Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
04/1994
04/28/1994CA2146629A1 Process for making thin films by pulsed excimer laser evaporation
04/27/1994EP0593924A1 Device for producing plasma using cathodic sputtering
04/27/1994EP0446375B1 Surface-coated hard member for cutting and abrasion-resistant tools
04/27/1994CN1085919A Antireflection coatings
04/26/1994US5306922 Production of high beam currents at low energies for use in ion implantation systems
04/26/1994US5306703 Sequentially depositing layers of copper, barium, calcium, thallium to desired thickness, capping with copper layer, heating in container while introducing oxygen, cooling
04/26/1994US5306702 Sintering metal film in oxygen-containing atmosphere
04/26/1994US5306699 A chemical reactor having apertures for venting the volatile materials
04/26/1994US5306569 Titanium-tungsten target material and manufacturing method thereof
04/26/1994US5306408 Drift tube with magnets to push plasma away from tube, maintain uniform plasma density and guide plasma towards substrate
04/26/1994US5306407 Method and apparatus for coating substrates
04/26/1994US5306406 Method and apparatus for sputtering superconducting thin films of niobium on quarter-wave resonant cavities of copper for accelerating heavy ions
04/26/1994US5306405 Slurrying powder of target material in suspending liquid, shaping, slow drying by evaporation
04/26/1994CA1328907C Medical electrical lead and method of manufacture
04/26/1994CA1328844C Method for preparing thin film of superconductor
04/26/1994CA1328784C Article having surface layer of uniformly oriented, crystalline, organic microstructures
04/20/1994EP0593372A1 Highly durable electrodes for eletrolysis and a method for preparation thereof
04/20/1994EP0592986A1 Ultra-thin film laminate
04/20/1994CN2162470Y Moving target device for vacuum coated machine
04/19/1994US5304406 Method for forming an organic film
04/19/1994US5304405 Etching with inert gas in vacuum vessel
04/19/1994US5304281 Providing heated substrates at specified distance from cadmium sulfide target, pressurization, continuous wave laser beam
04/19/1994US5304274 Method for manufacturing electrodes for multilayer ceramic capacitors
04/19/1994US5304258 Magnetic alloy consisting of a specified FeTaN Ag or FeTaNCu composition
04/19/1994US5304248 Passive shield for CVD wafer processing which provides frontside edge exclusion and prevents backside depositions
04/19/1994US5303574 Evaluation of the extent of wear of articles
04/14/1994WO1994008068A1 Pretreatment of plastic components for electrostatic enameling
04/14/1994WO1994008067A1 Topographically precise thin film coating system
04/14/1994WO1994008066A1 Tool for working the surfaces of components, and a substrate material for such a tool
04/14/1994WO1994007655A1 Tool for working the surfaces of components
04/14/1994DE4240490C1 Sealing elements for strip feeding device - comprising two shaped pieces pref. of PTFE
04/14/1994DE4240489C1 System for feeding strip into treatment chamber - has rollers operating valve system between different pressure stages
04/14/1994DE4240488C1 Appts. for reducing pressure in feeding channels leading to treatment chamber - using vacuum pumps connected in series to gradually reduce the pressure from atmospheric to the optimal pressure required
04/13/1994EP0592174A2 Process for producing optical recording medium, sputtering method and sputtering target
04/13/1994EP0591706A1 Chamber for transport of substrates
04/13/1994EP0591675A1 Device for avoiding arcing in vacuum sputtering apparatuses
04/13/1994EP0591588A1 Method of making polycrystalline thin film and superconducting oxide body
04/13/1994EP0591375A1 Composite article comprising oriented microstructures.
