Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
06/1992
06/30/1992US5126575 Method and apparatus for broad beam ion implantation
06/30/1992US5126519 Vacuum depositing aluminum on thin copolyester film; for browning, crisping food products
06/30/1992US5126320 Method for manufacturing an oxide superconducting thin-film
06/30/1992US5126318 Yttrium-barium-copper oxide of high critical temperature
06/30/1992US5126315 High tc superconducting device with weak link between two superconducting electrodes
06/30/1992US5126213 Coated near-alpha titanium articles
06/30/1992US5126207 Good bonding properties; abrasive tool for sawing, drilling grinding, cutting, abrading and dressing
06/30/1992US5126165 Vacuum deposition of metal film of desired property on substrate
06/30/1992US5126163 Method for metal ion implantation using multiple pulsed arcs
06/30/1992US5126033 Process and apparatus for reactively coating a substrate
06/30/1992US5126032 Process and apparatus for reactively coating a substrate
06/30/1992US5126030 Magnet coil between evaporation source and substrate; vapor deposition of hard, smooth films
06/30/1992US5126029 Apparatus and method for achieving via step coverage symmetry
06/30/1992US5126028 Computerized control of thickness and deposition rate
06/30/1992US5126027 Uniform heating of both surfaces of base plates gives uniform physical properties; magnetic recording media, disks
06/30/1992US5125359 Surface deposition or surface treatment reactor
06/30/1992US5125124 Electrostatic dust collector for use in vacuum system
06/30/1992CA1304430C Feed-through element for a vacuum apparatus
06/25/1992WO1992010857A1 Process for depositing high temperature superconducting oxide thin films
06/24/1992EP0491503A2 Method for depositing metal
06/24/1992EP0491313A2 Ion implantation method and apparatus
06/24/1992EP0491311A2 Ion implanting apparatus and method
06/24/1992CN1062178A Adhesion method for cathode target of vacuum sputter system
06/24/1992CN1017164B Preparation of antireflection coating on silicon or galliumarsenide substrate
06/23/1992US5124310 Laser ablation method for depositing fluorinated y-ba-cu-o superconducting film having basal plane alignment of the unit cells deposited on non-lattice-matched substrates
06/23/1992US5124174 Process for forming one or more substantially pure layers in substrate material using ion implantation
06/23/1992US5124019 Lens holder for use in a high-vacuum vapor deposition or sputtering system
06/23/1992US5124013 High ratio planetary drive system and method for vacuum chamber
06/23/1992US5124006 Method of forming heat engine parts made of a superalloy and having a metallic-ceramic protective coating
06/23/1992US5123980 Corrosion and wear resistance, toughness
06/23/1992US5123972 Hardened insert and brake shoe for backstopping clutch
06/17/1992EP0490727A1 Apparatus and crucible for vapor phase deposition
06/17/1992EP0490469A1 Method of reducing pore size of fine wire mesh screen
06/17/1992EP0490229A2 Method for producing selective sputtered structures
06/17/1992EP0490068A1 Method for centering an electron beam
06/17/1992EP0489914A1 Method of forming titanium nitride coating and pan made by this method
06/17/1992EP0489889A1 Process for depositing thin layers by laser pulse vapour deposition.
