Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
02/1995
02/15/1995EP0638659A2 Sputter-coating target and method of use
02/14/1995US5390142 Memory material and method for its manufacture
02/14/1995US5389606 Process for producing thin films of inorganic oxides of controlled stoichiometry
02/14/1995US5389445 Ultrathin band pass filters and high z mirrors
02/14/1995US5389397 Forming interference filter on cathode ray tube; partially shielded substrates
02/14/1995CA2095346C Rechargeable lithiated thin film intercalation electrode battery
02/09/1995WO1995004167A1 High melting point metallic silicide target and method for producing the same, high melting point metallic silicide film and semiconductor device
02/09/1995WO1995003996A1 COMPOSITION AND METHOD FOR SYNTHESIS OF HIGH-TEMPERATURE HgBa-Ca-Cu-O (HBCCO) SUPERCONDUCTORS IN BULK AND THIN FILM
02/09/1995DE4326100A1 Verfahren und Vorrichtung zum Beschichten von Substraten in einer Vakuumkammer, mit einer Einrichtung zur Erkennung und Unterdrückung von unerwünschten Lichtbögen Method and device for coating substrates in a vacuum chamber, with a device for detection and suppression of unwanted arcs
02/08/1995EP0637834A1 Ion implanting apparatus and ion implanting method
02/08/1995EP0637400A1 Ultra-thin low moisture content polyester film and its applications.
02/08/1995EP0415916B1 Cataphoretic process for screening color cathode ray tubes
02/07/1995US5387247 Prosthetic device having a biocompatible carbon film thereon and a method of and apparatus for forming such device
02/07/1995US5386798 Method for continuous control of composition and doping of pulsed laser deposited films
02/02/1995WO1995003436A1 Stationary aperture plate for reactive sputter deposition
02/02/1995WO1995003435A2 Method of ion bombarding a zinc or zinc alloy coated steel sheet before painting thereof
02/02/1995DE4425796A1 Coated tool and its use
02/02/1995DE4325574A1 Bright, decorative aluminium component and process for its manufacture
02/02/1995DE4325108A1 Process for producing ultrafine oxidic particles
02/02/1995CA2164975A1 Stationary aperture plate for reactive sputter deposition
02/01/1995EP0637088A1 Anisotropic superconductor device, method of producing the device and fluxon using same
02/01/1995EP0637087A1 Layered structure comprising insulator thin film and oxide superconductor thin film
02/01/1995EP0637059A2 Direct MOMBE and MOVPE growth of II-VI materials on silicon
02/01/1995EP0637052A1 Method for producing a stream of ionic aluminum
02/01/1995EP0636709A1 Process for treating the surface of metallic parts
02/01/1995EP0636703A1 Method for deposition of a layer on a substrate-disk using sputtering procedure
02/01/1995EP0636702A1 Methods for producing functional films
02/01/1995EP0636589A1 Sources for deposition of silicon oxide
02/01/1995EP0636587A2 Process for making a glass pane coated with a multilayer
02/01/1995EP0636585A2 Die for press-molding optical elements and methods of manufacturing and using the same
02/01/1995EP0636285A1 Stabilizer for switch-mode powered rf plasma processing.
02/01/1995EP0636053A1 Process for making thin polymer film by pulsed laser evaporation.
01/1995
01/31/1995US5385638 Method of manufacturing a stamper
01/31/1995CA1334155C Process for restoring locally damaged parts, particularly anticathodes
01/26/1995WO1995002896A1 Method for manufacturing semiconductor
01/26/1995WO1995002893A1 Control of the properties of a film deposited on a semiconductor wafer
01/26/1995WO1995002709A2 EXTENDED NITRIDE MATERIAL COMPRISING β-C3N¿4?
