Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
11/2005
11/24/2005WO2005111180A1 Assembly of mutually co-operating machine parts, lubricated with biologically decomposable lubricant
11/24/2005WO2005110698A2 Coating with hard wear and non-stick characteristics
11/24/2005WO2005110599A1 Photocatalytic laminated film
11/24/2005WO2005091329A3 Sputtering device for manufacturing thin films
11/24/2005WO2005073427A3 Method for the production of an ultra barrier layer system
11/24/2005WO2005071131A3 Transparent and conductive oxide layer, production and use thereof in a thin film solar cell
11/24/2005WO2005068680A3 Melting and vaporizing apparatus and method
11/24/2005US20050260837 Methods for stable and repeatable ion implantation
11/24/2005US20050260824 Semiconductor device manufacturing method and manufacturing line thereof
11/24/2005US20050260505 Preparation of photomask blank and photomask
11/24/2005US20050260332 Formation of combinatorial arrays of materials using solution-based methodologies
11/24/2005US20050258753 Plasma display panel, method for producing same and material for protective layer of such plasma display panel
11/24/2005US20050258541 Semiconductor device and manufacturing method thereof
11/24/2005US20050258377 Radiation image conversion panel
11/24/2005US20050258164 Hot plate
11/24/2005US20050258033 Sputtering target
11/24/2005US20050258030 Effects of methods of manufacturing sputtering targets on characteristics of coatings
11/24/2005US20050258029 Coated article with oxidation graded layer proximate IR reflecting layer(s) and corresponding method
11/24/2005US20050258028 Thin-film coating for wheel rims
11/24/2005US20050258027 Back-biased face target sputtering based programmable logic device
11/24/2005US20050257746 Clamp member, film deposition apparatus, film deposition method, and semiconductor device manufacturing method
11/24/2005US20050257745 Film formation source, vacuum film formation apparatus, method of manufacturing organic EL device, and organic EL device
11/24/2005US20050257744 Apparatus for directing plasma flow to coat internal passageways
11/24/2005DE19651592B4 Beschichtetes Schneidwerkzeug The coated cutting tool
11/24/2005DE102005019456A1 Target used in sputtering processes comprises a slanted surface formed around the body of the target in a region in which a sputtering surface and a peripheral surface of the body of the target cross each other
11/24/2005DE102004041855A1 Vorrichtung und Verfahren zur kontinuierlichen thermischen Vakuumbeschichtung Apparatus and method for continuous thermal vacuum coating
11/24/2005DE102004041854A1 Verfahren und Vorrichtung zur thermischen Vakuumbeschichtung Method and device for the thermal vacuum coating
11/24/2005DE102004041846A1 Verdampfungseinrichtung und Verfahren zum Verdampfen von Beschichtungsmaterial Evaporation device and method for vaporizing coating material
11/24/2005DE102004019061A1 Selectiver Absorber zur Umwandlung von Sonnenlicht in Wärme, ein Verfahren und eine Vorrichtung zu dessen Herstellung Selectiver absorber for the conversion of sunlight into heat, a method and apparatus for its production
11/24/2005DE102004019060A1 Vorrichtung zum Einbringen von abschmelzenden Elektroden für Lichtbogenverdampfungsvorrichtungen in eine Beschichtungskammer für große Substrate oder Bänder A device for introducing consumable electrodes for arc evaporation devices in a coating chamber for large substrates or tapes
11/23/2005EP1598844A1 Alkali metal generating agent, alkali metal generator, photoelectric surface, secondary electron emission surface, electron tube, method for manufacturing photoelectric surface, method for manufacturing secondary electron emission surface, and method for manufacturing electron tube
11/23/2005EP1598818A1 Optical recording medium, manufacturing method of the same, and sputtering target
11/23/2005EP1598660A1 Measuring device for measuring the optical characteristics of coated substrates
11/23/2005EP1598441A1 Amorphous carbon film, process for producing the same and amorphous carbon film-coated material
11/23/2005EP1597939A1 Heavy-duty, resistant, flexible heating foil
11/23/2005EP1597568A2 Method of and apparatus for measurement and control of a gas cluster ion beam
11/23/2005EP1597408A2 Dielectric barrier layer films
11/23/2005EP1597407A1 Process and apparatus for the manufacture of a sputtering target
11/23/2005EP1597406A2 Foodware with multilayer stick resistant ceramic coating and method of making
11/23/2005EP1597212A1 Vaporizing material for producing highly refractive optical layers
11/23/2005EP1597068A1 Heat treatable coated article with niobium chromium nitride ir reflecting layer and method of making same
11/23/2005EP1597066A2 Heat treatable coated article with chromium nitride ir reflecting layer and method of making same
11/23/2005EP1383939B1 Use of perfluoroketones as vapor reactor cleaning, etching, and doping gases
11/23/2005EP1218689B1 Method and apparatus for in-situ monitoring of plasma etch and deposition processes using a pulsed broadband light source
11/23/2005CN1701406A Alkali metal generating agent, alkali metal generator, photoelectric surface, secondary electron emission surface, electron tube, method for manufacturing photoelectric surface, method for manufacturi
11/23/2005CN1701131A Film-forming apparatus and film-forming method
