| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 11/25/2004 | DE10320183A1 Wear and fracture resistant seal sliding ring manufacturing method involves coating composite ring with resin, application of an energy beam to carbonize resin and application of vaporized metal powder |
| 11/25/2004 | CA2525715A1 Process for the preparation of a composite material |
| 11/25/2004 | CA2524733A1 Coated article with niobium zirconium inclusive layer(s) and method of making same |
| 11/24/2004 | EP1480209A1 Sputtering target for phase-change memory, film for phase change memory formed by using the target, and method for producing the target |
| 11/24/2004 | EP1479789A1 Sealing lock for an in-line vaccum deposition apparatus |
| 11/24/2004 | EP1479513A1 Gas barrier material |
| 11/24/2004 | EP1479435A1 Screening of organometallic materials for catalysis |
| 11/24/2004 | EP1479090A2 Channel spark source for generating a stable, focussed electron beam |
| 11/24/2004 | EP1436441A4 Method and apparatus application of metallic alloy coatings |
| 11/24/2004 | EP1392879B1 Electric arc evaporator |
| 11/24/2004 | EP1230429B8 Method for producing a component with layer |
| 11/24/2004 | CN2658163Y Vacuum silvered machine |
| 11/24/2004 | CN1550031A Shielding system for plasma chamber |
| 11/24/2004 | CN1549935A Optical coatings and associated methods |
| 11/24/2004 | CN1548576A Instantaneously switch controlled vacuum unit for gaseous beam source furnace |
| 11/24/2004 | CN1548575A Sputtering apparatus and metal layer/metal compound layer making process therewith |
| 11/24/2004 | CN1548574A Sputtering apparatus capable of changing distance between substrate and deposition preventing plate used for film formation |
| 11/24/2004 | CN1548573A Method of introducing helium into metal material |
| 11/24/2004 | CN1177080C Getter system for purifying work atmosphere in processes of physical vapor deposition |
| 11/24/2004 | CN1177079C In site getter pump system and method |
| 11/24/2004 | CN1177078C Methodfor preparing nano membrane device |
| 11/23/2004 | US6822277 Semiconductor device and method for manufacturing the same |
| 11/23/2004 | US6822189 Directing irradiation having energy fluence above ablation threshold of target; detecting and analyzing irradiation reflected and scattered |
| 11/23/2004 | US6822158 Thin-film solar cell and manufacture method therefor |
| 11/23/2004 | US6821912 Substrate processing pallet and related substrate processing method and machine |
| 11/23/2004 | US6821797 Semiconductor device and its manufacturing method |
| 11/23/2004 | US6821655 For a transparent electrode in a solar battery, display device such as liquid crystal display and the like |
| 11/23/2004 | US6821641 Article protected by thermal barrier coating having a sintering inhibitor, and its fabrication |
| 11/23/2004 | US6821624 Amorphous carbon covered member |
| 11/23/2004 | US6821578 Bonding ceramic layer onto nickel or cobalt alloy using nitride |
| 11/23/2004 | US6821564 Process for masking turbine components during vapor phase diffusion coating |
| 11/23/2004 | US6821562 Method of forming an electrically insulating sealing structure for use in a semiconductor manufacturing apparatus |
| 11/23/2004 | US6821561 Providing a shadow mask material; forming a shadow mask from the shadow mask material; using the shadow mask to deposit a thin film material on the substrate using the thin film deposition |
| 11/23/2004 | US6821560 Surface-treating support member and method using the same |
| 11/23/2004 | US6821399 Cathode mounting system for cathodic arc cathodes |
| 11/23/2004 | US6821397 Target for magnetron sputtering; generating, controlling magnetism; circulating tunnel loop |
| 11/23/2004 | US6821377 Plasma processing apparatus |
| 11/23/2004 | US6821350 Solution of hydrogen fluoride and nitric acid; then inert gas flow |
| 11/23/2004 | US6821348 Aperture mask patterns; elongated web of flexible film; integrated circuits |
| 11/23/2004 | CA2217822C Structures having enhanced biaxial texture and method of fabricating same |
| 11/23/2004 | CA2171539C Laminated metal structure |
| 11/18/2004 | WO2004100231A2 Oblique ion milling of via metallization |
| 11/18/2004 | WO2004099864A2 Electro-optical transducer |
| 11/18/2004 | WO2004099461A2 Method of forming compressive alpha-tantalum on substrates and devices including same |
| 11/18/2004 | WO2004099460A2 Method for producing galvanically enhanced moulded elements optionally lighted by transparency,made of thermoplastic,thermosetting plastic,elastomer or silicone, as well as moulded elements optionally lighted by transparency made of thermoplastic,thermosetting plastic,elastomer or silicone with galvanically enhanced surface |
| 11/18/2004 | WO2004099458A2 METHODS FOR MAKING LOW SILICON CONTENT Ni-Si SPUTTERING TARGETS AND TARGETS MADE THEREBY |
| 11/18/2004 | WO2004055231A3 Composite sputter target and phosphor deposition method |
| 11/18/2004 | WO2004033742A3 Pvd target and method of treating target |
| 11/18/2004 | US20040230301 Bioactive device having surface with alloyed layer of calcium phosphate compounds and method of making |
| 11/18/2004 | US20040229477 Apparatus and method for producing a <111> orientation aluminum film for an integrated circuit device |
| 11/18/2004 | US20040229458 Method and structure of a thick metal layer using multiple deposition chambers |
| 11/18/2004 | US20040229449 Method of depositing metal film and metal deposition cluster tool including supercritical drying/cleaning module |
| 11/18/2004 | US20040229386 Controlled fabrication of gaps in electrically conducting structures |
| 11/18/2004 | US20040229074 Coated article with low-E coating including IR reflecting layer (S) and corresponding method |