01/26/1995DE4421144A1 Coated tool with prolonged service life
01/26/1995DE4343040C1 Barrier film
01/26/1995CA2166423A1 Control of the properties of a film deposited on a semiconductor wafer
01/25/1995EP0635873A1 Processing system and device manufacturing method using the same
01/25/1995EP0635760A1 Process for making microstructures
01/25/1995EP0635582A1 Article having a decorative metal layer
01/25/1995CN1097815A Solar energy selective absorption splash coating and its process
01/24/1995US5384201 Tool for treating surfaces of structural parts and carrier material for the same
01/24/1995US5384161 System for making bright aluminum parts
01/24/1995US5384021 Sputtering apparatus
01/24/1995US5383969 Process and apparatus for supplying zinc vapor continuously to a chemical vapor deposition process from a continuous supply of solid zinc
01/24/1995US5383934 Method for ion beam treating orthopaedic implant components
01/24/1995US5383512 Method for fabricating a substrate having spaced apart microcapillaries thereon
01/19/1995WO1995002078A1 Diamond coated body
01/18/1995EP0634782A1 Method and apparatus for adjustment of spacing between wafer and PVD target during semiconductor processing
01/18/1995EP0634779A1 Collimation chamber with rotatable pedestal
01/18/1995EP0634626A2 Multilayer film forming apparatus and film forming method
01/18/1995EP0634500A1 Planar magnetron sputtering apparatus
01/18/1995EP0634499A1 Mosaic target
01/18/1995EP0634498A1 Etched sputtering target and process
01/18/1995EP0634376A1 Process for treating a thin oxide layer
01/17/1995US5382542 Method of growth of II-VI materials on silicon using As passivation
01/17/1995US5382471 Adherent metal coating for aluminum nitride surfaces
01/17/1995US5382457 Forming zinc oxide thin films
01/17/1995US5382345 Apparatus for simultaneously coating a film of magneto-optical recording medium on a plurality of disk substrates
01/17/1995US5382344 Sputtering apparatus
01/17/1995US5382342 Sputtering-slicing process for fabricating optics
01/17/1995US5382341 Heat treated bismuth oxide film on dielectric substrate, variation in electrical resistance with smoke concentration
01/17/1995US5382340 Measurement, adjustment during deposition
01/17/1995US5382339 Shield and collimator pasting deposition chamber with a side pocket for pasting the bottom of the collimator
01/17/1995US5382274 Optical element
01/17/1995US5382126 Multichamber coating apparatus
01/17/1995EP0646277A4 Giant magnetoresistant single film alloys.
01/14/1995CA2125532A1 Planar magnetron sputtering apparatus
01/12/1995WO1995001463A1 Deposition film, method of measuring shape of deposition film, method of controlling manufacturing processes, manufacturing method, shape measuring apparatus and apparatus for controlling manufacturing processes
01/12/1995WO1994025863A3 Process for depositing a large-surface layer through a mask and optional closure of said mask
01/12/1995DE4321817A1 Process for producing a layer system having at least one layer of a metal-oxidic superconducting material
01/11/1995EP0633600A1 Method and apparatus for forming thin films
01/11/1995EP0633599A1 Thin-film forming apparatus
01/11/1995EP0633331A1 Process for preparing high crystallinity oxide thin film
01/11/1995EP0633328A1 Method for depositing conductive metal traces on diamond
01/11/1995EP0632929A1 Producing magnetic fields in working gaps useful for irradiating a surface with atomic and molecular ions
01/11/1995EP0632849A1 Abrasion-resistant overcoat for coated substrates
01/11/1995EP0632848A1 Process for pretreating the surfaces of plastic components and plastic component pretreated by this process
01/11/1995EP0632847A1 Process for coating a substrate with a material giving a polished effect.
01/11/1995EP0632846A1 Arrangement for vacuum coating bulk goods.
01/11/1995CN2187177Y Plasma ion plating film device
01/11/1995CN1097223A Surface-treatment method for material by use of impulse high energy-density plasma
01/11/1995CN1097222A Method for resistance heating of metal using a pyrolytic boron nitride coated graphite boat
01/10/1995US5380595 Carbon cluster film having electrical conductivity and method of preparing the same
01/10/1995US5380558 Method of manufacturing shaped body having straight stripes
01/10/1995US5380421 Vacuum-arc plasma source
01/10/1995US5380420 Arc ion plating system
01/10/1995US5380419 Cathode-sputtering apparatus comprising a device for measuring critical target consumption
01/10/1995US5380415 Vacuum vapor deposition
01/10/1995US5380414 Noncracking
01/10/1995US5379984 Gate valve for vacuum processing system
01/05/1995WO1995000677A1 Sputtering device
01/05/1995WO1995000676A1 Ultrasonic enhancement of aluminum step coverage and apparatus
01/05/1995DE4421517A1 Method for removing or depositing material by means of a particle beam and device for carrying out the method
01/05/1995DE4321135A1 Method for depositing a superconducting thin film
01/05/1995CA2162596A1 Ultrasonic enhancement of aluminum step coverage and apparatus
01/04/1995EP0632144A2 Method of purging and pumping vacuum chamber to ultra-high vacuum