11/23/2005CN1700321A One time write optical recording media
11/23/2005CN1699964A Measuring device for measuring the optical characteristics of coated substrates
11/23/2005CN1699619A Film formation source, vacuum film formation apparatus, method of manufacturing organic EL device, and organic EL device
11/23/2005CN1699262A Target for transparent electroconductive film, transparent electroconductive material, transparent electroconductive glass and transparent electroconductive film
11/23/2005CN1228810C Method and apparatus for physical vapor phase deposit
11/23/2005CN1228657C Film wave-filter for optical multiplying device/demultiplying device and manufacturing method thereof
11/23/2005CN1228466C Multihead ion film-plating method for ceramic product
11/23/2005CN1228266C Magnetic control sputtering hot-bending coated glass and its production method
11/22/2005US6967771 Antireflection coating for ultraviolet light at large angles of incidence
11/22/2005US6967334 Ion source and ion beam device
11/22/2005US6967163 Metal film and manufacturing method therefor, and laminated ceramic electronic component and manufacturing method therefor
11/22/2005US6967060 layer of metallic, oxide and/or nitride of NbZr; silver infrared reflecting layer; insulating glass window units, laminated windows, architectural or residential monolithic window units, vehicle window units
11/22/2005US6966952 Apparatus of depositing thin film with high uniformity
11/22/2005CA2184738C Ion beam process for deposition of highly abrasion-resistant coatings
11/22/2005CA2184736C Highly abrasion-resistant, flexible coatings for soft substrates
11/17/2005WO2005109963A1 Deposition apparatus for temperature sensitive materials
11/17/2005WO2005109472A2 Mobile pvd/cvd coating center
11/17/2005WO2005109466A1 Method for depositing carbide coatings of high-fusion metals
11/17/2005WO2005109449A1 Conductive film for touch panel and method for producing conductive film for touch panel
11/17/2005WO2005108646A2 Rotary target locking ring assembly
11/17/2005WO2005108640A1 Method and apparatus for forming combinatorial film
11/17/2005WO2005108639A1 Sputter targets and methods of forming same by rotary axial forging
11/17/2005WO2005108638A1 Substrate dome
11/17/2005WO2005108637A1 Reinforcing structure of vacuum tank for preventing deformation
11/17/2005WO2005108064A2 Coating stack comprising a layer of barrier coating
11/17/2005WO2005107392A2 System for vaporizing materials onto substrate surface
11/17/2005WO2005071133A3 Vacuum deposition method and sealed-type evaporation source apparatus for vacuum deposition
11/17/2005WO2005061404A3 Scratch resistant coated glass article resistant to fluoride-based etchant(s)
11/17/2005WO2005024518A3 Phase shift mask blank with increased uniformity
11/17/2005WO2004103693A3 Floor tile coating method and system
11/17/2005WO2004102610A3 Generation of uniformly-distributed plasma
11/17/2005US20050256011 System and method for quality testing of superconducting tape
11/17/2005US20050255700 Controlled multi-step magnetron sputtering process
11/17/2005US20050255691 Self-ionized and inductively-coupled plasma for sputtering and resputtering
11/17/2005US20050255370 Vapor deposited catalysts and their use in fuel cells
11/17/2005US20050255329 Superalloy article having corrosion resistant coating thereon
11/17/2005US20050255313 Carbon nanotube composite material, magnetic material and production thereof
11/17/2005US20050255242 Apparatus and method for high rate uniform coating, including non-line of sight
11/17/2005US20050254410 Optical recording medium, manufacturing method of the same, and sputtering target
11/17/2005US20050254155 ND filter and aperture diaphragm apparatus
11/17/2005US20050253285 Supporting unit for semiconductor manufacturing device and semiconductor manufacturing device with supporting unit installed
11/17/2005US20050252768 Coater with a large-area assembly of rotatable magnetrons
11/17/2005US20050252767 Sputtering device
11/17/2005US20050252766 Cathode apparatus to selectively bias pallet during sputtering
11/17/2005US20050252765 Method and apparatus for forming a barrier layer on a substrate
11/17/2005US20050252763 increased sputtering yield increases the deposition rate; without an occurrence of arcing between the anode and the cathode assembly; increase density of ions in the strongly ionized plasma
11/17/2005US20050252584 Sputtering target, Al wiring film and electronic component
11/17/2005US20050252268 High integrity sputtering target material and method for producing bulk quantities of same
11/17/2005US20050252242 Fusion cast articles and methods of manufacture
11/17/2005US20050251980 Method for manufacturing dielectric ceramic layer and internal polar layer of multiple layer ceramic capacitors (mlcc) by vacuum sputtering
11/17/2005DE102004020768A1 Plasmareaktor mit hoher Produktivität Plasma reactor with high productivity
11/17/2005DE102004020558A1 Adjusting mechanical, optical and/or electrical properties of a layer comprises sputtering in a vacuum chamber, injecting energy in pulse form and periodically changing the pulse packets with respect to the electrode
11/17/2005DE102004020466A1 Verfahren zum Beschichten von Substraten in Inline-Anlagen A process for coating substrates in inline installations
11/17/2005DE102004020404A1 Trägerplatte für Sputtertargets Backing plate for sputtering targets