Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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07/13/1994 | EP0605444A1 Process and apparatus for surface hardening of refractory metal workpieces. |
07/12/1994 | US5328676 Vapor deposition fullerenes and energizing to form ions then coating and growing |
07/12/1994 | US5328583 Consisting of sputtering targets arranged in counterposition and second one on concentric circle having same center axis |
07/12/1994 | US5328582 Off-axis magnetron sputter deposition of mirrors |
07/07/1994 | WO1994014997A1 Atomic beam coating of polymers |
07/07/1994 | WO1994014996A1 Layer deposit process and equipment |
07/07/1994 | WO1994014565A1 Electron beam gun with liquid cooled rotatable crucible |
07/06/1994 | EP0605299A1 Method for controlling a reactive sputtering process |
07/06/1994 | EP0605273A1 Thermal barriers, materials and process for their preparation |
07/06/1994 | EP0604424A1 Vapour deposition. |
07/06/1994 | EP0558485B1 Process for obtaining a coated cemented carbide cutting tool |
07/06/1994 | CN2170954Y Class shell aluminium evaporating apparatus for vacuum cavity |
07/06/1994 | CN2170953Y Clamping device for preset film thickness distributing acquired on workpiece |
07/05/1994 | US5326980 Ion implanter with plural surface potential sensors |
07/05/1994 | US5326975 Measurement of gas leaks into gas lines of a plasma reactor |
07/05/1994 | US5326745 Superconducting device with C-axis orientation perpendicular to current flow |
07/05/1994 | US5326642 Layer of aluminum oxide or magnesium oxide |
07/05/1994 | US5325812 Substrate holding and rotating arrangement for vacuum processes |
07/05/1994 | US5325747 Method of machining using coated cutting tools |
07/05/1994 | CA1330548C Method and apparatus for producing thin film of compound having large area |
07/05/1994 | CA1330484C Panel type masking member and mold therefor |
06/30/1994 | DE4340952A1 Cleaning process for tools, etc. prior to coating deposition |
06/30/1994 | DE4243757A1 Cathodic evaporation process ferromagnetic target |
06/30/1994 | DE4243410A1 Prodn. of thin film with resistance |
06/29/1994 | EP0604066A1 Fluid flow control method and apparatus for an ion implanter |
06/29/1994 | EP0604036A2 Method for depositing aluminum layers on insulating oxide substrates |
06/29/1994 | EP0603864A2 Surface potential control in plasma processing of materials |
06/29/1994 | EP0603782A2 Method for producing a thin film resistor |
06/29/1994 | EP0603750A1 Target for magneto-optical recording media and method for producing same |
06/29/1994 | EP0603673A1 Object having a pink coating |
06/29/1994 | EP0603588A2 Process for coating organic polymeric substrate with copper |
06/29/1994 | EP0603587A1 Plasma generating apparatus |
06/29/1994 | EP0603486A2 Process for multi-step coating of substrates |
06/29/1994 | EP0603464A1 Process for coating substrates |
06/29/1994 | EP0603407A1 Vapor deposition material and production method thereof |
06/29/1994 | EP0365687B1 Steel sheet having dense ceramic coating with excellent adhesion,smoothness and corrosion resistance and process for its production |
06/29/1994 | CN1088504A Tool for the treatment of surfaces of components |
06/28/1994 | US5324593 Magnetic |
06/28/1994 | US5324552 Process for coating substrate material |
06/28/1994 | US5324537 Exposing at an elevated temperature to a stream of gaseous fluorocarbon |
06/28/1994 | US5324414 Ion selective electrode |
06/28/1994 | US5324362 Apparatus for treating substrates in a microwave-generated gas-supported plasma |
06/28/1994 | US5324361 Apparatus for coating cap-shaped substrates |
06/24/1994 | CA2112178A1 Surface potential control in plasma processing of materials |
06/23/1994 | WO1994014185A1 Wafer processing machine vacuum front end method and apparatus |
06/23/1994 | WO1994014183A1 Process for carrying out stable low pressure discharge processes |
06/23/1994 | WO1994013854A1 Method of producing a metal film |
06/23/1994 | WO1994013851A1 Transparent conductive film, transparent conductive base material, and conductive material |
06/23/1994 | WO1994013471A1 C-axis perovskite thin films grown on silicon dioxide |
06/23/1994 | DE4243515A1 Entry and exit seals for treatment chambers on continuous material line |
06/23/1994 | DE4242652A1 Electron beam deposition appts. |
06/23/1994 | DE4241763A1 Releasable means of attachment between target and support |
06/23/1994 | CA2150724A1 Transparent electrically conductive layer, electrically conductive transparent substrate and electrically conductive material |
06/23/1994 | CA2150473A1 Wafer processing machine vacuum front end method and apparatus |
06/22/1994 | EP0603158A2 Advanced multilayer molded plastic package using mesic technology |
