| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 04/20/1993 | US5203977 From high density crystalline boron sputter target |
| 04/20/1993 | US5203929 Evaporating, depositing film by irradiating laser beam to metal target |
| 04/20/1993 | CA1316332C Fixture for mounting small parts for processing |
| 04/15/1993 | WO1993007432A1 Pinching gate valve |
| 04/15/1993 | WO1993007306A1 Adherent metal coating for aluminum nitride surfaces |
| 04/15/1993 | DE4222026C1 Semi-finished prod. mfr. used as catalyst supports - by coating starting material, e.g. ferritic stainless steel, with at least one chromium@ layer and diffusion heat treating |
| 04/15/1993 | DE4209428C1 Automatic evapn. of large amts. of material without breaking vacuum - by charging moulded evapn. material from containers into recesses in rollers which then move mouldings to evaporators |
| 04/14/1993 | EP0537012A1 Sputtering processes and apparatus |
| 04/14/1993 | EP0537011A1 Sputtering apparatus |
| 04/14/1993 | EP0536607A2 Heat processable metallic appearing coatings |
| 04/14/1993 | CN1070954A Mirror made technology by wood plate, concrete plate, plastic plat, magnesia glass fibre plate |
| 04/13/1993 | US5202280 Method for fabricating a semiconductor device |
| 04/13/1993 | US5202201 Solid phase |
| 04/13/1993 | US5202156 Coating mold surface with durable amorphous carbon-hydrogen release film, for hot-pressing and molding glass |
| 04/13/1993 | US5202008 Method for preparing a shield to reduce particles in a physical vapor deposition chamber |
| 04/13/1993 | US5201956 Vapor deposition |
| 04/13/1993 | CA1315918C Hard outer coatings deposited on titanium or titanium alloys |
| 04/11/1993 | CA2078973A1 Multilayered catalyst for controlled transport of reactant |
| 04/09/1993 | CA2079432A1 Energetic composites and method of providing chemical energy |
| 04/08/1993 | DE4132562A1 In-situ determn. of thin electrically conductive films resistance - includes elimination of distorting plasma effects |
| 04/07/1993 | EP0535961A1 Patterning process |
| 04/07/1993 | EP0535823A1 Thin conductive metal films having a random lacework pattern |
| 04/07/1993 | EP0535736A1 Semiconductor device |
| 04/07/1993 | EP0535568A1 Metal strip surface cleaning apparatus |
| 04/07/1993 | EP0535413A1 Method for producing an adhesive-stable joint of layers of copper with alumina-ceramics without use of agent mediating the bond |
| 04/07/1993 | EP0535314A1 Platinum-cobalt alloy sputtering target and method for manufacturing same |
| 04/07/1993 | EP0535054A1 Metallizing apparatus |
| 04/07/1993 | CN1020239C Method of forming high temp. barriers in structural metals to make such metals creep resistant at high homologous temp. |
| 04/06/1993 | US5200277 Electroluminescent device |
| 04/06/1993 | US5200049 Cantilever mount for rotating cylindrical magnetrons |
| 04/06/1993 | US5199999 Precoating with sacrificial layer |
| 04/06/1993 | CA1315574C Colour change devices incorporating thin anodic films |
| 04/06/1993 | CA1315497C Plated steel sheet for cans |
| 04/01/1993 | WO1993006257A1 Process and apparatus for surface hardening of refractory metal workpieces |
| 03/31/1993 | EP0534905A2 Tools for machining materials |
| 03/31/1993 | EP0534737A1 Ion beam profiling method and apparatus |
| 03/31/1993 | EP0534505A2 Laser deposition method and apparatus, and product thereof |
| 03/31/1993 | EP0534441A2 Target for reactive sputtering and film-forming method using the target |
| 03/31/1993 | EP0534066A1 Arc discharge coating apparatus with auxiliary ionization anode |
| 03/31/1993 | EP0534047A1 Apparatus for the reduction of deformation of the exterior walls of vacuum chambers |
| 03/31/1993 | EP0533945A1 Production method for oxide superconductor film |
| 03/31/1993 | EP0533678A1 Ellipsometric control of material growth |
| 03/31/1993 | CN1070434A Vacuum evaporation apparatus |
| 03/30/1993 | US5198718 Filamentless ion source for thin film processing and surface modification |
| 03/30/1993 | US5198676 Ion beam profiling method and apparatus |
| 03/30/1993 | US5198414 In-situ growth of flourounated superconducting, Y-Ba-Cu-O thin films on sapphire substrates with a buffer layer by laser ablation |
| 03/30/1993 | US5198272 Rotation in a vacuum chamber a surface and coating with metal |
| 03/30/1993 | US5198262 Method of forming mirror for electromagnetic radiations of short wavelengths |
