Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
03/1993
03/04/1993WO1992022921A3 Process for making superconducting tl-pb-sr-ca-cu oxide films and devices
03/04/1993DE4127743A1 Aluminium@ foil for electrolytic capacitors - is vacuum-coated on both sides with aluminium@/alumina insulating film
03/03/1993EP0529687A2 Molecular beam epitaxy apparatus
03/03/1993EP0529321A1 Metallic material deposition method for integrated circuit manufacturing
03/03/1993EP0529268A2 Anti-reflex hard coating for plastic lenses
03/03/1993EP0529259A1 Apparatus for processing substrates
03/03/1993CN1069527A Carbon arc carburizing
03/02/1993US5190631 Process for forming transparent silicon carbide films
03/02/1993US5190630 Sputtering target
03/02/1993US5190590 Vacuum coating apparatus
02/1993
02/24/1993EP0528163A1 Device for suppressing arcing
02/24/1993EP0527915A1 Diamond-like carbon material produced by laser plasma deposition.
02/24/1993EP0527859A1 Apparatus for-plasma treatment of continuous material.
02/24/1993CN1069294A Hard coating, workpiece coated by such hard coating and method of coating such workpiece by such hard coating
02/23/1993US5189550 Ion-beam based deposition of coatings for electrochromic devices
02/23/1993US5188887 High nickel alloy intermediate layer, tin oxide overcoating
02/23/1993US5188876 Surface covering with inorganic wear layer
02/23/1993US5188865 Production of a magnetic recording medium
02/23/1993US5188717 Uniformity
02/23/1993CA1313842C2 Method and target for sputter depositing thin film
02/18/1993WO1993003590A1 Plasma processing apparatus
02/18/1993WO1993003195A1 PROCESS FOR FORMING A Ti-B-N-COATING ON A SUBSTRATE BY SPUTTERING
02/18/1993WO1993002806A1 Low energy ion doping of growing materials
02/17/1993EP0527713A2 Method and apparatus for sputtering superconducting thin films of niobium on quarter-wave resonant cavities of copper for accelerating heavy ions
02/17/1993EP0527668A1 Method for preparing a superconducting thin film of compound oxide
02/17/1993EP0527290A1 Device for implementing a thin film process for the treatment of large area substrates
02/17/1993EP0527133A1 Plasma reaction chamber having conductive diamond-coated surfaces.
02/17/1993CN1068990A Improvements in or relating to razor blades
02/16/1993US5187148 Having tube to enclose plasma nand supply oxygen while laser is applied to oxide target; for high speed, low temperature film formation
02/16/1993US5187147 Method for producing freestanding high Tc superconducting thin films
02/16/1993US5186994 Optical disc
02/16/1993US5186977 Method for manufacturing functional thin film
02/16/1993US5186872 Vacuum evaporation into confined space, cooling with inert gas stream, deposition onto cold surface
02/16/1993US5186854 Composites having high magnetic permeability and method of making
02/11/1993DE4126812A1 Depositing transparent electrically conductive metal oxide films - by reactive sputtering using water vapour as reactive component in ambient gas and annealing films, used for mfg. solar cells, etc.
02/11/1993DE4126811A1 Optical coatings for transparent conductive metal oxide films used in mfr. of solar cells, LCD etc. - comprises doped indium- and/or tin-oxide(s) deposited on metal oxide layer by sputtering in a water vapour atmos.
