C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
11/1992
11/12/1992	WO1992020103A1 A method for manufacturing solar cells
11/12/1992	WO1992019789A1 Electric arc evaporator of metals
11/12/1992	WO1992019788A1 Device for electric arc evaporation of metals
11/12/1992	WO1992019787A1 Process and device for vacuum evaporating siox coatings on a substrate
11/12/1992	WO1992019786A1 Fabrication process for low loss metallizations on superconducting thin film devices
11/12/1992	WO1992019785A1 Method and device for treatment of articles in gas-discharge plasma
11/12/1992	DE4221800A1 Vacuum vapour coating appts. for producing oxide layer on thermally sensitive plastic strip - has two cooler rolls to produce required temp. and side coating prevention device
11/11/1992	EP0512679A2 Method of making laser ablated oriented films on metal substrates and articles formed thereby
11/11/1992	EP0512456A1 Process for fitting and removal of a target plate in a vacuum processing chamber, fitting therefor, target plate and vacuum chamber
11/11/1992	EP0512386A1 High adhesion performance roll sputtered strike layer
11/11/1992	EP0512296A1 Method of depositing conductors in high aspect ratio apertures under high temperature conditions
11/11/1992	EP0512062A1 Iron-rich metallic glasses having high saturation induction and superior soft ferromagnetic properties at high magnetization rates.
11/10/1992	US5162633 Microwave-excited plasma processing apparatus
11/10/1992	CA1309904C Method of producing a superconductive oxide layer on a substrate
11/04/1992	EP0511733A1 Removable shutter apparatus for a semiconductor process chamber
11/04/1992	CN1065888A Method of depositing conductors in high aspect ratio apertures
11/03/1992	US5160675 Indium and tin oxides
11/03/1992	US5160595 Arc-magnetron and the method of coating
11/03/1992	US5160553 Cold-worked steel of high compressive strength and articles made thereof
11/03/1992	US5160537 Low friction, wear resistant, steel substrate
11/03/1992	US5160534 Barrier layer for semiconductor; alloying; sintering under pressure, heat treatment
11/03/1992	US5160388 Heat treatment of disks to obtain a fine grain
10/1992
10/29/1992	WO1992018990A1 Method for manufacturing transparent conductive film
10/29/1992	WO1992018657A1 Method of producing tungsten-titanium sputter targets and targets produced thereby
10/29/1992	WO1992018323A1 Computerised macro-assembly manufacture
10/29/1992	WO1992016014A3 Method and apparatus for concave substrates
10/29/1992	DE4113221A1 Flexible transparent polymer film for e.g. packaging - has barrier layer on one side, produced by deposition of layer of silicon oxide under reactive atmos., pref. hydrogen@
10/28/1992	EP0511153A1 Plasma enhancement apparatus and method for physical vapor deposition
10/28/1992	EP0510791A2 Flow verification for process gas in a wafer processing system, apparatus and method
10/28/1992	EP0510656A2 Evacuation system and method therefor
10/28/1992	EP0510584A1 Method of producing interconnectors for solid oxide electrolyte fuel cells
10/28/1992	EP0510581A2 Ion neutralizer
10/28/1992	EP0510468A2 Corrosion protection of FeMn by ion implantation
10/28/1992	EP0510340A1 Method for removing material from a surface in a vacuum chamber
10/28/1992	EP0510259A1 Apparatus for vacuum deposition of a sublimable substance
10/28/1992	EP0510201A1 Method of making superconductive film
10/27/1992	US5159169 Laser sputtering apparatus
10/27/1992	US5158933 Sputtering layer of first element, sputtering second element, then first element to form continuous phase layer
10/27/1992	US5158931 Method for manufacturing an oxide superconductor thin film
10/27/1992	US5158750 Boron nitride crucible
10/27/1992	US5158660 Rotary sputtering cathode
10/27/1992	US5157997 Sputtered silicon carbide coating
10/27/1992	US5157851 For isolating a vacuum chamber of a vacuum deposition system
10/27/1992	CA1309376C Ion implantation of zirconium alloys with hafnium
10/22/1992	DE4209744A1 Verfahren zur herstellung einer magnetplatte A process for producing a magnetic disk
10/21/1992	EP0509555A2 A method of making a magneto-optic memory device
10/21/1992	EP0509305A1 Method of depositing conductors in high aspect ratio apertures
10/21/1992	CN2119428U Plating equipment with two vacuum chambers
10/20/1992	WO1992018663A1 Method and apparatus for linear magnetron sputtering
10/20/1992	US5157547 Transparent coating having a medium refractivity
10/20/1992	US5157540 Tungsten oxide and solid electrolyte layer
