| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 12/08/2005 | DE202005015206U1 Covering mask for plasma coating cylinder bores of a crankcase or I.C. engines comprises a pressure part in a hole with a thread and openings for a wear ring made from sheet steel strips whose ends are welded together |
| 12/08/2005 | DE102004024980A1 Reactive coating unit comprises a work chamber with at least one magnetron, a primary measurement unit and a control circuit |
| 12/08/2005 | DE102004024351A1 Application of a system of thin films with complex physical functions onto substrates by medium frequency pulsed magnetron pulverisation, notably in the fabrication of optical components |
| 12/08/2005 | DE102004024137A1 Protective screen for vacuum coating installations, comprises a material coating which adheres well to the screen |
| 12/07/2005 | EP1603129A1 Silver alloy sputtering target for forming reflective layer of optical recording medium |
| 12/07/2005 | EP1602919A1 Measuring device for the survey of the transmittance of a coating |
| 12/07/2005 | EP1602747A1 Copper alloy sputtering target, process for producing the same and semiconductor element wiring |
| 12/07/2005 | EP1602746A1 Sputtering target and process for producing the same, thin film for optical information recording medium and process for producing the same |
| 12/07/2005 | EP1602745A1 Hafnium alloy target and process for producing the same |
| 12/07/2005 | EP1601800A1 Suface hardened stainless steel with improved wear resistance and low static friction properties |
| 12/07/2005 | EP1601528A2 Thermal barrier coating having low thermal conductivity |
| 12/07/2005 | EP1601471A2 Gas gate for isolating regions of differing gaseous pressure |
| 12/07/2005 | EP1481110B1 Getter metal alloy coating and device and method for the production thereof |
| 12/07/2005 | EP1315845B1 Method for producing a coating of fluorescent material |
| 12/07/2005 | EP1072055B1 Means for controlling target erosion and sputtering in a magnetron |
| 12/07/2005 | CN1705770A Stabilized aluminum laminate having aluminum and stabilizing layer laminated thereon |
| 12/07/2005 | CN1705766A Multilayer film-coated substrate and process for its production |
| 12/07/2005 | CN1704717A Measuring device for measuring the degree of transmission of a coating |
| 12/07/2005 | CN1704501A Film formation source, vacuum film formation apparatus, organic EL panel and method of manufacturing the same |
| 12/07/2005 | CN1704211A Web treatment machine with at least one vacuum chamber |
| 12/07/2005 | CN1230802C System and method for controlling passive bipolar electric arc |
| 12/06/2005 | US6972914 Optical lens holder |
| 12/06/2005 | US6972418 Ion doping apparatus, and multi-apertured electrode for the same |
| 12/06/2005 | US6972146 Structure having holes and method for producing the same |
| 12/06/2005 | US6972136 positioning lens in vacuum chamber of vacuum deposition apparatus; providing source of at least one high index of refraction composition and at least one low index of refraction composition, applying in layers to lens |
| 12/06/2005 | US6972079 Dual magnetron sputtering apparatus utilizing control means for delivering balanced power |
| 12/06/2005 | US6972076 Thin film formation use sputtering target material, thin film formed using same, and optical recording medium |
| 12/06/2005 | US6971151 Methods of treating physical vapor deposition targets |
| 12/06/2005 | CA2292437C Pulsed-vapor phase aluminide process for high temperature oxidation-resistant coating applications |
| 12/01/2005 | WO2005113853A1 Methods and apparatuses for transferring articles through a load lock chamber under vacuum |
| 12/01/2005 | WO2005113851A2 Fusion cast articles and methods of manufacture |
| 12/01/2005 | WO2005113164A2 Superconductor fabrication processes |
| 12/01/2005 | WO2005113143A1 Fine particles |
| 12/01/2005 | WO2005112603A2 Durable thermal barrier coating having low thermal conductivity |
| 12/01/2005 | WO2005091283A8 Method and apparatus for separating disc-shaped substrates |
| 12/01/2005 | WO2005024088A8 A method and apparatus for deposition of films of coating materials, in particular of superconductive oxides |
| 12/01/2005 | WO2005021826A3 Titanium foil metallization product and process |
| 12/01/2005 | WO2005010228A3 High peak power plasma pulsed supply with arc handling |
| 12/01/2005 | US20050267253 vapor-deposited organosiloxane copolymer film; first organosiloxane monomer with cyclosiloxane backbone and the second organosiloxane monomer with straight-chain siloxane backbone as raw materials |
| 12/01/2005 | US20050267000 Method for producing substantially planar films |
| 12/01/2005 | US20050266682 Methods and apparatus for forming barrier layers in high aspect ratio vias |
| 12/01/2005 | US20050266261 Method for improving electrical conductivity of metals, metal alloys and metal oxides |
| 12/01/2005 | US20050266250 Waterdrop slidable surface structure |
| 12/01/2005 | US20050266173 Method and apparatus of distributed plasma processing system for conformal ion stimulated nanoscale deposition process |
| 12/01/2005 | US20050266163 Extremely strain tolerant thermal protection coating and related method and apparatus thereof |
| 12/01/2005 | US20050266157 Method of manufacturing or repairing a coating on a metallic substrate |
| 12/01/2005 | US20050266152 Depositing an organic layer for use in OLEDs |
| 12/01/2005 | US20050264829 Measuring device for measuring the degree of transmission of a coating |
