Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
12/2005
12/21/2005EP1607492A1 Strip treatment apparatus with at least one vacuum chamber
12/21/2005EP1607417A1 Method of forming thin film
12/21/2005EP1606977A2 Coil constructions configured for utilization in physical vapor deposition chambers, and methods of forming coil constructions
12/21/2005EP1606543A1 Universal vacuum coupling for cylindrical target
12/21/2005EP1606430A1 Base for decorative layer
12/21/2005EP1606428A2 Contacting of an electrode with a device in vacuum
12/21/2005EP1606110A2 Coated article including titanium oxycarbide and method of making same
12/21/2005EP1606103A2 Rapid generation of nanoparticles from bulk solids at room temperature
12/21/2005EP0977904A4 Plasma processing system utilizing combined anode/ion source
12/21/2005EP0878558B1 Coated material and method of manufacturing the same
12/21/2005CN1711369A Apparatus for vacuum treating two dimensionally extended substrates and method for manufacturing such substrates
12/21/2005CN1711368A Device and method for the evaporation of lamina material
12/21/2005CN1710144A Hard coating and its production method
12/21/2005CN1232676C Method for forming electric conductive region by ion implantation
12/20/2005US6977016 Surface modified stainless steel
12/20/2005CA2319364C Apparatus and method for sputtering a magnetron target
12/15/2005WO2005119804A2 Depositing organic layers for oled
12/15/2005WO2005119750A1 Semiconductor device and method for fabricating same
12/15/2005WO2005119725A1 New material for vapor sources of alkali and alkaline earth metals and a method of its production
12/15/2005WO2005118908A2 Producing repetitive coatings on a flexible substrate
12/15/2005WO2005118907A1 Variable quadruple electromagnet array, particularly used in a multi-step process for forming a metal barrier in a sputter reactor
12/15/2005WO2005118906A1 Target material and its use in a sputter process
12/15/2005WO2005118905A1 Method and apparatus of plasma processing
12/15/2005WO2005118504A1 Single-crystal magnesium oxide sinter, process for producing the same, and protective film for plasma display panel
12/15/2005WO2005118501A1 Method for producing a hydrophobic coating, device for implementing said method and support provided with a hydrophobic coating
12/15/2005WO2005093117A3 Vaporizing fluidized organic materials
12/15/2005WO2005084583A3 Medical devices including metallic films and methods for making same
12/15/2005WO2005029601A3 Multilayer coating package on flexible substrates for electro-optical devices
12/15/2005WO2004008479A3 Vacuum sputtering cathode
12/15/2005US20050277296 Method to reduce impurity elements during semiconductor film deposition
12/15/2005US20050277295 Coating process for patterned substrate surfaces
12/15/2005US20050277266 Process for interfacial adhesion in laminate structures through patterned roughing of a surface
12/15/2005US20050277002 Enhanced sputter target alloy compositions
12/15/2005US20050276992 Method for metallizing a non-metallic surface and the metallized surface structure thereof
12/15/2005US20050276980 Co-extruded high refractive index coated embossable film
12/15/2005US20050276946 Write once optical recording medium
12/15/2005US20050276931 Method of fabricating an electrochemical device using ultrafast pulsed laser deposition
12/15/2005US20050276928 Plasma processing apparatus, electrode plate for plasma processing apparatus, and electrode plate manufacturing method
12/15/2005US20050274904 Monatomic boron ion source and method
12/15/2005US20050274903 Monatomic dopant ion source and method
12/15/2005US20050274775 Method of forming metal blanks for sputtering targets
12/15/2005US20050274714 In-line heater for use in semiconductor wet chemical processing and method of manufacturing the same
12/15/2005US20050274610 Magnetron sputtering apparatus
12/15/2005US20050274601 Method for manufacturing magnetic recording medium
12/15/2005US20050274594 Metallic keypad and method for making the same
12/15/2005US20050274319 Producing repetitive coatings on a flexible substrate
12/15/2005US20050274221 Enhanced sputter target alloy compositions
12/15/2005DE102004047299A1 Kohlenstoff-Nanoröhren-Verbundmaterial, magnetisches Material und Herstellung davon Carbon nanotube composite magnetic material and preparation thereof
12/15/2005DE102004025679A1 High-frequency plasma discharge impedance altering device for apparatus used to treat or coat substrate, varies magnetic field generated in discharge chamber to achieve desired impedance measurement
12/15/2005DE102004006131B4 Bandbeschichtungsanlage mit einer Vakuumkammer und einer Beschichtungswalze Tape coating system with a vacuum chamber and a coating roll
12/14/2005EP1605481A1 Metallic keypad and method for making the same
12/14/2005EP1604757A2 Manufacturing method of die for optical element molding