10/20/1992	US5157240 Deposition heaters
10/20/1992	US5156912 Silicon carbide coated with alternate layers of aluminum oxynitride and metal alloy; stability, oxidation resistance
10/20/1992	US5156909 Thick, low-stress films, and coated substrates formed therefrom, and methods for making same
10/20/1992	US5156815 Elongated tubes axially oriented off axis to each other
10/20/1992	US5156727 Film thickness uniformity control apparatus for in-line sputtering systems
10/20/1992	US5156725 Method for producing metal carbide or carbonitride coating on ceramic substrate
10/20/1992	US5156720 Process for producing released vapor deposited films and product produced thereby
10/20/1992	CA2108673A1 Method and apparatus for linear magnetron sputtering
10/20/1992	CA1309057C Method for carbon film production
10/15/1992	WO1992017625A1 Coated molybdenum parts and process for their production
10/15/1992	WO1992017622A1 Thermally compatible sputter target and backing plate assembly
10/15/1992	WO1992017621A1 Apparatus and method for high throughput sputtering
10/15/1992	WO1992017406A1 Production method for oxide superconductor film
10/15/1992	WO1992017323A1 Coated cutting tool
10/15/1992	DE4111384A1 Substrate cathode sputtering coater - uses groups of substrates and carriers to pass through in dual multipass mode, at the same time
10/14/1992	EP0508721A1 Coated molybdenum parts and process for their production
10/14/1992	EP0508612A2 Apparatus and method for coating a substrate using vacuum arc evaporation
10/14/1992	EP0508478A1 Process for forming metal film, and aluminium film coated matter
10/14/1992	EP0508429A1 Vacuum arc vapor deposition device
10/14/1992	EP0508359A1 Process and apparatus for coating at least one object
10/14/1992	EP0508252A2 Process for fabrication of a magnetic recording medium
10/14/1992	EP0508247A2 Process for fabrication of a magnetic recording medium
10/14/1992	EP0508195A1 Method of forming a microelectronic package having a copper substrate
10/14/1992	EP0436668A4 Passivation layers for high temperature superconductors
10/14/1992	CN1065297A Process for producing paterned metal surface
10/13/1992	US5155305 Delayed start of elevator car deceleration and creep using VVVF technology
10/13/1992	US5155063 Method of fabricating semiconductor device including an al/tin/ti contact
10/13/1992	US5154816 Process for depositing an anti-wear coating on titanium based substrates
10/13/1992	US5154811 Obtaining smooth, dense, hard coating of uniform surface and good adhesion
10/13/1992	US5154810 Simultaneously depositing and oxidizing at least two materials onto substrate; monitoring and adjusting sputtering rate to control stress
10/13/1992	US5154797 Silicon shadow mask
10/13/1992	US5154730 Semiconductor wafer processing module having an inclined rotating wafer handling turret and a method of using the module
10/13/1992	US5154023 Polishing process for refractory materials
10/13/1992	US5153986 Method for fabricating metal core layers for a multi-layer circuit board
10/13/1992	CA1308689C Method and apparatus for forming a thin film
10/09/1992	WO1992017620A1 Light transmissive electrically conductive oxide
10/09/1992	CA2104770A1 Light transmissive, electrically conductive oxide
10/07/1992	EP0507545A1 Titanium oxide films, their production and uses
10/07/1992	EP0507113A1 Method for coating a polymer substrate with a metal layer
10/07/1992	CN1065102A Arc light ion carburizing and carbonitriding technology and its installation
10/06/1992	US5153054 Multilayered coated window glass panels for buildings and for vehicles; wear, chemical, corrosion and weather resistance
10/06/1992	US5152774 Surgical instrument having a toughened wearing surface and method of making the same
10/06/1992	CA1308303C Pyrotechnic train
10/01/1992	WO1992016959A1 Arc source macroparticle filter
10/01/1992	WO1992016671A1 Method and device for forming film by sputtering process
10/01/1992	DE4210079A1 Shaped glass body with straight strips - uses masking plate with shaped openings for deposition on substrate
10/01/1992	DE4142712A1 Pressed and sintered electrodes for fuel cells - made from a mixt. of metal powder, ceramic powder and polymer powder rendered ion and electron conductive by ion beam treatment
10/01/1992	CA2106598A1 Arc source macroparticle filter
09/1992
09/30/1992	EP0506570A2 Method of forming compound oxide superconducting thin film

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