| 12/01/2005 | US20050263390 A tantalum nitride/Ta barrier is first sputter deposited with high target power and wafer bias, argon etching is performed with even higher wafer bias. a flash step is applied with reduced target power and wafer bias; different magnetic field distributions |
| 12/01/2005 | US20050263389 Variable quadruple electromagnet array in plasma processing |
| 12/01/2005 | US20050263388 Flexible emitter using high molecular compound and method for fabricating the same |
| 12/01/2005 | US20050263217 High purity niobium and products containing the same, and methods of making the same |
| 12/01/2005 | US20050263078 Drive mechanism for a vacuum treatment apparatus |
| 12/01/2005 | US20050263075 Delivery systems for efficient vaporization of precursor source material |
| 12/01/2005 | US20050263074 Film formation source, vacuum film formation apparatus, organic EL panel and method of manufacturing the same |
| 12/01/2005 | DE4310941B4 Vacuum treatment chamber - with a low voltage discharge with arcing on treatment chamber walls prevented |
| 12/01/2005 | DE19902908B4 Verfahren zur Herstellung von Chalkogenidschichten durch chemische Umsetzung von Schichten aus Metallen oder Metallverbindungen im niederenergetischen Chalkogen-Ionenstrahl A process for preparing chalcogenide layers by chemical reaction of layers of metals or metal compounds in the low energy ion beam chalcogen |
| 12/01/2005 | DE10340703B4 Vorrichtung und Verfahren zur nahtlosen Beschichtung von Substraten sowie beschichtetes Substrat Apparatus and method for seamless coating substrates and coated substrate |
| 12/01/2005 | DE102005022812A1 ND-Filter und Aperturblendenvorrichtung ND filter and aperture device |
| 12/01/2005 | DE102004063691A1 Semiconductor device ion implanting method, involves nonuniformly implanting dose of implanted ions in central portion and edge portions of semiconductor substrate with different scanning speed in different directions |
| 12/01/2005 | DE102004022297A1 Verfahren und System zum selektiven Beschichten oder Ätzen von Oberflächen A method and system for selectively coating or etching surfaces |
| 12/01/2005 | DE102004021734A1 Verfahren und Vorrichtung zur kontinuierlichen Beschichtung flacher Substrate mit optisch aktiven Schichtssystemen Method and apparatus for continuous coating of flat substrates with optically active layer systems |
| 12/01/2005 | CA2549091A1 Durable thermal barrier coating having low thermal conductivity |
| 11/30/2005 | EP1600526A1 Sputtering target and process for producing the same |
| 11/30/2005 | EP1600525A1 Process for making or repairing a coating on a metallic substrate |
| 11/30/2005 | EP1600429A2 Waterdrop slidable surface structure |
| 11/30/2005 | EP1284833A4 Scalpel blade having high sharpness and toughness |
| 11/30/2005 | EP1272683B1 Dlc layer system and method for producing said layer system |
| 11/30/2005 | EP0833956B1 Method of forming a solar selective surface coating |
| 11/30/2005 | CN2743367Y Sensing device of vacuum film plating substrate constant tension winding |
| 11/30/2005 | CN2743366Y Vacuum film plating machine having orientation and self control function |
| 11/30/2005 | CN1703772A Transparent oxide semiconductor thin film transistors |
| 11/30/2005 | CN1703746A Silver alloy for reflective film of optical recording medium |
| 11/30/2005 | CN1703532A Polycrystalline mgo vapor deposition material |
| 11/30/2005 | CN1703531A Method to recover spent components of a sputter target |
| 11/30/2005 | CN1702192A Driving mechanism for vacuum process equipment |
| 11/30/2005 | CN1702191A Method for preparing alloy sheet |
| 11/30/2005 | CN1702190A Rotation device for vacuum vertical planet clamp |
| 11/30/2005 | CN1702024A Vacuum treating device |
| 11/30/2005 | CN1229763C Sign forming method |
| 11/30/2005 | CN1229660C Method and apparatus for making array waveguide device |
| 11/30/2005 | CN1229515C Recessed sputter target |
| 11/30/2005 | CN1229514C Multicolour filming process of one piece filter and coloured rotary wheel set fitted with said filter |
| 11/30/2005 | CN1229513C Vacuum chamber for plain substrate |
| 11/30/2005 | CN1229279C Array structure of nm-class carbon tubes and its preparing process |
| 11/29/2005 | US6969558 Low sulfur article having a platinum-aluminide protective layer, and its preparation |
| 11/29/2005 | US6969448 Method for forming a metallization structure in an integrated circuit |
| 11/29/2005 | US6969447 Thin film protective layer with buffering interface |
| 11/29/2005 | US6968630 Vacuum processing apparatus and operating method therefor |
| 11/28/2005 | CA2508821A1 Process for manufacturing or repairing a coating on a metallic substrate |
| 11/24/2005 | WO2005112067A1 New material for vapor sources of alkali and alkaline earth metals and a method of its production |
| 11/24/2005 | WO2005111265A1 Method and system of dry cleaning a processing chamber |
| 11/24/2005 | WO2005111264A1 Dlc coatings for loaded machine parts, intended for use in boundary-lubrication conditions |
| 11/24/2005 | WO2005111263A1 Vacuum processing apparatus |
| 11/24/2005 | WO2005111262A1 Vacuum treatment device and method of manufacturing optical disk |
| 11/24/2005 | WO2005111261A1 Spattering target and method of manufacturing the same |
| 11/24/2005 | WO2005111260A1 Method and apparatus for applying a substance to a substrate |
| 11/24/2005 | WO2005111259A1 Organic material evaporation source and organic vapor deposition device |
| 11/24/2005 | WO2005111258A1 Device equipped with cooling means and cooling method |
| 11/24/2005 | WO2005111257A2 Effects of methods of manufacturing sputtering targets on characteristics of coatings |