04/13/1994EP0591339A1 Improvements in or relating to razor blades
04/13/1994CN2161625Y Multi-arc type ion coating machine
04/12/1994US5302449 Architectural glass, automobile windows
04/12/1994US5302434 Aluminum alloy, nickel phosphide layer overcoated with formed nickel oxide
04/12/1994US5302271 Anodic vacuum arc deposition system
04/12/1994US5302266 Method and apparatus for filing high aspect patterns with metal
04/12/1994US5302209 Apparatus for manufacturing semiconductor device
04/12/1994US5302208 Vacuum coating installation
04/12/1994CA2024987C Multilayer coating of a nitride-containing compound and method for producing it
04/07/1994DE4233512A1 Process gas control system and equipment for vacuum coating plants - with flow control valve and flow meter in the process gas supply line and diversion of the gas flow via by=pass when receiver gas supply is interrupted
04/07/1994DE4233000A1 Vorbehandlung von Kunststoffteilen für die elektrostatische Lackierung Pretreatment of plastic parts for electrostatic painting
04/07/1994DE4232430A1 Werkzeug zur Behandlung von Oberflächen von Bauteilen Tool for the treatment of surfaces of components
04/06/1994EP0590904A1 Diffusion-bonded sputtering target assembly and method of manufacturing the same
04/06/1994EP0590243A1 Apparatus for loading and unloading disc-shaped substates
04/06/1994EP0590148A1 Method and apparatus for thin film formation, device, electro-magnetic apparatus, data recording/reproduction apparatus, signal processor, and method of producing molten crystal
04/06/1994EP0389506B1 Process for producing thin layers of a material composed of different chemical compounds which melts or sublimes at high temperatures on a substrate
04/06/1994CN1084904A Elemental sulfur ion composite implantation
04/06/1994CN1084903A Full element ion beam material surface modifying technology
04/06/1994CN1084902A Vacuum sulfur complement method for zinc sulfate membrane
04/06/1994CN1024146C Process for preparing film of multicomponent metal oxide
04/05/1994US5301211 Fuel assembly sputtering process
04/05/1994US5300891 Ion accelerator
04/05/1994US5300485 Method of preparing oxide superconducting films by laser ablation
04/05/1994US5300462 Multistep process; implanting metals then heat treating to form alloy areas
04/05/1994US5300316 Evaporating metal to react with oxygen and sulfur gases; phosphors; electroluminescene, cathode ray tubes
04/05/1994US5300307 Microstructure control of Al-Cu films for improved electromigration resistance
04/05/1994US5300205 Sputtering multiple coating, regulating voltage at cathode
04/05/1994US5300189 Depositing carbon form hydrocarbon gas; having grounded and hollow counterelectrodes
04/05/1994US5300165 Method for manufacturing a metallic porous sheet
04/05/1994US5300159 Method for manufacturing superplastic forming/diffusion bonding tools from titanium
04/05/1994CA1328242C Process for manufacturing a superconductor and a method for producing a superconducting circuit
03/1994
03/31/1994WO1994006624A1 Gold film for computer-aided sign making system
03/31/1994DE4328067C1 Applying metal layers onto non-metallic substrate - uses intermediate adhesion promoter layer of inorganic oxide material
03/31/1994DE4232902A1 Substrate holder - has two pairs of elastic holding fingers located in the substrate plane
03/31/1994DE4232429A1 Werkzeug zur Behandlung von Oberflächen von Bauteilen und Trägerwerkstoff für dieses Werkzeug Tool for the treatment of surfaces of components and support material for this tool
03/31/1994DE4232007A1 Sputtering cathode for use in vacuum coating installations - mfd. using explosive welding process to produce vacuum-tight seams of cavity for coolant flow
03/30/1994EP0589699A1 Device and method for depositing metal oxide films
03/30/1994EP0589416A1 Film forming apparatus
03/30/1994EP0589237A2 Vacuum etch chamber and method for treating parts thereof
03/30/1994EP0588992A1 Device for processing substrates within a plasma.
03/30/1994EP0423327B1 Apparatus and method for treating flat substrates under reduced pressure
03/30/1994CN1084583A Alloy Vacuum Coating method
03/29/1994US5298759 For placement between a source cell and growth chamber for growth of semiconductor layears
03/29/1994US5298720 Method and apparatus for contamination control in processing apparatus containing voltage driven electrode
03/29/1994US5298338 Titanium-tungsten target material and manufacturing method thereof
03/29/1994US5298137 Used for producing a thin film on surface of an object
03/29/1994US5298136 Steered arc coating with thick targets
03/29/1994US5298048 Heat treatable sputter-coated glass systems
03/29/1994CA1328140C Polyester film coated with metal adhesion promoting coating and having superior winding performance
03/29/1994CA1328090C Low reflectance bronze coating
03/29/1994CA1328089C Sputtered films of bismuth/tin oxide
03/24/1994DE4331885A1 Prodn of esp ferroelectric, thin layers - by vaporising material onto substrate using ion beam cluster, and heating layer produced in oxygen atmosphere
03/24/1994DE4231644A1 Evaporator for localised application of anti-coating media to a passing foil strip - incorporating a shutter plate with a contoured closing edge
03/23/1994EP0588718A1 Process for the vapour phase deposition of a fluoride glass film on a substrate
03/23/1994EP0588351A2 Hard wear-resistant film and method for production thereof
03/23/1994EP0588350A2 Hard film of Ti-Si-N composite material and method for production thereof
03/23/1994EP0587741A1 Zinc alloy rotating sputter target
03/23/1994EP0581902A4 Method and apparatus for linear magnetron sputtering.
03/23/1994CN2159398Y Co-axis magnetically controlled sputter target
03/23/1994CN2159397Y Metal surface treating apparatus
03/23/1994CN1084291A Producing method of laser holographic interference image
03/22/1994US5296455 Process for preparing superconductor of compound oxide of Bi-Sr-Ca-Cu system