12/14/2005EP1518145B1 Display cell, in particular liquid crystal, or photovoltaic cell comprising means for connection to an electronic control circuit
12/14/2005EP1507894B1 Coating device comprising a conveying device
12/14/2005EP0984877B1 Wiper blade rubber with a protective layer
12/14/2005CN1708830A Thin film forming apparatus
12/14/2005CN1231544C Metallic coating with oxidation resistance and fatigue resistance
12/14/2005CN1231298C Water-proof parts and ink-jet head making method
12/13/2005US6974984 A collimator as a flux reducer may be used to filter out charged particles and reduce damage; amorphous, intermetallic layers
12/13/2005US6974976 Thin-film solar cells
12/13/2005US6974771 Methods and apparatus for forming barrier layers in high aspect ratio vias
12/13/2005US6974642 Carbonaceous protective layer, magnetic recording medium, production method thereof, and magnetic disk apparatus
12/13/2005US6974638 Protective coating
12/13/2005US6974524 Apparatus, method and system for monitoring chamber parameters associated with a deposition process
12/08/2005WO2005117498A1 Process for fabricating organic el element and method for cleaning system for fabricating organic el element
12/08/2005WO2005116501A1 Lock valve in particular for a strip processing unit
12/08/2005WO2005116291A2 Apparatus for directing plasma flow to coat internal passageways
12/08/2005WO2005116290A1 Method and apparatus for vacuum deposition by vaporizing metals and metal alloys
12/08/2005WO2005116289A1 Strip processing system
12/08/2005WO2005116288A1 Ultra-high vacuum sputtering system for forming multilayer thin film continuously and ultra-high vacuum sputtering method for forming multilayer thin film continuously
12/08/2005WO2005115941A1 Coated article with oxidation graded layer proximate ir reflecting layer(s) and corresponding method
12/08/2005WO2005115936A2 NANO GLASS POWER AND USE THEREOF, PARTICULARLY MULTICOMPONENT GLASS POWDER WITH A MEAN PARTICLE SIZE OF LESS THAN 1 µM
12/08/2005WO2005115640A1 Moulded body with evaporation-sputtered layers
12/08/2005WO2005115104A2 Methods for stable and repeatable plasma ion implantation
12/08/2005WO2005064037A3 High integrity sputtering target material and method for producing bulk quantities of same
12/08/2005WO2005028176A3 Process for forming a patterned thin film structure for in-mold decoration
12/08/2005WO2005024092A3 Particulate reduction using temperature-controlled chamber shield
12/08/2005WO2004114366A3 Hdp-cvd multistep gapfill process
12/08/2005WO2004108879A3 Biological laser printing for tissue microdissection via indirect photon-biomaterial interactions
12/08/2005US20050272273 Method and apparatus for electrostatically maintaining substrate flatness
12/08/2005US20050272254 Method of depositing low resistivity barrier layers for copper interconnects
12/08/2005US20050272200 Bismuth titanium silicon oxide, bismuth titanium silicon oxide thin film, and method for forming the thin film
12/08/2005US20050272196 Method of depositing a higher permittivity dielectric film
12/08/2005US20050271984 Textured chamber surface
12/08/2005US20050271951 Plasma etching apparatus and method of fabricating photomask using the same
12/08/2005US20050271815 Method of synthesising and growing nanorods from a metal carbide on a substrate, substrates thus obtained and applications thereof
12/08/2005US20050271796 Thin-film electrochemical devices on fibrous or ribbon-like substrates and method for their manufacture and design
12/08/2005US20050271514 Coating and coating process incorporating raised surface features for an air-cooled surface
12/08/2005US20050271512 Method and apparatus for coating or heat treatment of blisks for aircraft gas turbines
12/08/2005US20050270636 Optical element, optical apparatus, film forming method, film forming apparatus and device fabrication method
12/08/2005US20050269201 Methods of forming PVD target/backing plate constructions
12/08/2005US20050269200 Film deposition
12/08/2005US20050269021 Forming separation layer on base having single crystal or textured surface, buffer layer, metal oxide layer, and removing separation layer; for multilayer superconductive tapes, ferroelectric multilayer thin films, and optoelectronic devices
12/08/2005US20050268999 Ta sputtering target and method for preparation thereof
12/08/2005US20050268855 Evaporative deposition with enhanced film uniformity and stoichiometry
12/08/2005US20050268854 Film forming apparatus and film forming method
12/08/2005US20050268852 Vaccum film-forming apparatus
12/08/2005US20050268762 Web treatment machine with at least one vacuum chamber
12/08/2005US20050268662 A protective coating for the mold surface where an adhesion layer on the substrate makes contact with the outer working layer of intermetallic film of nickel/aluminum and/or titanium/boron/carbon/nitrogen; wear resistance; oxidation resistance; friction resistance; antisticking agents; heat resistance
12/08/2005US20050268470 Colored razor blades