Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
01/1994
01/04/1994US5276547 Electrochromic element, materials for use in such element, processes for making such element and such materials and use of such element in an electrochromic glass device
01/04/1994US5276010 Layer by layer vapor deposition, crystallization
01/04/1994US5275882 Method for improving adhesion of aluminum layers to thermoplastics and article
01/04/1994US5275709 Apparatus for coating substrates, preferably flat, more or less plate-like substrates
01/04/1994CA1325792C Method of producing a thin film by sputtering and an opposed target type sputtering apparatus
12/1993
12/29/1993EP0575654A1 Titanium-tungsten target material for sputtering and manufacturing method therefor
12/28/1993US5273911 Depositing a semiconductor layer on an induction-heated flaky graphite substrate hardened by rolling at 1000 degrees C.
12/28/1993US5273775 Process for selectively depositing copper aluminum alloy onto a substrate
12/28/1993US5273636 Coating apparatus
12/23/1993WO1993026018A1 Giant magnetoresistant single film alloys
12/23/1993WO1993025468A1 A method for the production of hydrogen from a water medium
12/23/1993DE4220226A1 Magnetostrikiver Wandler Magnetostrikiver converter
12/23/1993DE4219636A1 Activating PTFE surfaces to enable adhesive bonding - by treatment with high energy ion beam
12/22/1993EP0575166A1 Method of manufacturing sputtering target assembly and target assembly
12/22/1993EP0575055A2 Plasma vapour-deposition apparatus
12/22/1993EP0574785A1 Process for producing evaporation material for preparation of medium refractive index optical films
12/22/1993EP0574583A1 Base material of sheet for metallic transfer printing film and sheet itself
12/21/1993US5272735 Sputtering process burnable poison coating
12/21/1993US5272298 Apparatus for vacuum deposition of sublimative substance
12/21/1993US5272015 Wear resistant hyper-eutectic aluminum-silicon alloys having surface implanted wear resistant particles
12/21/1993US5272014 Wear-resistant coating for substrate and method for applying
12/21/1993US5271890 Method for producing carbon allotrope
12/21/1993US5271817 Design for sputter targets to reduce defects in refractory metal films
12/21/1993US5271602 Vacuum gate valve
12/21/1993CA1325404C Transparent coatings by reactive sputtering
12/21/1993CA1325371C Reagent source for molecular beam epitaxy
12/18/1993CA2098447A1 Vapour-deposition material for the production of optical coatings of medium refractive index
12/16/1993DE4219347A1 Alkali metal halide phosphor layer prodn. - by inclined vapour deposition to obtain layer island regions
12/15/1993EP0574119A2 Ti-W sputtering target and method of manufacturing the same
12/15/1993EP0574115A2 Diffusion bonding of aluminium and aluminium alloys
12/15/1993EP0574020A1 System and method for multilayer film production on tape substrates
12/15/1993EP0573879A2 Manufacturing process of a structured phosphor layer
12/15/1993EP0573722A2 Improvement of wear-resistance of solid lubricants by ionic impact
12/15/1993EP0573484A1 Titanium-based alloy produced by vapour quenching
12/15/1993CN1023133C Niobium titanium aluminium series metal compound high temp. resistance materials
12/14/1993US5270856 Apparatus for the observation of processes
12/14/1993US5270263 Process for depositing aluminum nitride (AlN) using nitrogen plasma sputtering
12/14/1993US5270112 Refractory metal core, Al-O-N coating, SiC coating
12/14/1993US5269899 Cathode assembly for cathodic sputtering apparatus
12/14/1993US5269898 Apparatus and method for coating a substrate using vacuum arc evaporation
12/14/1993US5269896 Cathodic arc deposition system
12/14/1993US5269894 Method of mounting a target plate to be cooled into a vacuum process chamber, an arrangement of a target plate, a target plate and a vacuum chamber
12/14/1993US5269881 Plasma processing apparatus and plasma cleaning method
12/14/1993US5269403 Sputtering target assembly for a sputter coating apparatus
12/14/1993US5269137 Gas turbine elements bearing coke inhibiting coatings of alumina
12/14/1993CA2019923C Semiconductor film and process for its production
12/09/1993WO1993024674A1 Improved planar magnetron sputtering magnet assembly
12/09/1993WO1993024663A1 Apparatus and method for producing carbide coatings
12/09/1993WO1993024316A1 Durable surface coatings and coating process
