| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 10/12/2004 | US6803098 Synthetic resin molded material and method for its production |
| 10/12/2004 | US6803075 Method employing plurality of particles and pressure differentials to deposit film |
| 10/12/2004 | US6803071 Paraelectric thin film semiconductor material and method for producing the same |
| 10/12/2004 | US6802991 Method for preparing a CsX photostimulable phosphor and phosphor screens therefrom |
| 10/12/2004 | US6802949 Method for manufacturing half-metallic magnetic oxide and plasma sputtering apparatus used in the same |
| 10/12/2004 | US6802945 Method of metal sputtering for integrated circuit metal routing |
| 10/12/2004 | US6802942 Storage plate support for receiving disk-shaped storage plates |
| 10/12/2004 | US6802457 Coatings for use in fuel system components |
| 10/07/2004 | WO2004086476A1 Equipment and method for manufacturing semiconductor device |
| 10/07/2004 | WO2004086419A1 Method for forming ferroelectric thin film |
| 10/07/2004 | WO2004085902A1 Universal vacuum coupling for cylindrical target |
| 10/07/2004 | WO2004085699A2 Contacting of an electrode with a device in vacuum |
| 10/07/2004 | WO2004085498A1 Method of forming thin film |
| 10/07/2004 | WO2004085312A1 Silicon sintered compact and method for producing same |
| 10/07/2004 | WO2004061159A3 Multi-layer coating which is used to protect parts against corrosion, method of producing one such coating and part comprising same |
| 10/07/2004 | US20040199337 Method and apparatus for non-destructive target cleanliness characterization by types of flaws sorted by size and location |
| 10/07/2004 | US20040198153 Wafer support system |
| 10/07/2004 | US20040197943 Nanosilicon light-emitting element and manufacturing method thereof |
| 10/07/2004 | US20040197939 Method and apparatus for sub-micron device fabrication |
| 10/07/2004 | US20040197937 Method of manufacturing ferroelectric substance thin film and ferroelectric memory using the ferroelectric substance thin film |
| 10/07/2004 | US20040197679 For use in the microfabrication of semiconductor integrated circuits |
| 10/07/2004 | US20040197581 Surface hardened stainless steel with improved wear resistance and low static friction properties |
| 10/07/2004 | US20040197537 Barium cadmium tantalum-based compound having high dielectric properties and method of making the same |
| 10/07/2004 | US20040197489 forming a first ceramic barrier layer on a substrate; modifying the surface of the first layer to introduce nucleation sites; and forming a second ceramic barrier layer on the first layer initiated at the nucleation sites; useful for packaging OLEDs |
| 10/07/2004 | US20040197476 Process for producing aluminum oxide films at low temperatures |
| 10/07/2004 | US20040197473 Method of applying adhesive |
| 10/07/2004 | US20040197471 Method of coating the interior surface of hollow objects |
| 10/07/2004 | US20040196985 Electronic apparatus having a detachable speaker unit |
| 10/07/2004 | US20040195960 Coatings with low permeation of gases and vapors |
| 10/07/2004 | US20040195606 Semiconductor manufacturing process and apparatus for modifying in-film stress of thin films, and product formed thereby |
| 10/07/2004 | US20040195524 Ion doping apparatus, and multi-apertured electrode for the same |
| 10/07/2004 | US20040195094 used as a high dielectric gate insulation film, superior in embrittlement resistance, having a low generation of particles, and which is not likely to cause ignition of sintering powder or explosion of powder dust during the manufacturing process |
| 10/07/2004 | US20040194988 EMI-shielding assembly and method for making same |
| 10/07/2004 | US20040194942 Cooling plate and manufacturing method thereof, and sputtering target and manufacturing method thereof thereof |
| 10/07/2004 | US20040194885 Degas chamber particle shield |
| 10/07/2004 | US20040194702 Thin film-forming apparatus |
| 10/07/2004 | US20040194696 Coating device and method |
| 10/07/2004 | US20040194268 Rapid cycle chamber having a top vent with nitrogen purge |
| 10/07/2004 | DE10312593A1 An in-situ process for film optimization by ITO (In-Sn oxide) separation useful in optico-electronic applications |
| 10/06/2004 | EP1465208A2 Radiographic image conversion panel and method for its production |
| 10/06/2004 | EP1464723A2 Thermal barrier coating having nano scale features |
| 10/06/2004 | EP1464721A2 Thermal barrier coating system |
| 10/06/2004 | EP1464714A1 Alloys and reflective layer and their use |
| 10/06/2004 | EP1463845A1 Production of a ceramic material for a heat-insulating layer and heat-insulating layer containing said material |
| 10/06/2004 | EP1252670B1 Amorphous electrode compositions |
| 10/06/2004 | EP1115897B1 Method for improving the corrosion protection of permanent magnets containing rare earth metals |
| 10/06/2004 | EP1109641A4 Method and apparatus for producing material vapour |
| 10/06/2004 | CN1535327A Sputtering device |
| 10/06/2004 | CN1535326A Methods of forming titanium-based and zirconium-based mixed-metal materials and sputtering targets |
| 10/06/2004 | CN1535322A Refractory metal plates with uniform texture and methods of making same |
| 10/06/2004 | CN1535203A Depositon film |
| 10/06/2004 | CN1535110A Manufacturing method of antielectromagnetic interference shielding cover |
| 10/06/2004 | CN1535082A Sedimented mask frame component element and its manufacturing method organic electroluminous device manufacturing method |
