Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
10/1994
10/13/1994DE4311360A1 Arrangement for the reactive deposition of materials as a thin film by means of medium-frequency cathode sputtering
10/12/1994EP0619694A1 Method of monitoring atmospheric pressure glow discharge plasma
10/12/1994EP0619383A1 Process and apparatus for supplying metal vapor continuously to a chemical vapor deposition
10/12/1994EP0619380A1 Thin film deposition apparatus and process utilizing PECVD and sputtering
10/12/1994EP0618984A1 Exothermic reflexible glass, exothermic transparent glass and process of manufacturing them
10/11/1994US5354986 Ion implantation apparatus
10/11/1994US5354615 Coated SiC reinforcements and composites containing same
10/11/1994US5354584 In situ low energy ion doping of materials grown by CVD
10/11/1994US5354583 Apparatus and method for selective area deposition of thin films on electrically biased substrates
10/11/1994US5354575 Ellipsometric approach to anti-reflection coatings of semiconductor laser amplifiers
10/11/1994US5354446 For forming transparent noncrystalline durable oxide film
10/11/1994US5354445 Thin film-forming apparatus
10/11/1994US5354443 Method and apparatus for physical-vapor deposition of material layers
10/11/1994US5354381 Cold cathode discharging; very short high voltage ionization pulses; synchronously produced electron flow to neutralize positively charged wafer surfaces
10/11/1994US5354380 Apparatus for the insertion and removal of a mask through the airlock of a vacuum coating apparatus
10/11/1994CA1332379C Plastic security case for a gold coin, precious stone or other item, ensuring authenticity and unaffected quality of the coinage or of the production of the item
10/11/1994CA1332330C Surface treatment of polymers
10/11/1994CA1332327C Preparation of superconducting oxide films using a pre-oxygen nitrogen anneal
10/06/1994DE4410258A1 Optisches Schichtmaterial Optical layer material
10/06/1994DE4310409A1 Method and device for defined irradiation with a laser
10/06/1994DE4310318A1 Sensor material having a perovskite-like crystal structure and an enhanced magnetoresistive effect, and method for preparing the material
10/05/1994EP0618606A1 Apparatus for DC reactive plasma vapor deposition of an electrically insulating material using a shielded secondary anode
10/05/1994EP0618306A2 Sputtering target
10/05/1994EP0618305A1 Process and device for creating patterns on substrates
10/05/1994CN1093213A Method for producing diamond composite vibrating membrane
10/04/1994US5352493 Method for forming diamond-like nanocomposite or doped-diamond-like nanocomposite films
09/1994
09/29/1994WO1994021839A1 Apparatus and system for arc ion plating
09/29/1994WO1994021838A1 Gold-clad-silver-layer-containing films
09/29/1994WO1994021557A1 Conversion of fullerenes to diamond
09/29/1994DE4309717A1 Method for evaporation coating of a layer
09/28/1994EP0617147A2 Diamond crystal forming method
09/28/1994EP0617143A1 Method and apparatus for continuous coating of metallic material
09/28/1994EP0617141A1 Improved method for growing continuous diamond films
09/28/1994EP0616648A1 Method for preparing a target element for cathode sputtering
09/27/1994US5351142 Authenticated document
09/27/1994US5350738 Method of manufacturing an oxide superconductor film
09/27/1994US5350641 Solid state fuel cell and process for the production thereof
09/27/1994US5350607 Ionized cluster beam deposition of sapphire
09/27/1994US5350599 Erosion-resistant thermal barrier coating
09/27/1994US5350598 Vessels with vaporization separation, rotatable drums and seal means for vapor retention
09/27/1994US5350455 Device for holding disk-shaped substrates in the vacuum chamber of a coating or etching apparatus
09/27/1994US5349762 Vacuum processing apparatus and operating method therefor
09/22/1994DE4409199A1 Method and device for automatic cleaning of a vacuum metallisation container
09/22/1994DE4324755C1 Method for the production of fibre-reinforced drive components
09/22/1994DE4308632A1 Method and device for the post-treatment of aluminium-coated plastic films
09/22/1994DE4308146A1 Modified metal oxide layers as supports for active compounds and reagents
09/21/1994EP0616050A1 Process for increasing the durability of tools, and wear-resistant coated tool