02/10/1993EP0526702A2 Apparatus for coating long fibres
02/10/1993EP0526491A1 Gaseous radical producing apparatus
02/09/1993US5185287 Attaching cluster ions to substrate, accelerating with electric field and second field to follow different orbits, intercepting to attach
02/09/1993US5185211 Non-stoichiometric titanium nitride coating
02/09/1993US5185178 Vacuum depositon; surface at least at melting point temperatuer; condensation in form of metal droplets
02/09/1993US5185055 Method of forming a pattern on a surface
02/09/1993CA1313509C Formation of hard coatings on cutting edges
02/04/1993WO1993002467A1 Apparatus for neutralizing charged body
02/04/1993WO1993001895A1 Method of inhibiting tin whisker growth
02/04/1993DE4216806C1 Sample holder for substrates to be high temp. coated - comprises hollow body with heat shield and slot for insertion of substrate
02/03/1993EP0526331A2 Method for preparing a superconducting thin film of compound oxide
02/03/1993EP0526326A2 Method for preparing a superconducting thin film of compound oxide
02/03/1993EP0526290A1 Strain dependent thin film based on cermet from tantalum and tantalum nitrid, its process of preparation and its application in a pressure sensor
02/03/1993EP0525295A1 Cathode for magnetron sputtering for vacuum deposition apparatus
02/03/1993EP0525281A1 Apparatus for coating workpiece surfaces
02/03/1993EP0525279A1 Apparatus for transporting substrates
02/02/1993USRE34173 Multi-layer wear resistant coatings
02/02/1993US5183547 Sputtering apparatus and system for sputtering employing same
02/02/1993CA1313347C Overlay films
02/02/1993CA1313335C Process for preparing a thin film of superconducting compound oxide
01/1993
01/27/1993EP0524725A2 Metallized wrapping film
01/27/1993EP0524174A1 Method of preparing amorphous fluorocarbon coatings
01/26/1993US5182567 Retrofittable vapor source for vacuum metallizing utilizing spatter reduction means
01/26/1993US5182495 Plasma processing method and apparatus using electron cyclotron resonance
01/26/1993US5182238 Protective layer of hard material with homogeneous distribution of elements
01/26/1993US5182003 Stationary magnetron sputtering cathode for a vacuum coating apparatus
01/26/1993US5182001 Configuration of magnetic flux lines
01/26/1993US5181556 System for substrate cooling in an evacuated environment
01/21/1993WO1993001327A1 Continuous vacuum arc broad beam ion source
01/21/1993DE4123326A1 Shaft for brushing and coating installations - has surface coating of nitride(s) or carbide(s) or carbo-nitride(s) of chromium, titanium, boron, tungsten and molybdenum, etc.
01/20/1993EP0523983A1 An Ion Beam Neutralizer and an Ion Implantation System using the same.
01/20/1993EP0523479A2 Method for fabricating metal core layers for a multi-layer circuit board
01/20/1993EP0523314A1 Apparatus for evaporation of liquid
01/20/1993EP0523311A1 Line evaporator for vacuum coating plants
01/20/1993CN1068067A Composite article comprising oriented microstructures
01/20/1993CA2072848A1 Diffuse secondary emission electron shower
01/19/1993US5181020 Thin-film magnetic material and process of production thereof
01/19/1993US5180687 Electroconductive
01/19/1993US5180478 Sputter coating source
01/19/1993US5180477 Thin film deposition apparatus
01/19/1993US5180476 Method for producing transparent conductive films
01/19/1993US5180468 Doping a silicon substrate and heat treatment
01/19/1993US5180433 Evaporation apparatus
01/19/1993US5180285 Protective coating
01/19/1993US5180000 Workpiece carrier with suction slot for a disk-shaped workpiece
01/19/1993US5179993 Method of fabricating anisometric metal needles and birefringent suspension thereof in dielectric fluid
01/19/1993CA1312752C Threaded fastener
01/14/1993DE4222819A1 Antistatic non-dazzle coatings prodn. for cathode ray tubes - by mixing alcoholic soln. of alkyl silicate polymer or partly-hydrolysed monomer with dil. acid, spin-coating onto the plate and heating
01/14/1993DE4122808A1 Coating susceptor tube of zirconium oxide furnace - by preheating with chemically reducing heating rod covered by quartz glass tube having holes over surface
01/13/1993EP0522962A1 Ion implanter with surface potential measuring system
01/13/1993EP0522873A1 Non-stoichiometric titanium nitride coating
01/13/1993EP0522872A1 Substoichiometric zirconium nitride coating
01/13/1993EP0522866A1 Method and apparatus for producing oxide thin film
01/13/1993EP0522821A1 Method of manufacturing sputtering target assembly
01/13/1993EP0522369A1 Target units and a method of fabricating the same
01/12/1993US5179622 Series evaporator for vacuum vapor-deposition apparatus
01/12/1993US5179318 Plates with phosphor layer then filter and stacks
01/12/1993US5178966 Window, coated glass
01/12/1993US5178962 Copper on polyimide with good adhesion and forming functional groups on surface films
01/12/1993US5178957 Noble metal-polymer composites and flexible thin-film conductors prepared therefrom
01/12/1993US5178743 Cylindrical magnetron sputtering system
01/12/1993US5178739 Sputtering; magnetic confinement of plasma electrons; radio frequency power to sustain plasma; semiconductors
01/12/1993US5178738 Ion-beam sputtering apparatus and method for operating the same
01/12/1993US5178726 Multilayer element, pulsation, energy absorbers and ablation