06/17/1992CN2107714U Column surface ionization device
06/16/1992US5122483 Vacuum deposition of silicon, injection of oxygen-inert gas mixture with ion beam
06/16/1992US5122412 Polyethylene plexifilamentary film-fibril sheet
06/16/1992US5122393 Reagent source for molecular beam epitaxy
06/16/1992US5122389 Vacuum evaporation method and apparatus
06/16/1992US5122252 Arrangement for the coating of substrates
06/16/1992US5122251 High density plasma deposition and etching apparatus
06/16/1992US5122250 Method of manufacturing iron garnet layers
06/16/1992US5122249 Direct current magnetron cathode sputtering of glass-like carbon target in argon, hydrogen and hexafluoroethane
06/16/1992US5121707 Apparatus for coating materials in a vacuum chamber
06/11/1992WO1992009722A1 Method of producing a coated hard-metal cutter
06/11/1992WO1992009717A1 Defect-induced control of the structure of boron nitride
06/11/1992WO1992009389A1 Method of making an essentially void-free, cast silicon and aluminum product
06/11/1992DE4124471C1 Target for cathodic sputtering - produced from partially reduced mixtures of indium oxide and tin oxide by hot pressing in inert protective gas
06/11/1992DE4038577A1 Coating substrate with silicon di:oxide - in which multicomponent target in evacuated chamber contg. argon@ and oxygen@ is used
06/10/1992EP0489659A1 Process for treatment of metals by deposition of material and furnace for carrying out the process
06/10/1992EP0489443A1 Vacuum evaporation system
06/10/1992EP0489396A1 Segmented cathode for arc-discharge coating
06/10/1992EP0489239A1 Sputtering apparatus with magnetron cathodes for coating of substrates
06/10/1992EP0489156A1 Thin-film el element
06/10/1992CN1061806A Method of plating steel
06/10/1992CN1016969B Automatical device for rapid heat chemical processing
06/09/1992US5121027 Plasma spraying scandium or scandium oxide onto surface of a cap including a nickle base containing reducing elements which ionized to form implantation layer; enhanced elctron emission characteristics
06/09/1992US5120596 Titanium nitride coated on stainless steel substrate
06/09/1992US5120568 Generating high temperature gas, depressurizing, pumping fluid reactants and impinging to form plasma polymerization
06/09/1992CA1303254C Platen assembly for a vacuum processing system
06/09/1992CA1302947C Copper-chromium-polyimide composite
06/09/1992CA1302807C Zirconium nitride coated article and method for making same
06/08/1992CA2056816A1 Apparatus and crucible for vapor deposition
06/07/1992CA2056910A1 Process for treatment of metals by material deposition and furnace using said process
06/04/1992DE4137462C1 Sputtering target cooling means - has target mounted on cooling plate with cooling channels contg. temp. sensor, with 2-way coolant supply line of good and poor thermally conductive media
06/04/1992DE4137238C1 Process for coating superconductor on both sides of polished substrates - includes coating at high temp., cooling in oxygen@ atmos. to room temp. etc.
06/04/1992DE4127262C1 Sputtering equipment for coating large substrates with (non)ferromagnetic material - consisting of two sub-targets electrically isolated and cooling plates whose gap in between is that in region of pole units
06/04/1992DE4127261C1 Sputtering equipment for coating large substrates with ferromagnetic and non-magnetic material - has cathode target comprising sub-targets, and cooling plates contg. magnet unit and poles shoes
06/03/1992EP0488535A2 Method and apparatus for manufacturing electrodes for multilayer ceramic capacitors
06/03/1992EP0488497A2 Method of plating steel
06/03/1992EP0488239A1 Method for manufacturing a stamper
06/03/1992EP0488048A1 A low emissivity film
06/03/1992EP0487848A1 A loading apparatus having a suction-hold mechanism
06/03/1992EP0487656A1 Charge neutralization apparatus for ion implantation system.
06/03/1992EP0313580B1 Radiation curable temporary solder mask
06/02/1992US5118661 Sputtering target for use in fabricating integrated circuit device
06/02/1992US5118400 Method of making biocompatible electrodes
06/02/1992US5118372 Method of forming a protective and decorative sheet material on a substrate
05/1992
05/29/1992WO1992008821A1 Device for coating hollow workpieces by gas diffusion
05/27/1992EP0487421A2 Process for preparing a thin film of Bi-type oxide superconductor
05/27/1992EP0487213A1 A method of manufacturing free standing perovskite lead scandium tantalate film
05/27/1992EP0486489A1 High-temperature-resistant, corrosion-resistant coating, in particular for components of gas turbines.
05/27/1992DE4037480A1 Verfahren zur herstellung eines beschichteten hartmetallschneidkoerpers A process for preparing a coated hartmetallschneidkoerpers
05/27/1992CN1061444A Apparatus for forming thin film
05/26/1992US5117192 Control circuitry for quartz crystal deposition monitor
05/26/1992US5116694 Coated cemented carbides
05/26/1992US5116482 Film forming system using high frequency power and power supply unit for the same
05/26/1992US5116479 Process for producing transparent conductive film comprising indium oxide
05/22/1992WO1992009718A1 Anode structures for magnetron sputtering apparatus
05/22/1992CA2096735A1 Anode structures for magnetron sputtering apparatus
05/20/1992EP0486475A2 Amorphous oxide film and article having such film thereon
05/20/1992EP0486182A1 Zinc oxide sintered body, and production and application thereof
05/20/1992EP0486149A2 Method and apparatus for reducing tilt angle variations in an ion implanter
05/20/1992EP0486055A2 Process for preparing a superconducting thin oxide film
05/20/1992EP0486054A2 Process for preparing a superconducting thin oxide film
05/20/1992EP0485907A1 Ultrahigh-purity ferroelectric thin film
05/20/1992EP0419461A4 Wafer handling system with bernoulli pick-up