06/22/1994 | EP0603144A1 Oxide coated cutting tool |
06/22/1994 | EP0602442A2 Method for the production of higher primary alcohols, predominantly unbranched |
06/22/1994 | EP0602322A1 Sputtering target |
06/22/1994 | CN1088327A Genuine gold sign making film for computer-aided sign making systems |
06/21/1994 | US5322817 In situ growth of TL-containing oxide superconducting films |
06/21/1994 | US5322735 Comprising a low density silicon nitride core and titanium nitride coatings; friction, heat and wear resistance |
06/21/1994 | US5322733 Magnetic recording medium |
06/21/1994 | US5322606 Use of rotary solenoid as a shutter actuator on a rotating arm |
06/21/1994 | US5322605 Used to form thin film on substrate which is formed by reaction of reactive gas and particles sputtered from the material of a target |
06/18/1994 | CA2111026A1 Process for the preparation of predominantly unbranched higher primary alcohols |
06/17/1994 | CA2111536A1 Collimated deposition apparatus |
06/16/1994 | DE4342047A1 Semiconductor component with silylazide layer among diffusion barriers - improves step coverage characteristic by rendering diffusion barrier layer arrangement more amenable to metallisation |
06/16/1994 | DE4341162A1 Producing coloured coatings on glass, metal ceramic and plastic substrates - by vapour coating alternate layer of dielectric material and organic colouring material |
06/16/1994 | DE4337107A1 Prodn. of gold-cobalt system used in magnetoresistive sensors - comprises forming intermediate prod. from alloy having gold@ mixed crystals satd. with cobalt@, and converting into final prod. |
06/16/1994 | DE4242490C1 Reactive vacuum treatment for e.g. coating substrates - with gas outflow from substrates partially removed by vacuum pumps |
06/15/1994 | EP0601928A1 Process for the treatment of metal oxide or nitride thin films |
06/15/1994 | EP0601656A1 Device for the treatment of substrates at low temperature |
06/15/1994 | EP0601513A2 Method for forming deposited film |
06/15/1994 | EP0546011B1 Method and apparatus for reducing wafer contamination |
06/15/1994 | CN1087852A Tool for the treatment of surfaces of components and carrier material for this tool |
06/14/1994 | US5321792 Apparatus for the continuous feeding of wire to an evaporator boat |
06/14/1994 | US5321634 Automatic thin-film measuring apparatus |
06/14/1994 | US5320984 Method for forming a semiconductor film by sputter deposition in a hydrogen atmosphere |
06/14/1994 | US5320982 Wafer cooling method and apparatus |
06/14/1994 | US5320882 Forming intermetallic with ductile metal inclusions |
06/14/1994 | US5320881 Pulsed high power laser light impinges upon target to cause vaporization and depsotion of ferrite material |
06/14/1994 | US5320877 Method for forming thin film and apparatus therefor |
06/14/1994 | US5320869 Method for producing high gloss bright colored plastic articles |
06/14/1994 | US5320729 Sputtering target |
06/14/1994 | US5320689 With nitrogen and/or carbon |
06/14/1994 | CA1330193C Method for making artificial layered high-t_ superconductors |
06/09/1994 | WO1994012680A1 Doping of highly tetrahedral diamond-like amorphous carbon |
06/09/1994 | WO1994005455A3 Modulated-structure of pzt/pt ferroelectric thin films for non-volatile random access memories |
06/09/1994 | DE4341319A1 Producing a magnetic recording medium - with the precipitation section on a cooling cylinder limited by its min and max distances from the evaporation spot |
06/09/1994 | DE4341164A1 Verfahren zur Herstellung eines Dünnfilm-Elektrolumineszenz-Elements A method of fabricating a thin film electroluminescent element |
06/09/1994 | DE4241238A1 Surface deposition system for applying hard coating to workpieces - has workpiece holders moved by draw chain around serpentine path within chamber and on straight line in front of vaporiser |
06/09/1994 | DE4235676A1 Chamber and chamber combination for transfer of at least one component - with a component holding element swivelled through a chamber opening |
06/08/1994 | EP0600716A1 Magnetic recording medium |
06/08/1994 | EP0600429A1 Magnetron sputtering device and method for thin film coating |
06/08/1994 | EP0600303A2 Method and apparatus for fabrication of dielectric thin film |
06/08/1994 | EP0600070A1 Improved planar magnetron sputtering magnet assembly |
06/08/1994 | CN1087750A Laser process |
06/07/1994 | US5319479 Deposited multi-layer device with a plastic substrate having an inorganic thin film layer |
06/07/1994 | US5319197 Process for monitoring ion-assisted processing procedures on wafers and an apparatus for carrying out the same |
06/07/1994 | US5318923 Method for forming a metal wiring layer in a semiconductor device |