12/09/1993DE4316114A1 X=ray beam mask used in X=ray lithography - comprises absorber contg. bismuth, titanium and nitrogen, and has amorphous structure
12/09/1993DE4223403C1 Structured doped regions prodn. on solid bodies - by applying amorphous layer onto body, implanting doping material, melting regions of amorphous layer, and etching
12/09/1993CA2137288A1 Durable surface coating and coating process
12/08/1993EP0573101A1 Ion selective electrode and method of manufacture
12/08/1993EP0573002A1 Sputtering target, wiring method for electronic devices and electronic device
12/08/1993EP0572673A1 Method of forming layer of evaporation coating
12/08/1993CN1079179A Cemented carbide with binder phase enriched surface zone
12/07/1993US5268354 Heating in sealed container
12/07/1993US5268332 Method of integrated circuit fabrication having planarized dielectrics
12/07/1993US5268236 Multilayer; pure aluminum, or alloy thereof
12/07/1993US5268217 Optically transparent substrate; composite layer vapor deposited, bonded to substrate
12/07/1993US5268216 Multilayer solid lubricant composite structures and method of making same
12/07/1993US5268085 Self-aligned sputter deposition masking device and method
12/07/1993CA1324980C Fabrication of devices using phosphorus glasses
12/07/1993CA1324979C Method of treating surfaces of substrates with the aid of a plasma and a reactor for carrying out the method
12/07/1993CA1324928C Corrosion-resistant and heat-resistant aluminum-based alloy thin film and process for producing the same
12/07/1993CA1324922C Steel substrate with metal coatings for the reinforcement of vulcanisable elastomers
12/06/1993CA2096385A1 Enhanced durability sputtered front surface mirror
12/02/1993DE4310941A1 Vacuum treatment chamber - with a low voltage discharge with arcing on treatment chamber walls prevented
12/01/1993EP0571595A1 Titanium containing magnesium alloy produced by vapour quenching
12/01/1993EP0571494A1 Solid state fuel cell and process for the production thereof.
11/1993
11/30/1993US5267289 Ion implantation of nuclear fuel assembly components using cathodic vacuum arc source
11/30/1993US5266524 Method of manufacturing a semiconductor device whereby a layer containing aluminium is deposited on a surface of a semiconductor body
11/30/1993US5266411 Metallized polypropylene film and process for manufacture
11/30/1993US5266409 Hard film for magnetic recording media
11/30/1993US5266398 Wear resistance, hardness
11/30/1993US5266389 Surface-coated hard material for cutting tools or wear resistance tools
11/30/1993US5266364 Method and apparatus for controlling plasma processing
11/30/1993US5266263 Reprocessing of used evaporation boats
11/30/1993US5266178 Sputtering cathode
11/30/1993US5266132 Energetic composites
11/30/1993US5266118 Vessel for growing thin films by isothermal vapor phase epitaxy
11/30/1993US5266117 Apparatus for the evaporative coating of substrates
11/30/1993CA1324710C Metallized breathable films prepared from melt embossed polyolefin/filler precursor films
11/25/1993WO1993023978A1 Process apparatus
11/25/1993WO1993023587A1 Process and device for applying pulses on the surface of a solid body
11/25/1993WO1993023586A1 Vapor deposition material and production method thereof
11/25/1993WO1993023176A1 Holding and driving device for substrate supports with planetary motion
11/25/1993DE4229600C1 Schutzschicht für Titanbauteile und Verfahren zu ihrer Herstellung Protective coating for titanium components and methods for their preparation
11/24/1993EP0570618A1 Film forming method and apparatus
11/23/1993US5265189 Serial evaporator for vacuum vapor depositing apparatus
11/23/1993US5264412 Laser ablation method for forming oxide superconducting thin films using a homogenized laser beam
11/23/1993US5264297 Physical vapor deposition of titanium nitride on a nonconductive substrate
11/23/1993US5264286 Multilayer glass and plastic films or sheets for windows or safety glass
11/23/1993US5264283 Diamond tools for rock drilling, metal cutting and wear part applications
11/23/1993US5264256 Allows controlled amount of glow plasma for each substrate
11/23/1993US5264248 Sulfuric acid catalysts and electrodeposition of coatings
11/23/1993US5264099 Method for producing an opaque substrate
11/23/1993US5263957 Ultrasonic scalpel blade and methods of application
11/18/1993EP0570182A1 Evaporation source material and evaporation method of forming transparent barrier film
11/18/1993EP0569660A1 Apparatus for holding substrates