and birefringent suspension thereof in dielectric fluid |
| 05/03/1994 | US5308463 Preparation of a firm bond between copper layers and aluminum oxide ceramic without use of coupling agents |
| 05/03/1994 | US5308462 Process for producing a ferroelectric film device |
| 05/03/1994 | US5308461 Bombarding target with ions produced by radio frequency excited ion beam gun; sputtering |
| 05/03/1994 | US5308367 Titanium-nitride and titanium-carbide coated grinding tools and method therefor |
| 05/03/1994 | CA1329166C Plasma thin film deposition process control |
| 04/28/1994 | WO1994009518A1 Process for making thin films by pulsed excimer laser evaporation |
| 04/28/1994 | WO1994009177A1 Process and arrangement for stabilising an electron-beam vaporisation process |
| 04/28/1994 | WO1994009176A1 Device for plasma-supported electron beam high-rate vapour deposiition |
| 04/28/1994 | DE4336357A1 Thin-film depositing device - with a vapour jet hitting a rotating substrate diagonally |
| 04/28/1994 | DE4235953A1 Sputtering source esp for large area deposition - has inexpensive linear hollow cathode formed of parallel planar targets |
| 04/28/1994 | DE4235677A1 Chamber for transport of components in a vacuum processing installation - with at least one radially movable transport unit mounted separately from rotatable component carriers. |
| 04/28/1994 | DE4235674A1 Chamber for transporting components under vacuum - with a second transport mechanism with elements movable axially and radially relative to the rotary first transport mechanism. |