| 03/30/1993 | US5198158 Forming a layer on magnesium oxide supported on saphire or gadolinium gallium garnet and etching the magnesium oxide with acid |
| 03/30/1993 | US5198090 Sputtering apparatus for producing thin films of material |
| 03/30/1993 | US5198087 Method of making magneto-optical recording medium |
| 03/30/1993 | US5198032 Vacuum deposition a coating on a tape with grooves |
| 03/30/1993 | CA1315461C Formation of superconductive ceramic oxides by chemical polymerization |
| 03/24/1993 | EP0533575A1 Plastic-supported metallic strip manufactured by metallising-plating |
| 03/24/1993 | EP0533254A2 Method of manufacturing a semiconductor device whereby a layer comprising aluminium is deposited on a surface for a semiconductor body |
| 03/24/1993 | EP0533113A2 Method of manufacturing a thin Hg1-xCdxTe film |
| 03/24/1993 | EP0532758A1 Cvd semiconductor manufacturing equipment |
| 03/24/1993 | EP0532543A1 Sog with moisture resistant protective capping layer. |
| 03/24/1993 | CN2128635Y Coated jewel |
| 03/24/1993 | CN1070234A Process for preparing crystallite coating on alloy |
| 03/24/1993 | CN1020158C Method for coating diamond-like carbon film on infrared lens of germanium and silicon |
| 03/24/1993 | CA2078245A1 Machining tools |
| 03/23/1993 | US5196916 Integrated circuit wiring, titanium, hafnium, zirconium |
| 03/23/1993 | US5196753 Surface acoustic wave devices having long-term frequency stability |
| 03/23/1993 | US5196400 High temperature superconductor deposition by sputtering |
| 03/23/1993 | US5196398 Heat treatment |
| 03/23/1993 | US5196379 Oxide of aluminum, bismuth, silicon or aluminum-tungsten |
| 03/23/1993 | US5196105 System for coating substrates with magnetron cathodes |
| 03/23/1993 | US5196103 Dielectric polycyclobutarene layer, adhesion, metal carbide interface, sputtering |
| 03/23/1993 | US5196102 Method and apparatus for applying a compound of a metal and a gas onto a surface |
| 03/23/1993 | US5196101 Deposition of thin films of multicomponent materials |
| 03/23/1993 | US5196100 Process and installation for the continuous metallization of a spread fibre sliver |
| 03/23/1993 | US5196062 Arrangement for holding and cooling work pieces positioned next to one another |
| 03/23/1993 | US5195651 Ball feeder for replenishing evaporator feed |
| 03/18/1993 | WO1993005195A1 Target element for cathode sputtering |
| 03/18/1993 | CA2116776A1 Target element for cathodic sputtering |
| 03/18/1993 | CA2051604A1 Plastic-mounted strips fabricated by vacuum deposition and cladding |
| 03/17/1993 | EP0532283A1 An ion implantation apparatus |
| 03/16/1993 | US5194748 Method and apparatus relating to ion implantation |
| 03/16/1993 | US5194398 Semiconductor film and process for its production |
| 03/16/1993 | US5194318 Multilayer film with metallized surface |
| 03/16/1993 | US5194297 Coating silicon wafers, particle counter, computer control |
| 03/16/1993 | US5194131 Apparatus and method for multiple ring sputtering from a single target |
| 03/16/1993 | US5193716 Masking method |
| 03/10/1993 | CN1069777A Apparatus for arc vapor-phase deposition |
| 03/10/1993 | CN1069776A Method and equipment of arc vapor-phase deposition with magnetic confinement |
| 03/10/1993 | CN1069775A High-temperature resistant materials of Nb-Ti-Al series metal compounds |
| 03/10/1993 | CN1020045C Multi-chamber deposition system |
| 03/09/1993 | US5192894 Device for the suppression of arcs |
| 03/09/1993 | US5192712 Integrated circuits |
| 03/09/1993 | US5192620 Metallized composite film structure and method |
| 03/09/1993 | US5192618 Corrosion protection by femn by ion implantation |
| 03/09/1993 | US5192585 Differential pressure sealing apparatus and method |
| 03/09/1993 | US5192583 Production of a magnetic recording medium |
| 03/09/1993 | US5192580 Process for making thin polymer film by pulsed laser evaporation |
| 03/09/1993 | US5192578 Ionization, nitriding, oxidation, and electrodeposition; corrosion resistance, waterproofing |
| 03/09/1993 | US5192409 Method of sputtering a mixture of hexagonal boron nitride and stainless steel onto a steel vessel and heating the film so as to precipitate the boron nitride onto the film surface |
| 03/09/1993 | US5192393 Crystallization of silicon by neutralization and activation |
| 03/04/1993 | WO1993004211A1 Apparatus and method for multiple ring sputtering from a single target |
| 03/04/1993 | WO1993004210A1 Method for forming oxide film |