| 11/18/2004 | US20040229073 Coated article with low-E coating including IR reflecting layer(s) and corresponding method |
| 11/18/2004 | US20040229056 polymerized and hardening layermade from diethylene glycol bis (allyl carbonate) is overlaid on said metallic deposition filmy layer so as to protect the surface of said filmy layer |
| 11/18/2004 | US20040229051 comprising a moisture and oxygen barrier, a chemically resistant layer, and a transparent conductive coating |
| 11/18/2004 | US20040228968 Varying subpressure during the feeding of barium, strontium, titanium and oxygen to vary concentrations and therefore the stoichiometry of the barium strontium titanium oxide deposited; three-dimensional cell capacitors (trench/stack) |
| 11/18/2004 | US20040227885 ITO film-formed substrate, and manufacturing method thereof |
| 11/18/2004 | US20040227113 Radiation image storage panel |
| 11/18/2004 | US20040227085 Film forming device, and production method for optical member |
| 11/18/2004 | US20040226818 Ag-Bi-base alloy sputtering target, and method for producing the same |
| 11/18/2004 | US20040226516 Wafer pedestal cover |
| 11/18/2004 | US20040226509 Film deposition method and film deposition system for depositing a halogen compound film, and magnesium fluroide film |
| 11/18/2004 | DE19724847B4 Liderungssystem für Artilleriewaffen Liderungssystem for artillery |
| 11/18/2004 | DE10319742A1 Pulverisierte organische Halbleiter und Verfahren zum Aufdampfen auf einen Träger Powdered organic semiconductor and method for vapor deposition on a substrate |
| 11/18/2004 | DE10318363A1 Process for the plasma-activated high rate vaporization of a large surface substrate in a vacuum comprises producing a magnetic field diverging in the direction of the substrate, and further processing |
| 11/17/2004 | EP1477580A2 Deposition method using multiple deposition chambers |
| 11/17/2004 | EP1476900A2 Oxide layer on a gaas-based semiconductor structure and method of forming the same |
| 11/17/2004 | EP1476891A1 Sputtering cathode and device and method for coating a substrate with several layers |
| 11/17/2004 | EP1476632A2 Device for reflecting electromagnetic waves, particularly light and heat radiation to a regulable extent, and method for the metallization of a film with a density varying with longitudinal position according to a given function |
| 11/17/2004 | EP1476587A1 Piston ring comprising a pvd coating |
| 11/17/2004 | EP1476508A2 Method of producing plane-parallel structures of silicon suboxide, silicon dioxide and/or silicon carbide, plane-parallel structures obtainable by such methods, and the use thereof |
| 11/17/2004 | EP1331283B1 Tantalum or tungsten target-copper alloy backing plate assembly and production method therefor |
| 11/17/2004 | EP1131474B1 Electron beam physical vapor deposition apparatus with ingot magazine |
| 11/17/2004 | CN2656432Y Rotary type magnetic controlled sputtering target |
| 11/17/2004 | CN1547623A Physical vapor deposition targets and methods of formation |
| 11/17/2004 | CN1547622A Silicon monoxide vapor deposition material and method for preparation thereof |
| 11/17/2004 | CN1547239A Method for preparing selenide or sulfide semiconductor film material of copper-indium-gallium |
| 11/17/2004 | CN1547222A Manganese doped silicon base magnetic semiconductor film material and making method |
| 11/17/2004 | CN1546747A Preparation of BaB2O4 single crystal thin film by pulsed laser deposition method |
| 11/17/2004 | CN1546722A Flexible low radiation window film and real time control method for producing the same |
| 11/17/2004 | CN1546721A Flexible linear mask device for vacuum plating |
| 11/17/2004 | CN1546719A Novel heat barrier coating material |
| 11/16/2004 | US6819349 Mark forming method and product using the same method |
| 11/16/2004 | US6818918 Josephson junctions with a continually graded barrier |
| 11/16/2004 | US6818356 Thin film battery and electrolyte therefor |
| 11/16/2004 | US6818321 A substrate of nickel-based single crystal alloy or a nickel-based unidirectional solidified alloy and a coating of an alloy of boron sprayed or vapor deposited on the surface; gas turbine blades; jet engines; shields |
| 11/16/2004 | US6818257 Method of providing a material processing ion beam |
| 11/16/2004 | US6818119 Electrolysis and ion exchange followed by melting to produce pure metals |
| 11/16/2004 | US6818108 Chamber for the transport of workpieces in a vacuum atmosphere, a chamber combination and a method for transporting a workpiece |
| 11/16/2004 | US6818103 Electrical circuit including center tapped transformer; applying controllable potential without additional power supply; continuous discharging through alternate ion and electron bombardment |
| 11/16/2004 | US6817712 Metallic vapor deposition lens provided with a protection coat and a method of producing the same |
| 11/16/2004 | CA2279806C Non-linear optical silica thin film manufacturing method and non-linear optical silica element |
| 11/11/2004 | WO2004097955A1 Pulverized organic semiconductors and method for vapor phase deposition onto a support |
| 11/11/2004 | WO2004097909A2 Method and apparatus for deep trench silicon etch |
| 11/11/2004 | WO2004097401A1 Systems and methods for non-contact measuring sputtering target thickness ultrasoniics |
| 11/11/2004 | WO2004097064A2 Methods and devices for reduction of tension in thin layers |
| 11/11/2004 | WO2004097063A2 Method for producing silicon oxide film and method for producing optical multilayer film |
| 11/11/2004 | WO2004097062A1 Alumina protective coating film and method for formation thereof |