| 10/06/2004 | CN1534749A Semiconductor device having epitaxial C49 titanium silicide (TiSi2)layer and its manufacturing method |
| 10/06/2004 | CN1534383A Deposited mask of display device and its manufacturing method |
| 10/06/2004 | CN1534110A 溅射靶材 Sputtering Targets |
| 10/06/2004 | CN1534109A Multicolour filming process of one piece filter and coloured rotary wheel set fitted with said filter |
| 10/06/2004 | CN1533881A Stacked body and capacitor |
| 10/06/2004 | CN1170001C Drive mechanism for vacuum device and vacuum device |
| 10/06/2004 | CN1170000C Plasma Intensified non-balance magnetically controlled sputter method |
| 10/06/2004 | CN1169999C Coating for selective absorption of sunlight spectrum |
| 10/06/2004 | CN1169998C Magnet device with high target utilization ratio used for sputtering target with conical butt |
| 10/05/2004 | US6800862 Ion implanting apparatus and ion implanting method |
| 10/05/2004 | US6800573 Water-vapor-permeable, watertight, and heat-reflecting flat composite, process for its manufacture, and use thereof |
| 10/05/2004 | US6800565 Method of forming thin oxidation layer by cluster ion beam |
| 10/05/2004 | US6800504 Integrated circuit device and fabrication using metal-doped chalcogenide materials |
| 10/05/2004 | US6800183 Sputtering device |
| 10/05/2004 | US6800182 Sputtering target, process for its production and film forming method |
| 10/05/2004 | US6800180 Resputtering to achieve better step coverage |
| 10/05/2004 | US6800179 Sputtering metal so the target is oxidation graded with top and bottom portions which are more oxidized than a central portion; |
| 10/05/2004 | US6800177 Apparatus and method for fabricating carbon thin film |
| 10/05/2004 | US6800135 ZnO/sapphire substrate and method for manufacturing the same |
| 10/05/2004 | US6799531 Method for making films utilizing a pulsed laser for ion injection and deposition |
| 10/05/2004 | US6799394 Apparatus for sealing a vacuum chamber |
| 09/30/2004 | WO2004083482A1 Copper alloy sputtering target process for producing the same and semiconductor element wiring |
| 09/30/2004 | WO2004083481A1 Method of preparing quaternary compositional ratio gradient film, method of preparing binary compositional ratio/thickness gradient film employed therein and method of sampling compositional ratio of multiple composition substance |
| 09/30/2004 | WO2004083337A1 Diamond particle for sintering tool and manufacturing method thereof and sintering tool using the same |
| 09/30/2004 | WO2004065046A3 Brittle material sputtering target assembly and method of making same |
| 09/30/2004 | WO2004031435A3 High-power pulsed magnetron sputtering |
| 09/30/2004 | US20040192560 High temperature superconducting composite conductors |
| 09/30/2004 | US20040191952 Method of manufacturing high-mobility organic thin films using organic vapor phase deposition |
| 09/30/2004 | US20040191651 Sputtering; continuous forming thin films on transparent substrate; forming pattern by sputtering |
| 09/30/2004 | US20040191646 Sputtering layers of phase shifting mask on substrates; concurrent discharging various targets; reducing defects |
| 09/30/2004 | US20040191556 Shape memory device having two-way cyclical shape memory effect due to compositional gradient and method of manufacture |
| 09/30/2004 | US20040191544 Thermal barrier coating system |
| 09/30/2004 | US20040191530 a mixed oxide with indium, zinc, and a third transition metal with a valence of four or more; sputtering target has low volume resistivity; film has little etch resistance; thin film liquid crystal displays |
| 09/30/2004 | US20040191488 Component, method for coating a component, and powder |
| 09/30/2004 | US20040191462 Optical recording medium, method for manufacturing the same and target used for sputtering process |
| 09/30/2004 | US20040191426 chemical vapor deposition by introducing oxygen radicals and organic raw material gases containing metals element into vacuum containers having silicon, to form dielectric layers; semiconductors |
| 09/30/2004 | US20040191407 Method for forming thin film and apparatus therefor |
| 09/30/2004 | US20040191153 Lubricity and wear resistance of metal sliding members in devices using water as working fluid |
| 09/30/2004 | US20040190435 Optical recording medium, method for manufacturing the same and target used for sputtering process |
| 09/30/2004 | US20040190104 Application of multi-layer antistatic/antireflective coating to video display screen by sputtering |
| 09/30/2004 | US20040189751 Piezoelectric body, manufacturing method thereof, piezoelectric element having the piezoelectric body, inject head, and inject type recording device |
| 09/30/2004 | US20040188691 Substrate for semiconductor light-emitting element, semiconductor light-emitting element and semiconductor light-emitting element fabrication method |
| 09/30/2004 | US20040188633 Method for manufacturing radiographic image conversion panel and radiographic image conversion panel produced by the method |
| 09/30/2004 | US20040188249 Mechanically alloyed precious metal magnetic sputtering targets fabricated using rapidly solidified alloy powders and elemental Pt metal |
| 09/30/2004 | US20040188243 Apparatus for enhancing the lifetime of stencil masks |
| 09/30/2004 | US20040188242 Method of manufacturing electromagnetic interference shield |
| 09/30/2004 | US20040188241 Using aluminum and nitrogen; sputtering; crystal molecular orientation |