Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
07/1994
07/13/1994EP0605444A1 Process and apparatus for surface hardening of refractory metal workpieces.
07/12/1994US5328676 Vapor deposition fullerenes and energizing to form ions then coating and growing
07/12/1994US5328583 Consisting of sputtering targets arranged in counterposition and second one on concentric circle having same center axis
07/12/1994US5328582 Off-axis magnetron sputter deposition of mirrors
07/07/1994WO1994014997A1 Atomic beam coating of polymers
07/07/1994WO1994014996A1 Layer deposit process and equipment
07/07/1994WO1994014565A1 Electron beam gun with liquid cooled rotatable crucible
07/06/1994EP0605299A1 Method for controlling a reactive sputtering process
07/06/1994EP0605273A1 Thermal barriers, materials and process for their preparation
07/06/1994EP0604424A1 Vapour deposition.
07/06/1994EP0558485B1 Process for obtaining a coated cemented carbide cutting tool
07/06/1994CN2170954Y Class shell aluminium evaporating apparatus for vacuum cavity
07/06/1994CN2170953Y Clamping device for preset film thickness distributing acquired on workpiece
07/05/1994US5326980 Ion implanter with plural surface potential sensors
07/05/1994US5326975 Measurement of gas leaks into gas lines of a plasma reactor
07/05/1994US5326745 Superconducting device with C-axis orientation perpendicular to current flow
07/05/1994US5326642 Layer of aluminum oxide or magnesium oxide
07/05/1994US5325812 Substrate holding and rotating arrangement for vacuum processes
07/05/1994US5325747 Method of machining using coated cutting tools
07/05/1994CA1330548C Method and apparatus for producing thin film of compound having large area
07/05/1994CA1330484C Panel type masking member and mold therefor
06/1994
06/30/1994DE4340952A1 Cleaning process for tools, etc. prior to coating deposition
06/30/1994DE4243757A1 Cathodic evaporation process ferromagnetic target
06/30/1994DE4243410A1 Prodn. of thin film with resistance
06/29/1994EP0604066A1 Fluid flow control method and apparatus for an ion implanter
06/29/1994EP0604036A2 Method for depositing aluminum layers on insulating oxide substrates
06/29/1994EP0603864A2 Surface potential control in plasma processing of materials
06/29/1994EP0603782A2 Method for producing a thin film resistor
06/29/1994EP0603750A1 Target for magneto-optical recording media and method for producing same
06/29/1994EP0603673A1 Object having a pink coating
06/29/1994EP0603588A2 Process for coating organic polymeric substrate with copper
06/29/1994EP0603587A1 Plasma generating apparatus
06/29/1994EP0603486A2 Process for multi-step coating of substrates
06/29/1994EP0603464A1 Process for coating substrates
06/29/1994EP0603407A1 Vapor deposition material and production method thereof
06/29/1994EP0365687B1 Steel sheet having dense ceramic coating with excellent adhesion,smoothness and corrosion resistance and process for its production
06/29/1994CN1088504A Tool for the treatment of surfaces of components
06/28/1994US5324593 Magnetic
06/28/1994US5324552 Process for coating substrate material
06/28/1994US5324537 Exposing at an elevated temperature to a stream of gaseous fluorocarbon
06/28/1994US5324414 Ion selective electrode
06/28/1994US5324362 Apparatus for treating substrates in a microwave-generated gas-supported plasma
06/28/1994US5324361 Apparatus for coating cap-shaped substrates
06/24/1994CA2112178A1 Surface potential control in plasma processing of materials
06/23/1994WO1994014185A1 Wafer processing machine vacuum front end method and apparatus
06/23/1994WO1994014183A1 Process for carrying out stable low pressure discharge processes
06/23/1994WO1994013854A1 Method of producing a metal film
06/23/1994WO1994013851A1 Transparent conductive film, transparent conductive base material, and conductive material
06/23/1994WO1994013471A1 C-axis perovskite thin films grown on silicon dioxide
06/23/1994DE4243515A1 Entry and exit seals for treatment chambers on continuous material line
06/23/1994DE4242652A1 Electron beam deposition appts.