09/21/1994EP0616046A1 Highly hard thin film and method for production thereof
09/21/1994EP0616045A1 Silicide targets for sputtering and method of manufacturing the same
09/21/1994EP0615966A1 Process for making ceramic fiber reinforced metal matrix composite articles
09/20/1994US5349467 Thorium-free coating for germanium IR window
09/20/1994US5349196 Ion implanting apparatus
09/20/1994US5348909 Manufacture of printhead with diamond resistors
09/20/1994US5348776 Method of producing interconnectors for solid oxide electrolyte fuel cells
09/20/1994US5348703 Vapor deposition apparatus and method
09/20/1994US5347887 Process for making a blade
09/15/1994WO1994021099A1 Process for manufacturing housings with at least one metallic shielding layer
09/15/1994WO1994020660A1 Knitting parts of knitting machine
09/15/1994DE4307182A1 Passivation layer for protecting function-supporting layers of components and method for its production
09/14/1994EP0615273A1 Method and apparatus for detection of sputtering target erosion
09/14/1994EP0615147A1 Low reset voltage process for DMD
09/14/1994EP0614997A1 High-power target and process for production of such a target
09/14/1994EP0614996A1 Anticorrosive lining
09/14/1994EP0614995A1 Mask for shielding the periphery of a disc-shaped substrate surface
09/14/1994CN1092114A Laser vaporing apparatus
09/13/1994US5347133 Powder agitator
09/13/1994US5346601 Sputter coating collimator with integral reactive gas distribution
09/13/1994US5346600 Carbides, nitrides
09/13/1994US5346554 Apparatus for forming a thin film
09/13/1994CA1331963C Process for coating synthetic optical substrates
09/13/1994CA1331951C Method for producing a superconducting circuit
09/07/1994EP0614212A1 A substrate carrier
09/07/1994EP0613962A1 Method for producing high gloss bright colored plastic articles
09/07/1994CN1091683A Oxide coated cutting tool
09/06/1994US5344796 Forming microcrystalline silicon seed layer over glass substrate, chemical vapor deposition of hydrogen-containing amorphous silicon layer over seed layer, heat treating upper layer; polycrystalline silicon seed layer may also be used
09/06/1994US5344718 For architectural use, high visible transmittance and infrared reflection, sputter coated
09/06/1994US5344500 Silicon film on graphite substrate, concave-convex surface
09/06/1994US5344243 Head wire and manufacturing process thereof
09/06/1994CA1331868C Process for depositing a superconducting thin film
09/06/1994CA1331867C Low emissivity film for high temperature processing
09/06/1994CA1331852C Process for preparing alloyed-zinc-plated titanium-killed steel sheet having excellent deep-drawability
09/01/1994WO1994019822A1 Laser controlled nanolithography
09/01/1994WO1994019675A1 Method of measuring the composition of a melt vapour under vacuum
09/01/1994WO1994019509A1 Film forming method and film forming apparatus
09/01/1994WO1994019508A1 System for sputtering compositions onto a substrate
09/01/1994WO1994019507A1 Method of stabilizing plasma generation by an electron-beam evaporator
09/01/1994WO1994019506A1 Vacuum-vapour-phase deposited barrier layer for the packaging industry and vaporized substance for producing the same
09/01/1994WO1994019201A1 Safety document and process for producing the same
09/01/1994WO1994019051A1 A spatially distributed sma actuator film
09/01/1994DE4305750A1 Device for retaining flat, circular disc-shaped substrates in the vacuum chamber of a deposition or etching system
09/01/1994DE4305748A1 Appliance for deposition onto, and/or etching of, substrates in a vacuum chamber
08/1994
08/31/1994EP0612860A1 Reactive ionized cluster beam deposition method and apparatus thereof
08/31/1994EP0612859A1 Low voltage arc evaporator with feed device and process for its use
08/31/1994EP0612855A2 A new compound with room temperature electrical resistivity comparable to that of elemental copper
08/31/1994EP0612358A1 Method and apparatus for sputter coating employing machine readable indicia carried by target assembly.
08/31/1994EP0612283A1 Aluminum with controlled oxidation
08/31/1994EP0612277A1 Methods for alloy migration sintering
08/30/1994US5343012 Differentially pumped temperature controller for low pressure thin film fabrication process
08/30/1994US5342828 Superconducting Tl-Pb-Sr-Ca-Cu-O thin film
08/30/1994US5342681 Absorbing, low reflecting coating for visible and infrared light