06/23/1994DE4241763A1 Releasable means of attachment between target and support
06/23/1994CA2150724A1 Transparent electrically conductive layer, electrically conductive transparent substrate and electrically conductive material
06/23/1994CA2150473A1 Wafer processing machine vacuum front end method and apparatus
06/22/1994EP0603158A2 Advanced multilayer molded plastic package using mesic technology
06/22/1994EP0603144A1 Oxide coated cutting tool
06/22/1994EP0602442A2 Method for the production of higher primary alcohols, predominantly unbranched
06/22/1994EP0602322A1 Sputtering target
06/22/1994CN1088327A Genuine gold sign making film for computer-aided sign making systems
06/21/1994US5322817 In situ growth of TL-containing oxide superconducting films
06/21/1994US5322735 Comprising a low density silicon nitride core and titanium nitride coatings; friction, heat and wear resistance
06/21/1994US5322733 Magnetic recording medium
06/21/1994US5322606 Use of rotary solenoid as a shutter actuator on a rotating arm
06/21/1994US5322605 Used to form thin film on substrate which is formed by reaction of reactive gas and particles sputtered from the material of a target
06/18/1994CA2111026A1 Process for the preparation of predominantly unbranched higher primary alcohols
06/17/1994CA2111536A1 Collimated deposition apparatus
06/16/1994DE4342047A1 Semiconductor component with silylazide layer among diffusion barriers - improves step coverage characteristic by rendering diffusion barrier layer arrangement more amenable to metallisation
06/16/1994DE4341162A1 Producing coloured coatings on glass, metal ceramic and plastic substrates - by vapour coating alternate layer of dielectric material and organic colouring material
06/16/1994DE4337107A1 Prodn. of gold-cobalt system used in magnetoresistive sensors - comprises forming intermediate prod. from alloy having gold@ mixed crystals satd. with cobalt@, and converting into final prod.
06/16/1994DE4242490C1 Reactive vacuum treatment for e.g. coating substrates - with gas outflow from substrates partially removed by vacuum pumps
06/15/1994EP0601928A1 Process for the treatment of metal oxide or nitride thin films
06/15/1994EP0601656A1 Device for the treatment of substrates at low temperature
06/15/1994EP0601513A2 Method for forming deposited film
06/15/1994EP0546011B1 Method and apparatus for reducing wafer contamination
06/15/1994CN1087852A Tool for the treatment of surfaces of components and carrier material for this tool
06/14/1994US5321792 Apparatus for the continuous feeding of wire to an evaporator boat
06/14/1994US5321634 Automatic thin-film measuring apparatus
06/14/1994US5320984 Method for forming a semiconductor film by sputter deposition in a hydrogen atmosphere
06/14/1994US5320982 Wafer cooling method and apparatus
06/14/1994US5320882 Forming intermetallic with ductile metal inclusions
06/14/1994US5320881 Pulsed high power laser light impinges upon target to cause vaporization and depsotion of ferrite material
06/14/1994US5320877 Method for forming thin film and apparatus therefor
06/14/1994US5320869 Method for producing high gloss bright colored plastic articles
06/14/1994US5320729 Sputtering target
06/14/1994US5320689 With nitrogen and/or carbon
06/14/1994CA1330193C Method for making artificial layered high-t_ superconductors
06/09/1994WO1994012680A1 Doping of highly tetrahedral diamond-like amorphous carbon
06/09/1994WO1994005455A3 Modulated-structure of pzt/pt ferroelectric thin films for non-volatile random access memories
06/09/1994DE4341319A1 Producing a magnetic recording medium - with the precipitation section on a cooling cylinder limited by its min and max distances from the evaporation spot
06/09/1994DE4341164A1 Verfahren zur Herstellung eines Dünnfilm-Elektrolumineszenz-Elements A method of fabricating a thin film electroluminescent element
06/09/1994DE4241238A1 Surface deposition system for applying hard coating to workpieces - has workpiece holders moved by draw chain around serpentine path within chamber and on straight line in front of vaporiser
06/09/1994DE4235676A1 Chamber and chamber combination for transfer of at least one component - with a component holding element swivelled through a chamber opening
06/08/1994EP0600716A1 Magnetic recording medium
06/08/1994EP0600429A1 Magnetron sputtering device and method for thin film coating
06/08/1994EP0600303A2 Method and apparatus for fabrication of dielectric thin film
06/08/1994EP0600070A1 Improved planar magnetron sputtering magnet assembly
06/08/1994CN1087750A Laser process
06/07/1994US5319479 Deposited multi-layer device with a plastic substrate having an inorganic thin film layer
06/07/1994US5319197 Process for monitoring ion-assisted processing procedures on wafers and an apparatus for carrying out the same
06/07/1994US5318923 Method for forming a metal wiring layer in a semiconductor device